CN215933526U - Gas-shielded scanning electron microscope sample box - Google Patents
Gas-shielded scanning electron microscope sample box Download PDFInfo
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- CN215933526U CN215933526U CN202121174012.8U CN202121174012U CN215933526U CN 215933526 U CN215933526 U CN 215933526U CN 202121174012 U CN202121174012 U CN 202121174012U CN 215933526 U CN215933526 U CN 215933526U
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Abstract
The utility model discloses a gas-shielded scanning electron microscope sample box, which comprises a box body, a sample rod and a connecting arm, wherein the sample rod comprises a first end and a second end, the first end is connected with the sample rod, the second end is connected with the sample rod, and the second end is connected with the sample rod: the box body is round or rectangular, a round or rectangular cavity is arranged in the box body, and the cavity is divided into a sample area and a sealing area; the sample rod is divided into a sample area, a sealing area and a fixing area, wherein the sample area of the sample rod is used for bearing and fixing a sample and can be inserted into the space of the sample area of the box body, and the two sealing areas can realize the isolation of the sample area from the outside air after the sample rod is inserted into the box body; one end of the connecting arm is connected with the box body, and the other end of the connecting arm is connected with the scanning electron microscope exchange bin. The sample area is protected by gas, and the isolation of the sample from air is realized. After the sample box is arranged in the exchange bin of the scanning electron microscope, two ends of the connecting arm are respectively connected and fixed with the box body and the exchange bin, and after the exchange bin reaches the vacuum degree set by the scanning electron microscope, the channel valve of the scanning electron microscope is opened to push the sample into the sample bin. The sample box protected by gas has simple process, easy manufacture and low cost.
Description
Technical Field
The utility model relates to the technical field of scanning electron microscopes, in particular to a gas-shielded scanning electron microscope sample box.
Background
Scanning electron microscopy is a common instrument used for analyzing the morphology and composition of a material sample. And (3) realizing morphology observation through secondary electron imaging, and analyzing the components of the sample by exciting characteristic X rays of the sample. Because electron propagation needs a certain vacuum degree, the test of the scanning electron microscope sample needs to be carried out under a certain vacuum condition. For a scanning electron microscope equipped with an exchange bin, firstly opening a placed sample of the exchange bin, and vacuumizing the exchange bin; after the exchange bin reaches a certain vacuum degree, opening a channel valve between the exchange bin and the sample bin of the scanning electron microscope, and pushing the sample into the sample bin at the certain vacuum degree through a channel; the detection operation is then started. Some samples are easy to react with oxygen or water in the air or absorb water in the air due to chemical or physical properties of the samples, so that real information of the samples cannot be acquired. Therefore, the sample can be isolated from air by the sample box with gas protection and sent into the sample cabin of the scanning electron microscope for testing.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a low-cost sample stage which is used for isolating a sample from air and entering a sample cabin of a scanning electron microscope through gas protection for the scanning electron microscope equipped with an exchange cabin.
The technical scheme adopted by the utility model is as follows: the utility model provides a gaseous scanning electron microscope sample box of protection, this sample box includes box body 1, sample pole 2 and linking arm 3, wherein:
the box body 1 is round or rectangular. The material is not limited, and the material has certain hardness. The height of the box body 1 is 2mm-200 mm; the length is between 10mm-200mm, a round or rectangular or other regular-shaped cavity, a sample dividing area and a sealing area are arranged in the box body 1, one end of the box body 1 is a closed end, and the other end of the box body is an opening which can be inserted with the sample rod 2.
The sample rod 2 is divided into a sample area, a sealing area and a fixing area. The sample area of the sample rod 2 is used for carrying and fixing a sample and can be inserted into the space of the sample area of the box body. The sealing area cross section size and shape are unanimous with the sealing area of box body 1, and after sample pole 2 inserted box body 1, the sealing area can be sealed the sample district, realizes that the sample is isolated with external gas. Meanwhile, the sealing effect is enhanced by adding a sealing O-ring in the sealing area or adding sealing gaskets at two ends of the sealing area. The fixed area is fixedly connected with a sample stage base 6 in the scanning electron microscope exchange bin 4 through screws or other detachable modes.
One end of the connecting arm 3 can be processed into a whole with the box cover or can be connected with the box cover through pasting or other modes, the connection is fixed connection or detachable connection, the other end is connected with the exchange bin 4 through pasting or screw fixation and other direct or indirect modes such as other accessories, the connection is fixed connection or detachable connection, but the two ends of the connecting arm 3 cannot be simultaneously fixed connection. The connecting arm 3 is not limited in material and has certain tensile strength. The length of the connecting arm 3 is between 5mm and 500 mm.
Further, according to the requirements of the sample preparation of the scanning electron microscope, the sample is fixed on the sample area of the sample rod 2, and the sample rod 2 is inserted into the box body 1.
Further, the sample box containing the sample is fixed on the sample table base 6 of the exchange chamber 4 through the fixing area of the sample rod 2.
Further, after the sample rod 2 is inserted into the box body 1, the sealing area can seal the sample area, so that the sample is isolated from the external gas, and meanwhile, the sealing effect is enhanced by increasing the sealing O rings in the sealing area or increasing the sealing gaskets at the two ends of the sealing area.
Further, on being fixed in sample platform base 6 in scanning electron microscope exchange storehouse 4 with the sample box, connect 3 one end of linking arm on box body 1, the other end is connected on the 4 storehouse bodies in exchange storehouse, closes the door.
Furthermore, the connection mode of the two ends of the connecting arm 3 is fixed connection or detachable connection, and the detachable connection is adhesive connection, bolt connection, buckle connection or clamping groove connection.
Furthermore, the detachable connection is a sticking connection, a bolt connection, a buckle connection or a clamping groove connection.
Further, the sample stage base 6 can be fixedly connected with the push rod 7 into a whole. After the vacuum degree of the scanning electron microscope exchange bin 4 reaches, a channel valve of the exchange bin 4 and a scanning electron microscope sample bin 5 is opened, a push rod 7 is pushed, the box body 1 is fixed with the exchange bin 4 through a connecting arm 3 and cannot move horizontally along with the push rod, and in the pushing process, the sample rod 2 is gradually pulled out from the box body 1 until being separated to enter the scanning electron microscope sample bin 5.
Compared with the prior art, the utility model has the advantages and positive effects that:
the sample box realizes the isolation of the sample from the air through gas protection. After the sample box is fixed on a sample table base in the exchange bin of the scanning electron microscope, the box body is connected to the bin body of the exchange bin through a connecting arm, a channel valve of the scanning electron microscope is opened after the exchange bin reaches the set vacuum degree of the scanning electron microscope, the exchange bin and the sample bin are already in the set vacuum degree of the scanning electron microscope at the moment, and a push rod is pushed to push the sample rod to the sample bin from the exchange bin in a translation mode. In the pushing process, the box body is connected to the exchange bin body through the connecting arm and cannot move horizontally along with the push rod, the sample rod is gradually pulled out from the box body until the sample rod is separated from the box body and enters the sample bin of the scanning electron microscope, and the sample is not influenced by air any more. The sample box using gas protection has the advantages of simple process, easy manufacture and low cost.
Drawings
FIG. 1 is a schematic view of a sample rod, a cartridge body and a connecting arm;
FIG. 2 is a schematic view of a sample cell placed in a scanning electron microscope exchange chamber;
FIG. 3 shows the box body pulled apart by the connecting arm during the process of pushing the sample rod into the sample chamber of the SEM.
In the figure, 1 is a box body, 2 is a sample rod, 3 is a connecting arm, 4 is a scanning electron microscope exchange bin, 5 is a scanning electron microscope sample bin, 6 is a sample table base, and 7 is a push rod.
Detailed Description
The utility model is further described with reference to the following figures and detailed description.
Aiming at a scanning electron microscope with an exchange bin, the utility model provides a gas-shielded scanning electron microscope sample box, which can enter a scanning electron microscope sample bin under the condition that a sample is isolated from air and can be observed and detected. This sample cartridge comprises three parts, a cartridge body 1, a sample rod 2 and a connecting arm 3.
1. A box body 1: the material is not limited, and the material has certain hardness. The height of the box body 1 is 2mm-200 mm; the length is between 10mm-200mm, a round or rectangular or other regular-shaped cavity, a sample dividing area and a sealing area are arranged in the box body 1, one end of the box body 1 is a closed end, and the other end of the box body is an opening which can be inserted into the sample rod 2.
2. The sample rod 2: a sample division area, a sealing area and a fixing area. The sample area of the sample rod 2 is used for bearing and fixing a sample and can be inserted into the space of the sample area of the box body; the size and the shape of the cross section of the sealing area are consistent with those of the sealing area of the box body, and the sealing areas can realize the isolation of the sample area from the outside air after the sample rod 2 is inserted into the box body; the fixed area can be fixedly connected with a sample stage base 6 in the scanning electron microscope exchange bin 4 through screws or other detachable modes.
3. Connecting arm 3: one end of the connecting arm 3 can be processed into a whole with the box body 1 or can be connected with the box body 1 by pasting or other modes, and can be fixedly connected and detachably connected, the other end can be directly connected with the exchange bin 4 by pasting or fixing screws or other indirect modes such as directly or through other accessories, and can be fixedly connected and detachably connected, but the two ends of the connecting arm 3 cannot be fixedly connected at the same time. The connecting arm 3 is not limited by materials and has certain tensile strength, and the length is between 5mm and 500 mm.
After the sample rod 2 is inserted into the box body 1, the sealing area can effectively seal the sample area, so that the sample is isolated from the external gas, and meanwhile, the sealing effect can be enhanced by increasing sealing O rings in the sealing area or increasing sealing gaskets at two ends of the sealing area.
Taking a circular sample box as an example, a schematic diagram of the box body 1, the sample rod 2 and the connecting arm 3 is shown in fig. 1.
As shown in fig. 2, the sample box with the sample is fixed on the sample table base 6 in the sem exchange chamber 4 through the fixing area of the sample rod 2, and the two ends of the connecting arm 3 are respectively connected to the box body 1 and the sem exchange chamber 4. The push rod 7 is connected and fixed with the base 6 into a whole.
As shown in fig. 3, after the vacuum degree of the sem exchange chamber 4 reaches, the passage valve between the sem exchange chamber 4 and the sem sample chamber 5 is opened, and the push rod 7 is pushed to push the sample rod 2 from the sem exchange chamber 4 to the sem sample chamber 5. In the pushing process, the box body 1 is connected to the bin body of the scanning electron microscope exchange bin 4 through the connecting arm 3 and cannot move horizontally along with the push rod 7, and the sample rod 2 is gradually pulled out of the box body 1 until being separated to enter the scanning electron microscope sample bin 5.
The operation mode is as follows: and selecting nitrogen or other inert protective gas according to the properties of the sample, and fixing the sample to be detected in the sample area of the sample rod 2 according to the requirement of the scanning electron microscope on sample fixation under a glove box or the like capable of providing gas protection environment. The sample rod 2 is inserted into the cartridge body 1. The sample cartridge is removed from the glove box or the protected environment. And opening the scanning electron microscope exchange bin 4, and fixing the sample box on a sample table base 6 in the scanning electron microscope exchange bin 4. The connecting arm 3 is connected to the case 1 (this connection can be avoided if the case 1 is already integrally formed with the connecting arm 3). The other end of the connecting arm 3 is connected to the scanning electron microscope exchange bin 4, and the scanning electron microscope exchange bin 4 is closed. And vacuumizing the scanning electron microscope exchange bin 4, opening a channel valve between the scanning electron microscope exchange bin 4 and the scanning electron microscope sample bin 5 after the vacuum degree is reached, and pushing the push rod 7 to horizontally push the sample rod 2 into the scanning electron microscope sample bin 5. And the subsequent operation steps are carried out according to the test operation of the scanning electron microscope.
Embodiment one, box 1: a polytetrafluoroethylene cylinder with the outer diameter of 24mm and the length of 53mm is adopted, wherein the inner diameter of a sealing area cavity is 18mm, the length of 37mm, the inner diameter of a sample area cavity is 10mm, and the length of 14 mm. A screw hole is formed in the outer side of the wall of the sealed end cylinder; the sample rod 2: the length of the sample area is 12mm, the width is 8mm, the thickness is 3mm, the diameter of the sealing area is 18mm, and the length is 37 mm; the diameter of the fixing area is 24mm, the length of the fixing area is 6mm, and screw holes are formed in the fixing area; connecting arm 3: the connecting arm is a stainless steel sheet with the thickness of 0.8mm, the width of 5mm and the length of 60mm, and two ends of the connecting arm 3 are provided with screw holes.
The sample is fixed to the sample area of the sample rod 2 in a nitrogen-protected glove box, the sample rod 2 is inserted into the box body 1, and the sample box containing the sample is taken out from the glove box. The test of this sample cell was carried out using a scanning electron microscope, model Gemini500, Zeiss, Germany.
1.1 the sample box is fixed on the sample table base 6 in the exchange chamber 4 of the scanning electron microscope by screws through the fixing area of the sample rod 2.
1.2 one end of the connecting arm 3 is fixedly connected with the box body 1 through a screw, and the other end is fixedly connected with the cabin body of the scanning electron microscope exchange cabin 4 through a screw.
1.3 treat that scanning electron microscope exchanges 4 vacuums in storehouse back, open the valve between storehouse 4 and the scanning electron microscope sample storehouse 5, utilize sample platform push rod 7 to push sample rod 2 in scanning electron microscope sample storehouse 5, can see out from the CCD camera in sample storehouse that sample rod 2 can be taken out and separate from box body 1 completely, reach the anticipated effect.
The above-described embodiments are merely illustrative of the preferred embodiments of the present invention, and the preferred embodiments are not exhaustive of all of the details, nor are they intended to limit the utility model to the precise embodiments described. Various modifications and improvements of the technical solution of the present invention may be made by those skilled in the art without departing from the spirit of the present invention, and the technical solution of the present invention is to be covered by the protection scope defined by the claims.
Claims (3)
1. The utility model provides a scanning electron microscope sample box of gas protection which characterized in that: this sample box includes box body (1), sample pole (2) and linking arm (3), wherein:
the box body (1) is round or rectangular; the height of the box body is 2mm-200 mm; the length is between 10mm and 200mm, a round or rectangular cavity is arranged in the box body (1) and is divided into a sample area and a sealing area, one end of the box body is a closed end, and the other end of the box body is an opening which can be inserted with a sample rod (2);
the sample rod (2) is divided into a sample area, a sealing area and a fixing area; the sample area of the sample rod (2) is used for bearing and fixing a sample and can be inserted into the space of the sample area of the box body; the size and the shape of the cross section of the sealing area are consistent with those of the sealing area of the box body (1), and the sealing areas of the sample rod (2) and the box body (1) can realize the isolation of the sample area from the outside air after the sample rod is inserted into the box body; the fixed area is fixedly connected with a sample table base (6) in the scanning electron microscope exchange bin (4) through screws;
one end of the connecting arm (3) is processed into a whole with the box cover or is connected with the box cover by pasting, the connection is fixed connection or detachable connection, the other end of the connecting arm is directly connected with the exchange bin (4) by pasting or screw fixation, the connection is fixed connection or detachable connection, but both ends of the connecting arm (3) cannot be fixed connection at the same time; the length of the connecting arm (3) is between 5mm and 500 mm.
2. A gas-shielded scanning electron microscope sample cell according to claim 1, wherein: after the sample rod (2) is inserted into the box body (1), the sealing area can seal the sample area, so that the sample is isolated from the external gas, and meanwhile, the sealing effect is enhanced by increasing the sealing O rings in the sealing area or increasing the sealing gaskets at the two ends of the sealing area.
3. A gas-shielded scanning electron microscope sample cell according to claim 1, wherein: sample platform base (6) and push rod (7) fixed connection are as an organic whole, and scanning electron microscope exchanges the passageway valve in storehouse (4) and scanning electron microscope sample storehouse (5) after the vacuum reachs, opens exchange the storehouse (4) and promote push rod (7), and box body (1) is fixed can not follow push rod (7) translation owing to pass through linking arm (3) with the exchange storehouse body, and in the promotion process, sample pole (2) are pulled out until the separation from the box body gradually.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121174012.8U CN215933526U (en) | 2021-05-28 | 2021-05-28 | Gas-shielded scanning electron microscope sample box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121174012.8U CN215933526U (en) | 2021-05-28 | 2021-05-28 | Gas-shielded scanning electron microscope sample box |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215933526U true CN215933526U (en) | 2022-03-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121174012.8U Active CN215933526U (en) | 2021-05-28 | 2021-05-28 | Gas-shielded scanning electron microscope sample box |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215933526U (en) |
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2021
- 2021-05-28 CN CN202121174012.8U patent/CN215933526U/en active Active
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