CN216049641U - Silicon flatness detection device - Google Patents
Silicon flatness detection device Download PDFInfo
- Publication number
- CN216049641U CN216049641U CN202122453091.2U CN202122453091U CN216049641U CN 216049641 U CN216049641 U CN 216049641U CN 202122453091 U CN202122453091 U CN 202122453091U CN 216049641 U CN216049641 U CN 216049641U
- Authority
- CN
- China
- Prior art keywords
- silicon
- sliding groove
- flatness
- jack
- detecting apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
The utility model discloses a silicon flatness detection device, which comprises a fixed support and a plurality of depth gauges transversely arranged on the fixed support; the fixed bolster bottom is provided with the spout, be provided with the slip installed part in the spout, the depth gauge can be dismantled the setting and be in on the slip installed part. The sliding installation part comprises an installation block and a fixing part penetrating through the installation block and extending into the sliding groove, the fixing part is located on one side in the sliding groove and is limited by the sliding groove, and the fixing part is in threaded connection with the installation block. During detection, the device is placed on the surface of a silicon material to be detected, then the reading of each depth gauge is read, and the flatness of each site is judged according to the reading. Through this device can detect each position of silicon material simultaneously, promote detection efficiency, and detect the rate of accuracy height.
Description
Technical Field
The utility model relates to the technical field of detection instruments, in particular to a silicon flatness detection device
Background
For large-scale machine tools and equipment, particularly platforms (planeness, gradient and verticality) requiring flatness, strict flatness detection is required during use, and a target platform is trimmed or adjusted according to results.
In the silicon material processing process, the requirement on the polishing flatness of the silicon material surface is extremely high, and after polishing is finished, a detection device is required to be adopted for flatness detection. However, the existing detection device can only carry out single-point detection, and cannot simultaneously detect the flatness of each site of the silicon material, so that the detection efficiency is low, and the single-point detection is difficult to apply to the silicon material with larger volume.
SUMMERY OF THE UTILITY MODEL
The present invention is directed to a silicon flatness detecting apparatus, which is used to solve the above technical problems in the prior art.
The utility model relates to a silicon flatness detection device, which comprises a fixed support and a plurality of depth gauges transversely arranged on the fixed support; the fixed bolster bottom is provided with the spout, be provided with the slip installed part in the spout, the depth gauge can be dismantled the setting and be in on the slip installed part.
In a preferred embodiment, the sliding mounting part comprises a mounting block and a fixing part penetrating through the mounting block and extending into the sliding groove, the fixing part is positioned at one side in the sliding groove and limited by the sliding groove, and the fixing part is in threaded connection with the mounting block.
In a preferred embodiment, the fixing member includes a stud having two ends provided with a limiting block, and the length of the stud is greater than the height of the mounting block.
In a preferred embodiment, the mounting block is provided with a jack and a threaded hole communicated with the jack, the jack is vertically arranged, the threaded hole is horizontally arranged, a fixing bolt is fixed in the threaded hole, and the depth gauge penetrates through the jack from top to bottom.
In a preferred embodiment, an adjustable supporting component is arranged at the bottom of the fixing bracket, and the adjustable supporting component comprises a supporting block and a supporting foot in threaded connection with the supporting block.
In a preferred embodiment, a handle is provided on the top of the fixing bracket.
The technical scheme of the utility model has the beneficial effects that:
during detection, the device is placed on the surface of a silicon material to be detected, then the reading of each depth gauge is read, and the flatness of each site is judged according to the reading. Through this device can detect each position of silicon material simultaneously, promote detection efficiency, and detect the rate of accuracy height.
Drawings
Figure 1 is a front view of the present invention,
figure 2 is a disassembled front view of the depth gage and mounting block attachment structure of the present invention,
figure 3 is a side view of the present invention,
FIG. 4 is a diagram showing the state of the upward movement of the limiting block in the chute of the utility model,
FIG. 5 is a view of the mounting block of the present invention separated from the bottom surface of the mounting bracket.
Description of reference numerals: the device comprises a fixing support 1, a depth gauge 2, a sliding groove 3, a sliding mounting part 4, a mounting block 41, a limiting block 42, a stud 43, a jack 44, a threaded hole 45, a fixing bolt 46, an adjustable supporting component 5, a supporting block 51, a supporting foot 52 and a handle 6.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments. The embodiments of the present invention have been presented for purposes of illustration and description, and are not intended to be exhaustive or limited to the utility model in the form disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiment was chosen and described in order to best explain the principles of the utility model and the practical application, and to enable others of ordinary skill in the art to understand the utility model for various embodiments with various modifications as are suited to the particular use contemplated.
Referring to fig. 1 to 5, the silicon flatness detecting device according to the technical scheme of the present invention includes a fixing bracket 1 and a plurality of depth gauges 2 transversely disposed on the fixing bracket 1; the bottom of the fixed support 1 is provided with a sliding groove 3, a sliding installation part 4 is arranged in the sliding groove 3, and the depth gauge 2 is detachably arranged on the sliding installation part 4.
Fixed bolster 1 transversely sets up, and depth gage 2 sets up in a row along 1 length direction of fixed bolster to fix on fixed bolster 1 through slidable mounting spare 4. The slide mounting 4 can slide within the slide channel 3 in order to adjust the mounting position of the depth gauge 2, and is fixed to the slide channel 3 after sliding to the appropriate position.
Firstly calibrate this depth gauge 2 before detecting, accomplish on the platform when the big reason of calibration work horizontally, place this device on the marble platform, return to zero the reading of depth gauge 2 after stable, accomplish the calibration work of depth gauge 2 promptly. During detection, the device is placed on the surface of a silicon material to be detected, then the reading of each depth gauge 2 is read, and the flatness of each site is judged according to the reading. Through this device can detect each position of silicon material simultaneously, promote detection efficiency, and detect the rate of accuracy height.
The sliding mounting part 4 comprises a mounting block 41 and a fixing part penetrating through the mounting block 41 and extending into the sliding groove 3, wherein the fixing part is positioned on one side in the sliding groove 3 and is limited by the sliding groove 3, and the fixing part is in threaded connection with the mounting block 41. The fixing piece comprises a stud 43, two ends of the stud 43 are provided with limiting blocks 42, and the length of the stud 43 is larger than the height of the mounting block 41.
When the mounting block 41 is fixed, the stud 43 is screwed to press the limiting block 42 in the sliding chute 3 against the bottom surface of the sliding chute 3, and at this time, the mounting block 41 is pressed and fixed against the bottom surface of the fixing bracket 1, as shown in fig. 3. When the position of the mounting block 41 needs to be adjusted, the limiting block 42 below the mounting block 41 is screwed to move the limiting block 42 in the sliding chute 3 upwards, as shown in fig. 4, the mounting block 41 moves downwards under the action of gravity and is separated from the fixed bracket 1, as shown in fig. 5, and at this time, the mounting block 41 can move horizontally.
There is jack 44 on the installation piece 41 and with the screw hole 45 of jack 44 intercommunication, the vertical setting of jack 44, screw hole 45 level sets up, screw hole 45 internal thread is fixed with fixing bolt 46, depth gauge 2 passes from top to bottom jack 44. When the fixing device is used for fixing, the probe at the bottom of the depth gauge 2 penetrates through the socket, then the fixing bolt 46 in the threaded hole 45 is screwed, and the end part of the fixing bolt 46 is used for abutting against the connecting part above the probe, so that the fixing of the depth gauge 2 is realized.
The bottom of the fixed support 1 is provided with an adjustable supporting component 5, and the adjustable supporting component 5 comprises a supporting block 51 and a supporting foot 52 in threaded connection with the supporting block 51. The support angle sets up to 4, is located four angles of fixed bolster 1 respectively. The support leg 52 is screwed to adjust the fixing bracket 1 to be in a horizontal state.
The top of the fixed bracket 1 is provided with a handle 6. The arrangement of the handle 6 facilitates the transfer of the device.
It is to be understood that the described embodiments are merely a few embodiments of the utility model, and not all embodiments. All other embodiments, which can be derived by one of ordinary skill in the art and related arts based on the embodiments of the present invention without any creative effort, shall fall within the protection scope of the present invention. Structures, devices, and methods of operation not specifically described or illustrated herein are generally practiced in the art without specific recitation or limitation.
Claims (6)
1. The utility model provides a silicon material flatness detection device which characterized in that: the device comprises a fixed bracket and a plurality of depth gauges transversely arranged on the fixed bracket; the fixed bolster bottom is provided with the spout, be provided with the slip installed part in the spout, the depth gauge can be dismantled the setting and be in on the slip installed part.
2. The silicon flatness detecting apparatus according to claim 1, wherein: the sliding installation part comprises an installation block and a fixing part penetrating through the installation block and extending into the sliding groove, the fixing part is located on one side in the sliding groove and is limited by the sliding groove, and the fixing part is in threaded connection with the installation block.
3. The silicon flatness detecting apparatus according to claim 2, wherein: the fixing piece comprises studs of which two ends are provided with limiting blocks, and the length of each stud is greater than the height of each mounting block.
4. The silicon flatness detecting apparatus according to claim 2, wherein: the installation piece on have the jack and with the screw hole of jack intercommunication, the vertical setting of jack, the screw hole level sets up, screw hole internal thread is fixed with fixing bolt, the depth gauge passes from top to bottom the jack.
5. The silicon flatness detecting apparatus according to claim 1, wherein: the adjustable supporting component is arranged at the bottom of the fixed support and comprises a supporting block and supporting legs in threaded connection with the supporting block.
6. The silicon flatness detecting apparatus according to claim 1, wherein: the top of the fixed support is provided with a handle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122453091.2U CN216049641U (en) | 2021-10-12 | 2021-10-12 | Silicon flatness detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122453091.2U CN216049641U (en) | 2021-10-12 | 2021-10-12 | Silicon flatness detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216049641U true CN216049641U (en) | 2022-03-15 |
Family
ID=80548507
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122453091.2U Active CN216049641U (en) | 2021-10-12 | 2021-10-12 | Silicon flatness detection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216049641U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115488711A (en) * | 2022-09-16 | 2022-12-20 | 成都青洋电子材料有限公司 | Tester for adjusting flatness of grinding disc of grinding machine and adjusting method |
-
2021
- 2021-10-12 CN CN202122453091.2U patent/CN216049641U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115488711A (en) * | 2022-09-16 | 2022-12-20 | 成都青洋电子材料有限公司 | Tester for adjusting flatness of grinding disc of grinding machine and adjusting method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8028430B2 (en) | Height measurement apparatus | |
| CN216049641U (en) | Silicon flatness detection device | |
| CN201993269U (en) | Furniture testing displacement sensing device | |
| CN108592851A (en) | A kind of workpiece symmetry detecting tool and detection method | |
| CN105571460A (en) | Measuring apparatus of tank bottom diameter | |
| CN213397124U (en) | A frock clamp for detecting crystal face type | |
| CN205619882U (en) | Header board crossbeam automatic checkout device | |
| CN108225272B (en) | Workbench horizontality detection equipment and application method thereof | |
| CN211476908U (en) | Three-coordinate measuring and calibrating device | |
| CN106352841A (en) | Flatness detecting device for elevator skirt panel | |
| CN205057544U (en) | A frock clamp for detecting horizontal precision of work piece | |
| CN105171704A (en) | Balance bracket for tool fixture | |
| CN206146365U (en) | Manual -automatic verticality measuring instrument | |
| KR20150129382A (en) | A measurement unit | |
| CN105215884A (en) | A kind of frock clamp for detecting workpiece level precision | |
| CN202149767U (en) | Vertical type flatness measuring device | |
| CN213932476U (en) | Levelness measuring device | |
| CN211977800U (en) | Accurate square straightness parallelism detector that hangs down | |
| CN205238004U (en) | Frock clamp and be used for this frock clamp's balanced support | |
| CN204679092U (en) | A kind of horizontal alignment smelting tool | |
| CN219996077U (en) | Fixing device for detecting coaxiality of stepped shaft | |
| CN204630501U (en) | A kind of special measuring tool examining and determine vernier caliper | |
| CN210773751U (en) | Automobile water tank lower cross beam gauge capable of reducing accumulated errors | |
| CN217331139U (en) | Perpendicularity measuring device for construction engineering | |
| CN213615359U (en) | Clamp assembly for CNC (computer numerical control) online measurement standard device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |