CN215893787U - Optical delay line device and terahertz time-domain spectrograph provided with same - Google Patents
Optical delay line device and terahertz time-domain spectrograph provided with same Download PDFInfo
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- CN215893787U CN215893787U CN202122531778.3U CN202122531778U CN215893787U CN 215893787 U CN215893787 U CN 215893787U CN 202122531778 U CN202122531778 U CN 202122531778U CN 215893787 U CN215893787 U CN 215893787U
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Abstract
The utility model relates to the field of terahertz spectrum measurement, in particular to an optical delay line device and a terahertz time-domain spectrometer with the same. The optical delay line device comprises a base, a sliding module, a retro-reflector, a driving module, a grating ruler and a reading module, wherein the sliding module is arranged on the base, the retro-reflector is arranged on the sliding module, and the driving module is used for driving the sliding module to reciprocate so as to drive the retro-reflector to reciprocate; the grating ruler is fixed on the first side of the sliding module and reciprocates along with the sliding module; the reading module is arranged on the base and positioned on one side of the grating ruler, and is connected with an upper computer and used for reading the position information of the grating ruler and sending the position information to the upper computer; the positioning auxiliary module is arranged on the base and is abutted against the second side of the sliding module, and is used for assisting in positioning the mounting position of the sliding module on the base, so that the retro-reflecting mirror can be accurately scanned.
Description
Technical Field
The utility model relates to the field of terahertz spectrum measurement, in particular to an optical delay line device and a terahertz time-domain spectrometer with the same.
Background
The terahertz radiation is 0.1-10 THz electromagnetic radiation and is between radio waves and light waves, millimeter waves and infrared rays in terms of frequency; and energetically between electrons and photons. With the development of terahertz technology, terahertz spectroscopy and imaging show great application potential in many fields such as biology, medical disease diagnosis, material science, military, chemical basic research and the like. The terahertz time-domain spectroscopy technology is one of the application technologies of terahertz radiation developed in recent years internationally, and is a new spectrum technology.
The optical delay line device is a device for realizing accurate and controllable relative time delay between coherent light pulses by an optical means, and is a key component for realizing rapid spectrum measurement and imaging of the terahertz time-domain spectrometer. Most of the optical delay line devices commonly used at present are based on stepping motor drive so as to push a sliding platform fixed with a reflector to move back and forth along a guide rail. However, when scanning is performed based on the reciprocating movement of the reflector driven by the stepping motor, the movement path of the reflector may be shifted, so that the scanning is not accurate.
SUMMERY OF THE UTILITY MODEL
The present invention is directed to overcome at least one of the above-mentioned drawbacks (disadvantages) of the prior art, and provides an optical delay line device and a terahertz time-domain spectrometer provided with the same, so as to solve the problem of inaccurate scanning of the optical delay line device.
The technical scheme adopted by the first aspect of the utility model is that,
the optical delay line device comprises a base, a sliding module, a retro-reflector, a driving module, a grating ruler, a reading module, a positioning auxiliary module and a positioning auxiliary module, wherein the sliding module is arranged on the base, the retro-reflector is arranged on the sliding module, and the driving module is used for driving the sliding module to reciprocate so as to drive the retro-reflector to reciprocate;
the grating ruler is fixed on the first side of the sliding module and reciprocates along with the sliding module;
the reading module is arranged on the base and positioned on one side of the grating ruler, and is connected with an upper computer and used for reading the position information of the grating ruler and sending the position information to the upper computer;
the positioning auxiliary module is arranged on the base and is abutted against the second side of the sliding module, and is used for assisting in positioning the installation position of the sliding module on the base.
Furthermore, the base comprises a side plate and a bottom plate which are rectangular, and the side plate is vertically arranged on the bottom plate;
the driving module is fixed on the side plate, the sliding module is fixed on the bottom plate, the reading module is arranged on the bottom plate and is positioned on one side of the grating ruler, and the positioning auxiliary module is arranged on the bottom plate and is abutted against the second side of the sliding module;
the positioning auxiliary module is provided with a positioning reference surface which is vertical to the side plate, or the positioning reference surface is parallel to the side surface of the side plate, and the side surface of the side plate is vertical to the bottom plate.
The pressing block is arranged on the side plate, and a pressing hole is formed in the pressing block;
the wire pressing block is used for pressing the cables of the reading module and the driving module into the wire pressing hole.
Further, the sliding module comprises a sliding rail, a sliding block and a connecting plate;
the sliding rail is fixedly arranged on the base and is abutted against the positioning auxiliary module, a sliding groove is formed in the sliding rail, the sliding block is slidably arranged on the sliding groove, and the connecting plate is fixed on the sliding block and is abutted against the positioning auxiliary module;
the back reflector is fixed on the connecting plate;
the grating ruler is fixed on one side of the connecting plate, which is far away from the positioning auxiliary module.
Furthermore, the sliding module also comprises a support plate, the support plate is fixedly arranged on the connecting plate, the retro-reflector is arranged on one side of the support plate, and the driving module is connected with the other side of the support plate;
the driving module drives the retroreflector and the grating ruler which are installed on the connecting plate through the supporting plate so that the retroreflector and the grating ruler can reciprocate along the sliding groove along with the sliding block.
Further, the reading module comprises a mounting seat and a reading head, the reading head is fixedly mounted on the base through the mounting seat and is located on one side of the grating ruler, and the reading head is connected with the upper computer and is used for reading the position information of the grating ruler and sending the position information to the upper computer.
Further, the precision of the grating ruler is 20 μm, and the precision of the reading head is 20 μm.
Furthermore, the driving module is a voice coil motor, and the voice coil motor comprises a motor shell and a motor coil;
the motor shell is arranged on the base and sleeved on the motor coil, and the motor coil is used for driving the sliding module to reciprocate so as to drive the retro-reflector and the grating ruler to reciprocate along with the sliding module;
a gap is arranged between the motor coil and the motor shell.
Further, the stroke of the voice coil motor is 14mm to 18 mm.
The second aspect of the present invention adopts the technical proposal that,
a terahertz time-domain spectrograph is provided with the optical delay line device.
Compared with the prior art, the utility model has the beneficial effects that:
(1) the positioning auxiliary module can assist in positioning the installation position of the sliding module on the base so as to enable the sliding module to be accurately installed, and therefore the retro-reflecting mirror can accurately scan. Specifically, when the sliding module is installed, the second side of the sliding module abuts against the positioning auxiliary module, so that the position of the sliding module is simply, quickly and conveniently positioned, the positioned sliding module is fixed on the base, and the problem that the installation position of the sliding module is incorrect due to artificial installation errors is avoided.
(2) The cable in the device can be prevented from being entangled with each other by the arrangement of the line pressing block and the line pressing hole, and the dragging of the cable is avoided when the sliding module reciprocates under the action of the driving module.
(3) When the precision of the grating ruler and the precision of the reading head are both set to be 20 micrometers, and during data acquisition, the obtained frequency domain signal of the terahertz spectrograph is stable before 4.8THZ, and the overall detection performance of the device is improved.
(4) The stroke of voice coil motor improves, and the optical path that corresponds also can improve, and under the unchangeable prerequisite of scanning frequency, the length of scanning becomes long, and the degree of depth scope of scanning improves, and the detectable is thicker sample, and application scope is bigger, is favorable to promoting terahertz time domain spectrum appearance check out test set's ability, improves the test ability to the sample of size thickness partially.
Drawings
Fig. 1 is a first angle structural view of an optical delay line device of the present invention.
FIG. 2 is a second angle structure diagram of the optical delay line device of the present invention.
FIG. 3 is an exploded view of an optical delay line device according to the present invention.
Fig. 4 is a frequency domain signal map of the first terahertz spectrometer.
FIG. 5 is a frequency domain signal map of a second terahertz spectrometer.
Fig. 6 is a first time domain waveform diagram.
Fig. 7 is a second time domain waveform diagram.
Description of the specific figures: the device comprises a base 1, a side plate 11, a bottom plate 12, a sliding module 2, a sliding rail 21, a sliding groove 211, a sliding block 22, a connecting plate 23, a supporting plate 24, a retro-reflector 3, a voice coil motor 4, a motor housing 41, a motor coil 42, a grating ruler 5, a reading module 6, a mounting seat 61, a reading head 62, a positioning auxiliary module 7, a positioning reference surface 71, a line pressing block 8 and a line pressing hole 81.
Detailed Description
The drawings are only for purposes of illustration and are not to be construed as limiting the utility model. For a better understanding of the following embodiments, certain features of the drawings may be omitted, enlarged or reduced, and do not represent the size of an actual product; it will be understood by those skilled in the art that certain well-known structures in the drawings and descriptions thereof may be omitted.
Example 1
As shown in fig. 1, fig. 2 and fig. 3, the present embodiment provides an optical delay line device, which includes a base 1, a sliding module 2, a retro-reflector 3, a driving module, a grating ruler 5 and a reading module 6, wherein the sliding module 2 is disposed on the base 1, the retro-reflector 3 is disposed on the sliding module 2, the driving module is configured to drive the sliding module 2 to reciprocate so as to drive the retro-reflector 3 to reciprocate, and the optical delay line device further includes a positioning auxiliary module 7;
the grating ruler 5 is fixed on the first side of the sliding module 2 and reciprocates along with the sliding module 2;
the reading module 6 is arranged on the base 1 and positioned at one side of the grating ruler 5, and the reading module 6 is connected with an upper computer and used for reading the position information of the grating ruler 5 and sending the position information to the upper computer;
the positioning auxiliary module 7 is disposed on the base 1 and abutted against the second side of the sliding module 2, for assisting in positioning the installation position of the sliding module 2 on the base 1.
The installation position of the sliding module 2 on the base 1 has great influence on the moving route of the retro-reflector 3, the installation position of the sliding module 2 is accurate, so that the moving route of the retro-reflector 3 on the sliding module is accurate, the deviation of the moving route is avoided, the scanning accuracy of the retro-reflector 3 is improved, and the terahertz time-domain spectrograph is facilitated to generate a time-domain spectrum better.
Similarly, the installation position of the sliding module 2 also affects the moving route of the grating ruler 5 installed thereon and moving along with the sliding module 2, and the installation position of the sliding module 2 is accurate, so that the moving route of the grating ruler 5 is accurate, the deviation of the moving route is avoided, and the reading module 6 is helpful for reading the position information of the grating ruler 5 better.
The positioning auxiliary module 7 can assist in positioning the installation position of the sliding module 2 on the base 1 so that the installation is accurate, thereby enabling the retro-reflector 3 to scan accurately. Specifically, in the embodiment, when the sliding module 2 is installed, the second side of the sliding module 2 abuts against the positioning auxiliary module 7, so that the position of the sliding module 2 is simply, quickly and conveniently positioned, the positioned sliding module 2 is fixed on the base 1, and the incorrect installation position of the sliding module 2 caused by artificial installation errors is avoided.
Further, the base 1 comprises a side plate 11 and a bottom plate 12 which are rectangular, and the side plate 11 is vertically arranged on the bottom plate 12;
the driving module is fixed on the side plate 11, the sliding module 2 is fixed on the bottom plate 12, the reading module 6 is arranged on the bottom plate 12 and is positioned at one side of the grating ruler 5, and the positioning auxiliary module 7 is arranged on the bottom plate 12 and is abutted against the second side of the sliding module 2;
the positioning assistance module 7 is provided with a positioning reference surface 71, and the positioning reference surface 71 is perpendicular to the side plate 11, or the positioning reference surface 71 is parallel to a side surface of the side plate 11, which is perpendicular to the bottom plate 12.
In the present embodiment, preferably, when the side plate 11 and the bottom plate 12 perpendicular to each other are rectangular, in order to make the moving path of the back mirror 3 and the grating ruler 5 perpendicular to the side plate 11, the sliding module 2 needs to be installed perpendicular to the side plate 11. The positioning assistance module 7 can assist the installer in mounting the slide module 2 perpendicular to the side plates 11 simply and quickly.
The positioning auxiliary module 7 may be a rectangular parallelepiped, a quadrangular prism whose upper and lower bottom surfaces are parallelogram or trapezoidal, or the like. This embodiment may preferably set one of the faces of the positioning assist module 7 as the positioning reference face 71, and the slide module 2 is positioned against the face opposite and parallel to the positioning reference face 71.
Specifically, when the positioning assistance module 7 has a rectangular parallelepiped shape, any one of the surfaces may be used as the positioning reference surface 71; when the positioning auxiliary module 7 is a quadrangular prism with upper and lower bottom surfaces being parallelograms, the upper and lower bottom surfaces should be placed in parallel with the upper surface of the base plate 12, and one of the side surfaces may be set as a positioning reference surface 71; when the positioning auxiliary module 7 is a quadrangular prism whose upper and lower bottom surfaces are trapezoidal, the upper and lower bottom surfaces should be placed in parallel with the upper surface of the base plate 12, and one of the two parallel side surfaces may be set as the positioning reference surface 71. At this time, only by ensuring that the positioning reference surface 71 is perpendicular to the side plate 11 or is parallel to the side surface of the bottom plate 12 perpendicular to the side plate 11, the surface perpendicular to the side plate 11 opposite to and parallel to the positioning reference surface 71 can be ensured, so that the sliding module 2 positioned close to the surface can also be perpendicular to the side plate 11, the moving routes of the retro-reflector 3 and the grating scale 5 arranged on the sliding module 2 are perpendicular to the side plate 11, the retro-reflector 3 can accurately scan, and the reading module 6 can accurately read.
Furthermore, the device also comprises a line pressing block 8, wherein the line pressing block 8 is arranged on the side plate 11, and a line pressing hole 81 is formed in the line pressing block 8;
the cable pressing block 8 is used for pressing the cables of the reading module 6 and the driving module into the cable pressing hole 81.
The line ball piece 8 is embedded into the side plate 11, the line ball hole 81 can penetrate through the side plate 11, and cables in the device can penetrate through the line ball hole 81. The setting of line ball piece 8 and line ball hole 81 can avoid the cable in the device to entangle each other, and when slip module 2 reciprocating motion under drive module's effect, avoid dragging of cable.
Preferably, the wire pressing block 8 may be a plate with a notch at an edge, and after the wire pressing block 8 is inserted into the side plate 11, the wire pressing hole 81 is formed between the notch on the edge of the wire pressing block 8 and the side plate 11. The wire pressing block 8 may also be a plate with a hole in the middle, which is the wire pressing hole 81.
Further, the sliding module 2 includes a sliding rail 21, a sliding block 22 and a connecting plate 23;
the slide rail 21 is fixedly arranged on the base 1 and is abutted against the positioning auxiliary module 7, the slide rail 21 is provided with a slide groove 211, the slide block 22 is slidably arranged on the slide groove 211, and the connecting plate 23 is fixed on the slide block 22 and is abutted against the positioning auxiliary module 7;
the retro-reflector 3 is fixed on the connecting plate 23;
the grating ruler 5 is fixed on one side of the connecting plate 23 far away from the positioning auxiliary module 7.
Preferably, the sliding rail 21 is installed on the bottom plate 12, and needs to be positioned next to the positioning auxiliary module 7 before installation, so that the sliding rail 21 is installed perpendicular to the side plate 11. Similarly, before the connecting plate 23 is mounted on the slider 22, the connecting plate 23 needs to be positioned by the positioning auxiliary module 7, so that the moving path of the connecting plate 23 is perpendicular to the side plate 11, the moving path deviation of the retro-reflector 3 and the grating ruler 5 mounted on the connecting plate 23 is avoided, the scanning accuracy of the retro-reflector 3 is improved, and the reading module 6 is facilitated to read accurately.
Furthermore, the sliding module 2 further comprises a support plate 24, the support plate 24 is fixedly installed on the connecting plate 23, the retro-reflector 3 is installed on one side of the support plate 24, and the driving module is connected with the other side of the support plate 24;
the driving module drives the back reflector 3 and the grating ruler 5 mounted on the connecting plate 23 through the supporting plate 24 so that the back reflector 3 and the grating ruler 5 reciprocate along the sliding groove 211 following the sliding block 22.
In the present embodiment, one side of the supporting plate 24 for mounting the retro-reflector 3 is preferably provided with a mounting position of the retro-reflector 3, and the other side of the supporting plate 24 for mounting the driving module is preferably provided with a connecting position of the driving module. Retro-reflection mirror 3 passes through backup pad 24 to be fixed on connecting plate 23, thereby drive module is through being connected the motion of drive retro-reflection mirror 3 with backup pad 24, and backup pad 24 is provided with and helps improving structural stability to make and install the retro-reflection mirror 3 on backup pad 24 and can stably move, avoid the route skew.
In this embodiment, the retro-reflector 3 is preferably fixed on the connecting plate 23 in various ways, for example, it can be fixed by an annular supporting frame, and the driving module can be directly connected with the connecting plate 23 or the retro-reflector 3, so as to drive the retro-reflector 3 and the grating ruler 5 to move.
Further, reading module 6 includes mount pad 61 and reading head 62, and reading head 62 passes through mount pad 61 fixed mounting on base 1 to be located grating chi 5's one side, reading head 62 and host computer connection for read grating chi 5's positional information and send the host computer.
The reading head 62 is fixedly mounted on the bottom plate 12 through the mounting seat 61, which can enhance the structural stability and help the reading head 62 to read the position information of the grating ruler 5 more accurately.
Further, the accuracy of the grating scale 5 is 20 μm, and the accuracy of the reading head 62 is 20 μm.
It should be noted that the grating scale 5 in this embodiment is a standard component, and the precision is usually 20 μm or 40 μm. In this embodiment, a grating ruler 5 with a precision of 20 μm is selected, and correspondingly, the reading head 62 is matched with the grating ruler 5, and the precision of the reading head 62 is the same as that of the grating ruler 5 and is also 20 μm.
In the embodiment, preferably, when the accuracies of the grating scale 5 and the reading head 62 are both set to 20 μm, and during data acquisition, the obtained frequency domain signal of the terahertz spectrometer is stable before 4.8THZ, so that the overall detection performance of the device is improved.
For example, fig. 4 is a frequency domain signal spectrum of the terahertz spectrometer obtained when the accuracies of the grating scale 5 and the reading head 62 are both set to 40 μm, and fig. 5 is a frequency domain signal spectrum of the terahertz spectrometer obtained when the accuracies of the grating scale 5 and the reading head 62 are both set to 20 μm. As shown by the dotted line in fig. 4, when the abscissa is 3.75THZ, the slope of the atlas changes, at this time, the signal is unstable, and the bandwidth of the frequency domain reaches 4 THZ. In fig. 5, before the abscissa is about 4.8THZ at the position indicated by the dotted line, the slope of the map has no obvious wide variation, the signal is stable, and the bandwidth of the frequency domain can reach 4.8 THZ.
Further, the driving module is a voice coil motor 4, and the voice coil motor 4 includes a motor housing 41 and a motor coil 42;
the motor housing 41 is mounted on the base 1 and sleeved on the motor coil 42, and the motor coil 42 is used for driving the sliding module 2 to reciprocate, so that the retro-reflector 3 and the grating ruler 5 are driven to reciprocate along with the sliding module 2;
the motor coil 42 has a gap with the motor housing 41.
Preferably, the driving module is a voice coil motor 4, the motor housing 41 is mounted on the side plate 11, and the motor coil 42 is mounted in the motor housing 41 and connected to one side of the supporting plate 24, so as to drive the supporting plate 24 to reciprocate the retro-reflector 3 and the grating scale 5.
Further, the stroke of the voice coil motor 4 is 14mm to 18 mm.
The stroke of voice coil motor 4 improves, according to optical path 2 journey/light speed, can learn, and the optical path that corresponds also can improve, under the unchangeable prerequisite of scanning frequency, the length of scanning becomes long, and the degree of depth scope of scanning improves, and the thicker sample of detectable, application scope is bigger, is favorable to promoting terahertz time domain spectrum appearance check out test set's ability, improves the test ability to the sample of size thickness partially.
Specifically, in this embodiment, fig. 6 is a time domain waveform diagram when the stroke of the voice coil motor 4 is 8mm, fig. 7 is a time domain waveform diagram when the stroke of the voice coil motor 4 is 16mm, and the maximum value of the abscissa in fig. 6 and 7 represents the maximum value of the optical path.
When the stroke of the voice coil motor 4 is changed from 8mm to 16mm, the corresponding optical path is increased from 53ps to 106ps according to the optical path of 2 stroke/optical speed, the thickness range of the sample which can be measured by the reflection test is increased from 53 x c/n > d > 0 to 106 x c/n > d > 0, and the thickness range of the sample which can be measured by the transmission test is also increased from 53 x c/(n-n) d > 00) > d > 0 to 106 × c/(n-n)0) D > 0, where n is the refractive index of the sample, c is the speed of light, n0Is the refractive index of air, n 01 is taken. The stroke of the voice coil motor 4 is improved, the thickness range of a test sample can be increased, and the detection capability of the internal defects of the sample is improved.
Example 2
The present embodiment provides a terahertz time-domain spectrometer provided with an optical delay line device as in embodiment 1.
It should be understood that the above-mentioned embodiments of the present invention are only examples for clearly illustrating the technical solutions of the present invention, and are not intended to limit the specific embodiments of the present invention. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention claims should be included in the protection scope of the present invention claims.
Claims (10)
1. An optical delay line device comprises a base, a sliding module, a retro-reflector, a driving module, a grating ruler and a reading module, wherein the sliding module is arranged on the base, the retro-reflector is arranged on the sliding module, the driving module is used for driving the sliding module to reciprocate so as to drive the retro-reflector to reciprocate, and the optical delay line device is characterized by further comprising a positioning auxiliary module;
the grating ruler is fixed on the first side of the sliding module and reciprocates along with the sliding module;
the reading module is arranged on the base and positioned on one side of the grating ruler, and the reading module is connected with an upper computer and used for reading the position information of the grating ruler and sending the position information to the upper computer;
the positioning auxiliary module is arranged on the base and is abutted against the second side of the sliding module, and is used for assisting the positioning of the sliding module at the installation position on the base.
2. An optical delay line device as claimed in claim 1, wherein said base includes a side plate and a bottom plate both having a rectangular shape, said side plate being vertically disposed on said bottom plate;
the driving module is fixed on the side plate, the sliding module is fixed on the bottom plate, the reading module is arranged on the bottom plate and positioned on one side of the grating ruler, and the positioning auxiliary module is arranged on the bottom plate and abutted against the second side of the sliding module;
the positioning auxiliary module is provided with a positioning reference surface, the positioning reference surface is perpendicular to the side plate, or the positioning reference surface is parallel to the side surface of the side plate, and the side surface of the side plate is perpendicular to the bottom plate.
3. An optical delay line device as claimed in claim 2, further comprising a line pressing block, said line pressing block being disposed on said side plate, said line pressing block being provided with a line pressing hole;
the wire pressing block is used for pressing the cables of the reading module and the driving module into the wire pressing hole.
4. An optical delay line device as claimed in claim 1, wherein the sliding module comprises a sliding rail, a sliding block and a connecting plate;
the sliding rail is fixedly arranged on the base and is abutted against the positioning auxiliary module, a sliding groove is formed in the sliding rail, the sliding block is slidably arranged on the sliding groove, and the connecting plate is fixed on the sliding block and is abutted against the positioning auxiliary module;
the back reflector is fixed on the connecting plate;
the grating ruler is fixed on one side of the connecting plate, which is far away from the positioning auxiliary module.
5. An optical delay line device as claimed in claim 4, wherein the sliding module further comprises a supporting plate, the supporting plate is fixedly mounted on the connecting plate, the retro-reflector is mounted on one side of the supporting plate, and the driving module is connected to the other side of the supporting plate;
the driving module drives the retroreflector and the grating ruler which are installed on the connecting plate through the supporting plate, so that the retroreflector and the grating ruler can move back and forth along the sliding groove along with the sliding block.
6. The optical delay line device of any one of claims 1 to 5, wherein the reading module comprises a mounting base and a reading head, the reading head is fixedly mounted on the base through the mounting base and is located at one side of the grating ruler, and the reading head is connected with the upper computer and is used for reading position information of the grating ruler and sending the position information to the upper computer.
7. An optical delay line device as claimed in claim 6, wherein the precision of the grating scale is 20 μm and the precision of the reading head is 20 μm.
8. An optical delay line device as claimed in any one of claims 1 to 5, wherein the drive module is a voice coil motor comprising a motor housing and a motor coil;
the motor shell is arranged on the base and sleeved on the motor coil, and the motor coil is used for driving the sliding module to reciprocate, so that the retro-reflector and the grating ruler are driven to reciprocate along with the sliding module;
a gap is formed between the motor coil and the motor shell.
9. An optical delay line device as claimed in claim 8, wherein the voice coil motor has a stroke of 14mm to 18 mm.
10. A terahertz time-domain spectrometer, characterized in that the optical delay line device as claimed in any one of claims 1 to 9 is provided.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122531778.3U CN215893787U (en) | 2021-10-20 | 2021-10-20 | Optical delay line device and terahertz time-domain spectrograph provided with same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122531778.3U CN215893787U (en) | 2021-10-20 | 2021-10-20 | Optical delay line device and terahertz time-domain spectrograph provided with same |
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| Publication Number | Publication Date |
|---|---|
| CN215893787U true CN215893787U (en) | 2022-02-22 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202122531778.3U Active CN215893787U (en) | 2021-10-20 | 2021-10-20 | Optical delay line device and terahertz time-domain spectrograph provided with same |
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- 2021-10-20 CN CN202122531778.3U patent/CN215893787U/en active Active
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