CN215871943U - High-charge-state ion generation and detection device - Google Patents
High-charge-state ion generation and detection device Download PDFInfo
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- CN215871943U CN215871943U CN202121070124.9U CN202121070124U CN215871943U CN 215871943 U CN215871943 U CN 215871943U CN 202121070124 U CN202121070124 U CN 202121070124U CN 215871943 U CN215871943 U CN 215871943U
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- 150000002500 ions Chemical class 0.000 claims abstract description 47
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- 238000002474 experimental method Methods 0.000 description 3
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- 230000009977 dual effect Effects 0.000 description 2
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- 238000004544 sputter deposition Methods 0.000 description 2
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Abstract
The utility model discloses a device for generating and detecting high charge state ions, which belongs to the technical field of high charge state ion generation, and particularly relates to a device for generating and detecting high charge state ions, which comprises a control unit, wherein the control unit is arranged at the bottom of the front side wall of a laboratory, a target chamber is arranged on the left side of the inner side wall of the laboratory, two slits are arranged between the target chamber and the laboratory, an ion detection assembly is arranged corresponding to the ion generation unit, a secondary electromagnet is adopted to generate a magnetic field, so that an ion beam is deflected in the magnetic field, and then the measurement is carried out through a first Faraday cylinder and a second Faraday cylinder, the measurement in two different directions is carried out, the experimental accuracy is increased, meanwhile, a fluorescent target is driven by a track motor to longitudinally translate, the incident point movement of laser emitted by a laser can be realized, the multi-operability is increased, and the device is matched with an accelerating deflection electrode to change the incident point, so that the laser is shot at different positions of the fluorescent target every time, measurements of different data were made.
Description
Technical Field
The utility model relates to the technical field of high-charge-state ions, in particular to a device for generating and detecting high-charge-state ions.
Background
Ions in a high charge state widely exist in nature, and collision of ions and atomic molecules is one of the main microscopic processes of substance interaction in nature. If high-charge-state ions in solar wind blow to the earth and act with the atmosphere at north and south poles to form aurora, the collision process of the high-charge-state ions and atomic molecules also exists in plasmas of magnetic confinement fusion and inertial confinement fusion which are carried out by human beings. The research on the action process of high-charge-state ions and atomic molecules in a laboratory is helpful for understanding natural phenomena and better controlling fusion plasma. Meanwhile, the research of the collision process is also an important way for understanding the dynamic evolution process of the multi-body such as atomic molecules and the like.
With the progress and demand of the technology, the process of generating plasma in the prior art is probably that an ion source is installed on a high voltage platform, a narrower charge balance is established by changing the energy of an electron beam, most ions are in the same ionization state, then a beam current is guided into a beam current line at the ground potential through an accelerating tube, and then an electromagnet selects the charge state of the beam current for corresponding physical experiments.
SUMMERY OF THE UTILITY MODEL
This section is for the purpose of summarizing some aspects of embodiments of the utility model and to briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this section as well as in the abstract of the specification and the title of the application to avoid obscuring the purpose of this section, the abstract of the specification and the title of the application, and such simplifications or omissions are not intended to limit the scope of the utility model.
The present invention has been made in view of the above and/or other problems occurring in the conventional ion devices.
Therefore, the utility model aims to provide a device for generating and detecting high-charge-state ions, which can move a fluorescent target, can realize the movement of an incidence point of laser emitted by a laser, increases the multi-operability, and is matched with an accelerating deflection electrode to change the incidence point, thereby ensuring that sputtering laser is shot at different positions of the fluorescent target every time, and being convenient for measuring different data.
To solve the above technical problem, according to an aspect of the present invention, the present invention provides the following technical solutions:
a high charge state ion generation and detection apparatus comprising: the ion detection assembly comprises a second-level electromagnet frame, a first Faraday cylinder, a second Faraday cylinder, an accelerating deflection electrode and a molecular pump, the second-level electromagnet frame is arranged at the central position of the top of the inner side wall of the laboratory, the first Faraday cylinder is arranged in the second-level electromagnet frame, the second Faraday cylinder is arranged in the laboratory, and the second Faraday cylinder is positioned under the first Faraday cylinder, the accelerating deflection electrode is positioned between the two slits, the molecular pump is provided with two molecular pumps, and the adjusting target unit is arranged in the target chamber.
As a preferable aspect of the generation and detection apparatus of ions in a high charge state according to the present invention, wherein: the adjusting target unit comprises a track motor and a fluorescent target, the track motor is installed on the inner side of the target chamber, and the fluorescent target is installed on a connecting seat of the track motor.
As a preferable aspect of the generation and detection apparatus of ions in a high charge state according to the present invention, wherein: the laboratory and the target chamber are matched through a vacuum pump to form a vacuum environment.
As a preferable aspect of the generation and detection apparatus of ions in a high charge state according to the present invention, wherein: the two slits have the same structure and are XY bidirectional slits, the two slits are respectively installed in a section of independent pipeline, and the outlet of the two molecular pumps is respectively communicated with the two pipelines through a main pipeline.
As a preferable aspect of the generation and detection apparatus of ions in a high charge state according to the present invention, wherein: the fluorescent target and the second Faraday cylinder are arranged in the same pipeline.
Compared with the prior art: adopt the secondary electromagnet to produce magnetic field, make the ion beam take place to deflect in the magnetic field, the orbit in the magnetic field of ion of different mass-to-charge ratios (element quality and charge state ratio) is different, first Faraday cylinder measures the beam size that does not pass through magnetic field deflection, second Faraday cylinder is used for measuring the beam size when getting into the target room, the measurement of dual not equidirectional, increase the experimental accuracy, and simultaneously, drive the fluorescence target through the track motor and carry out longitudinal translation, can realize the incident point of the laser of laser emission and remove, increase many operationality, and cooperate with the acceleration deflection electrode, change incident point, guaranteed that sputter laser hits the different positions at the fluorescence target at every turn, conveniently carry out the measurement of different data.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the present invention will be described in detail with reference to the accompanying drawings and detailed embodiments, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive exercise. Wherein:
FIG. 1 is a schematic view of the overall structure of the present invention;
in the figure: 100 control unit, 200 experiment chamber, 210 target chamber, 211 slit, 220 vacuum pump, 300 ion generating unit, 400 ion detecting component, 410 secondary magnet chamber, 420 first Faraday cup, 430 second Faraday cup, 440 accelerated deflection electrode, 450 molecular pump, 500 regulating target unit, 510 orbital motor, 520 fluorescent target.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, but the present invention may be practiced in other ways than those specifically described herein, and it will be apparent to those of ordinary skill in the art that the present invention may be practiced without departing from the spirit and scope of the present invention, and therefore the present invention is not limited to the specific embodiments disclosed below.
Next, the present invention will be described in detail with reference to the drawings, wherein for convenience of illustration, the cross-sectional view of the device structure is not enlarged partially according to the general scale, and the drawings are only examples, which should not limit the scope of the present invention. In addition, the three-dimensional dimensions of length, width and depth should be included in the actual fabrication.
In order to make the objects, technical solutions and advantages of the present invention more apparent, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
The utility model provides a high charge state ion generating and detecting device, which adopts a secondary electromagnet to generate a magnetic field, so that an ion beam deflects in the magnetic field, the trajectories of ions with different mass-to-charge ratios (element mass to charge state ratios) in the magnetic field are different, a first Faraday cylinder measures the beam current without magnetic field deflection, a second Faraday cylinder measures the beam current when entering a target chamber, and the measurement in double different directions increases the experimental accuracy, and please refer to fig. 1, and the device comprises a control unit 100, a laboratory 200, an ion generating unit 300, an ion detecting assembly 400 and an adjusting target unit 500;
referring to fig. 1, the control unit 100 is disposed at the bottom of the front sidewall of the laboratory 200, and the control unit 100 is used as a control system of the whole device;
referring to fig. 1, a target chamber 210 is disposed on the left side of the inner side wall of the laboratory 200, two slits 211 are disposed between the target chamber 210 and the laboratory 200, the two slits 211 have the same structure and are both XY bi-directional slits, the two slits 211 are respectively installed in a segment of independent pipeline, the slits 211 are used for collimating and limiting ion beams, a vacuum pump 220 is screwed on the top of the outer side wall of the laboratory 200, and the laboratory 200 and the target chamber 210 are both matched through the vacuum pump 220 to form a vacuum environment;
with reference to fig. 1, the ion generating unit 300 is disposed at the left side of the inner sidewall of the laboratory 200;
referring to fig. 1, the ion detection assembly 400 is disposed corresponding to the ion generating unit 300, the ion detection assembly 400 includes a second stage electromagnet support 410, a first faraday cup 420, a second faraday cup 430, an accelerating deflection electrode 440 and a molecular pump 450, the second stage electromagnet support 410 is installed at the central position of the top of the inner sidewall of the laboratory 200, the first faraday cup 420 is disposed in the second stage electromagnet support 410, a magnetic field is generated by a second stage electromagnet, so that the ion beam is deflected in the magnetic field, the trajectories of ions with different mass-to-charge ratios (ratios of element mass to charge state) in the magnetic field are different, the second faraday cup 430 is disposed in the laboratory 200, the second faraday cup 430 is disposed under the first faraday cup 420, the second faraday cup 430 is used for measuring the beam current size when entering the target chamber, the first faraday cup 420 measures the beam current size deflected by the magnetic field, the accelerating deflection electrode 440 is disposed between two slits 211, the number of the molecular pumps 450 is two, and outlets of the two molecular pumps 450 are respectively communicated with the two pipelines through a main pipeline;
please continue to refer to fig. 1, the adjusting target unit 500 is disposed in the target chamber 210, the adjusting target unit 500 includes a track motor 510 and a fluorescent target 520, the track motor 510 is installed inside the target chamber 210, the fluorescent target 520 is installed on a connecting seat of the track motor 510, the fluorescent target 520 is driven by the track motor 520 to longitudinally translate, so that the incident point of the laser emitted by the laser can move, the multi-operability is increased, and the adjusting target is matched with the accelerating deflection electrode to change the incident point, thereby ensuring that the sputtering laser strikes different positions of the fluorescent target at each time, and facilitating the measurement of different data.
The working principle is as follows: the utility model discloses a when using, adopt the secondary electromagnet to produce magnetic field, make the ion beam take place to deflect in the magnetic field, the orbit of the ion of different mass-to-charge ratios (ratio of element quality and charge state) is different in the magnetic field, first Faraday cylinder 420 measures the beam size that does not pass through magnetic field deflection, second Faraday cylinder 430 is used for measuring the beam size when getting into the target room, the measurement of dual not equidirectional, increase the experiment accuracy, and simultaneously, drive fluorescence target 520 through track motor 520 and carry out vertical translation, can realize the incident point removal of the laser of laser instrument transmission, increase many operationality, and with the cooperation of the deflection electrode with higher speed, change incident point, guaranteed that sputter laser hits the position different at the fluorescence target at every turn, conveniently carry out the measurement of different data.
While the utility model has been described above with reference to an embodiment, various modifications may be made and equivalents may be substituted for elements thereof without departing from the scope of the utility model. In particular, the various features of the disclosed embodiments of the utility model may be used in any combination, provided that no structural conflict exists, and the combinations are not exhaustively described in this specification merely for the sake of brevity and resource conservation. Therefore, it is intended that the utility model not be limited to the particular embodiments disclosed, but that the utility model will include all embodiments falling within the scope of the appended claims.
Claims (4)
1. A device for generating and detecting high charge state ions, comprising: the ion source comprises a control unit (100), a laboratory (200), an ion generating unit (300), an ion detecting assembly (400) and an adjusting target unit (500), wherein the control unit (100) is arranged at the bottom of the front side wall of the laboratory (200), a target chamber (210) is arranged on the left side of the inner side wall of the laboratory (200), two slits (211) are arranged between the target chamber (210) and the laboratory (200), a vacuum pump (220) is arranged at the top of the outer side wall of the laboratory (200), the ion generating unit (300) is arranged on the left side of the inner side wall of the laboratory (200), the ion detecting assembly (400) is arranged corresponding to the ion generating unit (300), the ion detecting assembly (400) comprises a secondary electromagnet frame (410), a first Faraday cylinder (420), a second Faraday cylinder (430), an accelerating deflection electrode (440) and a molecular pump (450), the secondary electromagnet frame (410) is arranged at the central position of the top of the inner side wall of the laboratory (200), the first Faraday cage (420) is arranged in the second-stage electromagnet stand (410), the second Faraday cage (430) is arranged in the laboratory (200), the second Faraday cage (430) is positioned right below the first Faraday cage (420), the accelerating deflection electrode (440) is positioned between the two slits (211), the number of the molecular pumps (450) is two, and the adjusting target unit (500) is arranged in the target chamber (210).
2. The apparatus for generating and detecting ions with high charge state according to claim 1, wherein the adjusting target unit (500) comprises an orbit motor (510) and a fluorescent target (520), the orbit motor (510) is installed inside the target chamber (210), and the fluorescent target (520) is installed on a connecting seat of the orbit motor (510).
3. The apparatus for generating and detecting ions with high charge state according to claim 1, wherein the laboratory (200) and the target chamber (210) are both cooperated by a vacuum pump (220) to form a vacuum environment.
4. The device for generating and detecting the high-charge-state ions according to claim 1, wherein the two slits (211) have the same structure and are both XY bidirectional slits, the two slits (211) are respectively installed in a section of independent pipeline, and the outlets of the two molecular pumps (450) are respectively communicated with the two pipelines through a main pipeline.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121070124.9U CN215871943U (en) | 2021-05-19 | 2021-05-19 | High-charge-state ion generation and detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121070124.9U CN215871943U (en) | 2021-05-19 | 2021-05-19 | High-charge-state ion generation and detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215871943U true CN215871943U (en) | 2022-02-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121070124.9U Expired - Fee Related CN215871943U (en) | 2021-05-19 | 2021-05-19 | High-charge-state ion generation and detection device |
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| Country | Link |
|---|---|
| CN (1) | CN215871943U (en) |
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2021
- 2021-05-19 CN CN202121070124.9U patent/CN215871943U/en not_active Expired - Fee Related
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