CN215895654U - Control circuit and semiconductor process equipment - Google Patents

Abstract

The application discloses a control circuit and semiconductor process equipment, and relates to the field of semiconductor equipment. A control circuit includes a main circuit, a detection circuit, and a switch circuit; a switch part is arranged on the main loop; the switch loop and the detection loop are both connected with the main loop, the access points are both positioned at the upstream of the switch piece, and the switch loop is used for controlling the on-off of the main loop by controlling the switch piece to be closed or opened; the detection loop comprises a first branch and a second branch, and the first branch is used for controlling the on-off of the switch loop; the second branch is used for being connected with the signal acquisition end; when the detection loop is triggered, the first branch circuit controls the main loop to be disconnected through the switch loop, and the second branch circuit sends an alarm signal to the signal acquisition end. A semiconductor process equipment is provided with the control circuit. The problem that the main circuit can not be powered off or the alarm signal can not be collected after the main circuit is powered off is solved.

Description

Control circuit and semiconductor process equipment

Technical Field

The application belongs to the technical field of semiconductor equipment, and particularly relates to a control circuit and semiconductor process equipment.

Background

Chemical Vapor Deposition (CVD) is a method by which a substance can be deposited on a substrate surface as an atomic film. In the CVD process, a plurality of process gases need to enter the chamber, however, silane and hydrogen in the process gases participating in the reaction belong to flammable gases, and in order to ensure safety, some flammable gases need to be prevented from leaking, and based on the situation, some semiconductor process equipment is provided with a flame detector for flame detection and alarm.

Currently, some flame detectors send out an alarm signal when detecting a flame in the practical application process, and the interlock is effective to close the process gas valve, however, the control main circuit lead and the electric device are still electrified, which is likely to cause a short circuit and cause serious consequences. In the application process of other flame detectors, when a flame is detected, the main loop can be powered off, and the process gas valve is closed, however, the power supply of the flame detector is also cut off due to the power failure of the main loop, so that the acquisition or confirmation of an alarm signal is influenced, and the condition of false alarm is easily caused.

SUMMERY OF THE UTILITY MODEL

An object of the embodiments of the present application is to provide a control circuit and a semiconductor process apparatus, which can solve the problem that the main circuit cannot be powered off, or the alarm signal of the flame detector cannot be collected or confirmed after the main circuit is powered off.

In order to solve the technical problem, the present application is implemented as follows:

an embodiment of the present application provides a control circuit, which includes: the device comprises a main loop, a detection loop and a switch loop;

a switch part is arranged on the main loop;

the switch loop and the detection loop are both connected with the main loop, the access points are both positioned at the upstream of the switch piece, and the switch loop is used for controlling the on-off of the main loop by controlling the switch piece to be closed or opened;

the detection loop comprises a first branch and a second branch, and the first branch is used for controlling the on-off of the switch loop; the second branch is used for being connected with the signal acquisition end;

when the detection loop is triggered, the first branch controls the main loop to be disconnected through the switch loop, and the second branch sends an alarm signal to the signal acquisition end.

The embodiment of the application also provides semiconductor process equipment which is provided with the control circuit.

In the embodiment of the application, the switch loop and the detection loop are both connected with the main loop, and the access point is located at the upstream of the switch piece, so that the switch loop can be controlled to be switched on or switched off by controlling the switch piece. Therefore, the embodiment of the application can guarantee normal work of the detection loop under the condition of cutting off power supply of the rear end of the main loop, so that connection between the second branch and the signal acquisition end can be realized, signal transmission is realized, and the condition of misjudgment can be avoided.

Drawings

FIG. 1 is a schematic diagram of a first type of flame detector control circuit in the related art;

FIG. 2 is a schematic diagram of a second type of flame detector control circuit in the related art;

FIG. 3 is a schematic diagram of a flame detector control loop according to an embodiment of the disclosure.

Detailed Description

The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some, but not all, embodiments of the present application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

The terms first, second and the like in the description and in the claims of the present application are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It will be appreciated that the data so used may be interchanged under appropriate circumstances such that embodiments of the application may be practiced in sequences other than those illustrated or described herein, and that the terms "first," "second," and the like are generally used herein in a generic sense and do not limit the number of terms, e.g., the first term can be one or more than one.

Chemical Vapor Deposition (CVD) is a method by which a substance can be deposited on a substrate surface as an atomic film. Some inflammable gases exist in the process gases participating in the reaction in the CVD process, and in order to ensure the safety, some semiconductor process equipment is provided with a flame detector for flame detection and alarm.

Referring to fig. 1, a control principle of a CVD tool flame detector in the related art is shown, after an ac contactor KM00 is closed, a voltage of a main loop L11 and a voltage of an L12 are 208VAC, and a switching power supply T1 outputs 24VDC to supply dc power to the flame detector. When a flame is detected, two normally open (N.O.) contacts inside the flame detector are closed, one is used for interlocking, the process gas circuit valve is immediately closed, and the other provides a flame alarm signal for Facility to record.

However, based on the above control logic, when the flame detector detects a flame, an alarm signal is recorded, but the interlock is effective only to close the process gas valve, the main circuit wire and the electrical component are still electrified, and there is a possibility that the wire insulation layer and the electrical component housing are burned out, so that a short circuit occurs, which causes a secondary fire or a personal injury, and causes serious consequences.

Another control principle of the related art CVD tool flame detector is shown in fig. 2, and the operation principles of the electrical components are as follows:

1. SB01 is a jog button, which automatically pops up when pressed, and is a start button of the whole machine, and functions to power up the main loop of the machine after KM00 contacts 2 and 4, to supply power to the back-end load.

2. KM00 is AC contactor, and when 208VAC is connected to coils A1 and A2, auxiliary contacts 13 and 14 will be closed, and main contacts 1 and 2, 3 and 4 will be attracted respectively.

3. T1 is a switch mode power supply with an input of 208VAC and an output of 24 VDC.

4. KA00 is an intermediate relay, and when coils a1 and a2 are on at 24VDC, normally closed contacts 23 and 24 are opened.

Based On the arrangement, in normal use, the main breaker QF00 of the closed machine station is closed, the Power On button SB01 is pressed, the coils A1 and A2 of the alternating current contactor KM00 are connected with 208VAC, the auxiliary contacts 13 and 14 of the KM00 are closed, the main contacts 1 and 2, 3 and 4 of the KM00 are respectively attracted, and the main loop of the machine station at the rear end is electrified. The switching power supply T1 outputs 24VDC to provide DC power for the flame detector, which operates normally.

When a flame is detected, two groups of normally-open (N.O.) contacts in the flame detector are closed, so that the coils A1 and A2 of the intermediate relay KA00 are connected with 24VDC, the normally-closed contacts 23 and 24 of the intermediate relay KA00 are disconnected, the coil A1 end of the KM00 loses alternating current power supply, main contacts 1 and 2, 3 and 4 of the KM00 are respectively disconnected, power supply of a rear-end main loop is cut off, and the rear-end loop is effectively protected.

However, in practical application, as shown in fig. 2, when the flame detector detects a flame, two sets of normally open contacts inside the flame detector are closed, the KM00 main contact is opened, the main circuit is immediately powered off, and the gas valve is immediately turned off. Although the main loop can be protected in time in the process, the power supply of the flame detector is cut off, and the flame alarm signal is not collected by Facility, so that the reason that the power failure is caused by flame alarm triggering or other faults cannot be confirmed, and the condition of false alarm is easy to occur.

Based on the above problem, the embodiment of the present application provides a control circuit, which not only can power down a main circuit to protect the main circuit, but also can prevent the power supply of a flame detector from being cut off, thereby overcoming the problem of false alarm. The method comprises the following specific steps:

referring to fig. 3, an embodiment of the present application discloses a control circuit, and the disclosed control circuit includes a main loop, a detection loop, and a switch loop.

The main loop is used for supplying power to a load at the rear end, and in addition, the main loop can also supply power to the detection loop and the switch loop. The main loop is provided with a switch piece, and the on-off of the main loop can be controlled through the switch piece, so that the power supply to the rear-end load is realized or the power supply to the rear-end load is cut off.

In the embodiment of the application, the switch loop and the detection loop are both connected with the main loop, and the respective access points are both located at the upstream of the switch member, so that even under the condition that the switch member is disconnected, the switch loop and the detection loop can still be connected with the main loop to supply power through the main loop.

The switch loop is a circuit which plays a control role in the control circuit and can control the on-off of the main loop by controlling the on-off of the switch piece. The detection loop is used for detecting whether flame occurs in the process so as to ensure the safe operation of the process.

In the embodiment of the application, the detection circuit comprises a first branch circuit and a second branch circuit, wherein the first branch circuit is used for controlling the on-off of the switch circuit, and the second branch circuit is used for being connected with the signal acquisition end. Alternatively, the first branch and the second branch may be connected to the main circuit, respectively, so that the first branch and the second branch are supplied with power through the main circuit. Based on the above arrangement, when a fire disaster occurs, the detection loop is triggered, at the moment, the first branch circuit can control the main loop to be disconnected through the switch loop, so that the load of the main loop, which is positioned at the downstream of the switch piece, is not electrified any more, thereby effectively relieving the problem that a line short circuit occurs after the electric elements in the wire insulating layer and the rear end load of the main loop are burnt out to cause secondary fire disasters or personnel injuries, and further reducing the safety risk. Meanwhile, the switch part cuts off the main loop, so that the main loop is not influenced to continue supplying power for the detection loop, namely, the normal operation of the detection loop is not influenced, an alarm signal can be sent to the signal acquisition end through the second branch circuit to record, and the problem of misinformation caused by failure in confirming the power failure is effectively avoided.

Optionally, the detection circuit further includes a flame detector and a power supply branch, and the first branch and the second branch are both connected to the main circuit through the power supply branch, so that the main circuit can supply power to the first branch and the second branch through the power supply branch. In addition, the power supply branch is connected with the flame detector, and the detection loop can be triggered under the condition that the flame detector detects flame.

Optionally, the flame detector has a plurality of connection contacts, including a first connection contact connected to the power supply branch, a second connection contact connected to the first branch, and a third connection contact connected to the second branch. When the flame detector detects flame, the first branch is connected to control the switch loop to be disconnected through the first branch, and the main loop is controlled to be disconnected through the switch loop to enable the main loop to be no longer electrified so as to stop supplying power to the load. Meanwhile, when the flame detector detects flame, the second branch circuit can be communicated, so that an alarm signal is sent to the signal acquisition end through the second branch circuit, and a reminding effect is played for workers.

It should be noted that, with regard to the specific structure and operation principle of the flame detector, reference may be made to the related art, and the detailed description thereof is omitted in this embodiment.

Optionally, the control circuit comprises an intermediate relay KA00 and a contactor KM01, a normally closed contact b1 of the intermediate relay KA00 is connected with the switch loop, a coil of the intermediate relay KA00 is connected in series in the first branch, main contacts a1, a2 of the contactor KM01 form a switch, and a coil of the contactor KM01 is connected in series in the switch loop.

The intermediate relay KA00 is a control electronic component in a control circuit, and includes a normally closed contact b1, through which the normally closed contact b1 can make the switch circuit, and of course, in some cases, the normally closed contact b1 can also be opened to break the switch circuit. In addition, the intermediate relay KA00 includes a coil connected in series in the first branch, through which the coil of the intermediate relay KA00 can be powered, and when the coil is powered, the normally closed contact b1 is controlled to switch to the open state to cut off the switching circuit.

The contactor KM01 is another control electronic component in the control circuit, and the contactor KM01 comprises main contacts a1 and a2, wherein the main contacts a1 and a2 are used for controlling the on-off of a main loop. Specifically, when the main contacts a1, a2 are closed, the main circuit is closed to supply power to the rear end load, and when the main contacts a1, a2 are open, the main circuit is closed to stop supplying power to the load. In addition, the contactor KM01 further includes a coil, the coil of the contactor KM01 is connected in series in a switch loop, the coil of the contactor KM01 can be powered through the switch loop, and in case of power-on of the coil, the main contacts a1 and a2 are controlled to be closed to supply power to the rear-end load through the main loop, and in case of power-off of the coil, the main contacts a1 and a2 are controlled to be opened to stop supplying power to the rear-end load.

In some embodiments, the main contacts a1, a2 of the contactor KM01 include a first main contact and a second main contact, and accordingly the main circuit includes a first phase line L1 and a second phase line L2, wherein the first main contact is connected to the first phase line L1 and the second main contact is connected to the second phase line L2. In this way, the on-off state of the first phase line L1 can be controlled by the on-off state of the first main contact, and the on-off state of the second phase line L2 can be controlled by the on-off state of the second main contact. In addition, the opening and closing states of the first main contact and the second main contact are controlled by the coil of the contactor KM01, specifically, when the coil of the contactor KM01 is electrified, the first main contact and the second main contact are both closed, and conversely, when the coil of the contactor KM01 is electrified, the first main contact and the second main contact are both opened. Therefore, the on-off of the main loop can be controlled by the switch loop.

Optionally, a first normally open contact c1 is provided in the first branch circuit to control the on/off of the voltage of the intermediate relay KA 00. Normally, the first normally open contact c1 is in an open state, and when the flame detector detects a flame, the first normally open contact c1 is closed to connect the first branch, and the detection loop is triggered. It should be noted that the first normally open contact c1 can be a contact embedded inside the flame detector, and the specific principle of the first normally open contact c1 being closed can be seen in the related art.

Based on the setting, the coil of the intermediate relay KA00 and the first normally open contact c1 are connected in series in the first branch circuit, the coil of the intermediate relay KA00 can be controlled to be in an electrified or power-off state through the on-off state of the first normally open contact c1, and therefore the on-off state of a switch loop can be controlled, and the on-off state of a main loop is controlled.

Optionally, a second normally open contact c2 is further disposed in the second branch, and when the detection circuit is triggered, the second normally open contact c2 is switched to a closed state to send an alarm signal to the signal acquisition end. Normally, the second normally open contact c2 is in an open state, and when the flame detector detects a flame, the second normally open contact c2 is closed to connect the second branch, and the detection loop is triggered. It should be noted that the second normally open contact c2 can be a contact embedded inside the flame detector, and the specific principle of the second normally open contact c2 being closed can be seen in the related art.

Based on the setting, the second branch circuit can send an alarm signal to the signal acquisition end after being switched on so as to remind workers.

Optionally, a normally open push button switch SB01 is provided in the switch loop, and in case of shutdown of the semiconductor process equipment, the normally open push button switch SB01 is in a normally open state, so that the switch loop is in an open state, at which time the coil of the contactor KM01 is in a power-off state, and accordingly, the main contacts a1 and a2 in the main loop are also in a power-off state, so that the load at the rear end of the main loop is powered off, that is, in a shutdown state. When it is desired to start the load, the normally open push switch SB01 is pressed to close, so that the switch loop is closed, the coil of the contactor KM01 is energized, and accordingly, the main contacts a1 and a2 in the main loop are closed to close the main loop, so that the load at the rear end can be supplied with power.

Note that the normally open push switch SB01 springs automatically when the external force is removed.

In order to ensure that the switch circuit is not powered off during the process, the contactor KM01 in the embodiment of the present application has an auxiliary contact a3 connected to the switch circuit, the auxiliary contact a3 being connected in parallel with the normally open push button switch SB 01. It is understood that the on/off of the auxiliary contact a3 is controlled by the coil of the contactor KM 01. In this way, when the normally open push switch SB01 is pressed, the coil of the contactor KM01 is energized via the switching circuit, so that the main contacts a1 and a2 are closed, and the auxiliary contact a3 is also closed. Thus, when the pressing action on the normally open button switch SB01 is released, the normally open button switch SB01 is switched from the closed state to the open state, and at this time, the auxiliary contact a3 is still in the on state, so that the switch loop can be kept in the on state, the coil of the contactor KM01 cannot lose power, the main contact a1 is further enabled, the a2 and the auxiliary contact a3 cannot be disconnected, and therefore power can be supplied to the load through the main loop.

Optionally, a normally closed push switch SB02 is provided in the switch circuit, and a normally closed push switch SB02 is provided in series with the normally closed contact b 1. In the case where the semiconductor process equipment is in normal operation, the normally-closed push switch SB02 is in a normally-closed state, so that the switching circuit is not opened by the normally-closed push switch SB 02. Optionally, a normally closed push button switch SB02 is located between the normally open push button switch SB01 and the normally closed contact b 1.

Note that normally closed push switch SB02 will be in the closed state when no force is applied. When the switch loop needs to be cut off to stop supplying power to the load, the normally closed button switch SB02 is pressed to be switched from the normally closed state to the open state, so that the switch loop can be cut off, at this time, the coil of the contactor KM01 loses power, and accordingly, the main contacts a1, a2 and the auxiliary contact a3 are all switched from the closed state to the open state, so that the switch loop is cut off, and the main loop is cut off, so that the power supply to the load is stopped.

In the embodiment of the application, the alternating current is introduced into the main loop, and the direct current with the preset voltage value needs to be introduced into the detection loop, so that the alternating current in the main loop needs to be converted into the direct current with the preset voltage value to supply power for the detection loop. Based on this, the control circuit in the embodiment of the present application further includes an AC/DC conversion unit, and the detection circuit is connected to the main circuit through the AC/DC conversion unit and is configured to provide a preset voltage value to the flame detector.

Based on the above arrangement, the ac power in the main circuit can be converted into dc power, and at the same time, the voltage value in the main circuit can be converted into the voltage value required by the detection circuit, for example, 24VDC, 36VDC, 72VDC, etc., so as to meet the actual power supply requirement.

In a more specific embodiment, 208V AC power, i.e., 208VAC, is fed into the main loop and is converted to output 24VDC to meet the actual power supply requirement of the detection loop.

Optionally, the switch circuit and the detection circuit are connected in parallel and then connected to the main circuit through the AC/DC conversion unit. On the basis, the AC/DC conversion unit can also convert the AC power in the main circuit into the DC power required for the switching circuit, and convert the voltage into the value required for the switching circuit, in which case the contactor KM01 is a DC contactor.

In a more specific embodiment, 208V AC power, i.e., 208VAC, is fed into the main circuit, and 24VDC is output after AC/DC conversion, so as to meet the actual power supply requirement of the switch circuit.

Optionally, the detection circuit is connected in series with the AC/DC conversion unit, then connected in parallel with the switching circuit, and then connected with the main circuit. On the basis of the above, the AC/DC conversion unit can also convert the AC power in the main circuit into the DC power required for the switching circuit, and convert the voltage into the value required for the switching circuit, in this case, the contactor KM01 is an AC contactor.

Optionally, the main circuit is provided with a breaker QF00, and the detection circuit and the switch circuit are both connected to the rear end of the breaker QF 00. Therefore, when the main loop is cut off by the breaker QF00, the power supply of the main loop to the detection loop, the switch loop and the load can be cut off at the same time, so that the circuit breaker plays a role in protecting the control circuit and the load.

In some embodiments, breaker QF00 has a plurality of contacts that are connected to a plurality of phase lines of the main circuit.

The working principle of the control circuit in the embodiment of the application is as follows:

in the shutdown state, the breaker QF00 is in the off state, the main contacts a1, a2 and the auxiliary contact a3 of the contactor KM01 are all in the off state, the normally open button switch SB01 is in the off state, the first normally open contact c1 and the second normally open contact c2 are all in the off state, at this time, the load at the rear end of the main loop does not work, and the switch loop and the detection loop are in the off state.

When the power-on is needed, the breaker QF00 is switched on, the normally open button switch SB01 is pressed to switch on the switch loop, at this time, the coil of the contactor KM01 is energized, and accordingly, the main contacts a1, a2 and the auxiliary contact a3 of the contactor KM01 are all switched from the open state to the closed state. In this way, after the main contacts a1, a2 are closed, the load at the rear end can be supplied with power through the main circuit, and at the same time, because the auxiliary contact a3 is closed, the switch circuit can still be kept in the on state after the normally open push button switch SB01 is released. Because the detection loop is connected with the main loop, the main loop can supply power to the detection loop after the circuit breaker QF00 is switched on, and based on the power, the load at the rear end can normally perform the process, and the flame detector can detect whether the flame is generated in the process in real time.

When the flame detector detects flame, the first normally open contact c1 is switched from the normally open state to the closed state, the first branch is connected, a coil of the intermediate relay KA00 arranged in the first branch is electrified, the normally closed contact b1 of the intermediate relay KA00 located in the switch loop is controlled by the coil to be switched from the normally closed state to the open state, so that the switch loop is cut off, the coil of the contactor KM01 is electrified, correspondingly, the main contacts a1, a2 located in the main loop and the auxiliary contact a3 located in the switch loop of the contactor KM01 are switched from the closed state to the open state, the main loop is cut off by the main contacts a1 and a2 to stop supplying power to a load at the rear end, and at the moment, the main loop can still supply power to the detection loop through the power supply branch, so that the flame detector can still work normally. Meanwhile, the second normally open contact c2 is switched from the normally open state to the closed state, and the second branch circuit is connected to send the alarm signal to the signal acquisition end through the second branch circuit, so that the alarm signal can be recorded by the signal acquisition end.

The embodiment of the application also discloses semiconductor process equipment which is provided with the control circuit.

To sum up, control circuit in this application embodiment can guarantee to detect the return circuit and normally work under the circumstances that cuts off the power supply of main loop rear end to can realize being connected between second branch road and the signal acquisition end, with realize signal transmission, and then can avoid the condition emergence of erroneous judgement.

While the present embodiments have been described with reference to the accompanying drawings, it is to be understood that the invention is not limited to the precise embodiments described above, which are meant to be illustrative and not restrictive, and that various changes may be made therein by those skilled in the art without departing from the spirit and scope of the invention as defined by the appended claims.

Claims (10)

1. A control circuit applied to semiconductor process equipment is characterized by comprising: the device comprises a main loop, a detection loop and a switch loop;

a switch part is arranged on the main loop;

the switch loop and the detection loop are both connected with the main loop, the access points are both positioned at the upstream of the switch piece, and the switch loop is used for controlling the on-off of the main loop by controlling the switch piece to be closed or opened;

the detection loop comprises a first branch and a second branch, and the first branch is used for controlling the on-off of the switch loop; the second branch is used for being connected with the signal acquisition end;

when the detection loop is triggered, the first branch controls the main loop to be disconnected through the switch loop, and the second branch sends an alarm signal to the signal acquisition end.

2. The control circuit of claim 1, wherein the detection circuit further comprises a flame detector and a power supply branch, the first branch and the second branch being connected to the main circuit through the power supply branch;

the power supply branch is connected with the flame detector, and triggers the detection loop under the condition that the flame detector detects flame.

3. The control circuit according to claim 1 or 2, characterized in that it comprises an intermediate relay (KA00) and a contactor (KM01), the normally closed contact (b1) of the intermediate relay (KA00) being connected with the switching circuit, the coil of the intermediate relay (KA00) being connected in series to the first branch;

the main contacts (a1, a2) of the contactor (KM01) form the switching piece, and the coil of the contactor (KM01) is connected in series to the switching loop.

4. The control circuit according to claim 3, characterized in that a first normally open contact (c1) is arranged in the first branch circuit for controlling the on-off of the power supply of the intermediate relay (KA 00); and a second normally open contact (c2) is arranged in the second branch, and when the detection circuit is triggered, the first normally open contact (c1) and the second normally open contact (c2) are both switched to a closed state, so that the main circuit is powered off, and an alarm signal is sent to the signal acquisition end.

5. The control circuit according to claim 3, characterized in that a normally open push-button switch (SB01) is arranged in the switch loop, and the normally open push-button switch (SB01) automatically bounces after the external force is removed;

the contactor (KM01) has an auxiliary contact (a3) connected to the switch circuit, the auxiliary contact (a3) is connected in parallel with the normally open push button switch (SB 01).

6. The control circuit according to claim 5, characterized in that a normally closed push-button switch (SB02) is provided in the switching circuit, the normally closed push-button switch (SB02) being arranged in series with the normally closed contact (b 1).

7. The control circuit of claim 2, wherein the control circuit comprises an AC/DC conversion unit, and the detection circuit is connected to the main circuit via the AC/DC conversion unit for providing a predetermined voltage value to the flame detector.

8. The control circuit of claim 7, wherein the switch circuit and the detection circuit are connected in parallel and then connected to the main circuit through the AC/DC conversion unit.

9. The control circuit according to claim 3, characterized in that the main circuit is provided with a circuit breaker (QF00), the detection circuit and the switching circuit being connected to the rear end of the circuit breaker (QF 00).

10. A semiconductor processing apparatus, characterized by being provided with the control circuit of any one of claims 1 to 9.

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