CN215872313U - Pulse bias power supply with arc suppression structure - Google Patents

Pulse bias power supply with arc suppression structure Download PDF

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Publication number
CN215872313U
CN215872313U CN202121961753.0U CN202121961753U CN215872313U CN 215872313 U CN215872313 U CN 215872313U CN 202121961753 U CN202121961753 U CN 202121961753U CN 215872313 U CN215872313 U CN 215872313U
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wall
power supply
arc suppression
bias power
box body
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CN202121961753.0U
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吕忠毅
梁寅平
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Dalian Palite Electronic Technology Development Co ltd
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Dalian Palite Electronic Technology Development Co ltd
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Abstract

The utility model discloses a pulse bias power supply with an arc suppression structure, which comprises a box body clamping structure, the arc suppression structure, a control panel, a false touch prevention structure and a heat dissipation structure, wherein the arc suppression structure is arranged inside the top end of the box body clamping structure; the arc suppressing structure includes: the air faucet is arranged on the outer wall of the top of the box body clamping structure; and the spring is arranged on the inner outer wall of the air faucet. This pulse bias power supply that possesses electric arc suppression structure, top cap and end box can carry out the centre gripping with the sealing ring and seal, pours inert gas into to its inside through pressing down the block stopper to outside pulling insulating nylon cord cover moves insulating pair wall and outwards removes, and laminating metallic current connector outer wall prevents that personnel from touching metallic current connector by mistake.

Description

Pulse bias power supply with arc suppression structure
Technical Field
The utility model relates to the technical field of pulse bias power supplies, in particular to a pulse bias power supply with an arc suppression structure.
Background
The pulse bias power supply is an important component in vacuum arc ion plating and other vacuum physical vapor deposition equipment, provides negative or positive bias voltage for workpieces in a coating process flow, is provided with a single positive pulse power supply and double positive and negative pulse power supplies, adopts a unique modulation technology, and can carry out operations such as positive current, voltage regulation, negative current, voltage and the like through numerical control.
The pulse bias power supply used in the market generally has no function of suppressing electric arc, the electric arc is a gas discharge phenomenon, the current passes through a transient spark generated by some insulating media, the transient spark has great destructive effect on a contact, the situations of explosion, fire and the like are easily caused, the electric arc can be suppressed through inert gas, and the pulse bias power supply with the electric arc suppression structure is provided.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a pulse bias power supply with an arc suppression structure, which aims to solve the problems that the pulse bias power supply in the market proposed in the background art does not generally have the effect of suppressing an arc, the arc is a gas discharge phenomenon, the current passes through a transient spark generated by some insulating media, the transient spark has great destructive effect on a contact, the situations of explosion, fire and the like are easily caused, and the arc can be suppressed through inert gas.
In order to achieve the purpose, the utility model provides the following technical scheme: a pulse bias power supply with an arc suppression structure comprises a box body clamping structure, the arc suppression structure, a control panel, a false touch prevention structure and a heat dissipation structure, wherein the arc suppression structure is arranged inside the top end of the box body clamping structure;
the arc suppressing structure includes:
the air faucet is arranged on the outer wall of the top of the box body clamping structure;
the spring is arranged on the inner outer wall of the air faucet;
the fixed block is fixed on the outer wall of the air faucet;
the limiting block is fixed on the outer wall of the air faucet;
and the clamping plug is arranged inside the air faucet.
Preferably, the clamping plug and the limiting block form an elastic structure through a spring, and the outer wall of the limiting block is tightly attached to the inner outer wall of the air faucet.
Preferably, the case engaging structure includes:
a top cover disposed outside the arc suppression structure;
a bolt provided on an outer surface of the top cover;
a bottom case connected to a bottom outer wall of the top cover;
and the sealing ring is arranged on the outer wall of the bottom of the top cover.
Preferably, the top cover and the bottom box form a detachable structure through bolts, and the sealing ring and the bottom box form a clamping structure through the top cover.
Preferably, the false touch prevention structure includes:
the socket hidden shell is arranged on the inner outer wall of the control panel;
the metal current connector is arranged on the inner outer wall of the socket hidden shell;
the insulating main wall is attached to the inner outer wall of the socket hidden shell;
an insulating sub-wall attached to an outer wall of the metal current connector;
the sliding groove is formed in the inner outer wall of the socket hidden shell;
and the insulating nylon rope covers are arranged on two sides of the inner outer wall of the socket hidden shell.
Preferably, the insulating auxiliary wall forms a sliding structure with the socket hidden shell through the metal current connector, the sliding groove, the insulating main wall and the socket hidden shell, and the metal current connector is attached to the insulating auxiliary wall.
Preferably, the heat dissipation structure includes:
the heat conduction side walls are arranged on two sides of the interior of the box body clamping structure;
the heat radiation fan is fixed on the inner outer wall of the heat conduction side wall;
the insulating dustproof net is arranged on the outer wall of the heat-conducting side wall;
the screw is arranged on the outer surface of the heat-conducting side wall;
the heat dissipation holes are formed in the outer surface of the heat conduction side wall;
and the heat dissipation auxiliary blade is fixed on the outer wall of the heat conduction side wall.
Preferably, the heat-conducting side wall is communicated with the box body clamping structure, and the heat-conducting side wall is movably connected with the box body clamping structure.
Compared with the prior art, the utility model has the beneficial effects that: this pulse bias power supply that possesses electric arc suppression structure, top cap and end box can carry out the centre gripping with the sealing ring and seal, pours inert gas into to its inside through pressing down the block stopper to outside pulling insulating nylon cord cover moves insulating pair wall and outwards removes, and laminating metallic current connector outer wall prevents that personnel from touching metallic current connector by mistake.
The top cap passes through the bolt and constitutes detachable construction with end box, can carry out the centre gripping with the sealing ring through top cap and end box to can be effectual seal its inside through the bolt, its effect is convenient for electric arc suppression structure pours into inert gas, makes its inert gas's difficult effluvium, thereby suppresses the condition that electric arc appears in the power.
Constitute elastic construction through spring and stopper, press the block stopper and through the inert gas jar, fill inert gas to its inside to utilize the spring to make block stopper and air cock closely laminate, make inside inert gas be difficult for effluvium, its effect makes things convenient for the staff to carry out filling inert gas, and restrain the electric arc and prepare.
The insulating auxiliary wall is made of rubber and the like, and has good insulativity, when the power interface is connected with electric equipment, the insulating auxiliary wall is in contact with the insulating main wall through a matched connecting socket, the insulating main wall drives the insulating auxiliary wall to be attached to the outer wall of the metal current connector through the sliding groove and moves inwards, so that the metal current connector is exposed and is in contact power-on with the connecting socket, after the use is finished, the insulating nylon rope cover is pulled outwards to drive the insulating main wall and the insulating auxiliary wall to move outwards and attach to the outer wall of the metal current connector, and the situations of electric shock or power supply short circuit and the like caused by mistakenly touching the metal current connector by personnel are prevented.
Drawings
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a front view of the heat dissipation structure of the present invention;
FIG. 3 is an enlarged view of a portion of FIG. 2;
fig. 4 is a schematic perspective view of the anti-false touch structure of the present invention.
In the figure: 1. a box body clamping structure; 101. a top cover; 102. a bolt; 103. a bottom case; 104. a seal ring; 2. an arc suppression structure; 201. an air tap; 202. a spring; 203. a fixed block; 204. a limiting block; 205. clamping a plug; 3. a control panel; 4. a false touch prevention structure; 401. a socket hidden shell; 402. a metal current connector; 403. an insulating main wall; 404. an insulating sub-wall; 405. a sliding groove; 406. an insulating nylon cord cover; 5. a heat dissipation structure; 501. a thermally conductive sidewall; 502. a heat radiation fan; 503. an insulating dust screen; 504. a screw; 505. heat dissipation holes; 506. auxiliary heat dissipation blades.
Detailed Description
As shown in fig. 1-2, a pulsed bias power supply with an arc suppression structure includes: box block structure 1, the inside electric arc that is provided with in top of box block structure 1 restraines structure 2, and the outside outer wall of box block structure 1 is provided with control panel 3, and control panel 3's surface is provided with prevents mistake and touches structure 4, and the both sides outer wall of box block structure 1 is connected with heat radiation structure 5, and box block structure 1 includes: a top cover 101 disposed outside the arc suppression structure 2; a bolt 102 provided on an outer surface of the top cover 101; a bottom case 103 connected to a bottom outer wall of the top cover 101; sealing ring 104, it sets up in the bottom outer wall of top cap 101, top cap 101 passes through bolt 102 and end box 103 constitutes detachable construction, and sealing ring 104 passes through top cap 101 and end box 103 constitutes the block structure, can carry out the centre gripping with sealing ring 104 through top cap 101 and end box 103, and can be effectual seal its inside through bolt 102, its effect is convenient for electric arc suppression structure 2 and is filled inert gas, make its inert gas's difficult effluvium, thereby restrain the condition that electric arc appears in the power, heat radiation structure 5 includes: heat-conducting side walls 501 provided on both sides of the interior of the box body fastening structure 1; a heat dissipation fan 502 fixed to an inner outer wall of the heat conductive sidewall 501; an insulating dust screen 503 disposed on an outer wall of the heat-conducting sidewall 501; a screw 504 disposed on an outer surface of the heat-conducting sidewall 501; heat dissipation holes 505 opened in the outer surface of the heat conductive sidewall 501; the auxiliary heat dissipation blade 506 is fixed on the outer wall of the heat conduction side wall 501, the heat conduction side wall 501 is communicated with the box clamping structure 1, the heat conduction side wall 501 is movably connected with the box clamping structure 1, when the power supply works, the power supply is internally provided with a power supply, more heat is easy to generate by electronic accessories such as resistors and the like, the auxiliary heat dissipation blade 506 can be arranged through the control panel 3, when the temperature is lower, the auxiliary heat dissipation blade dissipates heat through the heat dissipation holes 505 of the heat conduction side wall 501, when the internal temperature is higher, the worker is reminded to turn on the heat dissipation fan 502 and move the heat conduction side wall 501 to two sides, the heat dissipation fan 502 is in contact with the outside of the power supply, so that the heat dissipation is accelerated, the auxiliary heat dissipation blade is convenient for using the accessories of the worker with different powers, and has better heat dissipation performance compared with the power supply in the market.
As shown in fig. 2, the arc suppression structure 2 of the pulse bias power supply having the arc suppression structure includes: the air faucet 201 is arranged on the top outer wall spring 202 of the box body clamping structure 1 and is arranged on the inner outer wall of the air faucet 201; a fixing block 203 fixed to an outer wall of the air nozzle 201; a limiting block 204 fixed on the outer wall of the air faucet 201; the clamping plug 205 is arranged inside the air nozzle 201, the clamping plug 205 forms an elastic structure with the limiting block 204 through the spring 202, the outer wall of the limiting block 204 is tightly attached to the outer wall of the air nozzle 201, the clamping plug 205 is pressed and filled with inert gas through the inert gas tank, the spring 202 is utilized to enable the clamping plug 205 to be tightly attached to the air nozzle 201, the inert gas inside is enabled to be not prone to be dispersed, the clamping plug is used for facilitating staff to fill the inert gas, and electric arc suppression is used for preparing.
As shown in fig. 3, the erroneous-touch prevention structure 4 of the pulse bias power supply having the arc suppression structure includes: a socket dark shell 401 disposed on an inner outer wall of the control panel 3; a metal current connector 402 disposed on an inner outer wall of the socket dark shell 401; an insulating main wall 403 attached to an inner outer wall of the receptacle shell 401; an insulating sub-wall 404 attached to the outer wall of the metallic current connector 402; a sliding groove 405 opened on the inner outer wall of the socket dark shell 401; an insulating nylon cord cover 406, which is arranged at two sides of the inner outer wall of the socket shell 401, the insulating sub-wall 404 forms a sliding structure through the metal current connector 402, the sliding groove 405, the insulating main wall 403 and the socket shell 401, the metal current connector 402 and the insulating sub-wall 404 are jointed, the insulating main wall 403 and the insulating sub-wall 404 are integrally connected, the material of the insulating sub-wall 404 is made of rubber and the like, the insulating sub-wall has better insulating property, when the power interface is connected with electric equipment, the insulating sub-wall is contacted with the insulating main wall 403 through a matched connecting socket, the insulating main wall 403 drives the insulating sub-wall 404 jointed with the outer wall of the metal current connector 402 through the sliding groove 405, the insulating sub-wall moves inwards to expose the metal current connector 402 and is contacted with the connecting socket for electrification, after the use, the insulating nylon cord cover 406 is pulled outwards to drive the insulating main wall 403 and the insulating sub-wall 404 to move outwards to be jointed with the outer wall of the metal current connector 402, the condition such as electric shock or power short circuit that the personnel touched metal current connector 402 by mistake leads to is prevented.
In summary, in the pulse bias power supply with arc suppression structure, the heat dissipation structure 5 is firstly placed on both sides of the bottom case 103, then the sealing ring 104 is fixedly placed in the middle of the bottom case 103 and the top cover 101, and is fixedly sealed by the bolt 102, then the clamping plug 205 is pressed to fill inert gas into the interior, and the spring 202 is used to make the clamping plug 205 tightly attached to the air nozzle 201, so that the inert gas inside is not easy to be dispersed, and the action is convenient for workers to fill inert gas, and then the insulating main wall 403 and the insulating auxiliary wall 404 are integrally connected, so that the pulse bias power supply with arc suppression structure has better insulation, when the power supply interface is connected with electric equipment, the power supply interface is contacted with the insulating main wall 403 through the matched connecting socket, the insulating main wall 403 drives the insulating auxiliary wall 404 attached to the outer wall of the metal current connector 402 through the sliding groove 405 to move inwards, so that the metal current connector 402 is exposed, carry out the contact circular telegram with connection socket, the power carries out the during operation, its inside power, more heat easily appears in electronic accessories such as resistance, can set up through control panel 3, the louvre 505 and the heat dissipation auxiliary leaf 506 through heat conduction lateral wall 501 dispel the heat when the temperature is lower, higher condition appears in its inside temperature, remind the staff to open radiator fan 502 and remove heat conduction lateral wall 501 to both sides, make radiator fan 502 contact with the power outside, thereby accelerate the heat dissipation, after the use, outside pulling insulating nylon rope lid 406 makes and drives insulating main wall 403 and insulating vice wall 404 outwards removal, laminate in metal current connector 402 outer wall, prevent that personnel from touching metal current connector 402 by mistake and lead to electrocution or the condition such as power short circuit.

Claims (8)

1. The utility model provides a pulse bias power supply who possesses arc suppression structure, includes box block structure (1), arc suppression structure (2), control panel (3), prevents mistake and touches structure (4) and heat radiation structure (5), its characterized in that: an arc suppression structure (2) is arranged inside the top end of the box body clamping structure (1), a control panel (3) is arranged on the outer wall of the box body clamping structure (1), a false touch prevention structure (4) is arranged on the outer surface of the control panel (3), and heat dissipation structures (5) are connected to the outer walls of the two sides of the box body clamping structure (1);
the arc suppression structure (2) comprises:
the air tap (201) is arranged on the outer wall of the top of the box body clamping structure (1);
a spring (202) which is arranged on the inner outer wall of the air nozzle (201);
a fixed block (203) fixed to the outer wall of the air nozzle (201);
a limiting block (204) fixed on the outer wall of the air nozzle (201);
and an engaging plug (205) provided inside the air faucet (201).
2. The pulse bias power supply with an arc suppressing structure as claimed in claim 1, wherein: the clamping plug (205) and the limiting block (204) form an elastic structure through the spring (202), and the outer wall of the limiting block (204) is tightly attached to the inner outer wall of the air nozzle (201).
3. The pulse bias power supply with an arc suppressing structure as claimed in claim 1, wherein: the box body clamping structure (1) comprises:
a top cover (101) disposed outside the arc suppression structure (2);
a bolt (102) provided on an outer surface of the top cover (101);
a bottom case (103) connected to a bottom outer wall of the top cover (101);
and the sealing ring (104) is arranged on the bottom outer wall of the top cover (101).
4. The pulsed bias power supply with arc suppression structure according to claim 3, characterized in that: the top cover (101) and the bottom box (103) form a detachable structure through a bolt (102), and the sealing ring (104) and the bottom box (103) form a clamping structure through the top cover (101).
5. The pulse bias power supply with an arc suppressing structure as claimed in claim 1, wherein: the false touch prevention structure (4) includes:
the socket hidden shell (401) is arranged on the inner outer wall of the control panel (3);
the metal current connector (402) is arranged on the inner outer wall of the socket dark shell (401);
the insulating main wall (403) is attached to the inner outer wall of the socket hidden shell (401);
an insulating sub-wall (404) attached to an outer wall of the metallic current connector (402);
the sliding groove (405) is arranged on the inner outer wall of the socket hidden shell (401);
and the insulating nylon rope covers (406) are arranged on two sides of the inner outer wall of the socket hidden shell (401).
6. The pulsed bias power supply with arc suppression structure according to claim 5, characterized in that: the insulating auxiliary wall (404) and the socket hidden shell (401) form a sliding structure through the metal current connector (402), the sliding groove (405), the insulating main wall (403), and the metal current connector (402) and the insulating auxiliary wall (404) are attached to each other.
7. The pulse bias power supply with an arc suppressing structure as claimed in claim 1, wherein: the heat dissipation structure (5) includes:
the heat-conducting side walls (501) are arranged on two sides of the interior of the box body clamping structure (1);
a heat radiation fan (502) fixed on the inner outer wall of the heat conduction side wall (501);
the insulating dustproof net (503) is arranged on the outer wall of the heat-conducting side wall (501);
a screw (504) disposed on an outer surface of the thermally conductive sidewall (501);
heat dissipation holes (505) opened in the outer surface of the heat conductive side wall (501);
and the heat dissipation auxiliary blade (506) is fixed on the outer wall of the heat conduction side wall (501).
8. The pulsed bias power supply with arc suppression structure according to claim 7, characterized in that: the heat-conducting side wall (501) is communicated with the box body clamping structure (1), and the heat-conducting side wall (501) is movably connected with the box body clamping structure (1).
CN202121961753.0U 2021-08-20 2021-08-20 Pulse bias power supply with arc suppression structure Active CN215872313U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202121961753.0U CN215872313U (en) 2021-08-20 2021-08-20 Pulse bias power supply with arc suppression structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202121961753.0U CN215872313U (en) 2021-08-20 2021-08-20 Pulse bias power supply with arc suppression structure

Publications (1)

Publication Number Publication Date
CN215872313U true CN215872313U (en) 2022-02-18

Family

ID=80240728

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202121961753.0U Active CN215872313U (en) 2021-08-20 2021-08-20 Pulse bias power supply with arc suppression structure

Country Status (1)

Country Link
CN (1) CN215872313U (en)

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