CN215951121U - Ammonia water supply cabinet capable of keeping ammonia water supply concentration - Google Patents
Ammonia water supply cabinet capable of keeping ammonia water supply concentration Download PDFInfo
- Publication number
- CN215951121U CN215951121U CN202122569636.6U CN202122569636U CN215951121U CN 215951121 U CN215951121 U CN 215951121U CN 202122569636 U CN202122569636 U CN 202122569636U CN 215951121 U CN215951121 U CN 215951121U
- Authority
- CN
- China
- Prior art keywords
- pipeline
- ammonia
- ammonia water
- supply
- nitrogen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Abstract
The utility model discloses an ammonia water supply cabinet for keeping ammonia water supply concentration, which belongs to the technical field of ammonia water supply, and the ammonia water supply cabinet (1) comprises a raw liquid tank (14), a nitrogen pipeline (11), a nitrogen gas supplementing discharge pipeline (12) and an exhaust pipeline (13); the nitrogen pipeline (11) is connected with the raw liquid tank (14); one end of the nitrogen gas supplementing discharge pipeline (12) is connected between the raw liquid tank (14) and the nitrogen pipeline (11), and the other end of the nitrogen gas supplementing discharge pipeline (12) is connected with the air draft pipeline (13); the nitrogen gas supplementing and discharging pipeline (12) is provided with a pneumatic valve (15) and a restricted flow hole (16); the ammonia water supply cabinet (1) further comprises a first control valve (17) and an air source pipeline (18), and the first control valve (17) is connected with the air-operated valve (15) through the air source pipeline (18). The utility model can keep the concentration of ammonia water in the supply process of ammonia water, and effectively ensure the quality of corresponding process products.
Description
Technical Field
The utility model relates to the technical field of ammonia water supply, in particular to an ammonia water supply cabinet capable of keeping the supply concentration of ammonia water.
Background
Because the concentration of most ammonia water is 29 percent, the volatility is strong, the ammonia water can volatilize quickly under the condition that the sufficient sealing is not ensured, and the concentration is reduced to 25 percent or even below.
In the process of semiconductor production technology, ammonia water with the concentration of more than 28% is needed to ensure the yield of products, so that the concentration of ammonia water in the concentration supply process is ensured not to be volatilized, which is an important work content of ammonia water central supply.
The existing ammonia water supply technology usually adopts a device with an attached storage tank of an ammonia water supply cabinet, so that ammonia water is supplemented to the storage tank in time and then supplied to a production line by the storage tank, and the storage tank is always in a closed state, so that the ammonia water supply concentration is ensured. But this supply system area is great, and the input cost is higher, and for saving construction and later maintenance cost, some enterprises only use the ammonia water supply cabinet directly to supply the ammonia water to the production line.
The ammonia water supply cabinets in the existing market are consistent with the characteristics of internal pipelines of other chemical supply cabinets, and do not have complete sealing function, namely, an air supply and exhaust pipeline and an air pipe are in a straight-through state. The pipeline characteristic can not effectively ensure the concentration of the ammonia water, and the concentration of the ammonia water can be rapidly reduced to 23% -20% within a week through actual measurement.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the problem that the existing general ammonia water supply cabinet without an auxiliary tank cannot keep the ammonia water supply concentration, and provides a device transformation technology for reducing and even avoiding the reduction of the ammonia water supply concentration.
The purpose of the utility model is realized by the following technical scheme:
the ammonia water supply cabinet mainly provides an ammonia water supply cabinet for maintaining the supply concentration of ammonia water, and the ammonia water supply cabinet comprises a raw liquid tank for containing ammonia water, a nitrogen pipeline for supplementing ammonia water, a nitrogen supplementing discharge pipeline and an exhaust pipeline; the nitrogen pipeline is connected with the stock solution tank; one end of the nitrogen gas supplementing discharge pipeline is connected between the stock solution tank and the nitrogen pipeline, and the other end of the nitrogen gas supplementing discharge pipeline is connected with the exhaust pipeline;
a pneumatic valve is arranged on the nitrogen gas supplementing discharge pipeline close to the raw liquid tank, and a flow limiting hole is arranged on the nitrogen gas supplementing discharge pipeline close to the air draft pipeline;
the ammonia water supply cabinet also comprises a first control valve and an air source pipeline, and the first control valve is connected with the pneumatic valve through the air source pipeline.
As an option, an ammonia water supply cabinet for maintaining the supply concentration of ammonia water is further provided with a main control unit for controlling the first control valve.
As an option, the first control valve is a solenoid valve.
As an option, the ammonia water supply cabinet for maintaining the ammonia water supply concentration comprises a main control unit and a second control valve, wherein the main control unit comprises a touch panel, and the touch panel is connected with the first control valve.
As an option, the nitrogen make-up gas discharge pipeline is 1/4' PFA451HP pipe.
As an option, the nitrogen make-up gas discharge line is 1/4' PFA 951HP pipe.
As an option, an ammonia water supply tank for maintaining the supply concentration of ammonia water, the restriction hole is a PFA451HP hole, and the diameter of the restriction hole is 4 mm.
As an option, an ammonia supply tank for maintaining the ammonia supply concentration, the pneumatic valve is 1/4 "PFA 451HP valve.
As an option, the ammonia water supply cabinet for maintaining the ammonia water supply concentration comprises two raw liquid tanks, and each raw liquid tank is respectively connected with one nitrogen gas make-up discharge pipeline.
As an option, an ammonia water supply cabinet for maintaining the supply concentration of ammonia water is provided, and a second control valve is arranged on the nitrogen pipeline.
It should be further noted that the technical features corresponding to the above options can be combined with each other or replaced to form a new technical solution.
Compared with the prior art, the utility model has the beneficial effects that:
(1) according to the utility model, the flow limiting hole is arranged between the nitrogen gas supplementing discharge pipeline and the exhaust pipeline, so that the air flow in the nitrogen gas supplementing discharge pipeline is limited, the air flow in the nitrogen gas supplementing discharge pipeline is reduced, the volatilization speed of ammonia water can be slowed down, further, the pneumatic valve is arranged between the nitrogen gas supplementing discharge pipeline and the raw liquid tank, the continuous volatilization of the ammonia water is effectively prevented during the non-operation period of the ammonia water supply cabinet, the volatilization of the ammonia water can be slowed down due to the use of the flow limiting hole and the pneumatic valve, the concentration retention time of the ammonia water in the supply process is prolonged, and the yield of products of a production line is ensured.
(2) The ammonia water supply cabinet can keep the concentration of ammonia water without using an auxiliary storage tank, solves the problems of large occupied area, high investment cost and high later maintenance cost caused by the auxiliary storage tank, and partial enterprises only use the ammonia water supply cabinet to directly supply ammonia water to a production line, so that the ammonia water supply cabinet is wide in audience and high in practicability.
(3) Still be equipped with in the aqueous ammonia supply cabinet and be used for controlling the main control unit of first control valve, when the aqueous ammonia supply cabinet does not operate, the main control unit control first control valve is in the closed condition, and the pneumatic valve is closed, and when the operation of aqueous ammonia supply cabinet and tonifying qi, the main control unit control first control valve is in the open mode, and nitrogen gas passes through the air supply pipeline and reaches the pneumatic valve, opens the pneumatic valve, realizes the automatic control to the pneumatic valve.
Drawings
FIG. 1 is a schematic diagram of an ammonia supply tank for maintaining the ammonia supply concentration according to the present invention;
FIG. 2 is a schematic diagram of the structure of the ammonia water supply tank with a main control unit and a second control valve according to the present invention.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that directions or positional relationships indicated by "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like are directions or positional relationships described based on the drawings, and are only for convenience of description and simplification of description, and do not indicate or imply that the device or element referred to must have a specific orientation, be configured and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
According to the utility model, the flow limiting hole 16 is mainly arranged between the nitrogen gas supplementing discharge pipeline 12 and the exhaust pipeline 13, the pneumatic valve 15 is arranged between the nitrogen gas supplementing discharge pipeline 12 and the raw liquid tank 14, the continuous volatilization of ammonia water during the non-operation period of the ammonia water supply cabinet 1 is effectively prevented, the flow limiting hole 16 and the pneumatic valve 15 are used, the volatilization of the ammonia water can be slowed down, the concentration retention time of the ammonia water in the supply process is prolonged, and the yield of production line products is ensured.
Example 1
In an exemplary embodiment, an ammonia water supply tank for maintaining the supply concentration of ammonia water is provided, as shown in fig. 1, the ammonia water supply tank 1 includes a raw liquid tank 14 for containing ammonia water, a nitrogen gas line 11 for supplying gas, a nitrogen gas supply discharge line 12, and an exhaust line 13; the nitrogen pipeline 11 is connected with the raw liquid tank 14; one end of the nitrogen gas supplementing discharge pipeline 12 is connected between the raw liquid tank 14 and the nitrogen pipeline 11, and the other end of the nitrogen gas supplementing discharge pipeline 12 is connected with the air draft pipeline 13;
a pneumatic valve 15 is arranged on the nitrogen gas supplementing discharge pipeline 12 close to the raw liquid tank 14, and a flow limiting hole 16 is arranged on the nitrogen gas supplementing discharge pipeline 12 close to the air draft pipeline 13;
the ammonia water supply cabinet 1 further comprises a first control valve 17 and a gas source pipeline 18, wherein the first control valve 17 is connected with the pneumatic valve 15 through the gas source pipeline 18.
Specifically, the nitrogen line 11 is one of a nitrogen seal and a liquid supply power source, and in the process of supplying nitrogen, in order to prevent excessive pressure during nitrogen supply, excessive nitrogen overflows from a loop, i.e., a nitrogen supply discharge line 12, to an exhaust line 13, and ammonia volatilizes along with the gas flow in the process.
Ammonia water supply cabinet 1 belongs to the attached independent equipment of no storage tank, its nitrogen gas tonifying qi exhaust pipe 12 is in the through state with exhaust pipeline 13, when ammonia water supply cabinet 1 operation and need supply nitrogen gas to the pipeline in, nitrogen gas pipeline 11 switch-on, input nitrogen gas, open first control valve 17, at this moment, nitrogen gas passes through air supply pipeline 18 and reaches pneumatic valve 15, under gaseous effect, pneumatic valve 15 opens, let nitrogen gas tonifying qi discharge pipeline 12 discharge unnecessary nitrogen gas, when the nitrogen gas of getting rid of reachs restricted aperture 16, restrict the air current in nitrogen gas tonifying qi discharge pipeline 12 through restricted aperture 16, reduce nitrogen gas tonifying qi discharge pipeline 12 air current volume, can slow down the volatile speed of aqueous ammonia.
Further, when the ammonia water supply cabinet 1 is not in operation, the nitrogen pipeline 11 is not communicated, the first control valve 17 is closed, at this time, the pneumatic valve 15 is closed, and the nitrogen gas supplementing discharge pipeline 12 is in a closed state, so that continuous volatilization of ammonia water during the period that the ammonia water supply cabinet 1 is not in operation is effectively prevented. The use of restricted aperture 16 and pneumatic valve 15 can slow down the volatilization of aqueous ammonia, improves the concentration hold time of aqueous ammonia in the supply process to guarantee the yields of production line product.
Furthermore, the ammonia water supply cabinet 1 can keep the concentration of ammonia water by using the auxiliary storage tank, the problems of large occupied area, high investment cost and high later maintenance cost caused by the auxiliary storage tank are solved, and partial enterprises only use the ammonia water supply cabinet to directly supply ammonia water to a production line, so that the ammonia water supply cabinet is wide in audiences and high in practicability.
Example 2
Based on embodiment 1, an ammonia water supply tank for maintaining the supply concentration of ammonia water is provided, as shown in fig. 2, a main control unit 19 for controlling the first control valve 17 is further disposed in the ammonia water supply tank 1.
Specifically, the main control unit 19 is provided with a new control and operation program, and the main control unit 19 may be an independent control logic or a new control logic added on the basis of an original program logic. When the ammonia water supply cabinet is not operated, the main control unit controls the first control valve to be in a closed state, the pneumatic valve is closed, when the ammonia water supply cabinet is operated and air is supplemented, the main control unit controls the first control valve to be in an open state, nitrogen reaches the pneumatic valve through the air source pipeline, the pneumatic valve is opened, and automatic control of the pneumatic valve is achieved.
Further, the first control valve 17 is a solenoid valve.
Further, the main control unit 19 includes a touch panel, the touch panel is connected to the first control valve 17, and the electromagnetic valve can be controlled by manual operation using a touch screen, so that the function of setting the corresponding time for opening and closing the pneumatic valve 15 can be satisfied.
Further, the nitrogen make-up gas discharge piping 12 is 1/4 "PFA 451HP pipe, where 1/4" denotes pipe diameter size and PFA451HP denotes piping material.
Further, the nitrogen make-up gas discharge line 12 may also be an 1/4 "PFA 951HP pipe.
Further, the flow restriction hole 16 is a PFA451HP hole, and the diameter of the flow restriction hole 16 is 4 mm.
Further, the air-operated valve 15 is an 1/4 "PFA 451HP valve.
Further, as shown in fig. 2, the ammonia water supply cabinet 1 includes two raw liquid tanks 14, each raw liquid tank 14 is connected to one of the nitrogen make-up gas discharge pipelines 12, it should be noted that the number of the raw liquid tanks 14 and the nitrogen make-up gas discharge pipelines 12 is not limited here, and the number can be set according to actual needs. The number of open or close make-up air discharge lines 12 can be controlled by the main control unit 19, and is not necessarily limited to open or close.
Furthermore, a second control valve 20 is arranged on the nitrogen pipeline 11, so that the flexibility of the system is further improved through the second control valve 20, and automation can be realized.
The above detailed description is for the purpose of describing the utility model in detail, and it should not be construed that the detailed description is limited to the description, and it will be apparent to those skilled in the art that various modifications and substitutions can be made without departing from the spirit of the utility model.
Claims (10)
1. An ammonia water supply cabinet for maintaining the supply concentration of ammonia water is characterized in that the ammonia water supply cabinet (1) comprises a raw liquid tank (14) for containing ammonia water, a nitrogen pipeline (11) for supplementing air, a nitrogen supplementing discharge pipeline (12) and an exhaust pipeline (13); the nitrogen pipeline (11) is connected with the raw liquid tank (14); one end of the nitrogen gas supplementing discharge pipeline (12) is connected between the raw liquid tank (14) and the nitrogen pipeline (11), and the other end of the nitrogen gas supplementing discharge pipeline (12) is connected with the air draft pipeline (13);
a pneumatic valve (15) is arranged on the nitrogen gas supplementing discharge pipeline (12) close to the raw liquid tank (14), and a flow limiting hole (16) is arranged on the nitrogen gas supplementing discharge pipeline (12) close to the air draft pipeline (13);
the ammonia water supply cabinet (1) further comprises a first control valve (17) and an air source pipeline (18), and the first control valve (17) is connected with the air-operated valve (15) through the air source pipeline (18).
2. An ammonia supply tank for maintaining the supply concentration of ammonia according to claim 1, wherein a main control unit (19) for controlling the first control valve (17) is further provided in the ammonia supply tank (1).
3. An ammonia supply tank for maintaining the supply concentration of ammonia according to claim 1, characterized in that said first control valve (17) is a solenoid valve.
4. An ammonia supply cabinet for maintaining the supply concentration of ammonia according to claim 2, wherein the main control unit (19) comprises a touch panel connected to the first control valve (17).
5. An ammonia supply cabinet for maintaining the supply concentration of ammonia according to claim 1, wherein the nitrogen make-up gas discharge line (12) is a PFA451HP pipe.
6. An ammonia supply cabinet for maintaining the supply concentration of ammonia according to claim 1, wherein said nitrogen make-up gas discharge line (12) is a PFA 951HP pipe.
7. An ammonia supply tank for maintaining the supply concentration of ammonia according to claim 1, wherein said flow restriction hole (16) is a PFA451HP hole, and the diameter of said flow restriction hole (16) is 4 mm.
8. An ammonia supply tank for maintaining the supply concentration of ammonia according to claim 1, wherein said pneumatic valve (15) is a PFA451HP valve.
9. An ammonia supply tank for maintaining the supply concentration of ammonia according to claim 1, wherein said ammonia supply tank (1) comprises two raw liquid tanks (14), each raw liquid tank (14) being connected to one of said nitrogen make-up gas discharge lines (12).
10. An ammonia supply tank for maintaining the supply concentration of ammonia according to claim 1, characterized in that said nitrogen line (11) is provided with a second control valve (20).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122569636.6U CN215951121U (en) | 2021-10-25 | 2021-10-25 | Ammonia water supply cabinet capable of keeping ammonia water supply concentration |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122569636.6U CN215951121U (en) | 2021-10-25 | 2021-10-25 | Ammonia water supply cabinet capable of keeping ammonia water supply concentration |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215951121U true CN215951121U (en) | 2022-03-04 |
Family
ID=80410790
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122569636.6U Active CN215951121U (en) | 2021-10-25 | 2021-10-25 | Ammonia water supply cabinet capable of keeping ammonia water supply concentration |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215951121U (en) |
-
2021
- 2021-10-25 CN CN202122569636.6U patent/CN215951121U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN215951121U (en) | Ammonia water supply cabinet capable of keeping ammonia water supply concentration | |
| CN104928650A (en) | Liquid metal organic compound supply system | |
| CN203127523U (en) | Anti-blocking adjustable automatic distributor | |
| CN107219868A (en) | A kind of remote high-precision CO applied to open top type air chamber2Concentration automatic control system | |
| CN206535212U (en) | Liquid ammonia evaporation system | |
| CN106729912A (en) | There is system and its method of work in a kind of many perfume atmosphere | |
| CN220413447U (en) | RH vacuum treatment circulating gas adjusting and controlling device | |
| CN201805137U (en) | High power fast-flow axis CO2 laser continuous gas supply device | |
| CN213132564U (en) | Quick start system for preparing qualified nitrogen through pressure swing adsorption | |
| CN210188785U (en) | Intelligent electronic instrument capable of saving welding gas | |
| CN114413174A (en) | High-efficiency hydrogen recovery device and recovery method | |
| CN207349790U (en) | A kind of scene supply automatic switchover back-up system device | |
| CN201155924Y (en) | Dew-point corrosion resistant residual heat recovering system | |
| CN105435711B (en) | Quantitative at the uniform velocity glue filling device | |
| CN218951242U (en) | Energy-saving and environment-friendly device for shielding gas of electronic glass tin bath | |
| CN201398322Y (en) | Automatic pressure maintaining device for edible fungi liquid seed production fermenter | |
| CN214219838U (en) | Water saving fixtures of DBC surface treatment production line | |
| CN218146707U (en) | Pipeline type water body temperature adjusting device | |
| CN207309737U (en) | A kind of vacuum system polishing fluid reflux | |
| CN215713095U (en) | Blast furnace tuyere accident-proof slag-filling blast pipe air-distributing structure | |
| CN215315715U (en) | Humidifier is used in production of passivation aluminite powder | |
| CN206309987U (en) | A kind of uninterrupted valve group | |
| CN205084426U (en) | Solid -state naoh production facility and falling liquid film pipe | |
| CN203955031U (en) | A kind of bio-filtration deodorization cleaning system | |
| CN204469540U (en) | A kind of automatic water-replenishing device of desulfurizer humidifier |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |