CN215999074U - Large-current vacuum arc cathode structure device with multiple hollow cathodes - Google Patents
Large-current vacuum arc cathode structure device with multiple hollow cathodes Download PDFInfo
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- CN215999074U CN215999074U CN202121643754.0U CN202121643754U CN215999074U CN 215999074 U CN215999074 U CN 215999074U CN 202121643754 U CN202121643754 U CN 202121643754U CN 215999074 U CN215999074 U CN 215999074U
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Abstract
The utility model discloses a large-current vacuum arc cathode structure device with multiple hollow cathodes, aiming at solving the problem of short service life when a single hollow cathode bears large current. The utility model adopts a multi-hollow cathode cooperative discharge structure. The high-current vacuum arc cathode structure device with the multiple hollow cathodes is characterized by mainly comprising the following components: the vacuum pump comprises a main hollow cathode, a right hollow cathode, a left hollow cathode, an anode, a right power supply, a main power supply, a left air inlet, a main air inlet, a right air inlet, a polytetrafluoroethylene insulating sleeve, a polytetrafluoroethylene insulating plate, a vacuum pumping system, a cathode flange, a vacuum chamber, a left cathode clamp, a main cathode clamp, a right cathode clamp and the like. The hollow cathode vacuum electric arc has large total current and long service life.
Description
Technical Field
The utility model provides a large-current vacuum arc cathode structure device with multiple hollow cathodes, and relates to the technical field of application of vacuum arcs.
Background
The gas content in the vacuum environment is low, so that the preparation and processing of materials in the vacuum environment such as vacuum physical vapor deposition, vacuum welding, space welding and the like are widely researched. In a vacuum environment, the hollow cathode structure can generate a vacuum arc (namely, a hollow cathode vacuum arc) with stable and concentrated arc discharge, and is widely applied to processes such as space welding, physical vapor deposition, material fusion welding, surfacing welding, vacuum brazing and the like.
Different from TIG electric arc in a similar discharge mode under the atmospheric environment, when the hollow cathode vacuum electric arc discharges, the cathode is required to be in a hollow structure, working gas flows through the inside of the hollow cathode, and discharge is formed inside the hollow cathode and between the hollow cathode and the anode. In order to obtain stable vacuum arc discharge, the inside diameter of the cathode needs to satisfy the size requirement of overlapping negative bright regions during discharge, however, stable arc discharge cannot be obtained when the inside diameter of the cathode is increased due to burning-out of the inside diameter of the cathode. Because the cathode is of a hollow structure, the defect of short service life exists when a single cathode bears large-current arc discharge, and the industrial application of the hollow cathode vacuum arc is influenced.
SUMMERY OF THE UTILITY MODEL
Aiming at the problem of short service life when a single cathode bears a large-current arc, the utility model provides a vacuum arc cathode structure device with a multi-core cathode, which has the characteristics of small single cathode bearing current, large integral arc current and long service life.
The technical scheme adopted by the utility model for solving the problems is as follows: in order to solve the problem of short service life of a single cathode bearing large-current arc discharge, the utility model discloses a large-current vacuum arc cathode structure device with multiple hollow cathodes.
The high-current vacuum arc cathode structure device is characterized by comprising a main hollow cathode 1, a right hollow cathode 2, a left hollow cathode 3, an anode 4, a right power supply 5, a main power supply 6, a left power supply 7, left air inlet 8, main air inlet 9, right air inlet 10, a vacuum chamber electrode 11, a polytetrafluoroethylene insulating sleeve 12, a polytetrafluoroethylene insulating plate 13, a vacuum pumping system 14, a cathode flange 15, a vacuum chamber 16, a ceramic insulating sleeve 17, an inlet 18, a water outlet 19, a left cathode clamp 20, a main cathode clamp 21 and a right cathode clamp 22, wherein the cathode flange 15 penetrates through the polytetrafluoroethylene insulating sleeve 12 and the polytetrafluoroethylene insulating plate 13 through bolts to be in threaded insulation connection with the wall of the vacuum chamber 16, the left cathode clamp 20, the main cathode clamp 21 and the right cathode clamp 22 respectively penetrate through the ceramic insulating sleeve 17 through bolts to be in threaded insulation connection with the cathode flange 15, the left hollow cathode 3 is connected with the left cathode clamp 20 in an interference fit manner, the main hollow cathode 1 is connected with the main cathode clamp 21 in an interference fit manner, the right hollow cathode 2 is connected with the left cathode clamp 20 in an interference fit manner, left inlet air 8 enters the vacuum chamber 16 through the cathode flange 15, the left cathode clamp 20 and the left hollow cathode 3, main inlet air 9 enters the vacuum chamber 16 through the cathode flange 15, the main cathode clamp 21 and the main hollow cathode 1, right inlet air 10 enters the vacuum chamber 16 through the cathode flange 15, the right cathode clamp 22 and the right hollow cathode 2, an inlet port 18 and an outlet port 19 are respectively connected with the cathode flange 15 in a welding manner, the left hollow cathode 3 is connected with the negative electrode of the left power supply 7 through the vacuum chamber electrode 11, the main hollow cathode 1 is connected with the negative electrode of the main power supply 6 through the vacuum chamber electrode 11, the right hollow cathode 2 is connected with the negative electrode of the right power supply 5 through the vacuum chamber electrode 11, the anode 4 is connected with the left power supply 7, The main power supply 6 is connected with the positive pole of the right power supply 5, and the vacuum pumping system 14 is connected with the air outlet at the lower part of the right side of the vacuum chamber 16.
Furthermore, the hollow cathode 1, the right hollow cathode 2 and the left hollow cathode 3 are made of high-melting-point pure tungsten or lanthanum tungsten, and have the inner diameter of 0.5-2 mm and the outer diameter of 4-6 mm; the high-frequency generator is located inside the main power supply 6, and the positive pole and the negative pole of the high-frequency generator are respectively connected with the positive pole and the negative pole of the power supply 6, so that the high-frequency generator is automatically cut off when stable arc discharge is obtained.
Further, the total current of the left hollow cathode 3, the main hollow cathode 1 and the right hollow cathode 2 is 30A-450A.
Furthermore, the distance between the tips of the left hollow cathode 3, the main hollow cathode 1 and the right hollow cathode 2 is 10 mm-150 mm, and the included angle between the left hollow cathode 3 and the main hollow cathode 1 and the included angle between the right hollow cathode 2 and the main hollow cathode 1 are 0-30 degrees.
The utility model has the beneficial effects that: the utility model provides a large-current vacuum arc cathode structure device with multiple hollow cathodes, which solves the problem of short service life of a single cathode carrying large-current arc discharge, so that the hollow cathode vacuum arc can obtain stable large-current arc discharge, and scientific research and industrial requirements of the hollow cathode vacuum arc are met.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention.
Detailed Description
The first embodiment is as follows: referring to fig. 1, the present embodiment is described, and the present embodiment includes a main hollow cathode 1, a right hollow cathode 2, a left hollow cathode 3, an anode 4, a right power supply 5, a main power supply 6, a left power supply 7, a left air inlet 8, a main air inlet 9, a right air inlet 10, a vacuum chamber electrode 11, a teflon insulating sleeve 12, a teflon insulating plate 13, an evacuation system 14, a cathode flange 15, a vacuum chamber 16, a ceramic insulating sleeve 17, an inlet port 18, an outlet port 19, a left cathode clamp 20, a main cathode clamp 21, a right cathode clamp 22, a cathode flange 15 threaded and insulated to the wall of the vacuum chamber 16 by bolts passing through the teflon insulating sleeve 12 and the teflon insulating plate 13, the left cathode clamp 20, the main cathode clamp 21, and the right cathode clamp 22 threaded and insulated and connected to the cathode flange 15 by bolts passing through the ceramic insulating sleeve 17 respectively, the left hollow cathode 3 is connected with the left cathode clamp 20 in an interference fit manner, the main hollow cathode 1 is connected with the main cathode clamp 21 in an interference fit manner, the right hollow cathode 2 is connected with the left cathode clamp 20 in an interference fit manner, left inlet air 8 enters the vacuum chamber 16 through the cathode flange 15, the left cathode clamp 20 and the left hollow cathode 3, main inlet air 9 enters the vacuum chamber 16 through the cathode flange 15, the main cathode clamp 21 and the main hollow cathode 1, right inlet air 10 enters the vacuum chamber 16 through the cathode flange 15, the right cathode clamp 22 and the right hollow cathode 2, an inlet port 18 and an outlet port 19 are respectively connected with the cathode flange 15 in a welding manner, the left hollow cathode 3 is connected with the negative electrode of the left power supply 7 through the vacuum chamber electrode 11, the main hollow cathode 1 is connected with the negative electrode of the main power supply 6 through the vacuum chamber electrode 11, the right hollow cathode 2 is connected with the negative electrode of the right power supply 5 through the vacuum chamber electrode 11, the anode 4 is connected with the left power supply 7, The main power supply 6 is connected with the positive pole of the right power supply 5, and the vacuum pumping system 14 is connected with the air outlet at the lower part of the right side of the vacuum chamber 16.
The second embodiment is as follows: the present embodiment is described with reference to fig. 1, and the hollow cathode 1, the right hollow cathode 2 and the left hollow cathode 3 of the multi-hollow cathode large current vacuum arc cathode structure device according to the present embodiment are made of high melting point pure tungsten or lanthanum tungsten, the inner diameter is 0.5 mm-2 mm, the outer diameter is 4 mm-6 mm, the total current of the left hollow cathode 3, the main hollow cathode 1 and the right hollow cathode 2 is 30A-450A, the tip distance of the left hollow cathode 3, the main hollow cathode 1 and the right hollow cathode 2 is 80 mm-150 mm, and the included angle between the left hollow cathode 3 and the right hollow cathode 2 and the main hollow cathode 1 is 0-30 °. Other components and connections are the same as those in the first embodiment.
Principle of operation
The working process of the utility model is as follows:
firstly, pumping out air in a vacuum chamber 16 through a vacuum pumping system 14, wherein the air pressure in the vacuum chamber is less than or equal to 10 Pa;
injecting left inlet air 8, main inlet air 9 and right inlet air 10 into the left hollow cathode 3, the main hollow cathode 1 and the right hollow cathode 2 respectively, generating high-frequency glow discharge between the main hollow cathode 1 and the anode 4 under the action of a high-frequency generator of a main power supply 6, enabling high-frequency glow plasma to stably exist between the tip of the main hollow cathode 1 and the anode 4, rapidly heating the main hollow cathode 1 to a thermionic emission temperature, rapidly igniting the vacuum arc of the main hollow cathode 1 in a high-frequency mode, and simultaneously heating the left hollow cathode 3 and the right hollow cathode 2 to ignite the arc;
and step four, obtaining arc plasmas with different characteristics by adjusting the currents of the right power supply 5, the main power supply 6 and the left power supply 7.
Although the present invention has been described with reference to a preferred embodiment, it should be understood that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the utility model as defined by the appended claims.
Claims (3)
1. The utility model provides a heavy current vacuum arc cathode structure device of many hollow cathodes which characterized in that: the high-current vacuum arc cathode structure device with the multiple hollow cathodes comprises a main hollow cathode (1), a right hollow cathode (2), a left hollow cathode (3), an anode (4), a right power supply (5), a main power supply (6), a left power supply (7), a left air inlet (8), a main air inlet (9), a right air inlet (10), a vacuum chamber passing electrode (11), a polytetrafluoroethylene insulating sleeve (12), a polytetrafluoroethylene insulating plate (13), a vacuumizing system (14), a cathode flange (15), a vacuum chamber (16), a ceramic insulating sleeve (17), an inlet (18), a water outlet (19), a left cathode clamp (20), a main cathode clamp (21) and a right cathode clamp (22), wherein the cathode flange (15) penetrates through the polytetrafluoroethylene insulating sleeve (12) and the polytetrafluoroethylene insulating plate (13) through bolts and is connected to the wall of the vacuum chamber (16) in a threaded insulating manner, a left cathode clamp (20), a main cathode clamp (21) and a right cathode clamp (22) respectively penetrate through a ceramic insulating sleeve (17) through bolts and are connected to a cathode flange (15) in a threaded insulating manner, a left hollow cathode (3) is connected with the left cathode clamp (20) in an interference fit manner, a main hollow cathode (1) is connected with the main cathode clamp (21) in an interference fit manner, a right hollow cathode (2) is connected with the left cathode clamp (20) in an interference fit manner, a left air inlet (8) enters a vacuum chamber (16) through the cathode flange (15), the left cathode clamp (20) and the left hollow cathode (3), a main air inlet (9) enters the vacuum chamber (16) through the cathode flange (15), the main cathode clamp (21) and the main hollow cathode (1), a right air inlet (10) enters the vacuum chamber (16) through the cathode flange (15), the right cathode clamp (22) and the right hollow cathode (2), an inlet (18) and an outlet (19) are respectively connected with the cathode flange (15) in a welding manner, the left hollow cathode (3) is connected with the negative electrode of a left power supply (7) through a vacuum chamber electrode (11), the main hollow cathode (1) is connected with the negative electrode of a main power supply (6) through the vacuum chamber electrode (11), the right hollow cathode (2) is connected with the negative electrode of a right power supply (5) through the vacuum chamber electrode (11), the anode (4) is connected with the positive electrodes of the left power supply (7), the main power supply (6) and the right power supply (5), and the vacuumizing system (14) is connected with an air outlet at the lower part of the right side of the vacuum chamber (16).
2. A high current vacuum arc cathode structure device with multiple hollow cathodes as claimed in claim 1, characterized in that the total current of the left hollow cathode (3), the main hollow cathode (1) and the right hollow cathode (2) is 30A-450A.
3. A high-current vacuum arc cathode structure device with multiple hollow cathodes as claimed in claim 1, wherein the distance between the tips of the left hollow cathode (3), the main hollow cathode (1) and the right hollow cathode (2) is 10 mm-150 mm; the left hollow cathode (3) and the right hollow cathode (2) respectively form an included angle of 0-30 degrees with the main hollow cathode (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121643754.0U CN215999074U (en) | 2021-07-19 | 2021-07-19 | Large-current vacuum arc cathode structure device with multiple hollow cathodes |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121643754.0U CN215999074U (en) | 2021-07-19 | 2021-07-19 | Large-current vacuum arc cathode structure device with multiple hollow cathodes |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215999074U true CN215999074U (en) | 2022-03-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121643754.0U Active CN215999074U (en) | 2021-07-19 | 2021-07-19 | Large-current vacuum arc cathode structure device with multiple hollow cathodes |
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| Country | Link |
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| CN (1) | CN215999074U (en) |
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2021
- 2021-07-19 CN CN202121643754.0U patent/CN215999074U/en active Active
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