CN216006090U - High-temperature vacuum reactor - Google Patents
High-temperature vacuum reactor Download PDFInfo
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- CN216006090U CN216006090U CN202121443719.4U CN202121443719U CN216006090U CN 216006090 U CN216006090 U CN 216006090U CN 202121443719 U CN202121443719 U CN 202121443719U CN 216006090 U CN216006090 U CN 216006090U
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Abstract
The utility model discloses a high-temperature vacuum reactor, which comprises a hollow reactor, wherein a heating device for heating the temperature in the reactor to be higher than a set temperature is arranged in the reactor, the reactor is connected with a vacuumizing device for vacuumizing the reactor, the high-temperature vacuum reactor also comprises a low-temperature accommodating cavity capable of being communicated with the inner cavity of the reactor, the temperature in the low-temperature accommodating cavity is lower than the set temperature, a plurality of vacuum adsorbents are arranged in the low-temperature accommodating cavity, and the high-temperature vacuum reactor also comprises a conveying mechanism capable of moving the vacuum adsorbents between the inner cavity of the reactor and the low-temperature accommodating cavity. The utility model has the beneficial effects that: the vacuum adsorbent is stored in the low-temperature accommodating cavity, and during production, the vacuum adsorbent is fed into the reactor through the driving device and is activated through high temperature in the reactor, so that the vacuum degree is quickly improved by the auxiliary vacuumizing device.
Description
Technical Field
The utility model relates to the field of material preparation, in particular to a high-temperature vacuum reactor.
Background
In the field of material preparation, for example, in the polycrystalline synthesis of silicon carbide, a high-temperature vacuum reactor is used, and polycrystalline synthesis operation of silicon carbide is carried out by heating materials in a vacuum environment. The vacuum degree has a great influence on the purity of the finished product, and how to improve the vacuum degree is a technical problem to be solved urgently at present. The existing vacuumizing device realizes a vacuum mode by pumping out air, has high requirements on size, and can reach high vacuum degree only in a reactor with the diameter of 6-8 inches at present. If the size is larger, the vacuum degree is reduced sharply due to sealing, vacuum pumping time and the like.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a high-temperature vacuum reactor which is convenient to use, high in vacuum degree, reusable and large in size.
In order to achieve the purpose, the utility model provides the following technical scheme:
a high-temperature vacuum reactor comprises a hollow reactor, wherein a heating device for heating the temperature in the reactor to be higher than a set temperature is arranged in the reactor, the reactor is connected with a vacuumizing device for vacuumizing the reactor, the high-temperature vacuum reactor also comprises a low-temperature accommodating cavity capable of being communicated with the inner cavity of the reactor, the temperature in the low-temperature accommodating cavity is lower than the set temperature, a plurality of vacuum adsorbents are arranged in the low-temperature accommodating cavity, and the high-temperature vacuum reactor also comprises a conveying mechanism capable of moving the vacuum adsorbents between the inner cavity of the reactor and the low-temperature accommodating cavity.
Preferably, the vacuum adsorbent is an adsorbent that is activated only above the set temperature.
Preferably, the low-temperature accommodating cavity is communicated with the inner cavity of the reactor through a plurality of through holes.
Preferably, a base is arranged in the low-temperature accommodating cavity, a plurality of supports capable of respectively penetrating through one through hole are arranged on the base, and each support is provided with one vacuum adsorbent; and a driving device drives the base to move up and down.
Preferably, the reactor further comprises a partition plate for closing the low-temperature containing chamber and the reactor.
Preferably, a crucible for reaction is arranged in the reactor.
Preferably, the vacuum adsorbent is a non-evaporable getter alloy composition.
The utility model has the beneficial effects that: the vacuum adsorbent is stored in the low-temperature accommodating cavity, during production, the vacuum adsorbent is conveyed into the reactor through the driving device, and the vacuum adsorbent is activated through high temperature in the reactor, so that the vacuum degree is quickly improved by the auxiliary vacuumizing device, and the size of the reactor can be further increased.
Drawings
FIG. 1 is a schematic view of the structure of a high-temperature vacuum reactor of the present invention.
Detailed Description
The technical solution of the present patent will be described in further detail with reference to the following embodiments.
As shown in fig. 1, a high temperature vacuum reactor of the present invention includes a hollow reactor 10. The reactor 10 is provided with a heating device 12 for heating the temperature in the reactor 10 to a temperature higher than a predetermined temperature, and a vacuum-pumping device (not shown) for evacuating the interior of the reactor 10 is connected to the outside of the reactor 10. The bottom of the reactor 10 is provided with a low-temperature receiving cavity 14 which can be communicated with the inner cavity of the reactor 10. The temperature in the low-temperature containing cavity 14 is lower than a set temperature, a plurality of vacuum adsorbents 16 are arranged in the low-temperature containing cavity 14, and the low-temperature containing cavity also comprises a conveying mechanism which can move the vacuum adsorbents 16 between the inner cavity of the reactor 10 and the low-temperature containing cavity 14. The vacuum adsorbent 16 is an adsorbent 16 that is activated only when it is at a set temperature or higher, which is usually the activation temperature of the adsorbent 16.
The low temperature receiving chamber 14 is connected to the inner cavity of the reactor 10 through a plurality of through holes 18, and may further include a partition (not shown) for closing the through holes 18 to separate the low temperature receiving chamber 14 from the reactor 10. With this structure, heat transfer from the reactor 10 into the low-temperature storage chamber 14 is reduced, and the temperature in the low-temperature storage chamber 14 is reduced to a temperature lower than a set temperature.
In the best embodiment of the utility model, the structure of the conveying mechanism is as follows: a base 20 is arranged in the low-temperature containing cavity 14, a plurality of brackets 22 which can respectively penetrate through a through hole 18 are arranged on the base 20, and a vacuum adsorbent 16 is arranged on each bracket 22; a driving means (not shown) drives the base 20 to move up and down. When the reactor works in a high-temperature reaction, the driving device (a motor, a cylinder and the like) drives the base 20 to move upwards, so that the support 22 drives the vacuum adsorbent 16 to enter the reactor 10, the vacuum adsorbent is activated under the action of high temperature in the reactor 10 to adsorb air, and the vacuum degree is improved by matching with a vacuumizing device; after the reaction is completed, the support 22 is lowered to collect the vacuum adsorbent 16 into the low-temperature containing cavity 14, so that adsorption is stopped, and waste of the vacuum adsorbent 16 is avoided.
A crucible 24 for the reaction is provided in the reactor 10, and a crucible cover 26 for closing the reactor 10 is further included.
The vacuum adsorbent 16 is a non-evaporable getter alloy composition, which is commonly used in the art, for example, the composition disclosed in patent CN 1681952B.
It will be evident to those skilled in the art that the utility model is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (6)
1. A high-temperature vacuum reactor comprises a hollow reactor, a heating device for heating the temperature in the reactor to a temperature higher than a set temperature is arranged in the reactor, and the reactor is connected with a vacuumizing device for vacuumizing the reactor, and is characterized in that: the vacuum adsorption reactor is characterized by further comprising a low-temperature containing cavity communicated with the inner cavity of the reactor, the temperature in the low-temperature containing cavity is lower than the set temperature, a plurality of vacuum adsorbents are arranged in the low-temperature containing cavity, and the vacuum adsorbents can be conveyed between the inner cavity of the reactor and the low-temperature containing cavity.
2. A high temperature vacuum reactor as claimed in claim 1, wherein: the vacuum adsorbent is an adsorbent that is activated only above the set temperature.
3. A high temperature vacuum reactor as claimed in either of claims 1 or 2, wherein: the low-temperature containing cavity is communicated with the inner cavity of the reactor through a plurality of through holes.
4. A high temperature vacuum reactor as claimed in claim 3, wherein: a base is arranged in the low-temperature accommodating cavity, a plurality of supports capable of respectively penetrating through one through hole are arranged on the base, and each support is provided with a vacuum adsorbent; and a driving device drives the base to move up and down.
5. A high temperature vacuum reactor as claimed in claim 2, wherein: and the separator plate is used for sealing the low-temperature containing cavity and the reactor.
6. A high temperature vacuum reactor as claimed in claim 1, wherein: a crucible for reaction is arranged in the reactor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121443719.4U CN216006090U (en) | 2021-06-28 | 2021-06-28 | High-temperature vacuum reactor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121443719.4U CN216006090U (en) | 2021-06-28 | 2021-06-28 | High-temperature vacuum reactor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216006090U true CN216006090U (en) | 2022-03-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121443719.4U Active CN216006090U (en) | 2021-06-28 | 2021-06-28 | High-temperature vacuum reactor |
Country Status (1)
| Country | Link |
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| CN (1) | CN216006090U (en) |
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2021
- 2021-06-28 CN CN202121443719.4U patent/CN216006090U/en active Active
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