CN215997704U - Operation panel cleaning device for semiconductor processing - Google Patents
Operation panel cleaning device for semiconductor processing Download PDFInfo
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- CN215997704U CN215997704U CN202121692486.1U CN202121692486U CN215997704U CN 215997704 U CN215997704 U CN 215997704U CN 202121692486 U CN202121692486 U CN 202121692486U CN 215997704 U CN215997704 U CN 215997704U
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- operating platform
- cleaning mechanism
- cleaning
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Abstract
The utility model discloses a cleaning device for an operating platform for semiconductor processing, which is characterized by comprising a cleaning mechanism, wherein the cleaning mechanism comprises a semi-cylindrical shell, two ends of the shell are respectively provided with a base, the base is rotatably connected with a rotating shaft through a bearing with a seat, the outer side of the rotating shaft is provided with a rolling brush, and the rolling brush faces to an operating platform; one side of the shell is provided with a plurality of through holes, the through holes are connected with a negative pressure main pipe through a hose, and the other end of the negative pressure main pipe is connected with a dust suction device. According to the utility model, the cleaning mechanism is arranged on the operating platform for packaging, the rolling brush of the cleaning mechanism cleans the surface of the operating platform, and impurities such as cleaned dust enter the negative pressure main pipe through the plurality of through holes on the shell body through the plurality of hoses and then enter the dust collection equipment through the negative pressure main pipe, so that the impurities such as dust on the operating platform are reduced, and the quality of packaged products is ensured.
Description
Technical Field
The utility model relates to the technical field of semiconductor equipment, in particular to a cleaning device for an operating table for semiconductor processing.
Background
The semiconductor packaging refers to a process of processing a wafer passing a test according to a product model and a functional requirement to obtain an independent chip, a CPU and other ultra-large integrated circuits are continuously developed, a packaging form of the integrated circuit is continuously adjusted and changed correspondingly, and the progress of the packaging form will in turn promote the forward development of a chip technology. In the semiconductor packaging process, the requirements on the environment and the operation platform are high, and impurities remaining on the operation platform may affect the packaging effect, thereby possibly affecting the quality of products.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a cleaning device for a semiconductor processing operating table, aiming at the defects and shortcomings of the prior art.
In order to achieve the purpose, the utility model adopts the technical scheme that: a cleaning device for an operating platform for semiconductor processing is mounted on the operating platform and used for cleaning the upper surface of the operating platform, and is characterized by comprising a cleaning mechanism, wherein the cleaning mechanism comprises a semi-cylindrical shell, two ends of the shell are respectively provided with a base, the base is rotatably connected with a rotating shaft through a bearing with a seat, a rolling brush is arranged outside the rotating shaft, and the rolling brush faces the operating platform; one side of the shell is provided with a plurality of through holes, the through holes are connected with a negative pressure main pipe through a hose, and the other end of the negative pressure main pipe is connected with a dust suction device.
Furthermore, a translation mechanism is arranged below the cleaning mechanism and drives the whole cleaning mechanism to move back and forth.
Preferably, the translation mechanism comprises two slide rails arranged on two sides of the operating platform, a transverse mounting plate used for mounting the cleaning mechanism, and two slide blocks arranged on two sides below the transverse mounting plate.
The transverse mounting plate is arranged on the lower portion of the base, and the transverse mounting plate is arranged on the base.
Preferably, the transverse mounting plate is further provided with a driving motor, an output shaft of the driving motor is fixedly provided with a driving belt wheel, the driving belt wheel is connected with a driven belt wheel through a belt, and the driven belt wheel is fixedly arranged on the rotating shaft.
Further, the rolling brush is provided with bristles which are spirally arranged.
Further, the hose at least comprises a telescopic corrugated hose.
Furthermore, a control device is further arranged below the operating platform, the control device is electrically connected with the driving motor, the power mechanism and the dust collection equipment, and a button used for controlling the driving motor, the power mechanism and the dust collection equipment to start and stop in working is arranged on the control device.
After adopting the structure, the utility model has the beneficial effects that:
the cleaning mechanism is arranged on the operating platform for packaging, the rolling brush of the cleaning mechanism cleans the surface of the operating platform, and impurities such as cleaned dust enter the negative pressure main pipe through the through holes on the shell, the dust enters the dust collection equipment through the negative pressure main pipe, so that the impurities such as the dust on the operating platform are reduced, and the quality of packaged products is ensured.
Drawings
FIG. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a schematic top view of the present invention.
Description of reference numerals: 1. an operating platform; 2. a housing; 3. rolling and brushing; 4. a rotating shaft; 5. a hose; 6. a dust collection device; 7. a slider; 8. a slide rail; 9. a fixed block; 10. a power mechanism; 11. a drive motor; 12. a driving pulley; 13. a belt; 14. a driven pulley; 15. and (7) transversely mounting the plate.
Detailed Description
The utility model will be further described with reference to the accompanying drawings.
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in detail with reference to the accompanying drawings and the detailed description. It should be understood that the detailed description and specific examples, while indicating the utility model, are intended for purposes of illustration only and are not intended to limit the scope of the utility model.
Referring to fig. 1, the cleaning device for the operating platform for semiconductor processing is mounted on an operating platform 1 and used for cleaning the upper surface of the operating platform 1, and comprises a cleaning mechanism, wherein the cleaning mechanism comprises a semi-cylindrical shell 2, two ends of the shell 2 are respectively provided with a base, the base is rotatably connected with a rotating shaft 4 through a bearing with a base, a rolling brush 3 is arranged outside the rotating shaft 4, and the rolling brush 3 faces the operating platform 1; one side of the shell 2 is provided with a plurality of through holes, the through holes are connected with a negative pressure main pipe through a hose 5, the other end of the negative pressure main pipe is connected with a dust collecting device 6, and the dust collecting device 6 can be an industrial dust collector and the like. According to the utility model, the cleaning mechanism is arranged on the operating platform 1 for packaging, the rolling brush 3 of the cleaning mechanism cleans the surface of the operating platform 1, and impurities such as cleaned dust enter the negative pressure main pipe through the plurality of through holes on the shell 2 through the plurality of hoses 5 and then enter the dust collection equipment 6 through the negative pressure main pipe, so that the impurities such as dust on the operating platform are reduced, and the quality of packaged products is ensured.
In a further embodiment of the utility model, a translation mechanism is arranged below the cleaning mechanism, and the translation mechanism drives the whole cleaning mechanism to move back and forth. Preferably, the translation mechanism comprises two slide rails 8 arranged on two sides of the operating platform 1, a transverse mounting plate 15 for mounting the cleaning mechanism, and two slide blocks 7 arranged on two sides below the transverse mounting plate 15. The slider 7 is matched with the slide rail 8, so that the structure is simple and the use is convenient. The transverse mounting plate 15 is provided with a fixed block 9, the fixed block 9 is connected with a power mechanism 10 for driving the whole cleaning mechanism to move, the power mechanism 10 can be a hydraulic telescopic rod or an electric telescopic rod, and the power mechanism 10 drives the transverse mounting plate 15 and the cleaning mechanism mounted on the transverse mounting plate 15 to move back and forth.
Preferably, a driving motor 11 is further arranged on the transverse mounting plate 15, a driving pulley 12 is fixedly arranged on an output shaft of the driving motor 11, the driving pulley 12 is connected with a driven pulley 14 through a belt 13, and the driven pulley 14 is fixedly arranged on the rotating shaft 4. In this embodiment, the driving motor 11 drives the driving pulley 12 to rotate, the driving pulley 12 drives the driven pulley 14 through the transmission belt 13, and the driven pulley 14 drives the rotation shaft 4 to rotate, so as to drive the whole rolling brush 3 to automatically roll for cleaning.
In a further embodiment of the utility model, the roller brush 3 is provided with helically arranged bristles, which, in use, will more easily carry impurities into the housing 2 and thus into the hose 5 from the through hole.
In a further embodiment of the utility model, said hose 5 comprises at least one length of flexible corrugated hose 5, which can be extended or shortened according to the length requirement.
In a further embodiment of the present invention, a control device is further disposed below the console, the control device is electrically connected to the driving motor 11, the power mechanism 10 and the dust collecting device 6, and the control device is provided with a button for controlling the start and stop of the operation of the driving motor 11, the power mechanism 10 and the dust collecting device 6.
The above description is only for the purpose of illustrating the technical solutions of the present invention and not for the purpose of limiting the same, and other modifications or equivalent substitutions made by those skilled in the art to the technical solutions of the present invention should be covered within the scope of the claims of the present invention without departing from the spirit and scope of the technical solutions of the present invention.
Claims (6)
1. A cleaning device for an operating platform for semiconductor processing is mounted on the operating platform and used for cleaning the upper surface of the operating platform, and is characterized by comprising a cleaning mechanism, wherein the cleaning mechanism comprises a semi-cylindrical shell, two ends of the shell are respectively provided with a base, the base is rotatably connected with a rotating shaft through a bearing with a seat, a rolling brush is arranged outside the rotating shaft, and the rolling brush faces the operating platform; one side of the shell is provided with a plurality of through holes, the through holes are connected with a negative pressure main pipe through a hose, and the other end of the negative pressure main pipe is connected with a dust suction device.
2. The apparatus as claimed in claim 1, wherein a translation mechanism is provided under the cleaning mechanism, and the translation mechanism drives the whole cleaning mechanism to move back and forth.
3. The apparatus of claim 2, wherein the translation mechanism comprises two slide rails disposed at two sides of the operation platform, a transverse mounting plate for mounting the cleaning mechanism, and two slide blocks disposed at two sides below the transverse mounting plate.
4. The apparatus as claimed in claim 3, wherein a fixed block is disposed below the horizontal mounting plate, and a power mechanism for driving the whole cleaning mechanism to move is connected to the fixed block.
5. The semiconductor processing operating table cleaning device according to claim 3, wherein the transverse mounting plate is further provided with a driving motor, an output shaft of the driving motor is fixedly provided with a driving pulley, the driving pulley is connected with a driven pulley through a belt, and the driven pulley is fixedly arranged on the rotating shaft.
6. The semiconductor processing station cleaning apparatus according to claim 1, wherein the roller brush is provided with bristles arranged spirally.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121692486.1U CN215997704U (en) | 2021-07-24 | 2021-07-24 | Operation panel cleaning device for semiconductor processing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121692486.1U CN215997704U (en) | 2021-07-24 | 2021-07-24 | Operation panel cleaning device for semiconductor processing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215997704U true CN215997704U (en) | 2022-03-11 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121692486.1U Active CN215997704U (en) | 2021-07-24 | 2021-07-24 | Operation panel cleaning device for semiconductor processing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215997704U (en) |
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2021
- 2021-07-24 CN CN202121692486.1U patent/CN215997704U/en active Active
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