CN216064699U

CN216064699U - Quantitative liquid supplementing device of silicon wafer corrosion cleaning machine

Info

Publication number: CN216064699U
Application number: CN202122061607.9U
Authority: CN
Inventors: 管威; 聂先合; 王海龙
Original assignee: Suzhou Jingmiao Semiconductor Equipment Co ltd
Current assignee: Suzhou Jingmiao Semiconductor Equipment Co ltd
Priority date: 2021-08-30
Filing date: 2021-08-30
Publication date: 2022-03-18
Anticipated expiration: 2031-08-30

Abstract

The utility model relates to the technical field of silicon wafer corrosion cleaning machines, and discloses a quantitative liquid supplementing device of a silicon wafer corrosion cleaning machine, which comprises a liquid storage bottle, wherein a quantitative bottle is arranged below the liquid storage bottle, an installation box is arranged on the upper surface of the liquid storage bottle, an electric telescopic rod is arranged inside the installation box, a group of connecting plates are arranged at the driving end of the electric telescopic rod, one end of each connecting plate is fixedly connected with a cleaning plate, a round hole is formed inside the cleaning plate, the cleaning plate is driven by the electric telescopic rod to move up and down on the inner wall of the liquid storage bottle, so that crystals on the inner wall of the liquid storage bottle can be separated by the cleaning plate and can be dissolved again, alkali liquor can be dissolved more fully, the installation plate is fixed on the cleaning machine through bolts, then the limiting convex block is clamped into the limiting groove of the limiting plate, then the limiting convex block is connected with the limiting plate through the bolts, and the installation safety of the liquid storage bottle is improved, the operation of the liquid supplementing device is more stable.

Description

Quantitative liquid supplementing device of silicon wafer corrosion cleaning machine

Technical Field

The utility model relates to the technical field of silicon wafer corrosion cleaning machines, in particular to a quantitative liquid supplementing device of a silicon wafer corrosion cleaning machine.

Background

The silicon wafer corrosion refers to removing surface damage of the silicon wafer generated in the multi-line cutting process by using the corrosion effect of sodium hydroxide on polycrystalline silicon, and simultaneously striving for a surface texture with lower reflectivity by using the anisotropy of the sodium hydroxide on silicon corrosion, so that the situation that the filling factor of a solar cell is influenced by directly using the silicon wafer is avoided, and therefore quantitative liquid supplementing equipment is needed to assist the operation of a silicon wafer corrosion cleaning machine.

Present silicon chip corrodes cleaning machine ration fluid infusion device is inside mostly to be formed by level gauge and timer, open at the uniform time through timer control solenoid valve, obtain the liquid of certain flow, but this kind of mode error is great, the precision is not high, because the temperature of fluid infusion environment is lower, lead to alkali lye to have and can generate the crystallization on the inner wall of stock solution bottle, influence the mobility of alkali lye, it has certain deviation to cause the flow, and general proportioning device majority all is through clamp and bolt fastening on the lateral wall of cleaning machine, be difficult to dismantle, inconvenient washing, application number is CN 201820437311.8's a silicon chip corrodes cleaning machine ration fluid infusion device, the following technical characteristics are disclosed: including the stock solution bottle, the inlet has been seted up to the top of stock solution bottle left end, and the top of inlet is provided with the wood rubber stopper, and the central point department of putting of stock solution bottle upper surface is provided with the motor, and the precision of fluid infusion has been guaranteed in this application to make the alkali solution dissolve more abundant, in the use, the installation of the fluid infusion device in the above-mentioned file is safe inadequately, and the clearance measure to the crystallization was taken is not perfect enough, to this kind of condition, now provides a silicon chip and corrodes cleaning machine ration fluid infusion device.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a quantitative liquid supplementing device of a silicon wafer corrosion cleaning machine, which drives a cleaning plate to move up and down on the inner wall of a liquid storage bottle through an electric telescopic rod, so that the cleaning plate can separate crystals on the inner wall of the liquid storage bottle and dissolve the crystals again, the circular hole in the cleaning plate can increase the fluidity of alkali liquor in the process of moving up and down, so that the alkali liquor is dissolved more fully, a mounting plate is fixed on the cleaning machine through a bolt, a limiting lug is clamped in a limiting groove of a limiting plate, and the limiting lug is connected with the limiting plate through the bolt, so that the liquid storage bottle is very convenient to mount and dismount.

The purpose of the utility model can be realized by the following technical scheme:

the utility model provides a silicon chip corrodes cleaning machine ration fluid infusion device, includes the liquid reserve bottle, and the below of liquid reserve bottle is provided with the ration bottle, and the upper surface of liquid reserve bottle is provided with the install bin, the inside of install bin is provided with electric telescopic handle, and electric telescopic handle's drive end is provided with a set of connecting plate, and the one end rigid coupling of connecting plate has the clearance board, and the round hole has been seted up to the inside of clearance board.

As a still further scheme of the utility model: the rigid coupling has the fixed block on the back lateral wall of stock solution bottle, and the rear surface of fixed block is provided with the limiting plate, and the spacing groove has been seted up to the rear surface of limiting plate, and the rear of spacing groove is provided with the mounting panel, and the front surface rigid coupling of mounting panel has spacing lug, can make the installation and the dismantlement of stock solution bottle more convenient to make the stock solution bottle install safelyr.

As a still further scheme of the utility model: a control panel is arranged on one outer side wall of the liquid storage bottle, and a capacitance liquid level device is arranged on one side of the upper surface of the quantitative bottle, so that the condition in the liquid supplementing device can be monitored at any time.

As a still further scheme of the utility model: the lower surface of stock solution bottle is provided with the connecting pipe, and the lower surface of ration bottle is provided with the drain pipe, and stock solution bottle and ration bottle are connected to the connecting pipe, can make the transport of liquid between stock solution bottle and the ration bottle more convenient.

As a still further scheme of the utility model: the two connecting plates form a group, and one connecting plate is arranged below the other connecting plate, so that the cleaning plate can run more stably.

As a still further scheme of the utility model: the external diameter of clearance board and the internal diameter phase-match of stock solution bottle can make the clearance board clear up the inside crystallization of stock solution bottle cleaner.

As a still further scheme of the utility model: the limiting plate is connected with the limiting lug through the first bolt, the mounting plate is connected with the mounting surface through the second bolt, and therefore the mounting and dismounting between the equipment and the mounting surface are more convenient.

As a still further scheme of the utility model: the size and the shape of the limiting lug are matched with the limiting groove, and the front end of the limiting lug is inconsistent with the inside of the limiting groove, so that the equipment can be more stably installed.

As a still further scheme of the utility model: the outer surfaces of the connecting pipe and the liquid outlet pipe are provided with electromagnetic valves, so that the liquid outlet condition of liquid can be controlled, and the liquid outlet device is simple to use.

Compared with the prior art, the utility model has the beneficial effects that:

1. drive the clearance board through electric telescopic handle and reciprocate on the inner wall of stock solution bottle, the crystallization that the clearance board can make on the stock solution bottle inner wall breaks away from to dissolve once more, the inside wall of scraping the stock solution bottle from top to bottom can make the crystallization clear up cleaner, the round hole on the in-process clearance board that reciprocates can increase the mobility of alkali lye, thereby make alkali lye dissolve more fully, thereby improve work efficiency.

2. Pass through the bolt fastening with the mounting panel on the cleaning machine earlier, then block spacing lug to the spacing inslot of limiting plate, then couple together spacing lug and limiting plate through the bolt, the setting of mounting panel can prevent to frequently install and dismantle fluid infusion equipment when overhauing fluid infusion equipment or daily clearance, thereby cause the damage to the cleaning machine, spacing lug and spacing groove mutually support the installation that can make the stock solution bottle with dismantle convenience very, and make the fastening more of being connected between stock solution bottle and the cleaning machine, the security of stock solution bottle installation has been increased, make the operation of fluid infusion device more stable.

Drawings

FIG. 1 is a schematic structural view of a quantitative liquid replenishment device of a silicon wafer etching cleaning machine;

FIG. 2 is a cross-sectional view of a liquid storage bottle in a quantitative liquid feeding device of a silicon wafer etching cleaning machine;

FIG. 3 is an enlarged view of area A of FIG. 2;

FIG. 4 is a top view of a cleaning plate in a quantitative liquid feeding device of a silicon wafer etching cleaning machine.

In the figure: 1. a liquid storage bottle; 2. a quantification bottle; 3. installing a box; 4. an electric telescopic rod; 5. a connecting plate; 6. cleaning the plate; 7. a circular hole; 8. a fixed block; 9. a limiting plate; 10. a limiting groove; 11. mounting a plate; 12. and a limiting bump.

Detailed Description

Example 1

The utility model provides a silicon chip corrodes cleaning machine ration fluid infusion device, includes liquid storage bottle 1, as shown in fig. 1, fig. 2 and fig. 4, the below of liquid storage bottle 1 is provided with quantitative bottle 2, and the upper surface of liquid storage bottle 1 is provided with install bin 3, and the inside of install bin 3 is provided with electric telescopic handle 4, and electric telescopic handle 4's drive end is provided with a set of connecting plate 5, and the one end rigid coupling of connecting plate 5 has clearance board 6, and round hole 7 has been seted up to the inside of clearance board 6.

As shown in fig. 3, a fixing block 8 is fixedly connected to the rear side wall of the liquid storage bottle 1, a limiting plate 9 is arranged on the rear surface of the fixing block 8, a limiting groove 10 is formed in the rear surface of the limiting plate 9, an installation plate 11 is arranged behind the limiting groove 10, and a limiting projection 12 is fixedly connected to the front surface of the installation plate 11.

As shown in fig. 1, a control panel is disposed on an outer side wall of the liquid storage bottle 1, and a capacitor liquid level gauge is disposed on one side of the upper surface of the quantitative bottle 2.

As shown in fig. 1, the lower surface of the liquid storage bottle 1 is provided with a connecting pipe, the lower surface of the quantitative bottle 2 is provided with a liquid outlet pipe, and the connecting pipe connects the liquid storage bottle 1 and the quantitative bottle 2.

As shown in fig. 2 and 4, the connection plates 5 are grouped into two, and one of the connection plates 5 is disposed below the other connection plate 5.

As shown in fig. 2 and 4, the outer diameter of the cleaning plate 6 matches the inner diameter of the reservoir 1.

As shown in fig. 2, the limit plate 9 and the limit projection 12 are connected by a first bolt, and the mounting plate 11 and the mounting surface are connected by a second bolt.

As shown in fig. 2, the size and shape of the limit projection 12 are matched with those of the limit groove 10, and the front end of the limit projection 12 is against the inside of the limit groove 10.

As shown in fig. 1, the outer surfaces of the connecting pipe and the liquid outlet pipe are provided with electromagnetic valves.

The working principle of the utility model is as follows: the cleaning machine is installed through the second bolt with mounting panel 11 earlier to the staff, block spacing lug 12 to limiting groove 10 on the limiting plate 9, couple together spacing lug 12 and limiting plate 9 through first bolt, then start electric telescopic handle 4, make it drive clearance board 6 and scrape from top to bottom on the inner wall of stock solution bottle 1, make the crystallization on the 1 inner wall of stock solution bottle scraped, and dissolve once more with solution, start at last liquid supplementation equipment and begin to carry out the fluid infusion to the cleaning machine, high durability and convenient operation.

In the description herein, references to the description of "one embodiment," "an example," "a specific example" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The foregoing shows and describes the general principles, essential features, and advantages of the utility model. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the utility model as claimed.

Claims

1. The utility model provides a silicon chip corrodes cleaning machine ration fluid infusion device, includes liquid storage bottle (1), and the below of liquid storage bottle (1) is provided with quantitative bottle (2), and the upper surface of liquid storage bottle (1) is provided with install bin (3), its characterized in that, the inside of install bin (3) is provided with electric telescopic handle (4), and the drive end of electric telescopic handle (4) is provided with a set of connecting plate (5), and the one end rigid coupling of connecting plate (5) has clearance board (6), and round hole (7) have been seted up to the inside of clearance board (6).

2. The quantitative liquid supplementing device of the silicon wafer corrosion cleaning machine according to claim 1, wherein a fixing block (8) is fixedly connected to the rear side wall of the liquid storage bottle (1), a limiting plate (9) is arranged on the rear surface of the fixing block (8), a limiting groove (10) is formed in the rear surface of the limiting plate (9), a mounting plate (11) is arranged behind the limiting groove (10), and a limiting convex block (12) is fixedly connected to the front surface of the mounting plate (11).

3. The quantitative liquid supplementing device of the silicon wafer etching cleaning machine according to claim 1, wherein a control panel is arranged on an outer side wall of the liquid storage bottle (1), and a capacitor liquid level gauge is arranged on one side of the upper surface of the quantitative bottle (2).

4. The quantitative liquid supplementing device of the silicon wafer etching cleaning machine according to claim 1, wherein a connecting pipe is arranged on the lower surface of the liquid storage bottle (1), a liquid outlet pipe is arranged on the lower surface of the quantitative bottle (2), and the connecting pipe connects the liquid storage bottle (1) and the quantitative bottle (2).

5. The quantitative liquid feeding device of the silicon wafer corrosion cleaning machine according to claim 1, wherein the two connection plates (5) are in a group, and one of the connection plates (5) is placed below the other connection plate (5).

6. The quantitative liquid supplementing device of the silicon wafer corrosion cleaning machine according to claim 1, wherein the outer diameter of the cleaning plate (6) is matched with the inner diameter of the liquid storage bottle (1).

7. The quantitative liquid supplementing device of the silicon wafer corrosion cleaning machine according to claim 2, wherein the limit plate (9) is connected with the limit bump (12) through a first bolt, and the mounting plate (11) is connected with the mounting surface through a second bolt.

8. The quantitative liquid supplementing device of the silicon chip corrosion cleaning machine according to claim 2, wherein the size and the shape of the limit bump (12) are matched with those of the limit groove (10), and the front end of the limit bump (12) is abutted against the inside of the limit groove (10).

9. The quantitative liquid supplementing device of the silicon wafer etching cleaning machine according to claim 4, wherein the outer surfaces of the connecting pipe and the liquid outlet pipe are provided with electromagnetic valves.