CN216023720U - Air filtering and rectifying device for semiconductor equipment - Google Patents
Air filtering and rectifying device for semiconductor equipment Download PDFInfo
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- CN216023720U CN216023720U CN202121982905.5U CN202121982905U CN216023720U CN 216023720 U CN216023720 U CN 216023720U CN 202121982905 U CN202121982905 U CN 202121982905U CN 216023720 U CN216023720 U CN 216023720U
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Abstract
The utility model discloses an air filtering and rectifying device for semiconductor equipment, which comprises a shell, wherein one end of the shell is provided with an air inlet pipe, the inner wall of the air inlet pipe is fixedly connected with a first limiting rod, a first fan rotationally connected with the first limiting rod is installed on the first limiting rod, a driving rod penetrates through the first limiting rod and is fixedly connected with a brush, one end of a screw rod penetrates through the side wall of the shell and extends into the air inlet pipe, the lower end of the screw rod is provided with a limiting mechanism, the side wall of the shell is provided with a push block in sliding connection with the screw rod, and the push block penetrates through the side wall of the shell and is connected with a filter plate through an inserting mechanism. The rotating speed of the brush is adjusted through the limiting mechanism, so that dust on the filter plate is cleaned, and the phenomenon that the filter plate is damaged by the brush due to the fact that the rotating speed is too high is avoided; dust on the filter is too much, sets up through the cooperation of ejector pad and bolt, can dismantle the filter, saves a large amount of time, has improved the clean efficiency to the filter screen.
Description
Technical Field
The utility model relates to the technical field of semiconductor equipment, in particular to an air filtering rectifying device for semiconductor equipment.
Background
The semiconductor refers to a material with electric conductivity between a conductor and an insulator at normal temperature, and is widely applied to the fields of integrated circuits, communication systems, photovoltaic power generation and the like.
The semiconductor device of prior art is with straining wind fairing, because the dust in the air current easily adsorbs to the rectification intracavity wall, need regularly to dismantle the device and wash the dust to guarantee its and strain wind rectification effect, nevertheless because the device uses threaded connection as main mounting means usually, is difficult to dismantle fast with it and wash and change.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the defects in the prior art and provides an air filtering rectifying device for semiconductor equipment.
In order to achieve the purpose, the utility model adopts the following technical scheme:
the utility model provides a semiconductor equipment is with straining wind fairing, includes the casing, the one end of casing is equipped with the air-supply line, the first gag lever post of inner wall fixedly connected with of air-supply line, install the first fan rather than rotate and be connected on the first gag lever post, first fan comprises flabellum and actuating lever, the actuating lever runs through first gag lever post and fixedly connected with brush, the lateral wall of casing is equipped with the screw rod rather than threaded connection, the one end of screw rod runs through the lateral wall of casing and extends to in the air-supply line, stop gear is installed to the lower extreme of screw rod, be equipped with rather than sliding connection's filter in the casing, the brush offsets with the lateral wall of filter and is connected rather than rotating, the lateral wall of casing is equipped with rather than sliding connection's ejector pad, the ejector pad runs through the lateral wall of casing and is connected with the filter through grafting mechanism.
Preferably, stop gear is including rotating the fixed block of connection in the screw rod bottom, the lower extreme fixedly connected with first spring of fixed block, the other end fixedly connected with clutch blocks of first spring, the clutch blocks offsets with the lateral wall of actuating lever and rather than sliding connection.
Preferably, the plugging mechanism comprises a spring groove formed in the side wall of the shell, a moving plate is arranged in the spring groove and is in sliding connection with the spring groove, two second springs are fixedly connected to one side, close to the filter plate, of the moving plate and the inner wall of the spring groove, the push block penetrates through the moving plate and is fixedly connected with the moving plate, a bolt is arranged on one side, close to the spring groove, of the filter plate, the push block penetrates through the spring groove and abuts against the bolt, and the push block is in sliding connection with the inner wall of the bolt.
Preferably, the inner wall fixedly connected with second gag lever post of casing, the upper end fixedly connected with second fan of second gag lever post, the inner wall fixedly connected with fairing of the casing of telling, the lateral wall of casing is equipped with out the tuber pipe.
Preferably, one end of the friction block, which abuts against the driving rod, is arc-shaped and is matched with the side wall of the driving rod.
Preferably, the other end fixedly connected with first handle of screw rod, the other end fixedly connected with second handle of ejector pad, be provided with anti-skidding line on first handle and the second handle.
The utility model has the beneficial effects that:
1. by rotating the screw, the rotation speed of the second fan and thus the rotation of the brush can be controlled, so that the rotation speed of the brush can be adjusted according to the dust on the filter plate.
2. Through the cooperation setting of ejector pad and bolt, can fix the filter, it is very convenient to dismantle moreover, saves a large amount of time to the clean efficiency to the filter screen has been improved.
According to the utility model, the rotating speed of the brush is adjusted through the limiting mechanism, so that dust on the filter plate is cleaned, and the phenomenon that the filter plate is damaged by the brush due to the over-high rotating speed is avoided; in addition, when the dust on the filter is accumulated excessively, and the brush cannot be cleaned up, the filter can be detached through the matching arrangement of the push block and the bolt, a large amount of time is saved, and the cleaning efficiency of the filter screen is improved.
Drawings
Fig. 1 is a schematic structural diagram of an air-filtering rectifying device for a semiconductor device according to the present invention.
Fig. 2 is an enlarged view of a portion a of the air filtering and rectifying device for semiconductor equipment according to the present invention.
Fig. 3 is an enlarged view of a portion B of the air filtering and rectifying device for semiconductor equipment according to the present invention.
In the figure: the air conditioner comprises a shell 1, an air inlet pipe 2, a filter plate 3, a first limiting rod 4, a first fan 5, a brush 6, a second limiting rod 7, a second fan 8, a rectifying sheet 9, a screw rod 10, a fixing block 11, a first spring 12, a friction block 13, a pushing block 14, a spring groove 15, a moving plate 16, a second spring 17, a bolt 18 and an air outlet pipe 19.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
Referring to fig. 1-3, an air filtering rectifying device for a semiconductor device includes a housing 1, an air inlet pipe 2 is disposed at one end of the housing 1, a first limiting rod 4 is fixedly connected to an inner wall of the air inlet pipe 2, a first fan 5 rotatably connected to the first limiting rod 4 is mounted on the first limiting rod 4, the first limiting rod 4 is used for limiting the first fan 5, the first fan 5 is composed of a fan blade and a driving rod, the driving rod penetrates through the first limiting rod 4 and is fixedly connected with a brush 6, a second limiting rod 7 is fixedly connected to an inner wall of the housing 1, a second fan 8 is fixedly connected to an upper end of the second limiting rod 7, the second limiting rod 7 is used for limiting the second fan 8, a rectifying piece 9 is fixedly connected to an inner wall of the housing 1 and is used for rectifying blown air, and an air outlet pipe 19 is disposed on a side wall of the housing 1.
Casing 1's lateral wall is equipped with rather than threaded connection's screw rod 10, the first handle of upper end fixedly connected with of screw rod 10, the other end of screw rod 10 runs through casing 1's lateral wall and extends to in the air-supply line 2, stop gear is installed to the lower extreme of screw rod 10, stop gear is including rotating the fixed block 11 of connecting in the screw rod 10 bottom, the first spring 12 of lower extreme fixedly connected with of fixed block 11, the other end fixedly connected with clutch blocks 13 of first spring 12, clutch blocks 13 is the arc with the one end shape that the actuating lever offseted, and the lateral wall phase-match with the actuating lever, clutch blocks 13 offsets and rather than sliding connection with the lateral wall of actuating lever.
The filter 3 is arranged in the shell 1 and is connected with the shell in a sliding mode, the filter 3 is provided with a filter screen, the brush 6 abuts against the filter screen on the filter 3 and is connected with the filter screen in a rotating mode, the side wall of the shell 1 is provided with a push block 14 which is connected with the shell in a sliding mode, and the push block 14 penetrates through the side wall of the shell 1 and is connected with the filter 3 through a plugging mechanism.
The inserting mechanism comprises a spring groove 15 arranged on the side wall of the shell 1, a moving plate 16 connected with the spring groove 15 in a sliding manner is arranged in the spring groove 15, one side, close to the filter plate 3, of the moving plate 16 is fixedly connected with two second springs 17 through the inner wall of the spring groove 15, the two second springs 17 are used for resetting the moving plate 16, the push block 14 penetrates through the moving plate 16 and is fixedly connected with the moving plate, one side, close to the spring groove 15, of the filter plate 3 is provided with a bolt 18, the push block 14 penetrates through the spring groove 15 and abuts against the bolt 18, the push block 14 is connected with the inner wall of the bolt 18 in a sliding manner, and the filter plate 3 can be fixed through the matching of the push block 14 and the bolt 18.
According to the dust cleaning device, firstly, a worker starts a power supply to drive the second fan 8 to rotate, when dust accumulates on the filter plate 3, the first handle on the screw rod 10 is rotated, the screw rod 10 moves upwards, the initial state of the first spring 12 is a compression state, the screw rod 10 drives the fixing block 11 to move upwards, under the action force of the first spring 12, the action force of the friction block 13 on the driving rod is reduced, so that the friction force is reduced, under the action of the second fan 8, the first fan 5 starts to rotate, the rotating brush 6 rotates, and therefore the dust on the filter plate 3 is cleaned.
When the cleaning is finished, the worker rotates the first handle again to enable the friction block 13 to be tightly abutted against the driving rod, the brush 6 stops rotating, and the situation that the brush 6 rotates all the time to damage the filter plate 3 is avoided.
When the excessive dust of totalizing on the filter 3, when brush 6 can't be clean up completely, the staff is through pulling the second handle, drive ejector pad 14 and movable plate 16 and move left, second spring 17 is stretched, ejector pad 14 and bolt 18 no longer contact this moment, take out filter 3, the dust to on the filter 3 clears up the back, reinsert filter 3 again, then loosen the second handle, under second spring 17's effect, ejector pad 14 inserts in the bolt 18, the realization is fixed to filter 3.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and equivalent alternatives or modifications according to the technical solution of the present invention and the inventive concept thereof should be covered by the scope of the present invention.
Claims (6)
1. The utility model provides a semiconductor equipment is with straining wind fairing, includes casing (1), its characterized in that: an air inlet pipe (2) is arranged at one end of the shell (1), a first limiting rod (4) is fixedly connected to the inner wall of the air inlet pipe (2), a first fan (5) which is rotatably connected with the first limiting rod is installed on the first limiting rod (4), the first fan (5) is composed of fan blades and a driving rod, the driving rod penetrates through the first limiting rod (4) and is fixedly connected with a brush (6), a screw rod (10) which is in threaded connection with the side wall of the shell (1) is arranged on the side wall of the shell (1), one end of the screw rod (10) penetrates through the side wall of the shell (1) and extends into the air inlet pipe (2), a limiting mechanism is installed at the lower end of the screw rod (10), a filter plate (3) which is in sliding connection with the shell is arranged in the shell (1), the brush (6) is abutted against the side wall of the filter plate (3) and is rotatably connected with the filter plate, and a push block (14) which is in sliding connection with the side wall of the shell (1) is arranged on the side wall of the shell (1), the push block (14) penetrates through the side wall of the shell (1) and is connected with the filter plate (3) through the inserting mechanism.
2. The air filtering and rectifying device for the semiconductor equipment as claimed in claim 1, wherein the limiting mechanism comprises a fixed block (11) rotatably connected to the bottom of the screw (10), a first spring (12) is fixedly connected to the lower end of the fixed block (11), a friction block (13) is fixedly connected to the other end of the first spring (12), and the friction block (13) abuts against and is slidably connected with the side wall of the driving rod.
3. The wind-filtering rectifying device for the semiconductor equipment according to claim 1, wherein the plugging mechanism comprises a spring groove (15) formed in a side wall of the housing (1), a moving plate (16) slidably connected with the spring groove (15) is arranged in the spring groove (15), two second springs (17) are fixedly connected with an inner wall of the spring groove (15) and one side of the moving plate (16) close to the filter plate (3), the push block (14) penetrates through the moving plate (16) and is fixedly connected with the moving plate, a bolt (18) is arranged on one side of the filter plate (3) close to the spring groove (15), the push block (14) penetrates through the spring groove (15) and abuts against the bolt (18), and the push block (14) is slidably connected with an inner wall of the bolt (18).
4. The air filtering and rectifying device for the semiconductor equipment is characterized in that a second limiting rod (7) is fixedly connected to the inner wall of the shell (1), a second fan (8) is fixedly connected to the upper end of the second limiting rod (7), a rectifying sheet (9) is fixedly connected to the inner wall of the shell (1), and an air outlet pipe (19) is arranged on the side wall of the shell (1).
5. The air filtering and rectifying device for the semiconductor equipment as claimed in claim 2, wherein the end of the friction block (13) abutting against the driving rod is arc-shaped and matched with the side wall of the driving rod.
6. The air filtering and rectifying device for the semiconductor equipment as claimed in claim 1, wherein a first handle is fixedly connected to the other end of the screw (10), a second handle is fixedly connected to the other end of the push block (14), and anti-skid lines are arranged on the first handle and the second handle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121982905.5U CN216023720U (en) | 2021-08-23 | 2021-08-23 | Air filtering and rectifying device for semiconductor equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121982905.5U CN216023720U (en) | 2021-08-23 | 2021-08-23 | Air filtering and rectifying device for semiconductor equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216023720U true CN216023720U (en) | 2022-03-15 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121982905.5U Active CN216023720U (en) | 2021-08-23 | 2021-08-23 | Air filtering and rectifying device for semiconductor equipment |
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| CN (1) | CN216023720U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117394182A (en) * | 2023-12-12 | 2024-01-12 | 江苏福基电气有限公司 | Dustproof ventilation block terminal |
-
2021
- 2021-08-23 CN CN202121982905.5U patent/CN216023720U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117394182A (en) * | 2023-12-12 | 2024-01-12 | 江苏福基电气有限公司 | Dustproof ventilation block terminal |
| CN117394182B (en) * | 2023-12-12 | 2024-03-08 | 江苏福基电气有限公司 | Dustproof ventilation block terminal |
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