CN215901154U - Tail gas filter equipment is used in gallium arsenide preparation - Google Patents
Tail gas filter equipment is used in gallium arsenide preparation Download PDFInfo
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- CN215901154U CN215901154U CN202122105004.4U CN202122105004U CN215901154U CN 215901154 U CN215901154 U CN 215901154U CN 202122105004 U CN202122105004 U CN 202122105004U CN 215901154 U CN215901154 U CN 215901154U
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Abstract
The utility model discloses a tail gas filtering device for gallium arsenide preparation, which comprises a rack, wherein a first mounting cylinder and a second mounting cylinder are fixed on the rack, filter element cylinders are detachably mounted in the first mounting cylinder and the second mounting cylinder, one ends of the first mounting cylinder and the second mounting cylinder are respectively provided with an air inlet communicated with an inner hole of the filter element cylinder, the air inlets are communicated through an air inlet communicating pipe, the air inlet communicating pipe is provided with an air inlet pipe connector, cylinder bodies of the first mounting cylinder and the second mounting cylinder are respectively provided with an air outlet, the air outlets are communicated through an exhaust communicating pipe, the exhaust communicating pipe is provided with an exhaust pipe connector, and the outsides of the first mounting cylinder, the second mounting cylinder, the air inlet communicating pipe and the exhaust communicating pipe are respectively wrapped with a heating and heat preserving device. This tail gas filter equipment can better handle arsenic and phosphorus, reduces the frequency of clearance.
Description
Technical Field
The utility model relates to a tail gas filtering device, in particular to a tail gas filtering device used on gallium arsenide preparation equipment.
Background
In the process of preparing gallium arsenide, the exhausted tail gas contains toxic arsenic and phosphorus, and the arsenic and the phosphorus in the tail gas need to be filtered and then combusted through a subsequent combustion system. The existing tail gas filtering device mainly comprises a frame, wherein an arsenic filter cylinder and a phosphorus collecting cylinder which are connected in series are arranged on the frame, wherein the arsenic filter mainly adopts the filter cylinder for filtration, and the phosphorus collecting cylinder mainly reduces the temperature of gaseous phosphorus in a cooling mode. However, the exhaust gas filtering device has the following disadvantages: 1. the time for collecting and filtering phosphorus and the time for filtering arsenic of the existing filtering device are not uniform, and the cleaning time after cooling, filtering and collecting the phosphorus is shorter, so that the phosphorus needs to be cleaned in time once the phosphorus is fully collected, therefore, the cleaning of the ring-covered filtering equipment is frequent, and the labor intensity of workers is high; 2. the clearance of present tail gas filter equipment is very inconvenient, and the dismantlement of whole filter core is very troublesome, because this arsenic and phosphorus are toxic substance, consequently dismantle whole cartridge filter when the clearance, then clearance and washing under the surface of water, frequent clearance filter equipment can increase workman's poisoning risk like this, threatens to workman's health.
SUMMERY OF THE UTILITY MODEL
The technical problem to be solved by the utility model is as follows: the tail gas filtering device used on the gallium arsenide preparation equipment is capable of better treating arsenic and phosphorus and reducing the cleaning frequency.
In order to solve the technical problems, the technical scheme of the utility model is as follows: the utility model provides a tail gas filter equipment is used in gallium arsenide preparation, includes the frame, be fixed with first installation section of thick bamboo and second installation section of thick bamboo in the frame, demountable installation has a filter element section of thick bamboo in first installation section of thick bamboo and the second installation section of thick bamboo, the one end of first installation section of thick bamboo and second installation section of thick bamboo all is provided with the air inlet with filter element section of thick bamboo hole UNICOM, and this air inlet is provided with the inlet pipe interface through admitting air communicating pipe UNICOM on this inlet communicating pipe, the stack shell of first installation section of thick bamboo and second installation section of thick bamboo all is provided with the gas outlet, through exhaust communicating pipe UNICOM between this gas outlet, is provided with the exhaust pipe interface on this exhaust communicating pipe, the outside of first installation section of thick bamboo, second installation section of thick bamboo, the communicating pipe that admits air, exhaust communicating pipe all wraps up heating insulation device.
As a preferred scheme, the first installation cylinder and the second installation cylinder are identical in structure, the first installation cylinder comprises a first cylinder body, the air inlet is formed in one end of the first cylinder body, the other end of the first cylinder body is provided with an inlet, a first cylinder cover is hinged to the inlet, and the filter element cylinder is inserted into the first cylinder body and is fixedly pressed by the first cylinder cover.
As a preferable scheme, an air inlet sealing pipe section is arranged at the air inlet on the first cylinder body, and the air inlet sealing pipe section is inserted into the inner hole of the filter element cylinder and sealed with the inner hole of the filter element cylinder.
As a preferred scheme, the filter element cylinder comprises a filter element cylinder body, an inner hole of the filter element cylinder body is a blind hole, and a handle is arranged at the blind end of the filter element cylinder.
Preferably, the inner hole edge of the opening end of the inner hole of the filter element cylinder body is provided with a matching inclined plane matched with the air inlet sealing pipe section in a sealing mode.
Preferably, the blind end of the filter element cylinder is also provided with a cross-shaped reinforcing rod.
As a preferred scheme, the frame includes the cuboid frame construction that is formed by the shaped steel welding, be provided with a supporting beam on the cuboid frame, a first installation section of thick bamboo and a second installation section of thick bamboo welded fastening are in on the supporting beam.
As a preferable scheme, universal wheels are arranged at the bottom of the rectangular parallelepiped frame.
As a preferable scheme, the heating and heat-preserving device is electric heating cotton.
After the technical scheme is adopted, the utility model has the effects that: because the tail gas filtering device for preparing the gallium arsenide comprises a frame, a first installation barrel and a second installation barrel are fixed on the frame, filter element barrels are detachably installed in the first installation barrel and the second installation barrel, one ends of the first installation barrel and the second installation barrel are respectively provided with an air inlet communicated with an inner hole of the filter element barrel, the air inlets are communicated through an air inlet communicating pipe, an air inlet pipe joint is arranged on the air inlet communicating pipe, the barrel bodies of the first installation barrel and the second installation barrel are respectively provided with an air outlet, the air outlets are communicated through an air outlet communicating pipe, an air outlet pipe joint is arranged on the air outlet communicating pipe, heating and heat-insulating devices are wrapped outside the first installation barrel, the second installation barrel, the air inlet communicating pipe and the air outlet communicating pipe, and therefore, the tail gas filtering device directly connects the air inlet pipe joint to an exhaust pipe of gallium arsenide preparation equipment, the exhaust pipe interface is connected to the exhaust gas combustion system, so that the exhaust gas enters from the air inlet pipe interface and enters the inner holes of the filter element cylinders in the first mounting cylinder and the second mounting cylinder in a shunting manner through the air inlet communicating pipe, the granular arsenic is filtered at the moment, the filtered exhaust gas passes through the filter element cylinders and then is discharged from the exhaust communicating pipe, meanwhile, the heating and heat preservation devices are reported outside the pipeline, the first mounting cylinder and the second mounting cylinder of the whole exhaust gas filtering device, therefore, the phosphorus discharged by the exhaust gas can be continuously heated into a gaseous state, the gaseous phosphorus enters the subsequent exhaust gas combustion system to be combusted, the phosphorus is convenient to remove, the phosphorus is heated into a gaseous state by the exhaust gas filtering device, the times of cleaning and cleaning are reduced, meanwhile, the gaseous phosphorus directly enters the exhaust gas combustion system to be combusted through the exhaust gas filtering device, and the filter element cylinders can be directly taken out in the air, and need not to dismantle in the water, it is all more convenient to dismantle and install, has reduced workman's intensity of labour, simultaneously, adopts the reposition of redundant personnel of first installation section of thick bamboo and second installation section of thick bamboo to filter, and filter element section of thick bamboo has also used two, has further prolonged the cycle of clearance.
And because the first mounting cylinder and the second mounting cylinder have the same structure, the first mounting cylinder comprises a first cylinder body, the air inlet is arranged at one end of the first cylinder body, the other end of the first cylinder body is provided with an inlet, the inlet is hinged with a first cylinder cover, and the filter element cylinder is inserted into the first cylinder body and is fixedly pressed by the first cylinder cover, so that the filter element cylinder is directly inserted into the first cylinder body, and the mounting and the dismounting are very convenient.
And because the air inlet sealing pipe section is arranged at the air inlet on the first cylinder body, the air inlet sealing pipe section is inserted into the inner hole of the filter element cylinder and is sealed with the inner hole of the filter element cylinder, and because of the air inlet sealing pipe section, the air inlet sealing pipe section can be better inserted into the inner hole of the filter element cylinder and is sealed with the inner hole of the filter element cylinder, so that all tail gas can better pass through the filter element cylinder body, and the filtering is more thorough.
And because the filter element cylinder comprises a filter element cylinder body, the inner hole of the filter element cylinder body is a blind hole, the blind end of the filter element cylinder is provided with a handle, and the handle on the filter element cylinder body can be conveniently operated to pull out and insert the filter element cylinder in a handheld mode.
And because the inner hole edge of the opening end of the inner hole of the filter element cylinder body is provided with a matching inclined plane which is in sealing fit with the air inlet sealing pipe section, the matching inclined plane can be better sealed with the air inlet sealing section.
And because the blind end of the filter element cylinder is also provided with a cross-shaped reinforcing rod, the strength of the blind end of the filter element cylinder can be increased by adopting the reinforcing rod.
Drawings
The utility model is further illustrated with reference to the following figures and examples.
FIG. 1 is a perspective view of an embodiment of the present invention;
FIG. 2 is a schematic side view of an embodiment of the present invention;
FIG. 3 is a cross-sectional view at A-A of FIG. 2;
FIG. 4 is a perspective view of a cartridge;
FIG. 5 is a cross-sectional view of a cartridge;
in the drawings: 1. a frame; 2. a first mounting cylinder; 21. a first cylinder; 22. a first cartridge cover; 3. a second mounting cylinder; 4. an air intake communicating pipe; 5. an air inlet pipe interface; 6. an exhaust communicating pipe; 7. an exhaust pipe interface; 8. a support beam; 9. a filter element cartridge; 91. a filter element cylinder body; 92. an inner bore; 93. a handle; 94. a reinforcing bar; 95. a mating bevel; 10. a universal wheel; 11. the air intake seal pipe section.
Detailed Description
The present invention is described in further detail below with reference to specific examples.
As shown in fig. 1 to 5, a tail gas filter equipment is used in gallium arsenide preparation, includes frame 1, be fixed with first installation section of thick bamboo 2 and second installation section of thick bamboo 3 in frame 1, frame 1 includes the cuboid frame construction that forms by the shaped steel welding, be provided with supporting beam 8 on the cuboid frame, first installation section of thick bamboo 2 and 3 welded fastening of second installation section of thick bamboo are in on the supporting beam 8. The bottom of the cuboid frame is provided with universal wheels 10. Compared with the existing structure, the tail gas filtering device in the embodiment has the advantages that the first installation barrel 2 and the second installation barrel 3 are not frequently disassembled, and only the filter element barrel 9 is required to be taken out, so that the disassembling and assembling time is saved, and meanwhile, the work of butt joint of pipelines, pipeline sealing debugging and the like is reduced.
Demountable installation has a filter element section of thick bamboo 9 in first installation section of thick bamboo 2 and the second installation section of thick bamboo 3, the one end of first installation section of thick bamboo 2 and second installation section of thick bamboo 3 all be provided with the air inlet of filter element section of thick bamboo 9 hole 92 UNICOM, this air inlet is through intake communicating pipe 4 UNICOM, should admit air and be provided with intake pipe interface 5 on communicating pipe 4, the stack shell of first installation section of thick bamboo 2 and second installation section of thick bamboo 3 all is provided with the gas outlet, through exhaust communicating pipe 6 UNICOM between this gas outlet, is provided with blast pipe interface 7 on this exhaust communicating pipe 6, the outside of first installation section of thick bamboo 2, second installation section of thick bamboo 3, intake communicating pipe 4, exhaust communicating pipe 6 all wraps up and has the heating heat preservation device. The heating and heat-preserving device is electric heating cotton. The electric heating cotton can well wrap various cylinders or pipes in different shapes, and is convenient to wrap and form.
In this embodiment, the first installation section of thick bamboo 2 is the same with the structure of second installation section of thick bamboo 3, first installation section of thick bamboo 2 includes first barrel 21, the air inlet sets up in the one end of first barrel 21, the other end of first barrel 21 is provided with puts the mouth, it has first cover 22 to put the mouth articulated, filter element section of thick bamboo 9 inserts in the first barrel 21 and compress tightly fixedly by first cover 22, and the fixed mode of first cover 22 can adopt the mode locking of quick hasp fixed. In this embodiment, an air inlet sealing pipe segment 11 is arranged at the air inlet of the first cylinder 21, and the air inlet sealing pipe segment 11 is inserted into the inner hole 92 of the filter element cylinder 9 to seal with the inner hole 92 of the filter element cylinder 9. Thus, the flow path of the exhaust gas is as follows: tail gas enters from the air inlet pipe connector 5 and then enters into the first mounting cylinder 2 and the second mounting cylinder 3 through the diversion of the air inlet communicating pipe 4, and directly enters into the inner hole 92 of the filter element cylinder 9 through the air inlet sealing pipe section 11, enters into the space between the filter element cylinder 9 and the first cylinder 21 after being filtered by the filter material of the filter element cylinder 9, and then is discharged from the exhaust pipe connector 7 through the exhaust communicating pipe 6, and particulate matters in the tail gas in the whole process are filtered by the filter material.
As shown in fig. 4 and 5, the filter element cylinder 9 includes a filter element cylinder body 91, an inner hole 92 of the filter element cylinder body 91 is a blind hole, and a handle 93 is disposed at a blind end of the filter element cylinder 9. The inner hole edge of the opening end of the inner hole 92 of the filter element cylinder body 91 is provided with a matching inclined plane 95 which is in sealing fit with the air inlet sealing pipe section 11. The blind end of the filter element cylinder 9 is also provided with a cross-shaped reinforcing rod 94.
Compared with the prior structure, the utility model has the following advantages: 1. the filter element cylinder 9 of the filtering device can be directly drawn out without dismantling the first mounting cylinder 2 and the second mounting cylinder 3 and then placing the first mounting cylinder and the second mounting cylinder in water for decomposition, so that the workload is greatly reduced; the whole replacement and cleaning only needs to process the filter element cylinder 9, and other pipelines are not dismantled, so that the workload of replacement and cleaning every time is reduced, and the air tightness detection is not needed every time; 2. two filter element cylinders 9 of the filter device are connected in parallel, so that the maintenance period is further prolonged under the condition that the original volume is not changed (the original tail gas filter device is also provided with two cylinders, one cylinder is used for filtering arsenic, and the other cylinder is used for condensing phosphorus); 3. the filter device adopts a heating mode to enable the phosphorus to be in a gaseous state all the time, so that the gaseous phosphorus can directly enter a subsequent tail gas combustion system for combustion through the filter element cylinder 9.
The above-mentioned embodiments are merely descriptions of the preferred embodiments of the present invention, and are not intended to limit the scope of the present invention, and various modifications and alterations made to the technical solution of the present invention without departing from the spirit of the present invention are intended to fall within the scope of the present invention defined by the claims.
Claims (9)
1. The utility model provides a tail gas filter equipment is used in gallium arsenide preparation, includes the frame, its characterized in that: the frame is fixed with a first installation section of thick bamboo and a second installation section of thick bamboo, demountable installation has a filter element section of thick bamboo in a first installation section of thick bamboo and the second installation section of thick bamboo, the one end of a first installation section of thick bamboo and a second installation section of thick bamboo all be provided with the air inlet of filter element section of thick bamboo hole UNICOM, this air inlet is through admitting air communicating pipe UNICOM, is provided with the inlet tube interface on this admitting air communicating pipe, the stack shell of a first installation section of thick bamboo and a second installation section of thick bamboo all is provided with the gas outlet, through exhaust communicating pipe UNICOM between this gas outlet, is provided with the exhaust tube interface on this exhaust communicating pipe, the outside of a first installation section of thick bamboo, a second installation section of thick bamboo, the communicating pipe that admits air, exhaust communicating pipe all wraps up heating insulation device.
2. The apparatus of claim 1, wherein the apparatus comprises: the structure of first installation section of thick bamboo and second installation section of thick bamboo is the same, first installation section of thick bamboo includes first barrel, the air inlet sets up in the one end of first barrel, the other end of first barrel is provided with puts the entry, it has first cover to put the entry articulated, the filter element section of thick bamboo inserts in the first barrel and by first cover fastening.
3. The apparatus of claim 2, wherein the apparatus comprises: and an air inlet sealing pipe section is arranged at the air inlet on the first cylinder body, and the air inlet sealing pipe section is inserted into the inner hole of the filter element cylinder and sealed with the inner hole of the filter element cylinder.
4. The apparatus of claim 3, wherein the apparatus comprises: the filter element cylinder comprises a filter element cylinder body, an inner hole of the filter element cylinder body is a blind hole, and a handle is arranged at the blind end of the filter element cylinder.
5. The apparatus of claim 4, wherein the apparatus comprises: and the inner hole edge of the opening end of the inner hole of the filter element cylinder body is provided with a matching inclined plane in sealing fit with the air inlet sealing pipe section.
6. The apparatus of claim 5, wherein the apparatus comprises: the blind end of the filter element cylinder is also provided with a cross-shaped reinforcing rod.
7. The apparatus of claim 6, wherein the apparatus comprises: the frame includes the cuboid frame construction that is formed by the shaped steel welding, be provided with a supporting beam on the cuboid frame, a first installation section of thick bamboo and a second installation section of thick bamboo welded fastening are in on the supporting beam.
8. The apparatus of claim 7, wherein the apparatus comprises: the bottom of the cuboid frame is provided with universal wheels.
9. The apparatus of claim 8, wherein the apparatus comprises: the heating and heat-preserving device is electric heating cotton.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122105004.4U CN215901154U (en) | 2021-09-02 | 2021-09-02 | Tail gas filter equipment is used in gallium arsenide preparation |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122105004.4U CN215901154U (en) | 2021-09-02 | 2021-09-02 | Tail gas filter equipment is used in gallium arsenide preparation |
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| CN215901154U true CN215901154U (en) | 2022-02-25 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202122105004.4U Active CN215901154U (en) | 2021-09-02 | 2021-09-02 | Tail gas filter equipment is used in gallium arsenide preparation |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113713526A (en) * | 2021-09-02 | 2021-11-30 | 张家港光煌新材料科技有限公司 | Tail gas filter equipment is used in gallium arsenide preparation |
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2021
- 2021-09-02 CN CN202122105004.4U patent/CN215901154U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113713526A (en) * | 2021-09-02 | 2021-11-30 | 张家港光煌新材料科技有限公司 | Tail gas filter equipment is used in gallium arsenide preparation |
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