CN216062606U - Washing tower and exhaust treatment system - Google Patents
Washing tower and exhaust treatment system Download PDFInfo
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- CN216062606U CN216062606U CN202122340767.7U CN202122340767U CN216062606U CN 216062606 U CN216062606 U CN 216062606U CN 202122340767 U CN202122340767 U CN 202122340767U CN 216062606 U CN216062606 U CN 216062606U
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Abstract
The utility model relates to the technical field of semiconductor production, in particular to a washing tower and a waste gas treatment system. The inside of washing tower increases water spray ware and filter and as the clean part of dust fall, can carry out washing cleanness and dust fall to the powder after the burning processing, and increase dust treatment efficiency further improves the washing effect of washing tower to produced powder after the waste gas burning processing, prevents the jam of the export of tower body, avoids the exhaust negative pressure to listen unusual and the sour exhaust jam of factory affairs, guarantees that the exhaust negative pressure is normal, improves the stability of board operation.
Description
Technical Field
The utility model relates to the technical field of semiconductor production, in particular to a water washing tower and a waste gas treatment system.
Background
The semiconductor manufacturing process mainly comprises the following steps: the more complex the integrated circuit, the more demanding the manufacturing process is in the technological processes of photolithography, etching, thin film, diffusion, etc., and special gases must be used in the semiconductor manufacturing process, most of which are harmful to the environment and human body, and must be discharged after being safely treated by tail gas treatment equipment and meeting the environmental standards.
On the other hand, after combustion treatment, the device needs to be washed with water for cooling and dust fall, so that normal detection of the exhaust temperature of the device and normal exhaust negative pressure are ensured, and the operation stability of the device is improved. Present semiconductor exhaust treatment device does not have water smoke dust device inside the scrubbing tower, can not the omnidirectional handle the powder after the burning is handled, in case the powder is too much piled up to influenced the negative pressure detecting system of whole device, increased the risk that equipment is shut down.
SUMMERY OF THE UTILITY MODEL
The utility model provides a water washing tower and a waste gas treatment system, which are used for solving the defects that when a semiconductor waste gas treatment device in the prior art is used for treating powder generated by combustion of process waste gas, the powder is excessively washed and is not completely washed, so that the accumulation of the powder at an exhaust port of the water washing tower is easily caused, a negative pressure exhaust system of the whole device is reduced, and the risk of equipment breakdown is increased, so that the water washing cleaning and dust falling of the powder after the combustion treatment are realized, the dust treatment efficiency is increased, and the effect of washing the powder generated after the combustion treatment of the waste gas by the water washing tower is further improved.
The utility model provides a washing tower which comprises a tower body, a water sprayer and a filter, wherein the water sprayer comprises an annular pipe, an air supply part and a water supply part, a plurality of spray holes are formed in the pipe wall of the annular pipe, the air supply part and the water supply part are communicated with the inside of the annular pipe, the annular pipe and the filter are sequentially arranged in the tower body along the direction from the inlet to the outlet of the tower body, and the annular pipe is arranged on the cross section of the tower body.
According to the washing tower provided by the utility model, the filter comprises the filter disc, the filter disc is arranged on the cross section of the tower body, and the filter disc is provided with the air holes.
According to the water washing tower provided by the utility model, the plurality of spray holes are uniformly distributed around the inner side pipe wall of the circular pipe.
The washing tower further comprises a first spraying piece arranged inside the tower body, and the first spraying piece is arranged between the filter and an outlet of the tower body.
According to the water washing tower provided by the utility model, the water supply part comprises a water source, a water pipe and a first valve body, the ring pipe is communicated with the water source through the water pipe, and the first valve body is arranged on the water pipe.
According to the water scrubber provided by the utility model, the gas supply part comprises a gas source, a gas pipe and a second valve body, the ring pipe is communicated with the gas source through the gas pipe, and the second valve body is arranged on the gas pipe.
The water washing tower further comprises an adsorption part arranged inside the tower body, and the adsorption part is arranged between the water sprayer and an inlet of the tower body.
The washing tower further comprises a detection assembly, the detection assembly is arranged on the tower body and is communicated with an outlet of the tower body, and the detection assembly comprises a temperature sensor and a negative pressure sensor.
The utility model also provides a waste gas treatment system which comprises a reaction device, a waterfall tower, a water tank and the water washing tower, wherein an outlet of the reaction device is communicated with an inlet of the water tank through the waterfall tower, an outlet of the water tank is communicated with an inlet of the tower body, and a second spraying piece is arranged in the waterfall tower.
According to the waste gas treatment system provided by the utility model, the water tank is also provided with the pump body, and the pump body is communicated with the water supply component.
According to the water washing tower provided by the utility model, the water sprayer and the filter are arranged in the tower body, gas and powder generated after reaction of waste gas enter the tower body through the inlet of the tower body, the powder is cleaned and washed by the water sprayer, then the powder is continuously and fully captured by the filter, a small amount of residual powder in the gas can be attached to the filter, the filter has air permeability, and the gas can be discharged from the outlet of the tower body after smoothly passing through the filter. The inside of washing tower increases water spray ware and filter and as the clean part of dust fall, can carry out washing cleanness and dust fall to the powder after the burning processing, and increase dust treatment efficiency further improves the washing effect of washing tower to produced powder after the waste gas burning processing, prevents the jam of the export of tower body, avoids the exhaust negative pressure to listen unusual and the sour exhaust jam of factory affairs, guarantees that the exhaust negative pressure is normal, improves the stability of board operation.
The water fog ware is ring canal column structure, the ring canal sets up on the cross section of tower body, set up a plurality of spraying holes on the pipe wall, air feed part and water supply part provide compressed gas and water to the ring canal is inside, spray the effect upgrading of water for the atomizing under the effect of atmospheric pressure, water smoke sprays on the gas through spraying hole blowout through the water fog ware, water smoke sprays the contact effect that can improve with the dust on the one hand, it is clean to assist the improvement dust fall, on the other hand water smoke can cool down gas, guarantee that exhaust temperature is normal.
In addition to the technical problems addressed by the present invention, the technical features constituting the technical solutions and the advantages brought by the technical features of the technical solutions described above, other technical features of the present invention and the advantages brought by the technical features of the present invention will be further described with reference to the accompanying drawings or will be understood by the practice of the present invention.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic diagram of an exhaust treatment system provided by the present invention;
reference numerals:
100. a tower body;
200. a water atomizer; 210. a ring pipe;
300. a filter; 310. a filter tray;
400. a first spray member;
500. an adsorbing member;
600. a detection component; 610. a temperature sensor; 620. a negative pressure sensor;
700. a reaction device;
800. a waterfall tower; 810. a second spray member;
900. a water tank; 910. and a pump body.
Detailed Description
The embodiments of the present invention will be described in further detail with reference to the drawings and examples. The following examples are intended to illustrate the utility model but are not intended to limit the scope of the utility model.
In the description of the embodiments of the present invention, it should be noted that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing the embodiments of the present invention and simplifying the description, but do not indicate or imply that the referred devices or elements must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the embodiments of the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the embodiments of the present invention, it should be noted that, unless explicitly stated or limited otherwise, the terms "connected" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; may be directly connected or indirectly connected through an intermediate. Specific meanings of the above terms in the embodiments of the present invention can be understood in specific cases by those of ordinary skill in the art.
In embodiments of the utility model, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through intervening media. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of an embodiment of the utility model. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
As shown in fig. 1, the water scrubber according to the embodiment of the present invention includes a tower body 100, a water sprayer 200, and a filter 300, where the water sprayer 200 includes a circular pipe 210, a gas supply component, and a water supply component, a plurality of spray holes are formed on a pipe wall of the circular pipe 210, the gas supply component and the water supply component are both communicated with an inside of the circular pipe 210, the circular pipe 210 and the filter 300 are sequentially disposed inside the tower body 100 along an inlet-outlet direction of the tower body 100, and the circular pipe 210 is disposed on a cross section of the tower body 100.
According to the water washing tower provided by the embodiment of the utility model, the water sprayer 200 and the filter 300 are arranged in the tower body 100, gas and powder generated after reaction of waste gas enter the tower body 100 through the inlet of the tower body 100, the powder is cleaned and washed by the water sprayer 200, then the powder is continuously and fully captured by the filter 300, a small amount of powder remained in the gas can be attached to the filter 300, the filter 300 has air permeability, and the gas can be discharged from the outlet of the tower body 100 after smoothly passing through the filter 300. The inside of washing tower increases water atomizer 200 and filter 300 and regards as the clean part of dust fall, can carry out washing cleanness and dust fall to the powder after the burning processing, increases dust treatment efficiency, further improves the washing effect of washing tower to produced powder after the waste gas burning processing, prevents the jam of the export of tower body 100, avoids the exhaust negative pressure to listen unusual and the sour exhaust of factory to block up, guarantees that the exhaust negative pressure is normal, improves the stability of board operation.
According to an embodiment of the present invention, the filter 300 includes a filter plate 310, the filter plate 310 is disposed on a cross-section of the tower body 100, and the filter plate 310 is provided with air holes. In this embodiment, filter 300 is discoid, for filter disc 310, filter disc 310's surface sets up ventilative aperture, the bleeder vent promptly, filter disc 310 will further catch the powder, gaseous accessible bleeder vent passes through filter disc 310, remaining a small amount of powder can be attached to on filter disc 310 in the gas, the outward flange of filter disc 310 and the interior wall connection of tower body 100, filter disc 310 covers the cross section of tower body 100 of its position, in order to guarantee the interception of at utmost to catch the powder, can assist further dust fall, guarantee simultaneously that the exhaust negative pressure is normal.
In other embodiments, filter 300 may also employ a filter screen or the like.
According to one embodiment of the present invention, a plurality of spray holes are uniformly distributed around the inner wall of the collar 210. In this embodiment, the water atomizer 200 is a water mist generating ring, the outer ring 210 of the ring 210 is attached to the inner wall of the tower body 100, and the gas enters from the inlet of the tower body 100 and then passes through the inner wall of the ring 210 within a defined range. The inner side pipe wall is provided with spray holes in a surrounding mode, so that passing gas can be sprayed, and the gas is fully sprayed and washed within the range defined by the ring pipe 210.
In other embodiments, the spray holes can be formed in the bottom wall, the top wall, etc. of the ring pipe 210, and the positions can be adjusted according to actual spraying requirements.
According to an embodiment of the present invention, the water washing tower of the embodiment of the present invention further includes a first spray member 400 disposed inside the tower body 100, and the first spray member 400 is disposed between the filter 300 and the outlet of the tower body 100. In this embodiment, filter 300's top still sets up first piece 400 that sprays, and first piece 400 that sprays continuously sprays the washing, can wash adnexed powder on filter 300, guarantees that the bleeder vent on filter 300 is not blockked up by adnexed dust, ensures filter 300's ventilation effect, avoids influencing the exhaust negative pressure of tower body 100, can wash again to remaining the dust in the gas again, supplementary further dust fall sprays the cooling to gas simultaneously, guarantees that exhaust temperature is normal. In this embodiment, the first spraying member 400 may be a spray head, an automatic sprayer, or the like, and the first spraying member 400 sprays fresh water.
According to one embodiment of the present invention, the water supply unit includes a water source, a water pipe, and a first valve body, wherein the loop pipe 210 is connected to the water source through the water pipe, and the first valve body is disposed on the water pipe. In this embodiment, the water source is fed into the loop 210 through a water pipe, and is mixed with the compressed air provided by the air supply component to generate water mist, and the first valve controls the water source to be opened and closed, and also controls the flow of the water to be fed, so that the water inflow can be adjusted according to different multi-powder process requirements or different process gas flows, and the water mist effect is affected. And the washing tower is maintained to stably operate within the normal ranges of exhaust pressure, exhaust temperature and exhaust humidity, and the emission standard of process waste gas is met.
According to one embodiment of the present invention, the gas supply means comprises a gas source, a gas pipe, and a second valve body, wherein the loop pipe 210 is communicated with the gas source through the gas pipe, and the second valve body is arranged on the gas pipe. In this embodiment, the gas source provides compressed gas, which is fed into the loop 210 through the gas pipe, and mixed with water provided by the water supply unit to generate water mist, and the second valve body controls the opening and closing of the compressed gas inlet, and also controls the flow of the compressed gas inlet, and the gas inlet amount is adjusted according to different multi-powder process requirements or different process gas flows, so as to affect the water mist effect. And the washing tower is maintained to stably operate within the normal ranges of exhaust pressure, exhaust temperature and exhaust humidity, and the emission standard of process waste gas is met.
According to an embodiment of the present invention, the water scrubber of the embodiment of the present invention further includes an adsorbing member 500 disposed inside the tower body 100, and the adsorbing member 500 is disposed between the water sprayer 200 and the inlet of the tower body 100. In this embodiment, the inside of the tower body 100 is sequentially provided with the adsorbing member 500, the water mist device 200, the filter 300 and the first spraying member 400 from bottom to top, and after the gas and the powder formed after the combustion reaction of the waste gas pass through the inlet of the tower body 100, the gas and the powder first pass through the adsorbing member 500, so that the uniform distribution, the temperature reduction and the flow rate reduction of the gas are realized, the retention time of the gas and the powder in the tower body 100 is prolonged, the cross-sectional area of the water washing is increased, and the water washing effect and the treatment efficiency are improved. In this embodiment, the adsorbing member 500 may be a filler such as pall ring or activated carbon.
According to an embodiment provided by the utility model, the water washing tower of the embodiment of the utility model further comprises a detection assembly 600, the detection assembly 600 is arranged on the tower body 100 and is communicated with the outlet of the tower body 100, and the detection assembly 600 comprises a temperature sensor 610 and a negative pressure sensor 620. In this embodiment, the detection assembly 600 is further disposed outside the outlet of the tower body 100, the temperature and the exhaust pressure at the outlet of the tower body 100 are detected in real time, the exhaust pressure and the exhaust temperature of the treatment are strictly controlled by the detection assembly 600 and the feedback control system, and the related parameters reach the exhaust emission standard. In the present embodiment, the temperature sensor 610 detects the exhaust temperature, and the negative pressure sensor 620 detects the exhaust pressure. Once the parameters are abnormal, such as exhaust abnormality, temperature abnormality and humidity abnormality, and the parameters are lower than a set value, the parameters can be fed back to the PLC, and the machine station sends out a warming signal or an alarm signal.
The embodiment of the utility model further provides an exhaust gas treatment system, which comprises a reaction device 700, a waterfall tower 800, a water tank 900 and the water washing tower of the embodiment, wherein an outlet of the reaction device 700 is communicated with an inlet of the water tank 900 through the waterfall tower 800, an outlet of the water tank 900 is communicated with an inlet of the tower body 100, and a second spraying part 810 is arranged in the waterfall tower 800.
In the waste gas treatment system of the embodiment of the utility model, the process waste gas enters the reaction device 700 and undergoes a combustion reaction in the reaction device 700, the powder after the combustion treatment enters the waterfall tower 800 along with the trace waste gas under the effect of the plant negative pressure power, the second spraying part 810 in the waterfall tower 800 sprays the smoke dust and gas to primarily cool the high-temperature gas and powder, meanwhile, part of the powder and trace waste gas can be dissolved in water and flows into the water tank 900, the gas and powder which are not dissolved in water enter the water washing tower through the water tank 900, sufficient water washing and temperature reduction are continuously carried out in the water washing tower, and the process waste gas or powder enters the plant negative pressure power end after being sufficiently combusted through the waste gas treatment system and washed. Thereby washing the trace amount of waste gas or powder which can be dissolved in water with water sufficiently and reducing the temperature.
In this embodiment, the second spraying member 810 may adopt a spray head or an automatic sprayer, and the second spraying member 810 sprays fresh water.
According to an embodiment of the present invention, the water tank 900 is further provided with a pump body 910, and the pump body 910 is communicated with the water supply component. In this embodiment, the water source of the water supply unit is provided by the water tank 900, the fresh water sprayed by the first spraying member 400 and the second spraying member 810 falls into the water tank 900 after cleaning the powder, so as to provide circulating water for the whole exhaust gas treatment system, the circulating water enters the loop pipe 210 under the driving of the pump body 910 through the water pipe, and the dust carried by the water mist cleaning gas returns to the water tank 900, so as to form the water recycling.
The first valve body and the second valve body are not limited to be stop valves, electric valves, electromagnetic valves or other valves capable of opening and closing and adjusting flow.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (10)
1. A kind of water scrubber, characterized by: including tower body, water atomizer and filter, the water atomizer includes ring canal, air feed part and water supply part, be equipped with a plurality of spraying holes on the pipe wall of ring canal, the air feed part with water supply part all with the inside intercommunication of ring canal, the ring canal with the filter is followed the import of tower body to the export direction set gradually in inside the tower body, the ring canal is in lay on the cross section of tower body.
2. The water scrubber as recited in claim 1, wherein: the filter comprises a filter disc, the filter disc is arranged on the cross section of the tower body, and air holes are formed in the filter disc.
3. The water scrubber as recited in claim 1, wherein: the plurality of spray holes are uniformly distributed around the inner side pipe wall of the circular pipe.
4. The water scrubber as recited in claim 1, wherein: still including set up in the inside first piece that sprays of tower body, first spray set up in the filter with between the export of tower body.
5. The water scrubber as recited in claim 1, wherein: the water supply part comprises a water source, a water pipe and a first valve body, the ring pipe is communicated with the water source through the water pipe, and the first valve body is arranged on the water pipe.
6. The water scrubber as recited in claim 1, wherein: the air supply part comprises an air source, an air pipe and a second valve body, the ring pipe is communicated with the air source through the air pipe, and the second valve body is arranged on the air pipe.
7. The water scrubber as recited in claim 1, wherein: still including set up in the inside adsorption element of tower body, adsorption element set up in the water atomizer with between the import of tower body.
8. The water scrubber according to any one of claims 1 to 7, wherein: still include detection module, detection module set up in on the tower body, and with the export intercommunication of tower body, detection module includes temperature sensor and negative pressure sensor.
9. An exhaust treatment system, characterized by: the tower comprises a reaction device, a waterfall tower, a water tank and the water washing tower as claimed in any one of claims 1 to 8, wherein an outlet of the reaction device is communicated with an inlet of the water tank through the waterfall tower, an outlet of the water tank is communicated with an inlet of the tower body, and a second spraying piece is arranged in the waterfall tower.
10. The exhaust treatment system of claim 9, wherein: the water tank is also provided with a pump body which is communicated with the water supply component.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122340767.7U CN216062606U (en) | 2021-09-26 | 2021-09-26 | Washing tower and exhaust treatment system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122340767.7U CN216062606U (en) | 2021-09-26 | 2021-09-26 | Washing tower and exhaust treatment system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216062606U true CN216062606U (en) | 2022-03-18 |
Family
ID=80635930
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122340767.7U Active CN216062606U (en) | 2021-09-26 | 2021-09-26 | Washing tower and exhaust treatment system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216062606U (en) |
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2021
- 2021-09-26 CN CN202122340767.7U patent/CN216062606U/en active Active
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