CN215974956U - Hydrogen treatment system in polycrystalline silicon production - Google Patents
Hydrogen treatment system in polycrystalline silicon production Download PDFInfo
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- CN215974956U CN215974956U CN202122508993.1U CN202122508993U CN215974956U CN 215974956 U CN215974956 U CN 215974956U CN 202122508993 U CN202122508993 U CN 202122508993U CN 215974956 U CN215974956 U CN 215974956U
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Abstract
The utility model discloses a hydrogen treatment system in polysilicon production, which belongs to the technical field of hydrogen production and comprises three active carbon adsorption towers and a resin adsorption tower, wherein each active carbon adsorption tower comprises a first adsorption tower body and active carbon, the first adsorption tower body is sleeved with a first heat exchange pipe sleeve, the lower end of the first heat exchange pipe sleeve is connected with a hot fluid inlet pipe and/or a cold fluid inlet pipe, the upper end of the first heat exchange pipe sleeve is connected with a hot fluid outlet pipe and/or a cold fluid outlet pipe, the first adsorption tower body is provided with a first air inlet, a first air outlet and a first air inlet and outlet, the first air inlet is connected with a raw material gas inlet pipe, the first air inlet and outlet is connected with a hot hydrogen inlet pipe, a first hydrogen branch pipe and a second hydrogen branch pipe, the first air outlet is connected with a hot hydrogen outlet pipe, the resin adsorption tower comprises a second adsorption tower body and resin, the lower end of the second adsorption tower body is provided with a second air inlet and a second air outlet, the second air inlet is connected with the first hydrogen branch pipe, and the second air outlet is connected with the product outlet pipe.
Description
Technical Field
The utility model relates to the technical field of hydrogen production, in particular to a hydrogen treatment system in polycrystalline silicon production.
Background
Improved Siemens Process Tail gas recovery section, H2Purifying by activated carbon adsorption to obtain high-purity product H2For reducing SiHCl3And preparing polycrystalline silicon. Currently, activated carbon adsorption columns are performed in a manner that a plurality of sets of adsorption towers are connected in parallel, as shown in fig. 2. Each set of adsorption column is circulated for one period according to three steps of adsorption, heating regeneration and cooling.
For the a column (other columns are identical in principle):
stage 1 adsorption: the raw material H2 firstly enters the A column from the bottom, the adsorption operation is started, the purified H2 is discharged from the top of the A column, and the obtained product H2 is sent to the reduction section. After the column A adsorbs a period of time theta 1, the adsorption of impurities by the activated carbon in the column A reaches saturation, the column A no longer has adsorption capacity, and the raw material H2 is switched to enter the cooled column B for adsorption.
Stage 2 regeneration: and in the regeneration stage, high-temperature fluid is introduced into the inner coil pipe and the outer jacket pipe of the column A, and simultaneously, a small amount of heat H2 is blown back from the top to carry impurities desorbed from the activated carbon out of the column A. After the column A is heated and regenerated for a period of time theta 2, the activated carbon in the column A is completely regenerated, and the column A enters a third stage, namely cooling.
TABLE 1
| Time | A | B | C |
| θ1 | Adsorption | Cooling down | Heating regeneration |
| θ2 | Heating regeneration | Adsorption | Cooling down |
| θ3 | Cooling down | Heating regeneration | Adsorption |
The prior art mainly has the following problems: the carbon content in hydrogen (about 10ppm of CH4 and CO 2) cannot be completely adsorbed by the activated carbon adsorption column. The metal impurity content of the hydrogen after adsorption on activated carbon was about 15 ppb.
Disclosure of Invention
The utility model aims to solve the problems in the prior art and provides a hydrogen treatment system in polysilicon production, wherein raw material hydrogen is subjected to first adsorption through an activated carbon adsorption tower and then subjected to secondary adsorption through a resin adsorption tower, and the system has a good adsorption effect.
The purpose of the utility model is realized by the following technical scheme:
a hydrogen processing system in polycrystalline silicon production is characterized in that: the adsorption tower comprises three activated carbon adsorption towers and a resin adsorption tower, wherein each activated carbon adsorption tower comprises a first adsorption tower body and activated carbon arranged in the first adsorption tower body, the first adsorption tower body is sleeved with a first heat exchange pipe sleeve, the lower end of the first heat exchange pipe sleeve is connected with a hot fluid inlet pipe and/or a cold fluid inlet pipe, the upper end of the first heat exchange pipe sleeve is connected with a hot fluid outlet pipe and/or a cold fluid outlet pipe, the first adsorption tower body is provided with a first air inlet, a first air outlet and a first air inlet and outlet, the first air inlet is connected with a raw material gas inlet pipe, the first air inlet and outlet is connected with a hot hydrogen inlet pipe, a first hydrogen branch pipe and a second hydrogen branch pipe, the first air outlet is connected with the hot hydrogen outlet pipe, the resin adsorption tower comprises a second adsorption tower body and resin arranged in the second adsorption tower body, the lower end of the second adsorption tower body is provided with a second air inlet and a second air outlet, the second air inlet is connected with the first hydrogen branch pipe, and the second air outlet is connected with the product outlet pipe.
Preferably, two distributors are arranged in the second adsorption tower body, the distributor arranged at the upper end is connected with the second air outlet, and the distributor arranged at the lower end is connected with the second air inlet.
Preferably, the second adsorption tower body comprises a cylinder and two seal heads, and two ends of the cylinder are connected with the seal heads through flanges and bolts.
Preferably, the upper side and the lower side of the cylinder body are both provided with temperature inserting pipes.
Preferably, the upper end of the cylinder body is provided with a safety valve interface and a pressure transmitter interface.
Preferably, the safety valve port and the pressure transmitter port are both provided with filter screens.
Preferably, the upper end socket is provided with an upper guide sprinkling port, and the lower end socket is provided with a lower guide sprinkling port.
Preferably, an inner heat exchange component is further arranged inside the first adsorption tower body, a second heat exchange pipe sleeve is sleeved outside the inner heat exchange component, the lower end of the second heat exchange pipe sleeve is connected with a hot fluid inlet pipe and/or a cold fluid inlet pipe, and the upper end of the second heat exchange pipe sleeve is connected with a hot fluid outlet pipe and/or a cold fluid outlet pipe.
Preferably, the lower end of the inner heat exchange part is connected with a hot fluid inlet pipe and/or a cold fluid inlet pipe, and the side wall of the inner heat exchange part is connected with a hot fluid outlet pipe and/or a cold fluid outlet pipe.
Preferably, a drain valve and a first flow regulating valve are arranged on the first hydrogen branch pipe, a second flow regulating valve is arranged on the hot hydrogen outlet pipe, and a third flow regulating valve is arranged on the hot hydrogen inlet pipe.
The working principle is as follows: raw material hydrogen enters the A activated carbon adsorption tower through a feed gas inlet pipe, the activated carbon starts to adsorb impurities in the hydrogen, the purified hydrogen is discharged from the top of the A activated carbon adsorption tower and then enters the resin adsorption tower through a first hydrogen branch pipe, the resin further starts to adsorb the impurities in the hydrogen, the purified hydrogen is discharged from the top of the resin adsorption tower, and the obtained product hydrogen is sent to a reduction working section. After adsorbing for a period of time, the resin is saturated and no longer has adsorption capacity, the adsorption is stopped, the desorption is started, the temperature is reduced after the desorption is finished, and the adsorption is continued after the temperature is reduced to the normal temperature. And after the adsorption of the active carbon adsorption tower A is finished, the heating regeneration stage is carried out, at the moment, hot fluid is introduced into the inner heat exchange part and the first heat exchange pipe sleeve on the active carbon adsorption tower A, and meanwhile, a small amount of hot hydrogen is back-blown from the top of the active carbon adsorption tower to take the impurities desorbed from the active carbon out of the active carbon adsorption tower A. And (3) after the activated carbon adsorption tower A is heated and regenerated for a period of time theta 2, completely regenerating the activated carbon in the activated carbon adsorption tower A, and starting to enter a third stage, namely cooling. And the fluid of the inner heat exchange part on the active carbon adsorption tower A and the fluid of the first heat exchange pipe sleeve are switched back to cold fluid from hot fluid, and meanwhile, a small amount of product hydrogen is back blown from the top of the active carbon adsorption tower (the active carbon adsorption tower B is ejected out) to enhance the cooling effect. After cooling for a period of time theta 3, the activated carbon in the activated carbon adsorption tower A is completely cooled, and the adsorption operation can be carried out circularly; the active carbon adsorption tower B and the active carbon adsorption tower C are also the same steps. The utility model has good adsorption effect.
The beneficial effects of this technical scheme are as follows:
according to the hydrogen treatment system in the production of polycrystalline silicon, provided by the utility model, the raw material hydrogen is subjected to first adsorption through the activated carbon adsorption tower and then subjected to secondary adsorption through the resin adsorption tower, and by adopting the system, the carbon content in the hydrogen can be reduced to 2ppm, and the metal impurities in the hydrogen can be reduced to 8 PPb.
Secondly, the hydrogen treatment system in the polysilicon production provided by the utility model has the advantage that the arrangement of the distributor enables the adsorption effect of the resin adsorption tower to be better.
Thirdly, the temperature of the upper end and the lower end of the resin adsorption tower can be conveniently observed due to the arrangement of the temperature inserting pipe in the hydrogen treatment system in the polysilicon production.
According to the hydrogen treatment system in the polysilicon production, the pressure transmitter is arranged to facilitate observation of the pressure of the resin adsorption tower, and the safety valve is arranged to prevent the resin adsorption tower from being damaged due to differential pressure.
According to the hydrogen treatment system in the production of polycrystalline silicon, the arrangement of the internal heat exchange component enables the heating regeneration speed and the cooling speed of the activated carbon in the activated carbon adsorption tower to be higher.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a flow chart of the prior art;
FIG. 3 is a schematic view showing the structure of a resin adsorption column in the present invention;
FIG. 4 is a schematic view of the structure of an activated carbon adsorption tower according to the present invention;
wherein: 1. an activated carbon adsorption tower; 1.1, a first adsorption tower body; 1.2, a first heat exchange pipe sleeve; 1.3, a first air inlet; 1.4, a first air outlet; 1.5, a first air inlet and outlet; 1.6, an internal heat exchange component; 1.7, a second heat exchange pipe sleeve; 2. a resin adsorption tower; 2.1, a second adsorption tower body; 2.2, a second air inlet; 2.3, a second air outlet; 2.4, a distributor; 2.5, a cylinder body; 2.6, sealing the head; 2.7, inserting a temperature cannula; 2.8, a safety valve interface; 2.9, a pressure transmitter port; 2.10, a filter screen; 2.11, leading a shower opening; 2.12, a lower guide shower opening; 3. a hot fluid inlet pipe; 4. a cold fluid inlet pipe; 5. a hot fluid outlet pipe; 6. a cold fluid outlet pipe; 7. feeding raw material gas into a pipe; 8. a hot hydrogen inlet pipe; 8.1, a third flow regulating valve; 9. a first hydrogen branch pipe; 9.1, a drain valve; 9.2, a first flow regulating valve; 10. a second hydrogen branch pipe; 11. a hot hydrogen gas outlet pipe; 11.1, a second flow regulating valve; 12. and (4) discharging a product pipe.
Detailed Description
The present invention will be described in further detail with reference to examples, but the embodiments of the present invention are not limited thereto.
Example 1
As a most basic embodiment of the present invention, the present embodiment discloses a hydrogen treatment system in polysilicon production, as shown in fig. 1, fig. 3 and fig. 4, the system comprises three activated carbon adsorption towers 1 and one resin adsorption tower 2, the activated carbon adsorption tower 1 comprises a first adsorption tower body 1.1 and activated carbon arranged in the first adsorption tower body 1.1, the first adsorption tower body 1.1 is sleeved with a first heat exchange pipe sleeve 1.2, the lower end of the first heat exchange pipe sleeve 1.2 is connected with a hot fluid inlet pipe 3 and/or a cold fluid inlet pipe 4, the upper end of the first heat exchange pipe sleeve 1.2 is connected with a hot fluid outlet pipe 5 and/or a cold fluid outlet pipe 6, the first adsorption tower body 1.1 is provided with a first gas inlet 1.3, a first gas outlet 1.4 and a first gas inlet 1.5, the first gas inlet 1.3 is connected with a feed gas inlet pipe, the first gas inlet 1.5 is connected with a hot hydrogen inlet pipe 8, and a resin adsorption tower 2 is arranged in the first adsorption tower body 1.1.1, First hydrogen branch pipe 9 links to each other with second hydrogen branch pipe 10, first gas outlet 1.4 links to each other with hot hydrogen exit tube 11, resin adsorption tower 2 includes second adsorption tower body 2.1 and sets up the resin in second adsorption tower body 2.1, second adsorption tower body 2.1 lower extreme is provided with second air inlet 2.2 and second gas outlet 2.3, second air inlet 2.2 links to each other with first hydrogen branch pipe 9, second gas outlet 2.3 links to each other with product exit tube 12, and hot-fluid advances pipe 3, cold fluid and advances pipe 4, hot-fluid exit tube 5, cold-fluid exit tube 6, feed gas and advances pipe 7, hot hydrogen and advances to advance and all be provided with the trip valve on pipe 8, first hydrogen branch pipe 9, second hydrogen branch pipe 10, hot hydrogen exit tube 11 and the product exit tube 12.
Example 2
As a preferred embodiment of the present invention, the present embodiment discloses a hydrogen treatment system in polysilicon production, as shown in fig. 1, fig. 3 and fig. 4, the system comprises three activated carbon adsorption towers 1 and one resin adsorption tower 2, the activated carbon adsorption tower 1 comprises a first adsorption tower body 1.1 and activated carbon arranged in the first adsorption tower body 1.1, the first adsorption tower body 1.1 is sleeved with a first heat exchange pipe sleeve 1.2, the lower end of the first heat exchange pipe sleeve 1.2 is connected to a hot fluid inlet pipe 3 and/or a cold fluid inlet pipe 4, the upper end of the first heat exchange pipe sleeve 1.2 is connected to a hot fluid outlet pipe 5 and/or a cold fluid outlet pipe 6, the first adsorption tower body 1.1 is provided with a first gas inlet 1.3, a first gas outlet 1.4 and a first gas inlet 1.5, the first gas inlet 1.3 is connected to a feed gas inlet pipe, the first gas inlet 1.5 is connected to a hot hydrogen inlet pipe 8, and a resin adsorption tower 2 is arranged in the first adsorption tower body 1.1.1.1, First hydrogen branch pipe 9 links to each other with second hydrogen branch pipe 10, first gas outlet 1.4 links to each other with hot hydrogen exit tube 11, resin adsorption tower 2 includes second adsorption tower body 2.1 and sets up the resin in second adsorption tower body 2.1, second adsorption tower body 2.1 lower extreme is provided with second air inlet 2.2 and second gas outlet 2.3, second air inlet 2.2 links to each other with first hydrogen branch pipe 9, second gas outlet 2.3 links to each other with product exit tube 12, and hot-fluid advances pipe 3, cold fluid and advances pipe 4, hot-fluid exit tube 5, cold-fluid exit tube 6, feed gas and advances pipe 7, hot hydrogen and advances to advance and all be provided with the trip valve on pipe 8, first hydrogen branch pipe 9, second hydrogen branch pipe 10, hot hydrogen exit tube 11 and the product exit tube 12.
Preferably, two distributors 2.4 are arranged in the second adsorption tower body 2.1, the distributor 2.4 arranged at the upper end is connected with the second air outlet 2.3, and the distributor 2.4 arranged at the lower end is connected with the second air inlet 2.2.
Preferably, the second adsorption tower body 2.1 comprises a cylinder 2.5 and two seal heads 2.6, and two ends of the cylinder 2.5 are connected with the seal heads 2.6 through flanges and bolts.
Preferably, temperature inserting pipes 2.7 are arranged on the upper side and the lower side of the cylinder 2.5, and temperature sensors are arranged in the temperature inserting pipes 2.7.
Preferably, the upper end of the cylinder 2.5 is provided with a safety valve interface 2.8 and a pressure transmitter port 2.9, and the safety valve interface 2.8 is connected with an A42Y-25R safety valve.
Preferably, the safety valve port 2.8 and the pressure transmitter port 2.9 are both provided with a filter screen 2.10.
Preferably, an upper guide sprinkling port 2.11 is arranged on the end enclosure 2.6 at the upper end, and a lower guide sprinkling port 2.12 is arranged on the end enclosure 2.6 at the lower end.
Example 3
As a preferred embodiment of the present invention, the present embodiment discloses a hydrogen treatment system in polysilicon production, as shown in fig. 1, fig. 3 and fig. 4, the system comprises three activated carbon adsorption towers 1 and one resin adsorption tower 2, the activated carbon adsorption tower 1 comprises a first adsorption tower body 1.1 and activated carbon arranged in the first adsorption tower body 1.1, the first adsorption tower body 1.1 is sleeved with a first heat exchange pipe sleeve 1.2, the lower end of the first heat exchange pipe sleeve 1.2 is connected to a hot fluid inlet pipe 3 and/or a cold fluid inlet pipe 4, the upper end of the first heat exchange pipe sleeve 1.2 is connected to a hot fluid outlet pipe 5 and/or a cold fluid outlet pipe 6, the first adsorption tower body 1.1 is provided with a first gas inlet 1.3, a first gas outlet 1.4 and a first gas inlet 1.5, the first gas inlet 1.3 is connected to a feed gas inlet pipe, the first gas inlet 1.5 is connected to a hot hydrogen inlet pipe 8, and a resin adsorption tower 2 is arranged in the first adsorption tower body 1.1.1.1, First hydrogen branch pipe 9 links to each other with second hydrogen branch pipe 10, first gas outlet 1.4 links to each other with hot hydrogen exit tube 11, resin adsorption tower 2 includes second adsorption tower body 2.1 and sets up the resin in second adsorption tower body 2.1, second adsorption tower body 2.1 lower extreme is provided with second air inlet 2.2 and second gas outlet 2.3, second air inlet 2.2 links to each other with first hydrogen branch pipe 9, second gas outlet 2.3 links to each other with product exit tube 12, and hot-fluid advances pipe 3, cold fluid and advances pipe 4, hot-fluid exit tube 5, cold-fluid exit tube 6, feed gas and advances pipe 7, hot hydrogen and advances to advance and all be provided with the trip valve on pipe 8, first hydrogen branch pipe 9, second hydrogen branch pipe 10, hot hydrogen exit tube 11 and the product exit tube 12.
Preferably, two distributors 2.4 are arranged in the second adsorption tower body 2.1, the distributor 2.4 arranged at the upper end is connected with the second air outlet 2.3, and the distributor 2.4 arranged at the lower end is connected with the second air inlet 2.2.
Preferably, the second adsorption tower body 2.1 comprises a cylinder 2.5 and two seal heads 2.6, and two ends of the cylinder 2.5 are connected with the seal heads 2.6 through flanges and bolts.
Preferably, temperature inserting pipes 2.7 are arranged on the upper side and the lower side of the cylinder 2.5, and temperature sensors are arranged in the temperature inserting pipes 2.7.
Preferably, the upper end of the cylinder 2.5 is provided with a safety valve interface 2.8 and a pressure transmitter port 2.9, and the safety valve interface 2.8 is connected with an A42Y-25R safety valve.
Preferably, the safety valve port 2.8 and the pressure transmitter port 2.9 are both provided with a filter screen 2.10.
Preferably, an upper guide sprinkling port 2.11 is arranged on the end enclosure 2.6 at the upper end, and a lower guide sprinkling port 2.12 is arranged on the end enclosure 2.6 at the lower end.
Preferably, an inner heat exchange component 1.6 is further arranged inside the first adsorption tower body 1.1, a second heat exchange pipe sleeve 1.7 is sleeved outside the inner heat exchange component 1.6, the lower end of the second heat exchange pipe sleeve 1.7 is connected with a hot fluid inlet pipe 3 and/or a cold fluid inlet pipe 4, and the upper end of the second heat exchange pipe sleeve 1.7 is connected with a hot fluid outlet pipe 5 and/or a cold fluid outlet pipe 6.
Preferably, the lower end of the inner heat exchange part is connected with a hot fluid inlet pipe 3 and/or a cold fluid inlet pipe 4, and the side wall of the inner heat exchange part 1.6 is connected with a hot fluid outlet pipe 5 and/or a cold fluid outlet pipe 6.
Preferably, a drain valve 9.1 and a first flow regulating valve 9.2 are arranged on the first hydrogen branch pipe 9, a second flow regulating valve 11.1 is arranged on the hot hydrogen outlet pipe 11, and a third flow regulating valve 8.1 is arranged on the hot hydrogen inlet pipe 8.
The working principle is as follows: raw material hydrogen enters the A activated carbon adsorption tower 1 through a raw material gas inlet pipe 7, the activated carbon starts to adsorb impurities in the hydrogen, the purified hydrogen is discharged from the top of the A activated carbon adsorption tower 1 and then enters the resin adsorption tower 2 through a first hydrogen branch pipe 9, the resin further starts to adsorb the impurities in the hydrogen, the purified hydrogen is discharged from the top of the resin adsorption tower 2, and the obtained product hydrogen is sent to a reduction working section. After adsorbing for a period of time, the resin is saturated and no longer has adsorption capacity, the adsorption is stopped, the desorption is started, the temperature is reduced after the desorption is finished, and the adsorption is continued after the temperature is reduced to the normal temperature. And after the adsorption of the active carbon adsorption tower A1 is finished, a heating regeneration stage is carried out, at the moment, hot fluid is introduced into the inner heat exchange part 1.6 and the first heat exchange pipe sleeve 1.2 on the active carbon adsorption tower A1, and meanwhile, a small amount of hot hydrogen is blown back from the top of the active carbon adsorption tower 1 to take impurities desorbed from the active carbon out of the active carbon adsorption tower A1. After the activated carbon adsorption tower 1A is heated and regenerated for a period of time theta 2, all the activated carbon in the activated carbon adsorption tower 1A is regenerated, and the third stage, namely cooling, is started. The fluid of the inner heat exchange part 1.6 and the first heat exchange pipe sleeve 1.2 on the active carbon adsorption tower 1A is switched back to cold fluid from hot fluid, and simultaneously, a small amount of product hydrogen is back blown from the top of the active carbon adsorption tower 1 (the active carbon adsorption tower 1B is ejected out) to enhance the cooling effect. After cooling for a period of time theta 3, the activated carbon in the activated carbon adsorption tower A1 is completely cooled, and the adsorption operation can be carried out circularly; the activated carbon adsorption column B1 and the activated carbon adsorption column C1 are also the same steps. The utility model has good adsorption effect.
The beneficial effects of this technical scheme are as follows:
according to the hydrogen treatment system in the production of polycrystalline silicon, provided by the utility model, the raw material hydrogen is subjected to first adsorption through the activated carbon adsorption tower 1 and then subjected to secondary adsorption through the resin adsorption tower 2, and by adopting the system, the carbon content in the hydrogen can be reduced to 2ppm, and the metal impurities in the hydrogen can be reduced to 8 PPb.
The setting of distributor 2.4 makes resin adsorption tower 2 adsorption effect better. The temperature of the upper end and the lower end of the resin adsorption tower 2 can be conveniently observed due to the arrangement of the temperature inserting pipe 2.7. Pressure transmitter's setting conveniently observes resin adsorption tower 2's pressure, and resin adsorption tower 2 can not cause resin adsorption tower 2 to damage because of differential pressure in the setting of relief valve. The arrangement of the internal heat exchange component 1.6 enables the activated carbon adsorption tower 1 to have higher heating regeneration speed and cooling speed of activated carbon.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention in any way, and all simple modifications and equivalent variations of the above embodiments according to the technical spirit of the present invention are included in the scope of the present invention.
Claims (10)
1. A hydrogen processing system in polycrystalline silicon production is characterized in that: the adsorption tower comprises three activated carbon adsorption towers (1) and a resin adsorption tower (2), wherein each activated carbon adsorption tower (1) comprises a first adsorption tower body (1.1) and activated carbon arranged in the first adsorption tower body (1.1), the first adsorption tower body (1.1) is sleeved with a first heat exchange pipe sleeve (1.2), the lower end of the first heat exchange pipe sleeve (1.2) is connected with a hot fluid inlet pipe (3) and/or a cold fluid inlet pipe (4), the upper end of the first heat exchange pipe sleeve (1.2) is connected with a hot fluid outlet pipe (5) and/or a cold fluid outlet pipe (6), the first adsorption tower body (1.1) is provided with a first air inlet (1.3), a first air outlet (1.4) and a first air inlet and outlet (1.5), the first air inlet (1.3) is connected with a feed gas inlet pipe, and the first air inlet and outlet (1.5) is connected with a hot hydrogen inlet pipe (8), a first hydrogen branch pipe (9) and a second hydrogen branch pipe (10), first gas outlet (1.4) links to each other with hot hydrogen exit tube (11), resin adsorption tower (2) include second adsorption tower body (2.1) and set up the resin in second adsorption tower body (2.1), second adsorption tower body (2.1) lower extreme is provided with second air inlet (2.2) and second gas outlet (2.3), second air inlet (2.2) link to each other with first hydrogen branch pipe (9), second gas outlet (2.3) link to each other with product exit tube (12).
2. The system for treating hydrogen in the production of polysilicon according to claim 1, wherein: two distributors (2.4) are arranged in the second adsorption tower body (2.1), the distributor (2.4) arranged at the upper end is connected with the second gas outlet (2.3), and the distributor (2.4) arranged at the lower end is connected with the second gas inlet (2.2).
3. The system for treating hydrogen in the production of polysilicon according to claim 1, wherein: the second adsorption tower body (2.1) comprises a cylinder body (2.5) and two seal heads (2.6), and two ends of the cylinder body (2.5) are connected with the seal heads (2.6) through flanges and bolts.
4. The system for treating hydrogen in the production of polysilicon according to claim 3, wherein: temperature inserting pipes (2.7) are arranged on the upper side and the lower side of the cylinder body (2.5).
5. The system for treating hydrogen in polysilicon production according to claim 4, wherein: the upper end of the cylinder body (2.5) is provided with a safety valve interface (2.8) and a pressure transmitter interface (2.9).
6. The system for treating hydrogen in polysilicon production according to claim 5, wherein: and the safety valve port (2.8) and the pressure transmitter port (2.9) are both provided with filter screens (2.10).
7. The system for treating hydrogen in polysilicon production according to claim 6, wherein: an upper guide sprinkling opening (2.11) is arranged on the end enclosure (2.6) at the upper end, and a lower guide sprinkling opening (2.12) is arranged on the end enclosure (2.6) at the lower end.
8. The system for treating hydrogen in the production of polycrystalline silicon according to claim 1 or 7, wherein: an inner heat exchange component (1.6) is further arranged inside the first adsorption tower body (1.1), a second heat exchange pipe sleeve (1.7) is sleeved outside the inner heat exchange component (1.6), the lower end of the second heat exchange pipe sleeve (1.7) is connected with a hot fluid inlet pipe (3) and/or a cold fluid inlet pipe (4), and the upper end of the second heat exchange pipe sleeve (1.7) is connected with a hot fluid outlet pipe (5) and/or a cold fluid outlet pipe (6).
9. The system for treating hydrogen in the production of polysilicon according to claim 8, wherein: the lower end of the inner heat exchange part is connected with a hot fluid inlet pipe (3) and/or a cold fluid inlet pipe (4), and the side wall of the inner heat exchange part (1.6) is connected with a hot fluid outlet pipe (5) and/or a cold fluid outlet pipe (6).
10. The system for treating hydrogen in the production of polysilicon according to claim 9, wherein: a drain valve (9.1) and a first flow regulating valve (9.2) are arranged on the first hydrogen branch pipe (9), a second flow regulating valve (11.1) is arranged on the hot hydrogen outlet pipe (11), and a third flow regulating valve (8.1) is arranged on the hot hydrogen inlet pipe (8).
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| CN202122508993.1U CN215974956U (en) | 2021-10-19 | 2021-10-19 | Hydrogen treatment system in polycrystalline silicon production |
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| CN202122508993.1U CN215974956U (en) | 2021-10-19 | 2021-10-19 | Hydrogen treatment system in polycrystalline silicon production |
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