CN216009583U - Exhaust valve and exhaust device of semiconductor equipment - Google Patents

Abstract

The utility model discloses a semiconductor equipment's discharge valve and exhaust apparatus relates to integrated circuit production facility field. The utility model relates to a semiconductor equipment's discharge valve, it includes: the valve seat comprises a valve cavity, and the valve cavity penetrates through the valve seat; the flow blocking sheet is positioned in the valve cavity; the motor is positioned on the valve seat and is provided with a rotating main shaft, and the rotating main shaft is fixedly connected with the flow blocking sheet; a position flagpole located on the rotating spindle; and a plurality of position sensors located in the valve seat, the plurality of position sensors being located in the rotation area of the position flag pole. The utility model discloses can improve the unstable problem of semiconductor equipment exhaust pressure.

Description

Exhaust valve and exhaust device of semiconductor equipment

Technical Field

The utility model belongs to the technical field of integrated circuit production facility, especially, relate to a semiconductor equipment's discharge valve and exhaust apparatus.

Background

In the manufacturing process of semiconductor integrated circuits, a plurality of exhaust pipelines are required for a machine. Due to different functions and exhaust pressures of all pipelines, the pressure and fluctuation in each pipeline need to be monitored, and the exhaust valve in each pipeline is adjusted in time. At present, the exhaust valve is manually adjusted, so that the air pressure in each pipeline is difficult to adjust in time, the product quality is influenced, and the capacity loss is caused.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a semiconductor equipment's discharge valve and exhaust apparatus cooperates with the position flagpole through position sensor, detects the state of the interior baffling piece of discharge valve, has solved the unstable problem of intercommunication board each way pipeline internal gas pressure.

In order to solve the technical problem, the utility model discloses a realize through following technical scheme:

the utility model provides a semiconductor equipment's discharge valve, it includes:

the valve seat comprises a valve cavity, and the valve cavity penetrates through the valve seat;

the flow blocking sheet is arranged in the valve cavity;

the motor is arranged on the valve seat and provided with a rotating main shaft, and the rotating main shaft is fixed to the flow blocking sheet;

the position flagpole is arranged on the rotating main shaft and rotates around the rotating main shaft, and the flow blocking piece rotates around the rotating main shaft; and

and the position sensors are arranged on the valve seat, and the position sensors are positioned in the rotating area of the position flagpole.

In one embodiment of the invention, the midpoint of the position flagpole is located on the rotating spindle.

In an embodiment of the present invention, the number of the position sensors is at least two, and the position sensors are located on both sides of the position flagpole.

In an embodiment of the present invention, the position sensors are arranged in a central symmetry manner with respect to the rotating main shaft.

In an embodiment of the present invention, the valve chamber is cylindrical.

In an embodiment of the present invention, the flow blocking sheet is circular.

In an embodiment of the present invention, when the flow blocking sheet is perpendicular to the axis of the valve chamber, the flow blocking sheet seals the valve chamber, and when the flow blocking sheet coincides with the axis of the valve chamber, the valve chamber is in a fully open state.

In an embodiment of the present invention, the flow blocking plate and the position flag pole are in the same plane.

In an embodiment of the present invention, when the flow blocking sheet coincides with the axis of the valve cavity, the position flag pole abuts against the position sensor.

The utility model also provides an exhaust apparatus of semiconductor device, include:

the exhaust main pipe is communicated with a plurality of semiconductor devices through a plurality of branch pipes;

the flow blocking sheet is arranged in the branch pipe;

the motor is arranged on the branch pipe and provided with a rotating main shaft, and the rotating main shaft is fixed to the flow blocking sheet;

the driver is connected with the motor;

the position flagpole is fixed on the rotating main shaft and rotates around the rotating main shaft, and the flow blocking piece rotates around the rotating main shaft;

the position sensors are fixed on the branch pipes and are positioned in the rotating area of the position flagpole;

the air pressure detector is arranged in the branch pipe;

the signal processor is electrically connected with the motor, the driver, the position sensor and the air pressure detector; and

and the controller is connected with the signal processor.

The utility model discloses a with the synchronous pivoted position flagpole of fender stream piece for detect the turned angle of fender stream piece, be convenient for control discharge valve's gas flow. The controller achieves rotation control over the flow blocking sheet through rotation control over the motor, achieves adjustment of air pressure and air flow in the branch pipe, maintains the air pressure and the air flow in the branch pipe within a preset range, improves exhaust stability of the semiconductor device, and further improves operation reliability of the semiconductor device.

Of course, it is not necessary for any particular product to achieve all of the above-described advantages at the same time.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 is a schematic structural view of an exhaust valve of a semiconductor device according to an embodiment of the present invention;

fig. 2 is a schematic structural diagram of the valve seat, the flow blocking sheet and the rotating spindle according to an embodiment of the present invention;

fig. 3 is a schematic structural diagram of the valve seat, the flow blocking plate and the rotating spindle according to an embodiment of the present invention;

fig. 4 is a schematic diagram of a position structure of the valve seat, the flow blocking plate, the rotating spindle, the position flag pole and the position sensor according to an embodiment of the present invention;

fig. 5 is a schematic diagram of a position structure of the valve seat, the flow blocking plate, the rotating spindle, the position flag pole and the position sensor according to an embodiment of the present invention;

fig. 6 is a schematic diagram showing a position structure of the valve seat, the flow blocking plate, the rotating spindle, the position flag pole and the position sensor according to an embodiment of the present invention;

FIG. 7 is a schematic structural view of the semiconductor device, the scheduling main pipe, the branch pipe and the exhaust valve according to an embodiment of the present invention;

fig. 8 is a schematic structural diagram of an exhaust apparatus of a semiconductor device according to an embodiment of the present invention.

In the drawings, the components represented by the respective reference numerals are listed below:

1-a valve seat;

2-a flow blocking sheet;

3-motor, 31-rotating spindle;

4-position flagpole;

51. 52-position sensor;

6-a semiconductor device;

7-main exhaust pipe, 71-branch pipe;

8-an exhaust valve;

9-a pressure detector;

10-a driver;

11-a signal processor;

12-a controller.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative efforts belong to the protection scope of the present invention.

Referring to fig. 1, the present invention provides an exhaust valve and an exhaust apparatus of a semiconductor device, so as to control the flow rate of the exhaust valve and improve the operational reliability of the semiconductor device. The utility model discloses a discharge valve 8 of semiconductor equipment 6 can include disk seat 1, keep off the class piece 2, motor 3, position flagpole 4 and a plurality of sensor. Wherein, the valve cavity can be opened along the axial in the valve seat 1, and the valve cavity runs through the valve seat 1. The valve cavity can be internally provided with the flow blocking piece 2, and the flow blocking piece 2 can rotate in the valve cavity because the flow blocking piece 2 can be assembled on a rotating main shaft 31 of the motor 3, and the flow blocking piece 2 rotates along with the rotating main shaft 31 when the motor 3 rotates. Because the baffle plate 2 can rotate to different angles in the valve cavity, the baffle plate 2 can control the intercepting and communicating states of the valve cavity. The rotating spindle 31 can be further provided with a position flag pole 4, because the position flag pole 4 is fixedly assembled with the rotating spindle 31, the rotation angle of the position flag pole 4 is consistent with the rotation angle of the rotating spindle 31, and thus, the rotation angle of the rotating spindle 31 can be obtained according to the angle change of the position flag pole 4, and the flow blocking sheet 2 is also fixedly connected with the rotating spindle 31, so that the rotation angle of the position flag pole 4 can also reflect the rotation angle of the flow blocking sheet 2, and the position and the rotation angle of the flow blocking sheet 2 can be detected by detecting the rotation angle of the position flag pole 4. A plurality of position sensors 51, 52 may be disposed on the valve seat 1, and the position sensors 51, 52 may be disposed in a rotation region of the position flag pole 4, and since the position flag pole 4 may contact the position sensors 51, 52 during rotation, a rotation angle of the position flag pole 4 may be determined according to a contact state of the position flag pole 4 with the position sensors 51, 52 and positions of the position sensors 51, 52. Meanwhile, the position flagpole 4 and the flow blocking piece 2 rotate synchronously, so that the rotation angle of the position flagpole 4 is detected, namely the rotation angle of the flow blocking piece 2 is detected, the rotation angle of the flow blocking piece 2 in the valve cavity is detected, and the air flow of the exhaust valve 8 is conveniently controlled.

Referring to fig. 1, the position flag pole 4 may be a long bar, and the middle point of the position flag pole 4 may be fixed to the rotating main shaft 31. Since the center of gravity of the position flag pole 4 is also located at the midpoint position, the position flag pole 4 keeps the balance of the rotation moment during the rotation, and does not generate vibration that affects the stable rotation of the rotating main shaft 31. Through the stable rotation of rotatory main shaft 31, can avoid the flap 2 to take place the shake in the rotation process, realize avoiding influencing the technical effect of flap 2 and valve pocket inner wall leakproofness.

Referring to fig. 1, the number of the position sensors 51 and 52 may be two, and two position sensors 51 and 52 may be disposed on both sides of the position flag pole, and specifically, two position sensors 51 and 52 may be alternately disposed on both sides of the position flag pole 4. Because the position flag pole 4 can rotate clockwise and also can rotate anticlockwise, the two position sensors 51 and 52 are arranged on the two sides of the position flag pole 4 in a staggered mode, whether the position flag pole 4 rotates to the positions of the position sensors 51 and 52 can be detected in two rotating directions, and therefore the rotating angle of the flow blocking piece 2 is obtained, and detection of the communicating state in the valve cavity is achieved. In other alternative embodiments, the number of the position sensors 51 and 52 may be three or more, for example, and the detection of the rotation angle of the position flag pole 4 to detect the rotation angle of the baffle 2 can be realized.

Referring to fig. 1, the position sensors 51 and 52 may be arranged in a central symmetry manner with respect to the main rotation shaft 31. Since the position sensors 51 and 52 function to detect the rotation angle of the position flag 4, when the plurality of position sensors 51 and 52 are centrosymmetric with respect to the rotation main shaft 31, the position flag 4 can be touched by being rotated clockwise and counterclockwise by the same angle as the position sensors 51 and 52. When the air flow communication degree in the valve cavity is detected, the rotation direction of the flow baffle plate 2 does not influence the air flow communication degree in the valve cavity, so that the air flow communication degree in the valve cavity can be obtained by obtaining the rotation angle of the flow baffle plate 2.

Referring to fig. 1 to 3, the valve seat 1 may have a cylindrical overall structure, and the valve chamber may have a cylindrical structure. The shape of the baffle 2 may be circular corresponding to the structure of the valve chamber, and the diameter of the baffle 2 is equal to the inner diameter of the valve chamber. Because the shape and the size of the flow baffle plate 2 are matched with those of the valve cavity, when the flow baffle plate 2 is vertical to the axis of the valve cavity, the flow baffle plate 2 seals the valve cavity, and when the flow baffle plate 2 is superposed with the axis of the valve cavity, the valve cavity is in a fully opened state. In other alternative embodiments, the shape of the baffle 2 may be, for example, an oval shape, which is a cross-sectional side view of the valve chamber, and which can also perform the sealing and opening functions of the valve chamber.

Referring to fig. 1 to 6, the current blocking plate 2 and the position flag pole 4 may be in the same plane, and since the current blocking plate 2 and the position flag pole 4 are fixed on the rotating spindle 31, the current blocking plate 2 and the position flag pole 4 rotate synchronously, and the rotation angle of the position flag pole 4 can directly reflect the rotation angle of the current blocking plate 2. Since the rotation angle of the position flag pole 4 corresponds to the flow blocking piece 2, the rotation angle of the flow blocking piece 2 can be conveniently detected and controlled.

Referring to fig. 4 to 6, the position sensors 51 and 52 can be disposed along the extending direction of the valve cavity, i.e. the axis of the valve cavity, according to the following positional relationship, when the flow blocking plate 2 is overlapped with the axis of the valve cavity, the position flag rod 4 abuts against the position sensors 51 and 52. When the flow blocking sheet 2 is coincident with the axis of the valve cavity, the flow blocking sheet 2 no longer blocks the gas flowing in the valve cavity, and the valve cavity is in a fully opened state at the moment. In other alternative embodiments, the position sensors 51 and 52 may be disposed in such a way that when the flow stop plate 2 rotates close to the axis of the valve cavity coinciding, the position flag pole 4 abuts against the position sensors 51 and 52, and the angle of the flow stop plate 2 to the axis of the valve cavity may be 1 to 30 degrees. When the valve cavity is about to be fully opened, the position flagpole 4 abuts against the position sensors 51 and 52, and the early warning is triggered. The position sensors 51 and 52 may be added on the basis of the above arrangement of the position sensors 51 and 52, for example, the position sensors 51 and 52 may be arranged in such a manner that after the position flag pole 4 is in contact with the position sensors, one or more position sensors are further arranged along the rotation direction of the position flag pole 4, and when the position flag pole 4 is triggered by the contact with the position sensors, that is, when the air flow passing through the exhaust valve 8 is abnormal, an alarm needs to be activated.

Referring to fig. 7 to 8, the present invention further provides an exhaust device of a semiconductor device 6, which includes an exhaust main pipe 7, a flow blocking plate 2, a motor 3, a driver 10, a position flag pole 4, a plurality of position sensors 51 and 52, an air pressure detector 9, and a controller 12. The exhaust main pipe 7 may communicate with the semiconductor device 6 through a plurality of branch pipes 71, that is, various gases generated by the semiconductor device 6 are discharged to the exhaust main pipe 7 through the plurality of branch pipes 71, and are discharged to the outside through the exhaust main pipe 7. The flow blocking sheet 2 can be arranged in the inner cavity of the branch pipe 71, and the flow control effect on the branch pipe 71 can be achieved through different rotating angles of the flow blocking sheet 2. In order to control the rotation angle of the baffle plate 2, the baffle plate 2 may be fixed to a rotation shaft 31 of the motor 3, and when the motor 3 drives the rotation shaft 31 to rotate, the baffle plate 2 can also be driven to rotate. The motor 3 may be connected to a driver 10, and the rotational operation state of the motor 3 is controlled by the driver 10. The rotating spindle 31 of the motor 3 may also be fixed with a position flag pole 4, since the position flag pole 4 rotates synchronously with the flow stop plate 2, since the position flag pole 4 can indicate the rotation angle and position of the flow stop plate 2. The branch pipe 71 may further be provided with a plurality of position sensors 51, 52, the position sensors 51, 52 may detect the rotation angle of the position flag pole 4, and since the position flag pole 4 may rotate in synchronization with the flow blocking plate 2, the position sensors 51, 52 may also detect the rotation angle of the flow blocking plate 2, thereby realizing the detection of the air flow in the branch pipe 71. An air pressure detector 9 may also be provided in the branch pipe 71 for detecting the air pressure in the branch pipe 71. The motor 3, the driver 10, the position sensors 51 and 52 and/or the air pressure detector 9 may be connected to the signal processor 11, and may be configured to send the operation status and the detection data to the signal processor 11, the signal processor 11 processes the collected data and then sends the processed data to the controller 12, and the controller 12 obtains the air pressure and the air flow in the branch pipe 71 and the opening/closing status of the branch pipe 71 according to the data collected by the signal processor 11. The rotation angle of the baffle plate 2 is adjusted and controlled according to the air pressure, the air flow and the opening and closing state of the branch pipe 71, and the air pressure and the air flow in the branch pipe 71 are kept within a normal range.

Referring to fig. 1 to 8, at least two position sensors 51 and 52 may be alternatively disposed on both sides of the position flag pole 4, and when the baffle plate 2 rotates in the branch pipe 71 to a nearly fully opened state, the position flag pole 4 abuts against the position sensors 51 and 52. Since the position sensors 51 and 52 are connected with the signal processor 11 and the controller 12 in sequence, the semiconductor device 6 can be triggered to send out a prompt alarm to remind the device personnel that the exhaust valve 8 communicated with the semiconductor device 6 is about to reach the maximum limit of regulation and the exhaust condition of the semiconductor device 6 needs to be confirmed. In the above embodiment, position sensors 51 and 52 may be further disposed along the rotation direction of the flow blocking plate 2, and when the position flag rod 4 contacts the position sensors 51 and 52, it indicates that the exhaust valve 8 in the exhaust main pipe 7 is out of order, and the semiconductor device 6 needs to be triggered to issue an alarm.

Referring to fig. 8, the current blocking plate 2 and the position flag pole 4 are in the same plane, and the current blocking plate 2 and the position flag pole 4 rotate synchronously. Since the position flag pole 4 and the flow blocking piece 2 have rotation consistency, the rotation angle and the position of the position flag pole 4 are detected, and the rotation angle and the position of the flow blocking piece 2 in the branch pipe 71 can be obtained. In order to monitor the air pressure in the branch pipe 71, an air pressure detector 9 may be provided in the branch pipe 71 to monitor the air pressure in the branch pipe 71. The position sensors 51, 52 may be connected to the signal processor 11 for transmitting the position and rotation angle information of the position flag pole 4 to the signal processor 11. The air pressure detector 9 can be connected to the signal processor 11 for transmitting the air pressure information in the branch pipe 71 to the signal processor 11. The electric motor 3 may also be directly connected to the signal processor 11 for transmitting the operating state of the electric motor 3 to the signal processor 11. The signal processor 11 may be connected to the controller 12 for transmitting the collected and processed information to the controller 12, and the controller 12 is configured to generate a control command for controlling the rotation of the motor 3 through the motor 3 driver 10. The air pressure range of the branch pipe 71 can be preset in the controller 12, and the rotation control of the flow blocking piece 2 is realized by controlling the rotation of the motor 3, so that the air pressure and the air flow in the branch pipe 71 are adjusted, the exhaust stability of the semiconductor device 6 is improved, and the operation reliability of the semiconductor device 6 is further improved.

In addition, in the present embodiment, the connection of the electrical modules may be performed by a wired method such as an electrical cable or an optical cable, or may be performed by a wireless method.

In summary, the motor drives the rotating spindle to rotate, and the rotating spindle can drive the flow blocking piece and the position flag pole to rotate synchronously, so that the rotation angle of the position flag pole can be detected by the position sensor, and the rotation state of the flow blocking piece in the valve seat or the branch pipe can be indirectly measured. The pressure detector can be arranged in the branch pipe for detecting the pressure in the branch pipe, the pressure detector and the position sensor can transmit signals to the signal processor, and the signal processor transmits the processed signals to the controller for judging whether the pressure and the air flow in the branch pipe are at preset safety values. When the preset value is exceeded, the controller can drive the rotating main shaft of the motor to rotate through the driver so as to drive the flow blocking piece in the exhaust valve to rotate, and the adjustment of the air pressure and the air flow in the branch pipe is realized.

The preferred embodiments of the present invention disclosed above are intended only to help illustrate the present invention. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise embodiments disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and its practical applications, to thereby enable others skilled in the art to best understand the invention for and utilize the invention. The present invention is limited only by the claims and their full scope and equivalents.

Claims (10)

1. An exhaust valve of a semiconductor apparatus, comprising:

the valve seat comprises a valve cavity, and the valve cavity penetrates through the valve seat;

the flow blocking sheet is positioned in the valve cavity;

the motor is positioned on the valve seat and is provided with a rotating main shaft, and the rotating main shaft is fixedly connected with the flow blocking sheet;

a position flagpole located on the rotating spindle; and

and the position sensors are positioned in the valve seat, and the position sensors are positioned in the rotating area of the position flagpole.

2. The exhaust valve according to claim 1 wherein a midpoint of said position flag pole is located at said main axis of rotation.

3. The exhaust valve according to claim 1 wherein said position sensors are at least two in number and are located on either side of said position flag pole.

4. Exhaust valve according to claim 1 or 3, characterized in that a plurality of said position sensors are arranged in a central symmetrical manner with respect to said main axis of rotation.

5. The vent valve of claim 1, wherein the valve cavity is cylindrical.

6. The discharge valve according to claim 5, wherein said baffle is circular.

7. The vent valve of claim 6, wherein the flow stop seals the valve chamber when the flow stop is perpendicular to an axis of the valve chamber, and wherein the valve chamber is in a fully open state when the flow stop coincides with the axis of the valve chamber.

8. The vent valve of claims 1 or 7 wherein the flow stop is in the same plane as the position flag pole.

9. The exhaust valve according to claim 8 wherein said position flag pole abuts said position sensor when said flow stop tab coincides with an axis of said valve cavity.

10. An exhaust apparatus of a semiconductor device, comprising:

the exhaust main pipe is communicated with a plurality of semiconductor devices through a plurality of branch pipes;

the flow blocking sheet is arranged in the branch pipe;

the motor is arranged on the branch pipe and provided with a rotating main shaft, and the rotating main shaft is fixed to the flow blocking sheet;

the driver is connected with the motor;

the position flagpole is fixed on the rotating main shaft and rotates around the rotating main shaft, and the flow blocking piece rotates around the rotating main shaft;

the position sensors are fixed on the branch pipes and are positioned in the rotating area of the position flagpole;

the air pressure detector is arranged in the branch pipe;

the signal processor is electrically connected with the motor, the driver, the position sensor and the air pressure detector; and

and the controller is connected with the signal processor.

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