CN215862126U

CN215862126U - Double-layer air pipe with air inlet and pressure measuring functions

Info

Publication number: CN215862126U
Application number: CN202121749002.2U
Authority: CN
Inventors: 宋立禄; 张海林; 滕玉朋
Original assignee: Qingdao Sunred Electronic Technology Co ltd
Current assignee: Sairuida Intelligent Electronic Equipment Wuxi Co ltd
Priority date: 2021-07-29
Filing date: 2021-07-29
Publication date: 2022-02-18
Anticipated expiration: 2031-07-29

Abstract

The utility model discloses a double-layer air pipe with air inlet and pressure measuring functions, which comprises a process pipe, wherein an exhaust pipe is arranged at the tail end of the process pipe, a valve is arranged on the exhaust pipe, an outer pipe is welded at the lower part of the process pipe, which is close to the inner wall, a double-layer pipe joint body is sleeved at the end part of the outer pipe outside the process pipe, an air inlet pipe is clamped inside the double-layer pipe joint body, the diameters of the front inner circle and the rear inner circle of the double-layer pipe joint body are different, a pressure gauge seat pipe is arranged at the upper part of the double-layer pipe joint body, and the upper end of the pressure gauge seat pipe is connected with a pressure gauge. The utility model provides a double-deck trachea and joint design with admit air and pressure measurement function can reduce pipeline quantity, and reasonable suit shares same position, has realized that two kinds of gas suit pipelines share a central point and put or a central point of a gas and pressure measurement sharing, can reduce the position demand of half the inlet line, has solved the position crowded difficulty of arranging not opening, has realized the whole functions of admitting air and pressure measurement of many gaseous flows, and its good effect and effect are obvious.

Description

Double-layer air pipe with air inlet and pressure measuring functions

Technical Field

The utility model relates to a diffusion furnace, LPCVD and other tubular equipment in the semiconductor and photovoltaic fields, in particular to a double-layer air pipe with air inlet and pressure measuring functions.

Background

In the traditional mode, all air inlet, air exhaust, pressure measurement and process chamber inner coupling need single tubes for arrangement, for complex processes, the end part of a process chamber is provided with a plurality of pipelines, and reasonable space of a process wafer boat and a wafer inside the process chamber cannot be occupied, so the arrangement can be only carried out on the annular circumference close to the outer wall of the chamber, the equipment characteristics usually require air inlet arrangement at the lower part and air exhaust arrangement at the middle or upper part, and for the complex process requirements, a plurality of problems such as equipment air inlet end pipeline congestion, interference, inconvenient installation, easy damage and the like occur, and the problems are not solved easily.

Disclosure of Invention

The utility model aims to solve the problems and designs a double-layer air pipe with air inlet and pressure measuring functions.

The technical scheme of the utility model is that the double-layer air pipe with the air inlet and pressure measuring functions comprises a process pipe, wherein an exhaust pipe is arranged at the tail end of the process pipe, a valve is arranged on the exhaust pipe, an outer pipe is welded at the position, close to the inner wall, of the lower part of the process pipe, a double-layer pipe joint body is sleeved at the outer pipe end outside the process pipe, an air inlet pipe is clamped inside the double-layer pipe joint body, the front inner circle and the rear inner circle of the double-layer pipe joint body are different in diameter, a pressure gauge seat pipe is arranged at the upper part of the double-layer pipe joint body, and the upper end of the pressure gauge seat pipe is connected with a pressure gauge.

As a further explanation of the present invention, the air inlet pipe penetrates through the double-layer pipe joint body and the outer pipe, and one end of the air inlet pipe extends into the process pipe, and the other end extends out of the double-layer pipe joint body.

As a further description of the present invention, an outer tube threaded cap is disposed in the tube at one end of the double-layer tube joint body, and the outer tube threaded cap is sleeved on the outer wall of the outer tube.

As a further explanation of the present invention, an air inlet pipe screw gland is disposed in the pipe at the other end of the double-layer pipe joint body, and the air inlet pipe screw gland is sleeved on the outer wall of the air inlet pipe.

As a further explanation of the present invention, an outer tube sealing ring and an outer tube sealing ring spacer are disposed between the outer tube screw gland and the double-layer pipe joint.

As a further description of the present invention, the outer tube sealing ring is disposed at a position close to the double-layer tube joint body, and the outer tube sealing ring spacer is disposed between 2 outer tube sealing rings.

As a further explanation of the present invention, an intake pipe sealing ring and an intake sealing ring spacer are disposed between the intake pipe screw gland and the double-layer pipe joint body.

As a further description of the present invention, the intake pipe sealing ring is disposed at a position close to the intake pipe screw gland, and the intake sealing ring spacer is disposed between 2 intake pipe sealing rings.

As a further explanation of the utility model, an annular space is formed between the outer diameter of the inlet pipe and the inner diameter of the outer pipe, and the annular space is in volume communication with the process pipe.

As a further explanation of the utility model, the annular space communicates with the inner space of the pressure gauge seat tube.

The double-layer air pipe with the air inlet and pressure measuring functions and the joint structure have the advantages that the number of pipelines can be reduced, the double-layer air pipe with the air inlet and pressure measuring functions and the joint structure are reasonably sleeved and share the same position, the purpose that two sleeved pipelines share the same central position or one air and pressure measuring share the same central position is achieved, the position requirement of half of the air inlet pipeline can be reduced, the problem that the position is crowded and arranged without opening is solved, all functions of air inlet and pressure detection of multiple gases and multiple flow rates are achieved, the excellent effects and the obvious effects are achieved, and the double-layer air pipe with the air inlet and pressure measuring functions and the joint structure are worthy of popularization and application.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a partially enlarged schematic view of portion A of FIG. 1;

FIG. 3 is a partially enlarged view of the portion B in FIG. 1

In the figure, 1, an air inlet pipe; 2. a double-layer pipe joint body; 3. the air inlet pipe is provided with a threaded gland; 4. an air inlet pipe sealing ring; 5. an air inlet sealing ring spacer bush; 6. a pressure gauge seat tube; 7. a pressure gauge; 8. an outer pipe sealing ring; 9. The outer pipe is provided with a sealing ring spacer bush; 10. an outer tube; 11. the outer pipe is screwed with a gland; 12. a process tube; 13. and (4) exhausting the gas.

Detailed Description

The utility model is described in detail below with reference to the accompanying drawings, as shown in fig. 1-3, a double-layer trachea with air inlet and pressure measuring functions, the principle and composition of which are as follows: a process pipe 12 (also called a process chamber) is provided with an exhaust pipe 13 (with a valve) at the tail end, an outer pipe 10 is welded at the lower part close to the inner wall, a double-layer pipe joint body 2 is sleeved at the end part of the outer pipe 10 outside the process pipe 12, outer pipe sealing rings 8 (1 or more) are placed in a sealing space between an outer pipe thread gland 11 and the double-layer pipe joint body 2, the two outer pipe sealing rings 8 are separated by an outer pipe sealing ring spacer 9, the outer pipe thread gland 11 is screwed tightly to press the outer pipe sealing rings 8 and the outer pipe sealing ring spacer 9, the inner diameter of the sealing part of the double-layer pipe joint body 2 is pressed, fixed and sealed with the outer diameter part of the outer pipe 10 by deforming the outer pipe sealing rings 8, then an air inlet pipe 1 is coaxially inserted into an inner hole at the other side of the double-layer pipe joint body 2, the length of the air inlet pipe 1 extending into the process pipe 12 is determined according to the requirement of an air inlet point, the inner diameter matched with a double-layer pipe joint body 2 and an air inlet pipe thread gland 3 screwed by two air inlet pipe sealing rings 4 and an air inlet sealing ring spacer 5 between the two air inlet pipe sealing rings are used for compressing to realize the sealing and coaxial fixation of an air inlet pipe 1, wherein the number of the air inlet pipe sealing rings 4 can be 1 or more, the air inlet pipe 1 is used for process air inlet, a pressure gauge seat pipe 6 is arranged in the middle area of the double-layer pipe joint body 2, a pressure gauge 7 is arranged, an annular space is formed between the outer diameter of the air inlet pipe 1 and the inner diameter of an outer pipe 10 and is communicated with the volume of a process pipe 12, the pressure in the process pipe 12 can be communicated with the pressure gauge seat pipe 6 and the pressure gauge 7 through an annular space channel formed between the outer diameter of the air inlet pipe 1 and the inner diameter of the outer pipe 10, and the pressure communication pipeline is in isobaric transmission, so that the pressure value of the pressure gauge 7 is the process pressure value in the process pipe 12, the air inlet pipe 1 is used for process air inlet, and the pressure gauge 7 utilizes the air inlet pipe 1

An annular space is formed between the outer diameter and the inner diameter of the outer pipe 10, the pressure detection function of the inner part of the process pipe 12 is carried out, and the two functions of air inlet and pressure measurement are realized by sharing a central position; if the pressure gauge 7 is removed and connected with another path of gas, the coaxial sleeved structure can realize the gas inlet function that the inner pipe and the interlayer can inlet different gases; the utility model discloses a double-layer air pipe with air inlet and pressure measuring functions and a joint structure, which can well solve the problem of space crowding caused by more air inlet pipes.

The technical solutions described above only represent the preferred technical solutions of the present invention, and some possible modifications to some parts of the technical solutions by those skilled in the art all represent the principles of the present invention, and fall within the protection scope of the present invention.

Claims

1. The utility model provides a double-deck trachea with admit air and pressure measurement function, includes technology pipe (12), its characterized in that, the tail end of technology pipe (12) is provided with blast pipe (13), be provided with the valve on blast pipe (13), the lower part of technology pipe (12) is close to inner wall department welding has outer tube (10), the outside outer tube tip cover of technology pipe (12) has connect double-deck pipe connector body (2), the inside centre gripping of double-deck pipe connector body (2) has intake pipe (1), the interior circle diameter around double-deck pipe connector body (2) is different, double-deck pipe connector body (2) upper portion is provided with manometer seat pipe (6), the upper end of manometer seat pipe (6) is connected with manometer (7).

2. The double-layer air pipe with air inlet and pressure measuring functions as claimed in claim 1, wherein the air inlet pipe (1) penetrates through the double-layer pipe joint body (2) and the outer pipe (10), one end of the air inlet pipe (1) extends into the process pipe (12), and the other end of the air inlet pipe extends out of the double-layer pipe joint body (2).

3. The double-layer air pipe with air inlet and pressure measuring functions as claimed in claim 1, wherein an outer pipe thread gland (11) is arranged in the pipe at one end of the double-layer pipe joint body (2), and the outer pipe thread gland (11) is sleeved on the outer wall of the outer pipe (10).

4. The double-layer air pipe with air inlet and pressure measuring functions according to claim 1, wherein an air inlet pipe screw gland (3) is arranged in the pipe at the other end of the double-layer pipe joint body (2), and the air inlet pipe screw gland (3) is sleeved on the outer wall of the air inlet pipe (1).

5. The double-layer air pipe with air inlet and pressure measuring functions as claimed in claim 3, characterized in that an outer pipe sealing ring (8) and an outer pipe sealing ring spacer bush (9) are arranged between the outer pipe thread gland (11) and the double-layer pipe joint body (2).

6. The double-layer trachea with air inlet and pressure measuring functions as claimed in claim 5, wherein the outer tube sealing ring (8) is arranged at a position close to the double-layer trachea connector body (2), and the outer tube sealing ring spacer bush (9) is arranged between the 2 outer tube sealing rings (8).

7. The double-layer air pipe with air inlet and pressure measuring functions as claimed in claim 4, wherein an air inlet pipe sealing ring (4) and an air inlet sealing ring spacer bush (5) are arranged between the air inlet pipe screw gland (3) and the double-layer pipe connector body (2).

8. The double-layer air pipe with air inlet and pressure measuring functions as claimed in claim 7, wherein the air inlet pipe sealing ring (4) is arranged at a position close to the air inlet pipe screw gland (3), and the air inlet sealing ring spacer bush (5) is arranged between 2 air inlet pipe sealing rings (4).

9. The double-layer gas pipe with gas inlet and pressure measuring functions as claimed in claim 1, wherein an annular space is formed between the outer diameter of the gas inlet pipe (1) and the inner diameter of the outer pipe (10), and the annular space is communicated with the volume of the process pipe (12).

10. Double-layer trachea with aspiration and pressure measurement function according to claim 9, characterized by the fact that said annular space is in communication with the internal space of said seat tube (6).