CN215925063U - Jig for wafer coating - Google Patents
Jig for wafer coating Download PDFInfo
- Publication number
- CN215925063U CN215925063U CN202121623519.7U CN202121623519U CN215925063U CN 215925063 U CN215925063 U CN 215925063U CN 202121623519 U CN202121623519 U CN 202121623519U CN 215925063 U CN215925063 U CN 215925063U
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- wafer
- hole
- clamping jaw
- adjusting screw
- guide rods
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model relates to a jig for coating a wafer. The clamping jaw comprises a body with a through hole in the middle, two guide rods movably penetrating through the body are arranged on two sides of the through hole respectively, a clamping jaw is arranged at one end of each guide rod in the through hole, a baffle and an elastic piece are arranged at the other end of each guide rod, the elastic pieces are sleeved on the guide rods and are positioned between the baffles and the outer wall of the body, an adjusting screw rod which is threaded through the body is arranged between the two guide rods, one end of the adjusting screw rod abuts against the clamping jaw, the other end of the adjusting screw rod is positioned on the outer side of the body, and the working surface of the clamping jaw is an arc-shaped concave surface with an opening facing the center of the through hole. The utility model has simple structure and convenient use, can realize full film coating on the surface of the wafer and improves the film coating quality of the wafer.
Description
Technical Field
The utility model relates to a jig for coating a wafer, and belongs to the technical field of wafer manufacturing.
Background
In the film coating process of the wafer, the wafer is fixed in a jig through a clamp, and the jig is placed in a film coating machine for wafer film coating. The utility model discloses a chinese utility model patent (patent number is ZL 201820328595.7) provides a tool for wafer coating film, improves the anchor clamps part in the tool, has solved the technical defect such as the structure complicacy, the fixed inconvenience of wafer that traditional tool exists. The technical scheme of the utility model is as shown in the attached figure 1: a pair of clamping jaws 2 for clamping a wafer 5 are arranged in the through holes 11 of the jig 1, the sections of the clamping jaws 2 are L-shaped, when the wafer is clamped, the long sides of the clamping jaws 2 at two sides clamp the wafer 5 at two sides of the wafer 5, and the short sides hold the wafer 5 below the wafer 5. As can be seen from fig. 1, the jig has the obvious disadvantages: the short edge of the clamping jaw 2 shields part of the surface of the wafer 5 while holding the wafer 5, so that the surface of the wafer 5 cannot realize full coating.
Disclosure of Invention
The utility model mainly solves the technical defect that the clamp can not realize full coating on the surface of a wafer due to the fact that the clamp shields the surface of the wafer in the prior art, and provides a jig for coating the wafer, which can realize full coating on the surface of the wafer.
The utility model mainly solves the technical problems through the following technical scheme: the clamping jaw comprises a body with a through hole in the middle, two guide rods movably penetrating the body are arranged on two sides of the through hole respectively, a clamping jaw is arranged at one end of each guide rod in the through hole, a baffle and an elastic piece are arranged at one end of each guide rod on the outer side of the body, the elastic pieces are sleeved on the guide rods and positioned between the baffles and the outer wall of the body, an adjusting screw rod with threads penetrating the body is arranged between the two guide rods, one end of the adjusting screw rod penetrates through the through hole to abut against the clamping jaw, and the other end of the adjusting screw rod is positioned on the outer side of the body.
Preferably, the guide bar is detachably connected to the jaw.
Preferably, one end of the adjusting screw rod, which is positioned at the outer side of the body, is provided with a knob.
Therefore, the utility model has simple and reasonable structure and the following advantages:
aiming at the defects in the prior art, the utility model improves the clamp, and mainly sets the working surface of the clamping jaw for clamping the wafer as an arc concave surface, so that the contact area between the working surface and the outer edge of the wafer is enlarged, the clamping jaws at two sides clamp the wafer in a holding manner by screwing the adjusting screw rods at two sides, and under the condition that the shape of the arc concave surface is matched with the outer edge of the wafer, the working surface of the clamping jaw can be tightly attached to the outer edge of the wafer and a larger friction force can be formed between the working surface and the outer edge of the wafer, so that the wafer can be firmly clamped and fixed; when the wafer is clamped, the clamping claw is only contacted with the outer edge of the wafer and can not shield the upper surface and the lower surface of the wafer, so that the upper surface and the lower surface of the wafer can be completely coated during wafer coating.
Furthermore, the guide rod and the clamping jaw are detachably connected, so that the clamping jaw can be conveniently detached and replaced.
Furthermore, the knob is arranged at one end, located on the outer side of the body, of the adjusting screw, and the adjusting screw can be conveniently screwed through the knob.
Therefore, the utility model solves the technical defect that the full coating can not be realized on the surface of the wafer in the prior art, and has the advantages of simple structure, convenient operation, lower manufacturing cost and the like.
Drawings
FIG. 1 is a prior art schematic;
FIG. 2 is a schematic top view of a preferred embodiment of the present invention;
fig. 3 is a schematic view of the front view of a preferred embodiment of the present invention shown in fig. 2.
Description of reference numerals: 1. a body; 11. a through hole; 2. a clamping jaw; 21. a working surface; 3. a guide bar; 31. a baffle plate; 32. an elastic member; 4. adjusting the screw rod; 41. a knob; 5. a wafer.
Detailed Description
The technical scheme of the utility model is further specifically described by the following embodiments and the accompanying drawings.
Example 1: as shown in fig. 2 and fig. 3, the utility model comprises a body 1 with a through hole 11 in the middle, a pair of clamping jaws 2 arranged in the through hole 11, a guide rod 3 and an adjusting screw rod 4 arranged at two sides of the through hole 11;
two guide rods 3 are movably arranged on two sides of the through hole 11 in a penetrating way, one ends of the two guide rods 3 are connected with the clamping jaw 2 in the through hole 11, a baffle 31 and an elastic piece 32 are arranged at the other end of the two guide rods 3, the elastic piece 32 is sleeved on the guide rods 3 and is positioned between the baffle 31 and the outer wall of the body 1, and the guide rods 3 are connected with the clamping jaw 2 in a detachable connection mode;
an adjusting bolt 4 positioned between the two guide rods 3 is arranged on each thread on two sides of the through hole 11 in a penetrating way, one end of the adjusting screw rod 4 is abutted against the clamping jaw 2 in the through hole 11, and a knob 41 is arranged at one end positioned on the outer side of the body 1;
the working surfaces 21 of the clamping jaws 2 on the two sides are opposite, and the working surfaces 21 of the clamping jaws 2 are arc concave surfaces matched with the shape of the outer edge of the wafer 5.
When the wafer clamping device is used, a wafer 5 to be coated is flatly placed between two clamping jaws 2 positioned in a through hole 11, the distance between the clamping jaws 2 is adjusted through the adjusting screws 4 on the two sides, and when the working surfaces 21 of the clamping jaws 2 are attached to the outer edge of the wafer 5 and form a closed holding on the wafer 5, the wafer 5 can be clamped by appropriately tightening the adjusting screws 4; at this time, the wafer 5 is held and fixed in the through hole 11, and the upper and lower surfaces of the wafer 5 are not shielded by the chuck jaws 2, so that the surface can be completely coated when the wafer 5 is coated.
Of course, the drawings and examples are only for the purpose of illustrating and explaining the present invention and should not be taken as unduly limiting the utility model. All technical solutions which are equivalent to each other and can be obtained by a person skilled in the art according to the present invention fall within the protection scope of the present invention.
Claims (3)
1. A jig for coating a wafer comprises a body (1) with a through hole (11) in the middle, two guide rods (3) movably penetrating through the body (1) are respectively arranged at two sides of the through hole (11), one end of the guide rod (3) positioned in the through hole (11) is provided with a clamping jaw (2) while one end positioned outside the body (1) is provided with a baffle plate (31) and an elastic piece (32), the elastic piece (32) is sleeved on the guide rods (3) and positioned between the baffle (31) and the outer wall of the body (1), an adjusting screw rod (4) with threads penetrating through the body (1) is arranged between the two guide rods (3), one end of the adjusting screw rod (4) penetrates into the through hole (11) to be abutted against the clamping jaw (2) and the other end is positioned outside the body (1), the clamping jaw is characterized in that the working surface (21) of the clamping jaw (2) is an arc concave surface with an opening facing the center of the through hole (11).
2. A jig for coating wafers as defined in claim 1, wherein the guide bar (3) is detachably connected to the holding jaw (2).
3. A jig for coating wafers as claimed in claim 1 or 2 wherein the end of the adjusting screw (4) outside the body (1) is provided with a knob (41).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121623519.7U CN215925063U (en) | 2021-07-16 | 2021-07-16 | Jig for wafer coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121623519.7U CN215925063U (en) | 2021-07-16 | 2021-07-16 | Jig for wafer coating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215925063U true CN215925063U (en) | 2022-03-01 |
Family
ID=80401000
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121623519.7U Active CN215925063U (en) | 2021-07-16 | 2021-07-16 | Jig for wafer coating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215925063U (en) |
-
2021
- 2021-07-16 CN CN202121623519.7U patent/CN215925063U/en active Active
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