CN215862868U - Argon distributor of integrated circuit factory - Google Patents

Abstract

The utility model provides an argon gas distributor of integrated circuit factory, includes a set of air feed distribution unit at least, air feed distribution unit includes gas holder, truncation valve and clarifier, in the intake pipe is connected to the air inlet of gas holder, in set gradually truncation valve and clarifier according to the air feed delivery path on the pipeline of intake pipe, in set up a plurality of air feed ports on the gas holder, in every the air feed port is connected and is set up the air supply pipe. Carry out the distribution of concentrated gas supply to the required argon gas of construction through setting up the argon gas distributor to the break-make and the flow of each branch road argon gas of regulation control through each branch road flowmeter, compare in every group and carry little steel bottle construction separately, it is more convenient to the use of air supply, can implement centralized management to the air supply simultaneously, can arrange that the special messenger carries out the change and the management of high-purity large capacity argon gas bottle regularly, reduce in the past many times, many people carry out the use and the change of argon gas bottle and the incident that causes takes place.

Description

Argon distributor of integrated circuit factory

Technical Field

The utility model relates to the technical field of integrated circuits, in particular to an argon distributor of an integrated circuit factory.

Background

With the vigorous development of the integrated circuit chip manufacturing industry in China, a large number of new factories are being built. Since a large amount of high purity gas and liquid chemicals are used in the manufacturing process of the integrated circuit, a large amount of stainless steel pipes must be erected at the initial stage of factory building, and the welding workload is very large.

In order to ensure normal project progress, dozens of welding teams usually perform stainless steel pipeline welding simultaneously in a distributed operation mode. Because the surface finish requirement of the stainless steel pipeline is very high, an argon arc welding mode is required, so that each welding team is distributed with a small high-purity argon cylinder for blowing argon to protect and weld a high-temperature area and the corresponding inner wall of the pipeline during welding. The operation is characterized by scattered personnel, large working surface and certain hidden trouble in the aspects of safety management and welding quality.

Therefore, in order to overcome the above disadvantages, an argon distributor with high construction safety, convenient centralized management and high operation efficiency needs to be provided to overcome the defects in the prior art.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide an argon distributor of an integrated circuit factory, which is characterized in that the argon distributor is arranged to perform centralized gas supply distribution on argon required by construction, and the on-off and flow rate of each branch of argon are controlled by adjusting each branch flow meter.

In order to achieve the purpose, the utility model adopts the following technical scheme:

an argon distributor of an integrated circuit factory at least comprises a group of air supply distribution units, wherein each air supply distribution unit comprises an air storage tank, a cut-off valve and a purifier, an air inlet of each air storage tank is connected with an air inlet pipe, the cut-off valves and the purifiers are sequentially arranged on a pipeline of the air inlet pipe according to an air inlet conveying path, an air supply gas circuit is opened and closed through the cut-off valves, impurities in argon are removed through the purifiers, the argon is purified, the purity of the argon meets the requirement, a plurality of air supply ports are arranged on the air storage tank, and each air supply port is connected with and provided with an air supply pipe;

correspondingly, the block valve is a diaphragm valve;

correspondingly, a filter is arranged on an air inlet pipe between the block valve and the purifier, and the filter captures and adsorbs dust particles with different particle sizes in the argon gas, so that impurities in the argon gas are preliminarily filtered, and the quality of the argon gas is improved;

correspondingly, thirty gas supply ports are arranged on the gas storage tank at intervals, every two gas supply ports are used as a gas supply unit, one gas supply unit is used for a welding machine, the other gas supply unit is used for an internal blowing pipeline, the inner wall of the stainless steel pipeline is protected from high-temperature oxidation during welding, fifteen welding teams can be simultaneously used for construction, and the operation efficiency is greatly improved;

correspondingly, a flowmeter is arranged at the air supply end of the air supply pipe, a pipeline connecting port is arranged at the air outlet end of the flowmeter, and the air supply flow of the air supply pipe is independently adjusted through the flowmeter;

correspondingly, the air outlet end of the flowmeter is arranged upwards, so that the standardization of pipeline connection is facilitated.

Correspondingly, the gas storage tank is provided with an expansion port, the expansion port is connected with an expansion pipeline, the expansion pipeline is connected with another group of gas supply distribution units, the other group of gas supply distribution units comprises an expansion diaphragm valve, an expansion purifier and an expansion gas storage tank which are sequentially connected through the expansion pipeline, the expansion gas storage tank is provided with a plurality of expansion gas supply ports, each expansion gas supply port is connected with an expansion gas supply pipe, an expansion flowmeter is arranged at the gas supply end of the expansion gas supply pipe, and the gas outlet end of the expansion flowmeter is provided with a pipeline connecting port.

The utility model has the beneficial effects that:

1) the argon distributor is arranged to perform centralized gas supply distribution on argon required in operation, and the on-off and flow of each branch argon are controlled through the regulation of each branch flowmeter, so that compared with the construction that each group carries a small steel cylinder, the use of a gas source is more convenient, meanwhile, the centralized management can be performed on the gas source, a specially-assigned person can be arranged to perform replacement and management of a high-purity large-capacity argon bottle at regular time, and the occurrence of safety accidents caused by the fact that multiple persons use and replace the argon bottle for multiple times in the past is reduced;

2) the argon distributor can be used for a plurality of teams and groups to operate simultaneously, so that the construction efficiency is improved;

3) the argon is filtered and purified by the filter and the purifier and then is conveyed to the gas storage tank to be distributed in a centralized manner, so that the technical requirements on the gas storage tank are reduced, the applicability of the common gas storage tank is improved, the economic cost is reduced, and the argon is ensured to meet the welding and blowing requirements on stainless steel pipelines in the integrated circuit manufacturing industry.

Drawings

FIG. 1 is a schematic perspective view of an argon distributor of an IC foundry according to an embodiment of the present invention;

FIG. 2 is a top view of the structure of FIG. 1;

in the figure:

1. a gas storage tank; 2. an air inlet pipe; 3. a diaphragm valve; 4. a filter; 5. a purifier; 6. a gas supply pipe; 7. a flow meter; 8. expanding a pipeline; 9. and expanding the diaphragm valve.

Detailed Description

In the description of the present invention, it is to be understood that the terms "upward" and the like indicate orientations or positional relationships based on those shown in the drawings, which are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Further, in the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "connected," "disposed," and the like are to be construed broadly, e.g., as meaning fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

The principles and features of this invention are described below in conjunction with the following drawings, which are set forth by way of illustration only and are not intended to limit the scope of the utility model. It is to be noted that the drawings are in a very simplified form and are not to precise scale, which is merely for the purpose of facilitating and distinctly claiming the embodiments of the present invention.

As shown in fig. 1 and 2, the argon distributor of the ic factory at least comprises a set of supply distribution units, the supply distribution units comprise a gas storage tank 1, a shut-off valve, a filter 4 and a purifier 5, in this embodiment, the shut-off valve is set as a diaphragm valve 3, and the materials are all made of SUS316L/EP stainless steel (i.e., molybdenum-containing austenitic stainless steel/electropolishing treatment) according to SEMI standard of the ic industry, the size of the gas storage tank 1 is phi 100MM L500MM, which is suitable for human mechanics and is convenient for construction and transportation, a gas inlet of the gas storage tank 1 is connected with a gas inlet pipe 2, the diaphragm valve 3, the filter 4 and the purifier 5 are sequentially arranged on the pipeline of the gas inlet pipe 2 according to a gas inlet transportation path, a plurality of gas supply ports are arranged on the gas storage tank 1, generally, one welding team needs two gas ports, one of which is used by a welding machine, the other is used for an internal injection pipeline, therefore, in the embodiment, thirty air supply ports are arranged on the air storage tank 1 at intervals, 10 air supply ports are arranged in one row, and three rows are arranged, so that fifteen welding teams can be constructed at the same time, an air supply pipe 6 is connected and arranged on each air supply port, a flow meter 7 is arranged at the air supply end of the air supply pipe 6, a pipeline connecting port is arranged at the air supply end of the flow meter 7, the air supply end of the flow meter 7 is arranged upwards, and the air supply flow of the air supply pipe 6 is independently adjusted through the flow meter 7;

furthermore, the gas storage tank 1 is provided with an expansion port, when large-scale welding construction is required, the expansion port is connected with an expansion pipeline 8, the expansion pipeline 8 is connected with another group of gas supply distribution units, the other group of gas supply distribution units comprises an expansion diaphragm valve 9, an expansion purifier and an expansion gas storage tank which are sequentially connected through the expansion pipeline 8, the expansion gas storage tank is provided with a plurality of expansion gas supply ports, each expansion gas supply port is connected with an expansion gas supply pipe, an expansion flowmeter is arranged at a gas supply end of the expansion gas supply pipe, and a pipeline connecting port is arranged at a gas outlet end of the expansion flowmeter. It should be noted that "expansion" on "the expansion diaphragm valve 9", "the expansion purifier", "the expansion gas tank", "the expansion gas supply port", "the expansion gas supply pipe", and "the expansion flowmeter" has no practical meaning, and is only for distinguishing "the expansion diaphragm valve 9", "the expansion purifier", "the expansion gas tank", "the expansion gas supply port", "the expansion gas supply pipe", "the expansion flowmeter" from the aforementioned "diaphragm valve 3", "filter 4", "gas tank 1", "the gas supply port", "gas supply pipe 6", and "flowmeter 7", and for describing the structure in the other group, the function of "the expansion diaphragm valve 9" is the same as that of "the diaphragm valve 3", the function of "the expansion purifier" is the same as that of "the purifier 5", the function of "the expansion gas tank" is the same as that of "the gas tank 1", and the function of "the gas supply port" is the same as that of "the gas supply port", the function of the 'expansion air supply pipe' is the same as that of the 'air supply pipe 6', and the function of the 'expansion flowmeter' is the same as that of the 'flowmeter 7';

similarly, when a larger welding construction is needed, the expansion air storage tank can be further expanded.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims (7)

1. The utility model provides an argon gas distributor of integrated circuit factory, its characterized in that includes a set of air feed distribution unit at least, air feed distribution unit includes gas holder, truncation valve and clarifier, in the intake pipe is connected to the air inlet of gas holder, in set gradually truncation valve and clarifier according to the delivery path of admitting air on the pipeline of intake pipe, in set up a plurality of air feed ports on the gas holder, in every the air feed port is connected and is set up the air supply pipe.

2. The argon distributor of an integrated circuit plant of claim 1, wherein said shut-off valve is a diaphragm valve.

3. The argon distributor of an ic factory as claimed in claim 1, wherein a filter is disposed on the inlet pipe between said shut-off valve and said purifier.

4. The argon distributor of an IC factory according to claim 1, wherein thirty gas supply ports are provided at intervals on said gas storage tank, and every two of said gas supply ports are used as a gas supply unit.

5. The argon distributor of an IC factory as claimed in claim 1, wherein a flow meter is disposed at a gas supply end of said gas supply pipe, and a pipe connection port is disposed at a gas outlet end of said flow meter.

6. The argon distributor of an IC factory according to claim 5, wherein the outlet end of said flow meter is disposed upward.

7. The argon distributor of an IC factory as claimed in claim 1, wherein said gas tank is provided with an expansion port, said expansion port is connected to an expansion pipe, said expansion pipe is connected to another set of gas distribution units, said another set of gas distribution units comprises an expansion diaphragm valve, an expansion purifier and an expansion gas tank which are connected in sequence through said expansion pipe, a plurality of expansion gas supply ports are provided on said expansion gas tank, an expansion gas supply pipe is provided on each of said expansion gas supply ports, an expansion flowmeter is provided on a gas supply end of said expansion gas supply pipe, and a pipe connection port is provided on a gas outlet end of said expansion flowmeter.

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