CN215945474U - Lower version transfer device of mask version - Google Patents
Lower version transfer device of mask version Download PDFInfo
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- CN215945474U CN215945474U CN202121937536.8U CN202121937536U CN215945474U CN 215945474 U CN215945474 U CN 215945474U CN 202121937536 U CN202121937536 U CN 202121937536U CN 215945474 U CN215945474 U CN 215945474U
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Abstract
The utility model discloses a lower plate transfer device of a mask plate, which comprises a transfer platform, and a front support assembly, a rear support assembly, a left support assembly and a right support assembly which are arranged on the transfer platform and are arranged in a central symmetry manner, wherein the front support assembly and the rear support assembly are arranged oppositely and perform synchronous opposite or separated motion, and the left support assembly and the right support assembly are arranged oppositely and perform synchronous opposite or separated motion; the front support assembly, the rear support assembly, the left support assembly and the right support assembly form a horizontal support surface for placing a mask plate; the transfer platform is also provided with an anti-falling supporting assembly, the anti-falling supporting assembly comprises a plurality of supporting rods which are vertically arranged on the transfer platform, and the top ends of the supporting rods are positioned at the lower part of the horizontal supporting surface; the lower plate transfer device disclosed by the utility model realizes the temporary storage of the high-precision lower plates of mask plates with different sizes, is convenient for manual operation of personnel, reduces the action of the personnel for lower plate, reduces the risk of polluting the mask plates and improves the product quality.
Description
Technical Field
The utility model belongs to the field of mask production equipment, and particularly relates to a lower plate transfer device of a mask.
Background
The photolithography mask is a key link in the whole semiconductor industry, and with the rapid development of the semiconductor industry, the demand of the photolithography mask is increased. The mask plate manufacturing has higher requirements on the cleanliness of a production workshop and reaches the standard of ISOClass4, namely a 10-grade purification workshop. Therefore, in order to ensure the quality of the product, the human participation or the steps of the human operation are reduced as much as possible. At present, most of domestic mask plate manufacturing plants finish the manufacturing of a mask plate meeting the requirements of customers by purchasing mask plate raw materials (a glass substrate with photoresist and a chromium layer) and then performing processes such as exposure, development, etching, inspection, measurement and the like. Whether the semi-automatic production line or the automatic production line of the mask plate relates to the boxing of the mask plate. Most of the semi-automatic production lines adopt the Load of the equipment to carry out edition downloading. When the mask plate is placed down, the mask plate is in an inclined state, personnel are needed to manually adjust the mask plate from the inclined state to a horizontal state, and then the mask plate is placed in a box, so that the risk of polluting the mask plate is increased. And the lower version device of automation line relates to electric automatization, and the mechanism is complicated, and the cost is higher, finally also needs personnel to lift the mask version and put into the box.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a lower plate transfer device of a mask plate, which realizes temporary storage of high-precision lower plates of mask plates with different sizes, is convenient for manual operation of personnel, reduces the action of the personnel for lower plate, reduces the risk of polluting the mask plate and improves the product quality.
The utility model relates to a lower plate transfer device of a mask plate, which comprises a transfer platform, and a front support assembly, a rear support assembly, a left support assembly and a right support assembly which are arranged on the transfer platform and are arranged in a central symmetry manner, wherein the front support assembly and the rear support assembly are arranged oppositely and perform synchronous opposite or separated motion, and the left support assembly and the right support assembly are arranged oppositely and perform synchronous opposite or separated motion;
the front supporting assembly, the rear supporting assembly, the left supporting assembly and the right supporting assembly respectively comprise a mounting base and two supporting feet symmetrically arranged on the mounting base, and the eight supporting feet form a horizontal supporting surface for placing a mask plate;
still be provided with on the transfer platform and prevent falling supporting component, prevent falling supporting component include a plurality of be vertical state install in bracing piece on the transfer platform, the bracing piece top is located horizontal holding surface lower part.
Preferably, a first screw rod and a second screw rod are arranged on the transfer platform in a cross shape, the first screw rod is a bidirectional screw rod and comprises a front section screw rod and a rear section screw rod which are oppositely arranged and connected into a whole, the front support assembly and the rear support assembly are respectively sleeved on the front section screw rod and the rear section screw rod, and the connecting positions of the front section screw rod and the rear section screw rod are superposed with the center of the horizontal support surface;
the second screw rod comprises a left section screw rod and a right section screw rod which are arranged in a central symmetry manner and are separated from each other along a horizontal supporting surface, the left section screw rod and the right section screw rod are respectively arranged on two sides of the first screw rod, and the left supporting assembly and the right supporting assembly are respectively sleeved on the left section screw rod and the right section screw rod; and a synchronous connecting component for realizing synchronous rotation of the left section screw rod and the right section screw rod is connected between the left section screw rod and the right section screw rod.
Preferably, synchronous connection subassembly is including setting up respectively lead screw synchronizing wheel on left side section lead screw and the right side section lead screw, two the lead screw synchronizing wheel respectively drives a driven synchronizing wheel, two through a synchronous belt fixedly connected with one between the driven synchronizing wheel connects the pivot, connect the pivot by first lead screw lower part is passed.
Preferably, one end of the first screw rod and one end of the second screw rod are fixedly connected with a first rotary table and a second rotary table respectively.
Preferably, the transit platform is circular, two steel structures are arranged on the transit platform in a cross shape, and the length of each steel structure is greater than the diameter of the transit platform; the two steel structures are uniformly provided with two I-shaped steels respectively, a space is arranged between the two opposite I-shaped steels, and the connecting rotating shaft passes through the space.
Preferably, four be provided with the scale on the I-steel respectively, four the scale uses horizontal holding surface center to be central symmetry form setting, four the zero scale of scale is horizontal holding surface central point and puts.
Preferably, the cross sections of the eight supporting legs are L-shaped, and each supporting leg comprises a horizontal bottom surface forming a horizontal supporting surface and a vertical limiting surface vertical to the horizontal bottom surface; when in supporting, the depth of the horizontal bottom surface is not more than 10 mm; the distance between the two supporting feet on the same mounting base is 280 mm-320 mm.
Preferably, the height of the horizontal supporting surface is 840 mm-880 mm, and the top end of the supporting rod is positioned at the position of 8 mm-12 mm at the bottom of the horizontal supporting surface.
Preferably, the bottom of the transfer platform is provided with universal wheels and liftable feet.
The lower plate transfer device of the mask plate has the advantages that:
1. through setting up preceding supporting component and back supporting component and left supporting component and the right supporting component that synchronous looks or separated from each other, form a horizontal holding surface, realize keeping in behind the mask version, and realize the level of mask version and place and keep in, place in the box by artifical manual behind keeping in a certain amount of mask version, reduce artifical participation number of times in the mask version, reduce artifical adjustment number of times to the mask version, reduce personnel's action of keeping in the version, reduce the risk of polluting the mask version, improve the product quality.
2. The transfer device realizes pure mechanical operation and has no electric device, and aims to provide a method and a device with low cost for realizing the temporary storage function of masks with different sizes under high precision, low cost and wide application.
3. Prevent falling supporting component's setting, ensure the safety of mask version, if place the skew problem at putting the version in-process, also can ensure that the mask version can not drop to ground.
Drawings
FIG. 1 is a schematic view of a lower plate transfer device of a mask plate according to the present invention,
figure 2 is a schematic view of the supporting leg structure in this embodiment,
figure 3 is a schematic structural diagram of the synchronization connection assembly according to the present embodiment,
FIG. 4 is a schematic view showing a state in which a reticle is supported.
Detailed Description
In order to facilitate the understanding of the technical solutions of the present invention for those skilled in the art, the technical solutions of the present invention will be further described with reference to the drawings attached to the specification.
First of all, it is clear that: in this technical solution, the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "lateral", "longitudinal", etc. indicate the orientation or positional relationship indicated based on the orientation or positional relationship shown in the drawings, which is only for convenience of describing and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present application. As shown in fig. 1, the position directions of "front", "rear", "left" and "right" are clearly identified. In general operation, we assume that the operator stands in a "forward directional position with the face facing a" rearward "directional position.
Referring to fig. 1, the lower plate transfer device for a mask plate according to the technical solution of the present invention includes a transfer platform 11, and a front support assembly F, a rear support assembly B, a left support assembly L, and a right support assembly R disposed on the transfer platform 11 and in a central symmetry shape. The front supporting assembly F and the rear supporting assembly B are oppositely arranged and move synchronously to the same phase or away from the same phase, and the left supporting assembly L and the right supporting assembly R are oppositely arranged and move synchronously to the same phase or away from the same phase. Preceding supporting component F, back supporting component B, left supporting component L and right supporting component R all include installation base 1 and the symmetry set up two supporting legs 2 on installation base 1, and eight supporting legs form a horizontal holding surface that is used for placing the mask version.
Based on the technical scheme, a horizontal supporting surface is formed by arranging the front supporting component F, the rear supporting component B, the left supporting component L and the right supporting component R which are synchronously opposite or separated, and the mask plate is temporarily stored after being placed. The horizontal placement and temporary storage of the mask are realized, and the mask is manually placed in the box body after a certain amount of mask is temporarily stored, so that the number of times of manual participation in the mask is reduced, the number of times of manual adjustment on the mask is reduced, the number of actions of personnel on the mask is reduced, the risk of polluting the mask is reduced, and the product quality is improved. The transfer device realizes pure mechanical operation and has no electric device, and aims to provide a method and a device with low cost for realizing the temporary storage function of masks with different sizes under high precision, low cost and wide application.
Among this technical scheme, preceding supporting component F, back supporting component B, left supporting component L and right supporting component R centrosymmetric set up, when keeping in mask version, mask version center and the coincidence of horizontal holding surface center for mask version is placed in the same position with the same gesture always, and the in-process of putting down the version at the mask version, the adjustment version operation process of having avoided the mask version to put into the box in-process appearance under the mask version has reduced the pollution, improves the quality of mask version. And the transfer device of the lower edition in the technical scheme of the plate adopts mechanical operation, has low cost and is beneficial to popularization and use.
In the technical scheme, the height of the horizontal supporting surface is 840 mm-880 mm, the horizontal supporting surface accords with human engineering, is convenient for operators to operate, does not need the operators to frequently bow, and reduces labor intensity. The universal wheels and the liftable anchor feet are arranged at the bottom of the transfer platform, so that the whole transfer device for the edition unloading can be moved or lifted conveniently, and the transfer platform is suitable for operators with different heights or habits to use or operate.
As shown in fig. 1, the transfer platform 11 is further provided with an anti-falling support assembly, the anti-falling support assembly includes a plurality of support rods 21 vertically installed on the transfer platform, and the top ends of the support rods 21 are located at the lower part of the horizontal support surface. Specifically, the top of bracing piece 21 is located horizontal holding surface bottom 8mm ~ 12mm position, and the effectual bracing piece 21 of having avoided takes place to interfere with the mask version of arranging in on the horizontal holding surface, avoids the problem that the mask version crossed location or excessively supported, ensures to place the stability of the mask version of keeping in on this version transfer device down.
Based on the technical scheme, as shown in fig. 1 and fig. 2, the cross sections of the eight supporting legs forming the horizontal supporting surface are all L-shaped, and each eight supporting leg comprises a horizontal bottom surface 201 forming the horizontal supporting surface and a vertical limiting surface 202 perpendicular to the horizontal bottom surface 201. When the mask plate after being placed down is supported, the mask plate is placed on the horizontal bottom surface 201, that is, the eight horizontal bottom surfaces 201 support the mask plate. The depth of the horizontal bottom surface 201 is not more than 10mm, namely, the depth of the horizontal bottom surface 201 extending to the bottom surface of the mask is not more than 10mm, so that when the mask is supported, the problem that the large horizontal bottom plate 201 can pollute the early layer of the mask or the small-sized mask cannot be placed temporarily is avoided. The setting of vertical spacing face 202, after the mask version is supported, the realization presss from both sides tightly the mask version, further ensures the stability of mask version. In the technical scheme, the distance between the two supporting pins on the same mounting base 1 is 280-320 mm, so that the distance between the two supporting pins is reduced while the stable support of the mask is ensured, and the small-sized mask is conveniently supported.
As shown in fig. 1, the transfer platform 11 is provided with a first lead screw 78 and a second lead screw in a cross shape. The first screw rod 78 is a bidirectional screw rod and comprises a front section screw rod and a rear section screw rod which are oppositely arranged and connected into a whole, the front support component F and the rear support component B are respectively sleeved on the front section screw rod and the rear section screw rod, and the connecting positions of the front section screw rod and the rear section screw rod are coincided with the center of a horizontal supporting surface. The first screw rod 78, the front supporting component F and the rear supporting component B move synchronously in the opposite direction or in the opposite direction, and the central points of the front supporting component F and the rear supporting component B are superposed with the horizontal supporting surface, so that the central position of the supported mask plate is always ensured to be fixed.
As shown in fig. 1, in the present embodiment, the second lead screw includes a left lead screw 31 and a right lead screw 41 that are separated and arranged in a central symmetry manner with respect to the horizontal supporting surface, and the left lead screw 31 and the right lead screw 41 are respectively arranged at two sides of the first lead screw 78. The left supporting component L and the right supporting component R are respectively sleeved on the left section screw rod 31 and the right section screw rod 41. A synchronous connection assembly 6 for realizing synchronous rotation of the left section screw rod 31 and the right section screw rod 41 is connected between the left section screw rod 31 and the right section screw rod 41. The left section screw rod 31 and the right section screw rod 41 realize synchronous rotation through the synchronous connection assembly, so that the left support assembly L and the right support assembly R synchronously move in opposite directions or away from each other, the center points of the left support assembly L and the right support assembly R coincide with the horizontal support surface, and the center position of the supported mask plate is always ensured to be fixed.
Through the synchronous rotation of the front supporting component F, the rear supporting component B, the left supporting component L and the right supporting component R, the mask is placed on the plate transfer device at a fixed central position.
As shown in fig. 1 and fig. 3, the synchronous connection assembly 6 includes screw rod synchronizing wheels 61 respectively disposed on the left and right screw rods 41, the two screw rod synchronizing wheels 61 respectively drive a driven synchronizing wheel 63 through a synchronizing belt 62, and a connection rotating shaft 64 is fixedly connected between the two driven synchronizing wheels 63. The mechanism composed of the synchronous belt and the synchronous wheel can effectively ensure that the left section screw rod 31 and the right section screw rod 41 rotate synchronously.
The connecting shaft 64 is penetrated by the lower part of the first screw rod 78 to avoid interference.
As shown in fig. 1, one end of each of the first lead screw 78 and the second lead screw is fixedly connected with the first rotary plate 73 and the second rotary plate 33.
As shown in FIG. 1, the transfer platform 11 is circular and two steel structures 12 are installed on the transfer platform in a cross shape, and the length of the steel structures 12 is larger than the diameter of the transfer platform 11. The arrangement of the technical scheme ensures that the mask plate with larger size can be supported and circulated, and simultaneously reduces or reduces the size and the volume of the transfer platform 11 as much as possible, so that the cost is saved on one hand, and the transfer platform 11 is convenient to carry and install on the other hand. In the case that the diameter of the transfer platform 11 is small, the first lead screw 78 and the second lead screw are ensured to have enough length and moving distance, and the mask plate with larger size can be supported and rotated.
The two steel structures 12 are respectively provided with two I-beams 13, a space is arranged between the two opposite I-beams 13, and the connecting rotating shaft 64 passes through the space. The arrangement of the space between the two opposite I-shaped steels 13 is convenient for the arrangement of structural components such as screw rods and the like,
the four H-shaped steel 12 is respectively provided with the scales 72, the four scales 72 are arranged in a central symmetry manner by using the center of the horizontal supporting surface, and the zero scales of the four scales 72 are the center of the horizontal supporting surface.
In the technical scheme, as shown in fig. 1, the lower plate transfer device of the mask plate in the technical scheme of the utility model is used for carrying out turnover support on the mask plate: first, according to the size of the mask 100, the first turntable 73 and the second turntable 33 are respectively rotated, so that the first lead screw 78 and the second lead screw are rotated, and the positions of the front support assembly F, the rear support assembly B, the left support assembly L and the right support assembly R are determined. Then, respectively manually operating the first rotating disc 73 and the second rotating disc 33, adjusting the distance between the front supporting assembly F and the rear supporting assembly B to be the longitudinal size of the mask plate plus 2mm, and enabling the distance between the front supporting assembly F and the rear supporting assembly B to be equal to the center distance between the front supporting assembly F and the rear supporting assembly B and the horizontal supporting surface; the distance between the left supporting component L and the right supporting component R is adjusted to be the horizontal size of the mask plate plus 2mm, and the distance between the left supporting component L and the right supporting component R is equal to the distance between the center of the horizontal supporting surface. And then, horizontally placing the mask on a horizontal supporting surface consisting of the front supporting assembly F, the rear supporting assembly B, the left supporting assembly L and the right supporting assembly R. Finally, after the mask plate 100 is placed on the lower plate transfer device, an operator can directly place the mask plate in the packaging box by hand lifting or horizontally placing the mask plate by the clamp without adjusting the angle of the mask plate.
Technical solution of the utility model the present invention is described above with reference to the accompanying drawings by way of example, and it is to be understood that the specific implementation of the present invention is not limited to the above-described embodiments, and it is within the scope of the present invention to employ various insubstantial modifications of the method concept and technical solution of the present invention, or to directly apply the concept and technical solution of the present invention to other applications without modification.
Claims (9)
1. A lower plate transfer device of a mask plate is characterized by comprising a transfer platform, and a front support assembly, a rear support assembly, a left support assembly and a right support assembly which are arranged on the transfer platform and are arranged in a central symmetry manner, wherein the front support assembly and the rear support assembly are arranged oppositely and move synchronously in the opposite direction or in the opposite direction, and the left support assembly and the right support assembly are arranged oppositely and move synchronously in the opposite direction or in the opposite direction;
the front supporting assembly, the rear supporting assembly, the left supporting assembly and the right supporting assembly respectively comprise a mounting base and two supporting feet symmetrically arranged on the mounting base, and the eight supporting feet form a horizontal supporting surface for placing a mask plate;
still be provided with on the transfer platform and prevent falling supporting component, prevent falling supporting component include a plurality of be vertical state install in bracing piece on the transfer platform, the bracing piece top is located horizontal holding surface lower part.
2. The mask plate lower plate transfer device according to claim 1, wherein a first lead screw and a second lead screw are arranged on the transfer platform in a cross shape, the first lead screw is a bidirectional lead screw and comprises a front section lead screw and a rear section lead screw which are oppositely arranged and connected into a whole, the front support assembly and the rear support assembly are respectively sleeved on the front section lead screw and the rear section lead screw, and the connecting position of the front section lead screw and the rear section lead screw is coincided with the center of the horizontal support surface;
the second screw rod comprises a left section screw rod and a right section screw rod which are arranged in a central symmetry manner and are separated from each other along a horizontal supporting surface, the left section screw rod and the right section screw rod are respectively arranged on two sides of the first screw rod, and the left supporting assembly and the right supporting assembly are respectively sleeved on the left section screw rod and the right section screw rod; and a synchronous connecting component for realizing synchronous rotation of the left section screw rod and the right section screw rod is connected between the left section screw rod and the right section screw rod.
3. The mask plate lower plate transfer device according to claim 2, wherein the synchronous connection assembly comprises screw synchronous wheels respectively disposed on the left screw and the right screw, each screw synchronous wheel drives a driven synchronous wheel through a synchronous belt, a connection rotating shaft is fixedly connected between the driven synchronous wheels, and the connection rotating shaft is penetrated by a lower portion of the first screw.
4. The lower plate transfer device of the mask plate according to claim 2, wherein one end of the first screw rod and one end of the second screw rod are fixedly connected with a first turntable and a second turntable respectively.
5. The lower plate transfer device of the mask plate according to claim 1, wherein the transfer platform is circular and is provided with two steel structures in a cross shape, and the length of the steel structures is greater than the diameter of the transfer platform; the two steel structures are uniformly provided with two I-shaped steels respectively, a space is arranged between the two opposite I-shaped steels, and the connecting rotating shaft passes through the space.
6. The lower plate transfer device of the mask plate according to claim 5, wherein the four I-shaped steels are respectively provided with a scale, the four scales are arranged in a central symmetry manner by taking the center of the horizontal supporting surface as a center, and zero scales of the four scales are all the center of the horizontal supporting surface.
7. The transfer device of the lower plate of the mask plate according to claim 1, wherein the cross sections of the eight supporting legs are L-shaped, and each supporting leg comprises a horizontal bottom surface forming a horizontal supporting surface and a vertical limiting surface vertical to the horizontal bottom surface; when in supporting, the depth of the horizontal bottom surface is not more than 10 mm; the distance between the two supporting feet on the same mounting base is 280 mm-320 mm.
8. The lower plate transfer device of the mask plate according to claim 1, wherein the height of the horizontal support surface is 840 mm-880 mm, and the top end of the support rod is positioned at the bottom of the horizontal support surface by 8 mm-12 mm.
9. The mask plate lower plate transfer device according to claim 1, wherein a universal wheel and a liftable foot are arranged at the bottom of the transfer platform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121937536.8U CN215945474U (en) | 2021-08-18 | 2021-08-18 | Lower version transfer device of mask version |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121937536.8U CN215945474U (en) | 2021-08-18 | 2021-08-18 | Lower version transfer device of mask version |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215945474U true CN215945474U (en) | 2022-03-04 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121937536.8U Active CN215945474U (en) | 2021-08-18 | 2021-08-18 | Lower version transfer device of mask version |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215945474U (en) |
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2021
- 2021-08-18 CN CN202121937536.8U patent/CN215945474U/en active Active
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