CN215967784U - Device for measuring rigidity of air floatation pad of ultra-precision machine tool - Google Patents
Device for measuring rigidity of air floatation pad of ultra-precision machine tool Download PDFInfo
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- CN215967784U CN215967784U CN202121897273.2U CN202121897273U CN215967784U CN 215967784 U CN215967784 U CN 215967784U CN 202121897273 U CN202121897273 U CN 202121897273U CN 215967784 U CN215967784 U CN 215967784U
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Abstract
The utility model discloses a device for measuring the rigidity of an air floatation pad of an ultra-precision machine tool, which comprises a base, a pressure plate and a top seat, wherein a support column is welded between the base and the top seat. Four corners of the upper surface of the pressure plate are embedded with circular slide rails, and the inner surface walls of the circular slide rails are connected with balls in a sliding manner. According to the utility model, through the design of the pressure plate, the four screw rods are rotated, the screw rod nut drives the universal ball to clamp the air floatation pad through the L-shaped frame, the condition that the air floatation pad generates transverse displacement when the air film rigidity is measured is reduced, and the friction force of the air floatation pad during longitudinal displacement is reduced under the action of the universal ball, so that the accuracy of the device for measuring the air film rigidity is improved.
Description
Technical Field
The utility model relates to the technical field of air bearing pad rigidity, in particular to a device for measuring the air bearing pad rigidity of an ultra-precision machine tool.
Background
The air floating cushion is an application of an air bearing, and a gap between the air floating cushion and a plane is formed to form a sliding condition which is approximately frictionless through an air thin layer (about 1mm or less) formed at the bottom of the air floating cushion.
The existing device for measuring the rigidity of the air floatation cushion has certain defects when in use, most of the devices adopt a threaded rod screwing mode to apply downward pressure to the air floatation cushion to measure the rigidity of an air film generated by the air floatation cushion, but the threaded rod screwing mode has no good downward pressure, and can only measure the rigidity of the air floatation cushion with smaller size scale, and when measuring the rigidity of the air film of the air floatation cushion, the generated air flow can possibly cause the transverse displacement of the air floatation cushion, so that the measurement data is not accurate.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the defects in the prior art and provides a device for measuring the rigidity of an air bearing pad of an ultra-precision machine tool.
In order to achieve the purpose, the utility model adopts the following technical scheme: a device for measuring the rigidity of an air floatation pad of an ultra-precision machine tool comprises a base, a pressure plate and a top seat, wherein a support column is welded between the base and the top seat;
four corners of the upper surface of pressure plate inlay to establish and install circular slide rail, the interior table wall sliding connection of circular slide rail has the ball, the pressure plate passes through circular slide rail and support column sliding connection, the upper surface center department welding of pressure plate has the stand, four bar grooves, four have been seted up to the lower surface of pressure plate the bar groove is the cross and distributes respectively on the pressure plate, bar inslot rotation is connected with the lead screw, threaded connection has screw-nut on the lead screw, screw-nut's top welding has L type frame, the welding of the horizontal direction one end of L type frame has universal ball.
Preferably, the balls are provided with a plurality of balls, the balls are annularly distributed in the circular slide rail, and the distance between two adjacent balls is equal.
Preferably, the number of the support columns is four, the four support columns are distributed at four corners of the base respectively in a rectangular array, and the four support columns are matched with the four circular slide rails.
Preferably, the center of the upper surface of the top seat is in threaded connection with a threaded rod which penetrates through the top seat and extends to the lower part of the top seat, and the bottom end of the threaded rod is in threaded connection with a pressure sensor.
Preferably, the pressure sensor and the upright post are on the same vertical line.
Preferably, a laser displacement sensor positioned on one side of the supporting column is fixed on the lower surface of the top seat through a bolt.
Preferably, the upper surface of the pressure plate is also provided with a balance weight disc.
Compared with the prior art, the utility model has the beneficial effects that:
1. according to the device for measuring the rigidity of the air floating pad of the ultra-precision machine tool, through the design of the pressure plate, the four screw rods are rotated, the screw rod nuts drive the universal balls to clamp the air floating pad through the L-shaped frame, the situation that the air floating pad transversely displaces when the rigidity of an air film is measured is reduced, the friction force of the air floating pad during longitudinal displacement is reduced under the action of the universal balls, the accuracy of the device for measuring the rigidity of the air film is improved, the balance weight discs are added or reduced to the pressure plate, and the pressure sensor is driven to apply downward pressure to the upright post and the pressure plate through rotating the screw rods, so that the device can measure the air floating pad in a larger size range, and the applicability of the device is improved.
2. According to the device for measuring the rigidity of the air flotation pad of the ultra-precision machine tool, through the design of the circular slide rail and the ball, when the pressure plate moves upwards, the friction force between the pressure plate and the supporting column can be reduced through the ball, and the accuracy in measurement is further improved.
Drawings
FIG. 1 is a schematic structural diagram of an apparatus for measuring stiffness of an air bearing pad of an ultra-precision machine tool according to the present invention;
FIG. 2 is a bottom view of a pressure plate of the apparatus for measuring the stiffness of an air bearing pad of an ultra-precision machine tool according to the present invention;
fig. 3 is a top view of a pressure plate of the apparatus for measuring the stiffness of an air bearing pad of an ultra-precision machine tool according to the present invention.
Illustration of the drawings:
1. a base; 2. a pressure plate; 3. a universal ball; 4. an L-shaped frame; 5. a feed screw nut; 6. a strip-shaped groove; 7. a screw rod; 8. a column; 9. a pressure sensor; 10. a threaded rod; 11. a top seat; 12. a laser displacement sensor; 13. a support pillar; 14. a weight plate; 15. a ball bearing; 16. a circular slide rail.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention; the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance; furthermore, unless expressly stated or limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, as they may be fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Referring to fig. 1-3, a device for measuring the stiffness of an air bearing pad of an ultra-precision machine tool comprises a base 1, a pressure plate 2 and a top seat 11, wherein a support column 13 is welded between the base 1 and the top seat 11;
four corners of the upper surface of pressure plate 2 are inlayed and are established and install circular slide rail 16, circular slide rail 16's interior table wall sliding connection has ball 15, pressure plate 2 is through circular slide rail 16 and support column 13 sliding connection, the welding of pressure plate 2's upper surface center department has stand 8, four bar grooves 6 have been seted up to pressure plate 2's lower surface, four bar grooves 6 are the cross and distribute respectively on pressure plate 2, bar groove 6 internal rotation is connected with lead screw 7, threaded connection has screw-nut 5 on the lead screw 7, the welding of screw-nut 5's top has L type frame 4, the welding of L type frame 4's horizontal direction one end has universal ball 3.
The balls 15 are provided with a plurality of balls, the balls 15 are annularly distributed in the circular slide rail 16, and the distance between two adjacent balls 15 is equal.
The supporting columns 13 are four in number, the four supporting columns 13 are distributed at four corners of the base 1 in a rectangular array respectively, and the four supporting columns 13 are matched with the four circular sliding rails 16.
The center of the upper surface of the top seat 11 is connected with a threaded rod 10 which penetrates through the top seat 11 and extends to the lower part of the top seat 11 through threads, and the bottom end of the threaded rod 10 is connected with a pressure sensor 9 through threads.
The pressure sensor 9 and the upright post 8 are on the same vertical line.
A laser displacement sensor 12 positioned on one side of the supporting column 13 is fixed on the lower surface of the top seat 11 through bolts.
The upper surface of the pressure plate 2 is also provided with a weight plate 14.
The number of the counterweight plates 14 is multiple, and the downward pressure can be further applied to the air floatation cushion by increasing the number of the counterweight plates 14.
The working principle is as follows:
this a device for measuring ultra-precision machine tool air supporting pad rigidity when fixing the air supporting pad, place the air supporting pad in base 1's upper surface center department, rotate four lead screws 7 respectively, lead screw 7 drives screw-nut 5 and carries out the displacement this moment, screw-nut 5 drives L type frame 4 and carries out the displacement, L type frame 4 drives universal ball 3 and carries out the centre gripping to the air supporting pad, reduce the condition that the air supporting pad takes place lateral displacement when measuring air film rigidity, and under universal ball 3's effect, reduce the air supporting pad frictional force when longitudinal displacement, the device has improved the accuracy nature of measuring air film rigidity.
This a device for measuring ultra-precision machine tool air supporting pad rigidity when exerting the holding down force to the air supporting pad, place the pressure plate 2 with the balance weight dish 14 on, the holding down force is exerted to the air supporting pad through pressure plate 2 to balance weight dish 14, rethread rotary threaded rod 10, threaded rod 10 drives pressure sensor 9 and exerts the holding down force to stand 8 this moment, stand 8 further exerts the holding down force to the air supporting pad through pressure plate 2, make the device can measure the air supporting pad of bigger size scope, the device's suitability has been improved.
When the device for measuring the rigidity of the air floating pad of the ultra-precision machine tool measures the rigidity of an air film on the air floating pad, quantitative atmospheric pressure is conveyed to the air floating pad, the air floating pad drives the pressure plate 2 to move upwards at the moment, the upward moving height of the pressure plate 2 is measured under the action of the laser displacement sensor 12, the height of the air film is obtained, then the fixed weight of the pressure plate 2, the fixed weight of the counterweight plate 14 and the downward pressure of the threaded rod 10 are added to obtain the bearing capacity of the air floating pad, the rigidity of the air film under the bearing capacity is calculated according to a formula J (air film rigidity) W (bearing capacity)/H (air film height), and the rigidity of the air film under different bearing capacities is calculated by increasing the counterweight plate 14 and screwing the threaded rod 10.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and equivalent alternatives or modifications according to the technical solution of the present invention and the inventive concept thereof should be covered by the scope of the present invention.
Claims (7)
1. A device for measuring the rigidity of an air floatation pad of an ultra-precision machine tool comprises a base (1), a pressure plate (2) and a top seat (11), and is characterized in that a support column (13) is welded between the base (1) and the top seat (11);
four corners of the upper surface of pressure plate (2) are inlayed and are established and install circular slide rail (16), the interior table wall sliding connection of circular slide rail (16) has ball (15), pressure plate (2) are through circular slide rail (16) and support column (13) sliding connection, the upper surface center department welding of pressure plate (2) has stand (8), four bar grooves (6), four have been seted up to the lower surface of pressure plate (2) bar groove (6) are the cross and distribute respectively on pressure plate (2), bar groove (6) internal rotation is connected with lead screw (7), threaded connection has screw-nut (5) on lead screw (7), the top welding of screw-nut (5) has L type frame (4), the welding of the horizontal direction one end of L type frame (4) has universal ball (3).
2. The device for measuring the air bearing pad rigidity of the ultra-precision machine tool is characterized in that a plurality of balls (15) are arranged, the plurality of balls (15) are distributed in a circular sliding rail (16) in an annular mode, and the distance between every two adjacent balls (15) is equal.
3. The device for measuring the stiffness of the air bearing pad of the ultra-precision machine tool is characterized in that the number of the support columns (13) is four, the four support columns (13) are respectively distributed at four corners of the base (1) in a rectangular array, and the four support columns (13) are matched with the four circular slide rails (16).
4. The device for measuring the rigidity of the air bearing pad of the ultra-precision machine tool is characterized in that a threaded rod (10) penetrating through the top seat (11) and extending below the top seat (11) is connected to the center of the upper surface of the top seat (11) in a threaded mode, and a pressure sensor (9) is connected to the bottom end of the threaded rod (10) in a threaded mode.
5. Device for measuring the stiffness of an air bearing pad of an ultra-precision machine according to claim 4, characterized in that the pressure sensor (9) and the upright column (8) are on the same vertical line.
6. The device for measuring the air bearing pad rigidity of the ultra-precision machine tool is characterized in that a laser displacement sensor (12) positioned on one side of a supporting column (13) is fixed on the lower surface of the top seat (11) through bolts.
7. Device for measuring the stiffness of an air bearing pad of an ultra-precision machine according to claim 1, characterized in that the upper surface of the pressure plate (2) is further provided with a counterweight plate (14).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121897273.2U CN215967784U (en) | 2021-08-13 | 2021-08-13 | Device for measuring rigidity of air floatation pad of ultra-precision machine tool |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121897273.2U CN215967784U (en) | 2021-08-13 | 2021-08-13 | Device for measuring rigidity of air floatation pad of ultra-precision machine tool |
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| CN215967784U true CN215967784U (en) | 2022-03-08 |
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| CN202121897273.2U Active CN215967784U (en) | 2021-08-13 | 2021-08-13 | Device for measuring rigidity of air floatation pad of ultra-precision machine tool |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115711812A (en) * | 2023-01-10 | 2023-02-24 | 湖南中交京纬信息科技有限公司 | Wisdom building site beam slab rigidity detecting system based on it is digital |
-
2021
- 2021-08-13 CN CN202121897273.2U patent/CN215967784U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115711812A (en) * | 2023-01-10 | 2023-02-24 | 湖南中交京纬信息科技有限公司 | Wisdom building site beam slab rigidity detecting system based on it is digital |
| CN115711812B (en) * | 2023-01-10 | 2023-05-05 | 湖南中交京纬信息科技有限公司 | Intelligent construction site beam plate rigidity detection system based on digitization |
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