CN216015047U - Thin film inductor and power conversion circuit - Google Patents

Abstract

The utility model provides a film type inductor and power conversion circuit. The thin film inductor comprises a main body, an input electrode and an output electrode, wherein the input electrode and the output electrode are arranged on the outer side of the main body; the main body comprises a first magnetic part, a first coil and a supporting part which are sequentially stacked, wherein the first magnetic part is wrapped on the periphery of the first coil; the supporting piece comprises a body for supporting the first coil, a first through hole arranged on the body, a second through hole arranged around the first through hole and a second magnetic piece positioned in the first through hole and the second through hole, and a space is reserved between the first through hole and the second through hole. The technical scheme of the utility model thin film inductor has the advantage that inductance value is big.

Description

Thin film inductor and power conversion circuit

Technical Field

The utility model relates to an inductance technical field particularly, relates to a film formula inductor and power conversion circuit.

Background

Inductors, one of the three passive devices, are widely used in devices such as oscillators, low noise amplifiers, and impedance matching networks. Therefore, miniaturization and high frequency of inductors are also a trend of necessity. Although the patch type winding inductor solves a part of problems of light weight and miniaturization of a system, the requirement of high integration level at present cannot be met, and the traditional three-dimensional iron core inductor can be developed to a two-dimensional plane structure due to the thinning of the inductor.

However, the thin film inductor in the prior art does not fully utilize the magnetic material filled in the space in the inductor, so that the thin film inductor has less magnetic material, the magnetic permeability of the thin film inductor is low, and the inductance of the thin film inductor is small.

SUMMERY OF THE UTILITY MODEL

An object of the present invention is to provide a thin film inductor and a power conversion circuit, wherein the thin film inductor has a large inductance.

In order to achieve the above object, according to one aspect of the present invention, there is provided a thin film inductor including a main body, and an input electrode and an output electrode both disposed outside the main body; the main body comprises a first magnetic part, a first coil and a supporting part which are sequentially stacked, wherein the first magnetic part is wrapped on the periphery of the first coil; the supporting piece comprises a body for supporting the first coil, a first through hole arranged on the body, a second through hole arranged around the first through hole and a second magnetic piece positioned in the first through hole and the second through hole, and a space is reserved between the first through hole and the second through hole.

Further, support piece includes a plurality of second through-holes, by first through-hole to the direction of keeping away from first through-hole, a plurality of second through-holes interval sets up, all is equipped with the second magnetism spare in every second through-hole.

Further, the main body further includes: the second coil is electrically connected with the first coil, and the second coil and the first coil are respectively positioned at the upper side and the lower side of the supporting piece; the third magnetic part wraps the periphery of the second coil, and the third magnetic part is located on one side, deviating from the first coil, of the second coil.

Furthermore, the supporting piece has insulating property, the first coil is provided with a plurality of turns, a first interval is arranged between every two adjacent turns, the first interval and the second through hole are correspondingly arranged, and the turns are all supported on the body.

Furthermore, the supporting member further comprises a mounting through hole arranged in the body, the main body further comprises a conductive member penetrating through the mounting through hole, the first end of the first coil is connected with the first end of the second coil through the conductive member, the second end of the first coil is exposed on the surface of the first magnetic member and connected with the input electrode, and the second end of the second coil is exposed on the surface of the third magnetic member and connected with the output electrode.

Further, the support member comprises a plurality of second through holes, the first coil comprises a plurality of metal coils, the plurality of metal coils are arranged in parallel and at intervals, each metal coil is provided with a plurality of turns, a second interval is arranged between every two adjacent turns, and the plurality of second intervals correspond to the plurality of second through holes.

Further, the second spacers are filled with a magnetic material.

Further, the thin film inductor further comprises an adhesive layer, and at least one side of the support member is provided with the adhesive layer.

Further, the first magnetic part, the second magnetic part and the third magnetic part are integrally formed; alternatively, the first magnetic member, the second magnetic member and the third magnetic member are all made of a soft magnetic alloy.

According to another aspect of the present invention, there is provided a power conversion circuit, including a dc power supply, at least one switch unit and at least one inductance unit, the switch unit and the inductance unit are correspondingly disposed, and each inductance unit is connected to the dc power supply through the corresponding switch unit, wherein the inductance unit includes the above-mentioned thin film inductor.

Use the technical scheme of the utility model, set up first magnetic part through the periphery at first coil, can improve the inductance value of film inductor, and, through setting up first through-hole and around the second through-hole that first through-hole set up, and all set up the second magnetic part in first through-hole and second through-hole, like this, can further increase the magnetic permeability of film inductor, thereby can further increase the magnetic flux of film inductor, and then can improve the inductance value of film inductor effectively, consequently, the utility model discloses a film inductor has great inductance value.

Drawings

The accompanying drawings, which form a part of the present application, are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention and not to limit the invention. In the drawings:

fig. 1 shows a schematic structural diagram of a thin film inductor according to an embodiment of the present invention;

fig. 2 is a schematic view showing a connection structure of a first coil and a second coil of the thin film inductor of fig. 1;

FIG. 3 shows a schematic structural view of a support member of the thin film inductor of FIG. 1; and

fig. 4 shows a cross-sectional view of the thin film inductor of fig. 1.

Wherein the figures include the following reference numerals:

10. a main body; 11. an input electrode; 12. an output electrode; 20. a first magnetic member; 30. a first coil; 31. a metal coil; 40. a support member; 41. a body; 42. a first through hole; 43. a second through hole; 44. mounting a through hole; 45. a conductive member; 50. a second magnetic member; 60. a second coil; 70. a third magnetic member; 80. and (7) bonding the layers.

Detailed Description

It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present invention will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.

Note that, the overall size of the thin film inductor according to the embodiment of the present invention is 1.2mm × 1.0mm × 0.6 mm.

In the metal coil 31 of the thin film inductor according to the embodiment of the present invention, the width of the copper wire is 30 μm, and the thickness of the copper wire is 100 μm.

As shown in fig. 1 and 3, an embodiment of the present invention provides a thin film inductor. The thin film inductor includes a body 10, and an input electrode 11 and an output electrode 12 both disposed outside the body 10; the main body 10 comprises a first magnetic part 20, a first coil 30 and a support part 40 which are sequentially stacked, wherein the first magnetic part 20 is wrapped on the periphery of the first coil 30; the support member 40 includes a body 41 for supporting the first coil 30, a first through hole 42 provided on the body 41, a second through hole 43 provided around the first through hole 42, and a second magnetic member 50 located in the first through hole 42 and the second through hole 43 with a space therebetween.

Among the above-mentioned technical scheme, through setting up first magnetism spare 20 in the periphery of first coil 30, can improve film inductor's magnetic permeability, and, through setting up first through-hole 42 and around the second through-hole 43 that first through-hole 42 set up, and set up second magnetism spare 50 in first through-hole 42 and second through-hole 43, like this, can further increase film inductor's magnetic permeability, thereby can further increase film inductor's magnetic flux, and then can improve film inductor's inductance volume effectively, consequently, the utility model discloses a film inductor has great inductance volume.

It should be noted that, in the embodiment of the present invention, the first magnetic member 20 is wrapped around the first coil 30, that is, the first magnetic member 20 covers the outer surface of the first coil 30 (except the surface of the first coil 30 contacting with the supporting member 40), and the first magnetic member 20 is also filled in the hole of the first coil 30, that is, not only the first magnetic member 20 is disposed outside the first coil 30, but also the first magnetic member 20 is disposed inside the first coil 30, that is, the first magnetic member 20 wraps the first coil 30 on the supporting member 40, so as to improve the inductance of the thin film inductor.

Specifically, in the embodiment of the present invention, the supporting member 40 is a plate-shaped structure, and plays a role of supporting the first coil 30.

As shown in fig. 3, in the embodiment of the present invention, the supporting member 40 includes a plurality of second through holes 43, the plurality of second through holes 43 are spaced from each other from the first through hole 42 to the direction away from the first through hole 42, and a second magnetic member 50 is disposed in each second through hole 43.

In the above technical solution, by providing a plurality of second through holes 43 and providing a second magnetic member 50 in each second through hole 43, the magnetic permeability of the thin film inductor can be increased, so that the magnetic flux of the thin film inductor can be effectively increased, and the inductance of the thin film inductor can be effectively improved.

Specifically, in the embodiment of the present invention, the space between the first through hole 42 and the second through hole 43 and the space between any two adjacent second through holes 43 are used for supporting the first coil 30.

Preferably, in the embodiment of the present invention, the supporting member 40 includes a plurality of second through holes 43, and only the body 41 for supporting the first coil 30 is left, so that the inner space of the thin film inductor can be fully utilized and more second magnetic members 50 are filled, thereby effectively increasing the magnetic permeability of the thin film inductor.

Preferably, in the embodiment of the present invention, the supporting member 40 is processed by using a laser trimming technique, so that only a structure for supporting the coil is left on the body 41.

Preferably, in the embodiment of the present invention, the plurality of second through holes 43 are straight elongated holes or elongated holes extending around the central axis of the first through hole 42 (see fig. 3), and the plurality of second through holes 43 do not communicate with each other from the center to the outer side of the body 41.

In a specific embodiment, the second through hole 43 may also be an annular through hole extending in the circumferential direction around the central axis of the first through hole 42, such as a rectangular ring or a circular ring.

As shown in fig. 1, in the embodiment of the present invention, the main body 10 further includes a second coil 60 and a third magnetic member 70. The second coil 60 is electrically connected with the first coil 30, and the second coil 60 and the first coil 30 are respectively positioned at the upper side and the lower side of the supporting member 40; the third magnetic member 70 is wrapped around the outer periphery of the second coil 60, and the third magnetic member 70 is located on a side of the second coil 60 facing away from the first coil 30.

With the arrangement, the first coil 30 can generate inductance by self-induction, and the second coil 60 can also generate inductance by self-induction, so that the first coil 30 and the second coil 60 can generate inductance by mutual induction, and the inductance of the thin film inductor can be effectively increased.

Further, by providing the third magnetic member 70 on the outer periphery of the second coil 60, the inductance of the thin film inductor can be effectively increased.

It should be noted that, in the embodiment of the present invention, the third magnetic member 70 is wrapped around the outer periphery of the second coil 60, that is, the third magnetic member 70 covers the outer surface of the second coil 60 (except the surface of the second coil 60 contacting with the supporting member 40), and the third magnetic member 70 is also filled in the hole of the second coil 60, that is, not only the third magnetic member 70 is disposed outside the second coil 60, but also the third magnetic member 70 is disposed inside the second coil 60, that is, the third magnetic member 70 wraps the first coil 30 on the supporting member 40.

It should be noted that, in the embodiment of the present invention, the first magnetic member 20 and the third magnetic member 70 are the same in size and are symmetrical with respect to the supporting member 40.

Preferably, in the embodiment of the present invention, the first coil 30 and the second coil 60 of the thin film inductor are made of metal or metal alloy. Specifically, the metal or the metal alloy may have a small resistivity.

As shown in fig. 1 and fig. 2, in the embodiment of the present invention, the supporting member 40 has an insulating property, the first coil 30 has a plurality of turns, a first interval is provided between two adjacent turns, the first interval corresponds to the second through hole 43, and the plurality of turns are all supported on the body 41.

In the above technical solution, the first gap and the second through hole 43 are correspondingly arranged, and the plurality of turns are all supported on the body 41, so that the body 41 can separate the first coil 30 from the second coil 60, and thus a part of the first coil 30 and a part of the second coil 60 can be insulated.

Preferably, in the embodiment of the present invention, the supporting member 40 is made of an insulating material such as plastic or rubber.

As shown in fig. 2, in the embodiment of the present invention, the supporting member 40 further includes a mounting through hole 44 disposed on the body 41, the main body 10 further includes a conductive member 45 disposed through the mounting through hole 44, a first end of the first coil 30 is connected to a first end of the second coil 60 through the conductive member 45, a second end of the first coil 30 is exposed on a surface of the first magnetic member 20 and connected to the input electrode 11, and a second end of the second coil 60 is exposed on a surface of the third magnetic member 70 and connected to the output electrode 12.

Through the above arrangement, not only the first coil 30 can be connected to an external power source through the input electrode 11, but also the second coil 60 can be connected to the external power source through the output electrode 12, and the conductive member 45 can be arranged to realize the electrical connection between the first coil 30 and the second coil 60, so that the first coil 30 can generate inductance by self-induction, and the second coil 60 can also generate inductance by self-induction, thereby enabling the first coil 30 and the second coil 60 to generate inductance by mutual induction, and further effectively increasing the inductance of the thin film inductor.

Preferably, in the embodiment of the present invention, the first end of the first coil 30 adopts a circular structure, and the second end of the first coil 30 adopts a square structure; the first end of the second coil 60 has a circular configuration and the second end of the second coil 60 has a square configuration.

Of course, in an alternative embodiment not shown in the drawings, the first end of the first coil 30 may also adopt a square structure, an oval structure, or the like, and the second end of the first coil 30 may also adopt a circular structure or an oval structure; the first end of the second coil 60 may also have a square or elliptical configuration, and the second end of the second coil 60 may also have a circular or elliptical configuration.

Of course, in an alternative embodiment not shown in the drawings, the first end of the first coil 30 may adopt a square structure, and the second end of the first coil 30 may also adopt a square structure, that is, the first end of the first coil 30 and the second end of the first coil 30 may have the same structure; the first end of the second coil 60 may have a square structure, and the second end of the second coil 60 may also have a square structure, that is, the first end of the second coil 60 and the second end of the second coil 60 may have the same structure.

It should be noted that, in the embodiment of the present invention, the second end of the first coil 30 is exposed on the surface of the first magnetic member 20, that is, the second end of the first coil 30 protrudes out of the surface of the first magnetic member 20, or the second end of the first coil 30 is flush with the surface of the first magnetic member 20.

Similarly, the fact that the second end of the second coil 60 is exposed on the surface of the third magnetic member 70 means that the second end of the second coil 60 is exposed through the surface of the third magnetic member 70, that is, the second end of the second coil 60 protrudes out of the surface of the third magnetic member 70 or the second end of the second coil 60 is flush with the surface of the third magnetic member 70.

Specifically, as shown in fig. 2, in the embodiment of the present invention, the first coil 30 and the second coil 60 have the same structure, and the first coil 30 and the second coil 60 are symmetrically disposed about the center line of the main body 10. In this way, the second end of the first coil 30 and the second end of the second coil 60 may be located at opposite sides of the body 10, respectively, so as to be connected to the input electrode 11 and the output electrode 12, respectively.

It should be noted that, as shown in fig. 2, in the embodiment of the present invention, the distances from the center line to both ends of the first coil 30 in the horizontal plane are equal.

Preferably, in the embodiment of the present invention, the conductive member 45 is made of a conductive material.

In the embodiment of the present invention, the input electrode 11 and the output electrode 12 have the same size and shape, and the input electrode 11 and the output electrode 12 are symmetrically disposed about the center line.

It should be noted that, in the embodiment of the present invention, both the first coil 30 and the second coil 60 are processed by an electroplating process to increase the thickness of the coil.

As shown in fig. 2 and 3, in the embodiment of the present invention, the supporting member 40 includes a plurality of second through holes 43, the first coil 30 includes a plurality of metal coils 31, the plurality of metal coils 31 are disposed in parallel and at intervals, each metal coil 31 has a plurality of turns, a second interval is provided between every two adjacent turns, and the plurality of second intervals corresponds to the plurality of second through holes 43.

In the above technical solution, the direct current resistance can be effectively reduced by providing the plurality of metal coils 31, so that the inductance Q value (quality factor of the inductance) can be effectively improved while the inductance parasitic capacitance is reduced.

Specifically, in the embodiment of the present invention, the first coil 30 includes two metal coils 31, and the two metal coils 31 are parallel and spaced, so as to effectively reduce the direct current resistance, so as to increase the magnetic flux of the thin film inductor, and further increase the inductance of the thin film inductor. Of course, in alternative embodiments not shown in the drawings, the first coil 30 may also comprise three metal coils 31 or four metal coils 31 or five metal coils 31, etc.

Specifically, in the embodiment of the present invention, the second coil 60 has the same structure as the first coil 30, and therefore, the second coil 60 also includes two metal coils 31, and the two metal coils 31 are parallel and spaced, so as to effectively reduce the dc resistance, increase the magnetic flux of the thin film inductor, and further increase the inductance of the thin film inductor. Of course, in alternative embodiments not shown in the drawings, the second coil 60 may also comprise three metal coils 31 or four metal coils 31 or five metal coils 31, etc.

In the embodiment of the present invention, the second interval includes an interval between the two metal coils 31 of the first coil 30 and the first interval.

Specifically, in the embodiment of the present invention, one end of the two metal coils 31 is merged to form the first end of the first coil 30, so as to be electrically connected to the second coil 60; the other ends of the two metal coils 31 are combined to form a second end of the first coil 30, so as to be connected with the input electrode 11; of course, one end of the two metal coils 31 may be combined to form the first end of the second coil 60 so as to be electrically connected to the first coil 30; the other ends of the two metal coils 31 may also be combined to form a second end of the second coil 60 so as to be connected to the output electrode 12.

As shown in fig. 1, in the embodiment of the present invention, the second spacers are filled with a magnetic material.

Through the arrangement, the magnetic material of the thin film inductor can be increased, so that the magnetic permeability of the thin film inductor is increased, the magnetic flux of the thin film inductor is increased, and the inductance of the thin film inductor can be effectively improved.

In the embodiment of the present invention, the first magnetic member 20, the second magnetic member 50, and the third magnetic member 70 are made of the above-mentioned magnetic material.

As shown in fig. 1 and 4, in the embodiment of the present invention, the thin film inductor further includes an adhesive layer 80, and the adhesive layer 80 is disposed on two opposite sides of the supporting member 40.

Through the above arrangement, both the first coil 30 and the second coil 60 can be tightly connected to the body 41, so that the first coil 30 and the second coil 60 are prevented from falling off from the body 41.

Of course, in an alternative embodiment not shown in the drawings, the adhesive layer 80 may be provided only on the upper side of the supporting member 40, so that the first coil 30 may be tightly connected with the supporting member 40 through the adhesive layer 80; alternatively, the adhesive layer 80 may be provided only on the lower side of the support member 40, so that the second coil 60 may be closely coupled to the support member 40 through the adhesive layer 80.

Preferably, in the embodiment of the present invention, the adhesive layer 80 is a glue layer.

As shown in fig. 1, in the embodiment of the present invention, the first magnetic member 20, the second magnetic member 50, and the third magnetic member 70 are integrally formed.

With the above arrangement, the first magnetic member 20, the second magnetic member 50, and the third magnetic member 70 can encapsulate the first coil 30 and the second coil 60 on the supporting member 40, and the magnetic member made of a magnetic material is filled in the through holes on the first coil 30, the second coil 60, and the supporting member 40, so that the magnetic permeability of the thin film inductor can be increased to increase the magnetic flux of the thin film inductor, thereby increasing the inductance of the thin film inductor.

Further, the first magnetic member 20, the second magnetic member 50, and the third magnetic member 70 are integrally formed, so that the first coil 30 and the second coil 60 can be more stably mounted on the support member 40.

Of course, in an alternative embodiment not shown in the drawings, the first magnetic member 20, the second magnetic member 50 and the third magnetic member 70 may be provided separately.

Preferably, in the embodiment of the present invention, the first magnetic member 20, the second magnetic member 50 and the third magnetic member 70 are made of soft magnetic alloy, that is, the magnetic material is soft magnetic alloy. Since soft magnetic alloy (soft magnetic material) is a magnetic material having high saturation magnetic flux density, low coercive force, and high magnetic permeability, the magnetic permeability of the thin film inductor can be improved.

Of course, in alternative embodiments, various performance parameters of the magnetic material can be changed according to the actual situation, and can be replaced by other magnetic materials.

Preferably, in the embodiment of the present invention, the second magnetic member 50 is made of soft magnetic alloy powder; the first and third magnetic members 20 and 70 are made of soft magnetic alloy sheets so that the first and second through holes 42 and 43 can be filled with magnetic material, and the first and second coils 30 and 60 can be wrapped.

It should be noted that, as shown in fig. 4, in the embodiment of the present invention, the first magnetic member 20, the first coil 30, the supporting member 40, the second coil 60, and the third magnetic member 70 are sequentially arranged along the vertical direction and are disposed in parallel with each other.

It should be noted that, as shown in fig. 4, the thin film inductor according to the embodiment of the present invention has a seven-layer structure in the vertical direction, and includes a first magnetic member 20, a first coil 30, an adhesive layer 80, a support member 40, an adhesive layer 80, a second coil 60, and a third magnetic member 70 in sequence, where the first magnetic member 20 covers the first coil 30, and the third magnetic member 70 covers the second coil 60, so as to form a whole shielding body.

For example, in an embodiment of the present invention, the thin film inductor is made of soft magnetic alloy with a magnetic permeability of 40, and under the condition of inputting the dc current 5A, the inductance value obtained by simulation is 150nH, and the dc resistance is 17m Ω, so that the thin film inductor has a smaller size, better performance and a simpler structure than the thin film inductor of the same type.

It should be noted that the embodiment of the utility model provides a film inductor based on soft magnetic alloy magnetic sheet has adopted a neotype coil structure and coil bearing structure, make full use of film inductor's inner space to can promote film inductor's magnetic flux, and reduce film inductor's direct current resistance, realized having high inductance value, small-size, low direct current resistance, big saturation current's film inductor.

It should be noted that, the thin film inductor of the embodiments of the present invention has advantages of small size, low processing difficulty, large inductance value, etc. compared with the similar inductor. And the thin film type inductor adopts a seven-layer structure, fully utilizes a space structure and effectively reduces the volume.

An embodiment of the utility model provides a power conversion circuit. The power conversion circuit comprises a direct current power supply, at least one switch unit and at least one inductance unit, wherein the switch unit and the inductance unit are correspondingly arranged, and each inductance unit is connected with the direct current power supply through the corresponding switch unit, and comprises the thin film type inductor.

The utility model discloses a power conversion circuit can convert the voltage of a power to a plurality of different output voltage, and above-mentioned power conversion circuit generally is applied to the AGV dolly (automatic guided transporting vehicle), and above-mentioned power conversion circuit has the whole advantages of above-mentioned thin film inductor, and the here is no longer repeated.

From the above description, it can be seen that the above-mentioned embodiments of the present invention achieve the following technical effects: through setting up first magnetism spare in the periphery of first coil, can improve film inductor's inductance value to, through setting up first through-hole and around the second through-hole of first through-hole setting, and set up second magnetism spare in first through-hole and second through-hole, like this, can further increase the magnetic flux, thereby can improve film inductor's inductance value effectively, consequently, the utility model discloses a film inductor has great inductance value.

The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (10)

1. A thin film inductor is characterized in that,

the thin film inductor comprises a main body (10) and an input electrode (11) and an output electrode (12) which are arranged outside the main body (10);

the main body (10) comprises a first magnetic part (20), a first coil (30) and a support part (40) which are sequentially stacked, wherein the first magnetic part (20) is wrapped on the periphery of the first coil (30);

the support member (40) includes a body (41) for supporting the first coil (30), a first through hole (42) provided on the body (41), a second through hole (43) provided around the first through hole (42), and a second magnetic member (50) located in the first through hole (42) and the second through hole (43), with a space between the first through hole (42) and the second through hole (43).

2. The thin film inductor according to claim 1, wherein the supporting member (40) comprises a plurality of second through holes (43), the plurality of second through holes (43) are spaced apart from each other from the first through hole (42) in a direction away from the first through hole (42), and each second through hole (43) has the second magnetic member (50) disposed therein.

3. The thin film inductor according to claim 1, wherein the body (10) further comprises:

a second coil (60) electrically connected to the first coil (30), the second coil (60) and the first coil (30) being respectively located at upper and lower sides of the support member (40);

and the third magnetic part (70) is wrapped on the periphery of the second coil (60), and the third magnetic part (70) is positioned on one side, away from the first coil (30), of the second coil (60).

4. Thin film inductor according to claim 3, characterized in that the support (40) has insulating properties, the first coil (30) has a plurality of turns with a first spacing between two adjacent turns, the first spacing being arranged in correspondence with the second through hole (43), the plurality of turns each being supported on the body (41).

5. The thin film inductor as claimed in claim 3, wherein the supporting member (40) further comprises a mounting through hole (44) provided in the body (41), the body (10) further comprises a conductive member (45) inserted into the mounting through hole (44), a first end of the first coil (30) is connected to a first end of the second coil (60) through the conductive member (45), a second end of the first coil (30) is exposed to a surface of the first magnetic member (20) and connected to the input electrode (11), and a second end of the second coil (60) is exposed to a surface of the third magnetic member (70) and connected to the output electrode (12).

6. Thin film inductor according to any of claims 1 to 5, characterized in that the support (40) comprises a plurality of said second vias (43), the first coil (30) comprises a plurality of metal coils (31), the plurality of metal coils (31) are arranged in parallel and spaced apart, each metal coil (31) has a plurality of turns, each two adjacent turns have a second spacing therebetween, and the plurality of second spacings correspond to the plurality of second vias (43).

7. The thin film inductor as recited in claim 6, wherein the second spacers are filled with a magnetic material.

8. Thin film inductor according to any of claims 1-5, characterized in that it further comprises an adhesive layer (80), at least one side of the support (40) being provided with the adhesive layer (80).

9. Thin film inductor as claimed in any of claims 3 to 5, characterized in that the first magnetic element (20), the second magnetic element (50) and the third magnetic element (70) are integrally formed; alternatively, the first magnetic member (20), the second magnetic member (50), and the third magnetic member (70) are all made of a soft magnetic alloy.

10. A power conversion circuit, comprising a dc power supply, at least one switching unit and at least one inductance unit, wherein the switching unit and the inductance unit are disposed correspondingly, and each inductance unit is connected to the dc power supply through the corresponding switching unit, wherein the inductance unit comprises the thin film inductor according to any one of claims 1 to 9.

Images