CN215968233U

CN215968233U - Chemical mechanical polishing pad grinder

Info

Publication number: CN215968233U
Application number: CN202122521412.8U
Authority: CN
Inventors: 吴庆飞
Original assignee: Dalian Guomao Material Technology Co ltd
Current assignee: Dalian Guomao Material Technology Co ltd
Priority date: 2021-10-19
Filing date: 2021-10-19
Publication date: 2022-03-08
Anticipated expiration: 2031-10-19

Abstract

The utility model relates to the technical field of grinding equipment, in particular to a chemical mechanical grinding pad grinder which is convenient for quickly adjusting the grinding position of a grinding pad and improving the use convenience of the device; the grinding machine comprises a base, a fixed frame, a first motor, a gear, a rack, a connecting plate, a movable plate, a fixed assembly, a first T-shaped sliding block, a second motor, a first bevel gear, a second bevel gear, a screw shaft, a sliding rod, a second T-shaped sliding block, a third motor and a grinding disc, wherein the first motor is fixed on the left side of the top of the base through the fixed frame, the output end of the first motor is connected with the gear, the gear is in transmission connection with the rack, the rack is fixed at the bottom end of the connecting plate, limiting blocks are arranged at the front end and the rear end of the rack, the connecting plate is fixed at the middle part of the left end of the movable plate, a grinding pad is fixed at the right end of the movable plate through the fixed assembly, the movable plate is fixed at the middle part of the top of the first T-shaped sliding block, and the first T-shaped sliding block is clamped with the left side of the top of the base.

Description

Chemical mechanical polishing pad grinder

Technical Field

The utility model relates to the technical field of grinding equipment, in particular to a chemical mechanical grinding pad grinder.

Background

A chemical mechanical polishing pad grinder is an auxiliary device for grinding a polishing pad, and is widely used in the field of polishing apparatuses; because the material that the chemical mechanical polishing pad used the back grinding for a long time can accumulate on the grinding pad, influences the grinding of subsequent material, needs regularly clear up, but the current chemical mechanical polishing pad mill is difficult to adjust the grinding position of grinding pad, leads to the use convenience of device relatively poor.

SUMMERY OF THE UTILITY MODEL

In order to solve the technical problems, the utility model provides a chemical mechanical polishing pad grinder which is convenient for quickly adjusting the polishing position of a polishing pad and improving the use convenience of the chemical mechanical polishing pad grinder.

The utility model relates to a grinder for a chemical mechanical grinding pad, which comprises a base, a fixed frame, a first motor, a gear, a rack, a connecting plate, a moving plate, a fixed assembly, a first T-shaped slide block, a second motor, a first bevel gear, a second bevel gear, a screw shaft, a slide bar, a second T-shaped slide block, a third motor and a grinding disc, wherein the first motor is fixed on the left side of the top end of the base through the fixed frame, the output end of the first motor is connected with the gear, the gear is in meshing transmission connection with the rack, the rack is fixed at the bottom end of the connecting plate, the front end and the rear end of the rack are provided with limit blocks, the connecting plate is fixed in the middle of the left end of the moving plate, the grinding pad is fixed at the right end of the moving plate through the fixed assembly, the moving plate is fixed in the middle of the top end of the first T-shaped slide block, the first T-shaped slide block is slidably clamped with the left side of the top end of the base, the second motor is fixed on the right side of the top end of the base, the output end of the second motor is connected with the first bevel gear, the first bevel gear is in meshing transmission connection with the second bevel gear, the second bevel gear is fixed at the bottom of the screw shaft, the screw shaft is rotatably connected with the top end of the base, the sliding rod is fixed at the top end of the base and positioned on the left side of the screw shaft, the second T-shaped sliding block is in threaded connection with the screw shaft and is in sliding connection with the sliding rod, the third motor is fixed at the left end of the second T-shaped sliding block, the output end of the third motor is connected with the grinding disc, and the grinding disc can be in contact with the grinding pad; drive the abrasive disc through the third motor and rotate, and grind the lapping pad through the abrasive disc, and drive gear through first motor and rotate, the gear is connected with the rack toothing transmission, make the connecting plate use under the cooperation of first T type slider, drive movable plate back-and-forth movement, accessible second motor drives first bevel gear and rotates simultaneously, first bevel gear is connected with second bevel gear meshing transmission, make the screw shaft rotate, thereby make second T type slider use under the cooperation of slide bar, drive third motor and abrasive disc and reciprocate, the position of polishing of the quick adjustment lapping pad of being convenient for, improve the device and use the convenience.

Preferably, the fixing assembly comprises two groups of electric push rods, two groups of right-angle clamping blocks, two groups of screw rods, two groups of rotating handles and two groups of pressing blocks, the two groups of electric push rods are symmetrically fixed on the upper side and the lower side of the right end of the moving plate respectively, the output ends of the electric push rods are connected with the right-angle clamping blocks, the two groups of right-angle clamping blocks are slidably clamped with the upper side and the lower side of the right end of the moving plate respectively, the screw rods are in threaded connection with the right-angle clamping blocks, the rotating handles are fixed on the right end of the screw rods, the left ends of the screw rods are rotatably connected with the pressing blocks, and the pressing blocks are slidably clamped with the inner side walls of the right-angle clamping blocks; through control electric putter, drive the right angle and add the grip block and reciprocate, add the grip block through two sets of right angles and add the grinding pad and add and hold fixedly, rotate the handle through rotating simultaneously for the screw rod drives the briquetting and removes to the left side, extrudees fixedly through the briquetting to the grinding pad, appears rocking when avoiding the grinding pad to grind, improves the stability in use of device.

Preferably, the dust collector also comprises an air aspirator, a dust collection box, a dust collection net and a plurality of groups of dust collection pipes, wherein the air aspirator is fixed in the middle of the bottom end of the base; by arranging the air suction machine, the dust suction box, the dust suction net and the dust suction pipe, dust generated during grinding is absorbed, the dust is prevented from diffusing into the air to cause atmosphere pollution, and the environment-friendly usability of the device is improved.

Preferably, the device also comprises a pushing handle and a plurality of groups of universal wheels, wherein the pushing handle is fixed at the right end of the base, the plurality of groups of universal wheels are uniformly fixed at the bottom end of the base, and the universal wheels are provided with brake braking pieces; through setting up pushing hands and universal wheel, the bulk movement of the device of being convenient for improves the nimble usability of device.

Preferably, the device also comprises two groups of limiting plates, wherein the two groups of limiting plates are respectively fixed at the top end and the bottom of the sliding rod and are both rotationally connected with the screw shaft; through setting up the limiting plate, carry on spacingly to second T type slider, avoid second T type slider and lead screw axle to break away from, avoid colliding with second bevel gear simultaneously, further improve the stability in use of device.

Preferably, the device also comprises a plurality of groups of reinforcing rods, wherein the reinforcing rods are uniformly fixed at the bottom of the left end of the movable plate, and the other ends of the reinforcing rods are connected with the top end of the first T-shaped sliding block; through setting up the stiffener, strengthen the intensity that the movable plate is connected with first T type slider, improve the structural stability of device.

Preferably, the first motor, the second motor and the third motor are all noise reduction motors; through setting up the amortization motor, noise pollution is reduced avoids causing the hearing damage to the operator, improves the use reliability of device.

Compared with the prior art, the utility model has the beneficial effects that: drive the abrasive disc through the third motor and rotate, and grind the lapping pad through the abrasive disc, and drive gear through first motor and rotate, the gear is connected with the rack toothing transmission, make the connecting plate use under the cooperation of first T type slider, drive movable plate back-and-forth movement, accessible second motor drives first bevel gear and rotates simultaneously, first bevel gear is connected with second bevel gear meshing transmission, make the screw shaft rotate, thereby make second T type slider use under the cooperation of slide bar, drive third motor and abrasive disc and reciprocate, the position of polishing of the quick adjustment lapping pad of being convenient for, improve the device and use the convenience.

Drawings

FIG. 1 is a schematic front view and partial cross-sectional structural view of the present invention;

FIG. 2 is a schematic view of a partial isometric configuration of the present invention;

FIG. 3 is an enlarged schematic view of the utility model at A in FIG. 1;

FIG. 4 is an enlarged view of the structure of FIG. 1 at B according to the present invention;

in the drawings, the reference numbers: 1. a base; 2. a fixed mount; 3. a first motor; 4. a gear; 5. a rack; 6. a connecting plate; 7. moving the plate; 8. a first T-shaped slider; 9. a second motor; 10. a first bevel gear; 11. a second bevel gear; 12. a screw shaft; 13. a slide bar; 14. a second T-shaped slider; 15. a third motor; 16. a grinding disk; 17. an electric push rod; 18. adding a clamping block at a right angle; 19. a screw; 20. rotating the handle; 21. briquetting; 22. an aspirator; 23. a dust collection box; 24. a dust collection net; 25. a dust collection pipe; 26. a pushing handle; 27. a universal wheel; 28. a limiting plate; 29. A reinforcing rod.

Detailed Description

To facilitate an understanding of the utility model, the utility model will now be described more fully with reference to the accompanying drawings. The present invention may be embodied in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.

Example 1

The first motor 3 is fixed on the left side of the top end of the base 1 through a fixing frame 2, the output end of the first motor 3 is connected with a gear 4, the gear 4 is in meshing transmission connection with a rack 5, the rack 5 is fixed on the bottom end of a connecting plate 6, the front end and the rear end of the rack 5 are provided with limiting blocks, the connecting plate 6 is fixed in the middle of the left end of a movable plate 7, two groups of electric push rods 17 are symmetrically fixed on the upper side and the lower side of the right end of the movable plate 7 respectively, the output end of each electric push rod 17 is connected with a right-angle clamping block 18, the two groups of right-angle clamping blocks 18 are in sliding clamping connection with the upper side and the lower side of the right end of the movable plate 7 respectively, a screw rod 19 is in threaded connection with the right-angle clamping block 18, a rotating handle 20 is fixed on the right end of the screw rod 19, the left end of the screw rod 19 is rotatably connected with a pressing block 21, the pressing block 21 is in sliding clamping connection with the inner side wall of the right-angle clamping block 18, the movable plate 7 is fixed in the middle of the top end of a first T-shaped sliding block 8, the first T-shaped slider 8 is slidably clamped with the left side of the top end of the base 1, the second motor 9 is fixed on the right side of the top end of the base 1, the output end of the second motor 9 is connected with a first bevel gear 10, the first bevel gear 10 is in meshing transmission connection with a second bevel gear 11, the second bevel gear 11 is fixed at the bottom of a screw shaft 12, the screw shaft 12 is rotatably connected with the top end of the base 1, a sliding rod 13 is fixed at the top end of the base 1 and positioned on the left side of the screw shaft 12, the second T-shaped slider 14 is in threaded connection with the screw shaft 12, the second T-shaped slider 14 is in sliding connection with the sliding rod 13, a third motor 15 is fixed at the left end of the second T-shaped slider 14, the output end of the third motor 15 is connected with a grinding disc 16, and the grinding disc 16 can be in contact with a grinding pad; the right angle clamping blocks 18 are driven to move up and down by controlling the electric push rod 17, the grinding pad is fixedly clamped by the two groups of right angle clamping blocks 18, meanwhile, the handle 20 is rotated by rotating, so that the screw rod 19 drives the pressing block 21 to move towards the left side, the grinding pad is extruded and fixed by the pressing block 21, the shaking during grinding of the grinding pad is avoided, the use stability of the device is improved, then the grinding disc 16 is driven to rotate by the third motor 15, the grinding pad is ground by the grinding disc 16, the gear 4 is driven to rotate by the first motor 3, the gear 4 is in meshing transmission connection with the rack 5, the movable plate 7 is driven to move back and forth by the connecting plate 6 under the matching use of the first T-shaped sliding block 8, meanwhile, the first bevel gear 10 is driven to rotate by the second motor 9, the first bevel gear 10 is in meshing transmission connection with the second bevel gear 11, so that the screw rod shaft 12 rotates, therefore, the second T-shaped sliding block 14 drives the third motor 15 and the grinding disc 16 to move up and down under the matching use of the sliding rod 13, the grinding position of the grinding pad can be adjusted conveniently and rapidly, and the use convenience of the device is improved.

As shown in fig. 1 to 4, in the operation of the chemical mechanical polishing pad grinder of the present invention, firstly, the electric push rod 17 is controlled to drive the right angle clamping blocks 18 to move up and down, the polishing pad is clamped and fixed by the two sets of right angle clamping blocks 18, meanwhile, the rotating handle 20 is rotated to make the screw rod 19 drive the pressing block 21 to move to the left, the polishing pad is pressed and fixed by the pressing block 21, the shaking during polishing of the polishing pad is avoided, the stability of the use of the device is improved, then the third motor 15 drives the polishing disk 16 to rotate, the polishing pad is polished by the polishing disk 16, the first motor 3 drives the gear 4 to rotate, the gear 4 is engaged and connected with the rack 5 in a transmission manner, so that the connecting plate 6 drives the moving plate 7 to move back and forth under the cooperation of the first T-shaped slider 8, and simultaneously, the second motor 9 can drive the first bevel gear 10 to rotate, first bevel gear 10 is connected with the meshing transmission of second bevel gear 11, make screw shaft 12 rotate, thereby make second T type slider 14 use under the cooperation of slide bar 13, drive third motor 15 and abrasive disc 16 and reciprocate, be convenient for the position of polishing of quick adjustment grinding pad, improve the device and use the convenience, then through setting up aspirator 22, suction box 23, dust absorption net 24 and dust absorption pipe 25, absorb the dust that produces during the grinding, avoid the dust to spread to cause the atmosphere pollution in the air, improve the environmental protection usability of device, and through setting up pushing hands 26 and universal wheel 27, be convenient for the bulk movement of device, improve the nimble usability of device.

The chemical mechanical polishing pad grinder provided by the utility model has the advantages that the installation mode, the connection mode or the arrangement mode are common mechanical modes, and the chemical mechanical polishing pad grinder can be implemented as long as the beneficial effects are achieved.

All technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the utility model herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the utility model. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, several modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.

Claims

1. The chemical mechanical polishing pad grinder is characterized by comprising a base (1), a fixing frame (2), a first motor (3), a gear (4), a rack (5), a connecting plate (6), a moving plate (7), a fixing component, a first T-shaped slider (8), a second motor (9), a first bevel gear (10), a second bevel gear (11), a lead screw shaft (12), a slide bar (13), a second T-shaped slider (14), a third motor (15) and a polishing disk (16), wherein the first motor (3) is fixed on the left side of the top end of the base (1) through the fixing frame (2), the output end of the first motor (3) is connected with the gear (4), the gear (4) is in meshing transmission connection with the rack (5), the rack (5) is fixed at the bottom end of the connecting plate (6), limiting blocks are arranged at the front end and the rear end of the rack (5), and the connecting plate (6) is fixed in the middle of the left end of the moving plate (7), the grinding pad is fixed at the right end of a moving plate (7) through a fixing assembly, the moving plate (7) is fixed at the middle part of the top end of a first T-shaped sliding block (8), the first T-shaped sliding block (8) is slidably clamped with the left side of the top end of a base (1), a second motor (9) is fixed at the right side of the top end of the base (1), the output end of the second motor (9) is connected with a first bevel gear (10), the first bevel gear (10) is in meshing transmission connection with a second bevel gear (11), the second bevel gear (11) is fixed at the bottom of a screw shaft (12), the screw shaft (12) is rotatably connected with the top end of the base (1), a sliding rod (13) is fixed at the top end of the base (1) and positioned at the left side of the screw shaft (12), a second T-shaped sliding block (14) is in threaded connection with the screw shaft (12), the second T-shaped sliding block (14) is slidably connected with the sliding rod (13), and a third motor (15) is fixed at the left end of the second T-shaped sliding block (14), the output end of the third motor (15) is connected with the grinding disc (16), and the grinding disc (16) can be contacted with the grinding pad.

2. The grinder for chemical mechanical polishing pads according to claim 1, wherein the fixing assembly comprises two sets of electric push rods (17), two sets of right angle clamping blocks (18), two sets of screws (19), two sets of rotating handles (20) and two sets of pressing blocks (21), the two sets of electric push rods (17) are symmetrically fixed on the upper and lower sides of the right end of the moving plate (7) respectively, the output end of the electric push rods (17) is connected with the right angle clamping blocks (18), the two sets of right angle clamping blocks (18) are slidably clamped with the upper and lower sides of the right end of the moving plate (7) respectively, the screws (19) are threadedly connected with the right angle clamping blocks (18), the rotating handles (20) are fixed on the right end of the screws (19), the left end of the screws (19) is rotatably connected with the pressing blocks (21), and the pressing blocks (21) are slidably clamped with the inner side walls of the right angle clamping blocks (18).

3. The grinder for chemical mechanical polishing pads according to claim 1, further comprising a suction machine (22), a dust box (23), a dust collection net (24) and a plurality of sets of dust collection pipes (25), wherein the suction machine (22) is fixed at the middle of the bottom end of the base (1), the input end of the suction machine (22) is communicated with the bottom end of the dust box (23), the dust box (23) is fixed at the middle of the top end of the base (1), the dust collection net (24) is fixed inside the dust box (23), the plurality of sets of dust collection pipes (25) are uniformly fixed at the top end of the dust box (23), and the top end of the dust collection pipe (25) is provided with a dust collection nozzle.

4. The grinder for chemical mechanical polishing pads according to claim 1, further comprising a pushing handle (26) and a plurality of sets of universal wheels (27), wherein the pushing handle (26) is fixed at the right end of the base (1), the plurality of sets of universal wheels (27) are uniformly fixed at the bottom end of the base (1), and the universal wheels (27) are provided with brake pads.

5. The grinder for chemical mechanical polishing pads according to claim 1, further comprising two sets of limiting plates (28), wherein the two sets of limiting plates (28) are respectively fixed on the top and bottom of the sliding rod (13) and are both rotatably connected with the screw shaft (12).

6. The grinder for chemical mechanical polishing pads according to claim 1, further comprising a plurality of sets of reinforcing rods (29), wherein the plurality of sets of reinforcing rods (29) are uniformly fixed to the bottom of the left end of the moving plate (7), and the other end of the reinforcing rods (29) is connected to the top end of the first T-shaped slider (8).

7. The grinder for chemical mechanical polishing pads according to claim 1, characterized in that the first motor (3), the second motor (9) and the third motor (15) are all noise reduction motors.