CN215965125U

CN215965125U - Detection platform convenient to clean and used for detecting etching ring

Info

Publication number: CN215965125U
Application number: CN202122275110.7U
Authority: CN
Inventors: 范冬冬; 范贤力; 张顺红
Original assignee: Jiangsu Tuanxiang Photoelectric Technology Co ltd
Current assignee: Jiangsu Tuanxiang Photoelectric Technology Co ltd
Priority date: 2021-09-18
Filing date: 2021-09-18
Publication date: 2022-03-08
Anticipated expiration: 2031-09-18

Abstract

The utility model relates to a detection table convenient to clean for detecting an etching ring, which comprises a detection table body, a cleaning device and a recovery device, wherein the detection table body is provided with a plurality of grooves; the detection table body comprises a detection table and a fixed box, the left side of the fixed box is fixedly connected with a cleaning device, the right side of the fixed box is fixedly connected with a recovery device, and the fixed box is used for fixing the cleaning device and the recovery device; the cleaning device comprises a water tank, a water pump, a water delivery pipe, a high-pressure sprayer and an electric push rod, and is used for cleaning the detection table. This sculpture ring detects with detection platform of being convenient for to clear up through setting up the start-up water pump pressure boost, and the raceway of being convenient for is carried the inside water of water tank to inside the high pressure nozzle, and the rethread sets up high pressure nozzle and washs the top surface of detecting the platform, then starts electric putter through setting up, and electric putter starts to drive and detects the left side of platform and upwards rise, and the waste stream after being convenient for wash flows to the recovery tube, has reached the effectual advantage of clearance.

Description

Detection platform convenient to clean and used for detecting etching ring

Technical Field

The utility model relates to the technical field of cleaning of detection tables.

Background

Etching, which is a very important step in semiconductor manufacturing processes, microelectronic IC manufacturing processes and micro-nano manufacturing processes, is a main process of patterning processes associated with photolithography, and so-called etching, which is understood in a narrow sense as lithography etching, a process of selectively removing unnecessary materials from the surface of a silicon wafer by chemical or physical means, and the basic object of which is to correctly reproduce a mask pattern on a pasted silicon wafer, first performs a lithography exposure process on a photoresist and then performs an etching process by other means to remove portions to be removed.

With the development of micro-manufacturing process, etching is a general name for stripping and removing materials by solution, reactive ions or other mechanical methods, which becomes a general calling method for micro-machining manufacturing, and etching ring detection needs to be performed on a detection table, so that a large amount of etching liquid can be caused.

SUMMERY OF THE UTILITY MODEL

Aiming at the technical problems in the prior art, the utility model provides the detection table convenient to clean for detecting the etching ring, and solves the problems of serious environmental pollution and great economic waste caused by poor cleaning effect of the detection table.

The technical scheme for solving the technical problems is as follows: a detection table convenient to clean for detecting an etching ring comprises a detection table body, a cleaning device and a recovery device; the detection table body comprises a detection table and a fixed box, the left side of the fixed box is fixedly connected with a cleaning device, the right side of the fixed box is fixedly connected with a recovery device, and the fixed box is used for fixing the cleaning device and the recovery device; the cleaning device comprises a water tank, a water pump, a water delivery pipe, a high-pressure spray head and an electric push rod, and is used for cleaning the detection table; the recovery device comprises a recovery box, a recovery pipe and a filter plate, and the recovery device is used for recovering and cleaning waste materials.

On the basis of the technical scheme, the utility model can be further improved as follows.

Further, the equal fixedly connected with guard plate all around of examining test table top, the bottom swing joint who examines the test table has the fixed case, the fixed case is hollow cuboid.

Further, the bottom fixedly connected with universal wheel of fixed case, the quantity of universal wheel is four, the front of fixed case articulates there is the chamber door.

Further, the left side fixedly connected with water tank, water pump and the fixed plate of fixed case, the top of water tank is equipped with the water inlet, fixedly connected with connecting pipe between water tank and the water pump.

Furthermore, the water pump is located at the top of the water tank, the fixing plate is located at the top of the water pump, and a water delivery pipe penetrating through and extending outside the fixing plate is fixedly connected to the top of the water pump.

Furthermore, the bottom of one end, far away from the water pump, of the water delivery pipe is fixedly connected with a high-pressure spray head, an electric push rod is fixedly installed inside the fixing box, and the output end of the electric push rod is fixedly connected with the bottom surface of the detection table.

Further, the right side fixedly connected with collection box of fixed case, the inside fixedly connected with of examining the test table extends to the inside recovery tube of collection box.

Further, the inside joint of collection box has the filter that runs through and extend to the collection box outside, the inside fixedly connected with filter screen of filter, the inside fixedly connected with of collection box runs through and extends to the outside drain pipe of collection box, the equal fixedly connected with control valve in outside of drain pipe and recovery tube.

Compared with the prior art, the technical scheme of the application has the following beneficial technical effects:

1. this sculpture ring detects with detection platform of being convenient for to clear up through setting up the start-up water pump pressure boost, and the raceway of being convenient for is carried the inside water of water tank to inside the high pressure nozzle, and the rethread sets up high pressure nozzle and washs the top surface of detecting the platform, then starts electric putter through setting up, and electric putter starts to drive and detects the left side of platform and upwards rise, and the waste stream after being convenient for wash flows to the recovery tube, has reached the effectual advantage of clearance.

2. This sculpture ring detects with detection platform of being convenient for to clear up, through setting up the equal fixedly connected with guard plate all around of detecting the platform, can effectively avoid wasing water to splashing all around, has the filter through the inside joint that sets up the collection box, is convenient for carry out filtration treatment to the waste material, and the rethread sets up the cooperation between collection box, recovery tube and the filter, is convenient for carry out recovery processing to the waste material, and the effectual environmental pollution and the economic waste of having reduced have reached and have retrieved effectual advantage.

Drawings

FIG. 1 is a schematic structural view of the present invention;

fig. 2 is a front view of the structure of the present invention.

In the drawings, the components represented by the respective reference numerals are listed below:

1. the device comprises a detection table body, 2, a cleaning device, 3, a recovery device, 101, a detection table, 102, a protection plate, 103, a fixed box, 104, universal wheels, 105, a box door, 201, a water tank, 202, a water pump, 203, a fixed plate, 204, a water pipe, 205, a high-pressure spray head, 206, an electric push rod, 301, a recovery box, 302, a recovery pipe, 303, a filter plate, 304, a drain pipe, 305 and a control valve.

Detailed Description

The principles and features of this invention are described below in conjunction with the following drawings, which are set forth by way of illustration only and are not intended to limit the scope of the utility model.

Referring to fig. 1-2, the present embodiment includes a testing table body 1, a cleaning device 2 and a recycling device 3; the detection table body 1 comprises a detection table 101 and a fixed box 103, the left side of the fixed box 103 is fixedly connected with a cleaning device 2, the right side of the fixed box 103 is fixedly connected with a recovery device 3, and the fixed box 103 is used for fixing the cleaning device 2 and the recovery device 3; the cleaning device 2 comprises a water tank 201, a water pump 202, a water pipe 204, a high-pressure spray nozzle 205 and an electric push rod 206, and the cleaning device 2 is used for cleaning the detection table 101; recovery unit 3 includes collection box 301, recovery tube 302 and filter 303, recovery unit 3 is used for retrieving the clearance waste material, through starting the pressure boost of water pump 202, be convenient for raceway 204 carries the inside water of water tank 201 to high pressure nozzle 205 inside, rethread high pressure nozzle 205 washs the top surface of examining test table 101, then through starting electric putter 206, electric putter 206 starts to drive the left side that detects test table 101 and upwards rises, the waste material flow direction recovery tube 302 after being convenient for wash, the effectual advantage of clearance has been reached.

In this embodiment, detect equal fixedly connected with guard plate 102 all around at platform 101 top, can effectively avoid wasing water to splash all around, the bottom swing joint who detects platform 101 has fixed case 103, be convenient for carry out fixed mounting to fixed cleaning device 2 and recovery unit 3, the bottom fixedly connected with universal wheel 104 of fixed case 103, the quantity of universal wheel 104 is four, convenient to use person removes the device to the assigned position, the front of fixed case 103 articulates there is chamber door 105, be convenient for store debris.

In this embodiment, left side fixedly connected with water tank 201 of fixed box 103, water pump 202 and fixed plate 203, the top of water tank 201 is equipped with the water inlet, be convenient for add washing water, fixedly connected with connecting pipe between water tank 201 and the water pump 202, water pump 202 is located the top of water tank 201, fixed plate 203 is located the top of water pump 202, the top fixedly connected with of water pump 202 runs through and extends at the outside raceway 204 of fixed plate 203, the bottom fixedly connected with high pressure nozzle 205 of water pump 202 one end is kept away from to raceway 204, be convenient for raceway 204 carries the inside water of water tank 201 to inside high pressure nozzle 205, the inside fixed mounting of fixed box 103 has electric putter 206, on electric putter 206's the output with the bottom surface fixed connection who detects platform 101, be convenient for electric putter 206 starts the left side that drives and detect platform 101 and upwards rises.

In this embodiment, the right side fixedly connected with collection box 301 of fixed box 103, the inside fixedly connected with who examines test table 101 extends to the inside recovery tube 302 of collection box 301, be convenient for carry out recovery processing to the waste material, the effectual environmental pollution and the economic waste that have reduced, the effectual advantage of recovery has been reached, the inside joint of collection box 301 has the filter 303 that runs through and extend to collection box 301 outside, the inside fixedly connected with filter screen of filter 303, the inside joint of collection box 301 has filter 303, be convenient for carry out filtration processing to the waste material, the inside fixedly connected with of collection box 301 runs through and extends to the outside drain pipe 304 of collection box 301, the equal fixedly connected with control valve 305 in outside of drain pipe 304 and recovery tube 302, be convenient for control drain pipe 304 and recovery tube 302.

The working principle of the above embodiment is as follows:

through the pressure boost of starting water pump 202, be convenient for raceway 204 with the inside water transport of water tank 201 to high pressure nozzle 205 inside, rethread high pressure nozzle 205 washs the top surface of examining test table 101, then through starting electric putter 206, electric putter 206 starts to drive and examines the left side of test table 101 and upwards rise, the waste material flow direction recovery tube 302 after being convenient for wash.

The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the utility model, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.

Claims

1. A detection table convenient to clean for detecting an etching ring is characterized by comprising a detection table body (1), a cleaning device (2) and a recovery device (3); the detection table body (1) comprises a detection table (101) and a fixed box (103), the left side of the fixed box (103) is fixedly connected with a cleaning device (2), the right side of the fixed box (103) is fixedly connected with a recovery device (3), and the fixed box (103) is used for fixing the cleaning device (2) and the recovery device (3); the cleaning device (2) comprises a water tank (201), a water pump (202), a water conveying pipe (204), a high-pressure spray head (205) and an electric push rod (206), and the cleaning device (2) is used for cleaning the detection table (101); the recovery device (3) comprises a recovery box (301), a recovery pipe (302) and a filter plate (303), and the recovery device (3) is used for recovering and cleaning waste materials.

2. The etching ring detection easy-to-clean detection table according to claim 1, wherein protection plates (102) are fixedly connected to the periphery of the top of the detection table (101), a fixed box (103) is movably connected to the bottom of the detection table (101), and the fixed box (103) is a hollow cuboid.

3. The etching ring detection easy-to-clean detection table as claimed in claim 2, wherein the bottom of the fixed box (103) is fixedly connected with universal wheels (104), the number of the universal wheels (104) is four, and the front surface of the fixed box (103) is hinged with a box door (105).

4. The etching ring detection easy-to-clean detection table according to claim 1, wherein a water tank (201), a water pump (202) and a fixing plate (203) are fixedly connected to the left side of the fixing box (103), a water inlet is formed in the top of the water tank (201), and a connecting pipe is fixedly connected between the water tank (201) and the water pump (202).

5. The etching ring detection easy-to-clean detection table according to claim 4, wherein the water pump (202) is located at the top of the water tank (201), the fixing plate (203) is located at the top of the water pump (202), and a water pipe (204) penetrating and extending outside the fixing plate (203) is fixedly connected to the top of the water pump (202).

6. The etching ring detection easy-to-clean detection table as claimed in claim 5, wherein a high-pressure nozzle (205) is fixedly connected to the bottom of one end, away from the water pump (202), of the water pipe (204), an electric push rod (206) is fixedly installed inside the fixed box (103), and the output end of the electric push rod (206) is fixedly connected with the bottom surface of the detection table (101).

7. The etching ring detection easy-to-clean detection table according to claim 1, characterized in that a recovery box (301) is fixedly connected to the right side of the fixed box (103), and a recovery pipe (302) extending to the interior of the recovery box (301) is fixedly connected to the interior of the detection table (101).

8. The etching ring detection easy-to-clean detection table according to claim 7, wherein a filter plate (303) penetrating and extending to the outside of the recovery box (301) is clamped inside the recovery box (301), the filter plate (303) is fixedly connected with a filter screen inside, a drain pipe (304) penetrating and extending to the outside of the recovery box (301) is fixedly connected inside the recovery box (301), and a control valve (305) is fixedly connected outside both the drain pipe (304) and the recovery pipe (302).