CN215856304U

CN215856304U - Magnetron sputtering coating production line system

Info

Publication number: CN215856304U
Application number: CN202121892260.6U
Authority: CN
Inventors: 陈培绍; 王松沛; 邱子豪
Original assignee: Zhongshan Kaixuan Vacuum Science and Technology Co Ltd
Current assignee: Zhongshan Kaixuan Vacuum Science and Technology Co Ltd
Priority date: 2021-08-13
Filing date: 2021-08-13
Publication date: 2022-02-18
Anticipated expiration: 2031-08-13

Abstract

The utility model discloses a magnetron sputtering coating production line system, which comprises: a multi-section vacuum chamber assembly, the vacuum chamber assembly comprising a load assembly; the sub-control cabinets correspond to the vacuum cavity assemblies one by one and are provided with control modules; the control cable groups correspond to the control modules one by one, and the control modules are electrically connected with the load assembly through the control cable groups; the main control cabinet is provided with a processing module, and the processing module is in communication connection with the control module. The control cable groups of different sub-control cabinets are not interfered with each other, the arrangement of the control cable groups can be simplified, and the sub-control cabinets are arranged on each section of vacuum cavity assembly in a one-to-one correspondence mode, so that the consumption of the wiring length of the control cable groups can be reduced. When the vacuum cavity assembly is newly inserted, the vacuum cavity assembly and the sub-control cabinet are moved together, a control cable group between the control module and the load assembly is not required to be disassembled and assembled, the operation is simplified, and the time is saved.

Description

Magnetron sputtering coating production line system

Technical Field

The utility model relates to the field of magnetron sputtering film production lines, in particular to a magnetron sputtering coating production line system.

Background

The continuous magnetron sputtering coating production line comprises a plurality of sections of vacuum cavity assemblies connected end to end, different vacuum cavity assemblies can perform different processing procedures to realize different functions, and the vacuum cavity assemblies can be divided into a cleaning chamber, a buffer chamber, a coating chamber and the like according to the functions.

Referring to fig. 1, in the prior art, each vacuum chamber assembly 900 includes different load components, and the electric control cabinet 910 is connected to each load component through a control cable 920, so that a plurality of control cables 910 are connected between each vacuum chamber assembly 900 and the electric control cabinet 920, which results in a large number of cables and troublesome routing arrangement.

Meanwhile, the more the vacuum cavity assemblies 900 in the magnetron sputtering coating production line are, the longer the vacuum cavity assemblies are, the general overall length is generally more than 20 meters, and because the control cables 920 are connected with the same electric control cabinet 910, the control cables 920 are increasingly consumed along with the increase of the overall length. When a new vacuum cavity assembly 900 needs to be inserted due to process change and the like, all vacuum cavity assemblies 900 newly inserted into the vacuum cavity assembly 900, that is, the distance between the vacuum cavity assembly 900 to be moved and the electric control cabinet 910 changes, and due to the limitation of the length of the control cable 920, all vacuum cavity assemblies 900 newly inserted into the vacuum cavity assembly 900 need to be detached from the originally connected control cable 920 and reconnected with the control cable 920 with sufficient length after being moved, so that the operation is troublesome and the time is long.

In addition, when the number of the vacuum cavity assemblies 900 is increased, the number of control modules in the electric control cabinet 910, such as the number of control points of a PLC, may be insufficient, and the electric control cabinet 910 needs to be additionally assembled and assembled, which is troublesome to operate.

SUMMERY OF THE UTILITY MODEL

The present invention is directed to solving at least one of the problems of the prior art. Therefore, the utility model provides a magnetron sputtering coating production line system which can simplify the arrangement of a control cable group, reduce the length consumption of the control cable group and simplify the operation when a vacuum cavity assembly is newly added.

The magnetron sputtering coating production line system comprises: a multi-section vacuum chamber assembly, the vacuum chamber assembly comprising a load assembly; the sub-control cabinets correspond to the vacuum cavity assemblies one by one and are provided with control modules; the control cable groups correspond to the control modules one by one, and the control modules are electrically connected with the load assembly through the control cable groups; the main control cabinet is provided with a processing module, and the processing module is in communication connection with the control module.

The magnetron sputtering coating production line system provided by the embodiment of the utility model at least has the following beneficial effects: the control modules in the sub-control cabinets are electrically connected with the load assemblies on the corresponding vacuum cavity assemblies through control cable sets, and the processing module in the main control cabinet is in communication connection with the control modules in each sub-control cabinet respectively so as to coordinate different control modules to control the load assemblies to work. With this structure, the control cable group of different branch accuse cabinets is mutual noninterference, can simplify the arranging of control cable group to every section vacuum cavity subassembly one-to-one is provided with branch accuse cabinet, can reduce the consumption of control cable group line length. Meanwhile, when the vacuum cavity assembly is newly inserted, the vacuum cavity assembly and the sub-control cabinet are moved together, and a control cable group between the control module and the load assembly is not required to be disassembled and assembled, so that the operation is simplified, and the time is saved. In addition, because the vacuum cavity assemblies correspond to the sub-control cabinets one to one, the number of the vacuum cavity assemblies is increased, the situation that the control points of the control module are insufficient can be avoided, the newly-added vacuum cavity assemblies do not need to be additionally arranged on the main control cabinet, and the operation is more convenient.

According to some embodiments of the present invention, the system further comprises a communication cable, the sub-control cabinet is provided with a first wired communication module electrically connected to the control module, the main control cabinet is provided with a second wired communication module electrically connected to the processing module, and the first wired communication module is electrically connected to the second wired communication module through the communication cable.

According to some embodiments of the utility model, the vacuum chamber assembly is provided with vacuum chambers, a plurality of the vacuum chamber assemblies are connected end to communicate adjacent vacuum chambers, and the vacuum chamber assembly comprises vacuum partitions capable of partitioning the adjacent vacuum chambers from each other.

According to some embodiments of the present invention, the load assembly includes a driving member connected to the vacuum barrier, the control module includes a controller and a relay, the control cable set includes a driving control wire set, the controller is electrically connected to a control end of the relay, and the relay is electrically connected to the driving member through the driving control wire set.

According to some embodiments of the utility model, the load assembly comprises a motor, the control module comprises a frequency converter, the control cable set comprises a motor control line set, the controller is electrically connected with a control end of the frequency converter, and the frequency converter is electrically connected with the motor through the motor control line set.

According to some embodiments of the present invention, the control module further comprises a contactor, the controller is electrically connected to the control end of the contactor, the frequency converter is electrically connected to the contactor, and the contactor is electrically connected to the motor through the motor control line set.

According to some embodiments of the utility model, the control module comprises a motor protector, the inverter is electrically connected to the motor protector, and the motor protector is electrically connected to the motor through the motor control line set.

According to some embodiments of the present invention, the power distribution system further comprises a power supply cable set and a power distribution cable, wherein the power distribution cabinet is provided with a power supply module, the power supply module is electrically connected to the load assembly through the power supply cable set, and the main control cabinet is provided with a power distribution module, and the power distribution module is electrically connected to the power supply module through the power distribution cable.

According to some embodiments of the present invention, the power supply module includes a circuit breaker and a power adapter, the control module is electrically connected to the control terminal of the circuit breaker, the power distribution cable is electrically connected to the circuit breaker, the circuit breaker is electrically connected to the power adapter, and the power adapter is electrically connected to the load assembly through the power supply cable set.

According to some embodiments of the present invention, the sub-control cabinet is provided with a first connection terminal set and a second connection terminal set, the control module is electrically connected to the first connection terminal set, the first connection terminal set is detachably connected to the control cable set, the power supply module is electrically connected to the second connection terminal set, and the second connection terminal set is detachably connected to the power supply cable set.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the utility model.

Drawings

The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:

FIG. 1 is a schematic structural diagram of a continuous magnetron sputtering coating production line in the prior art;

FIG. 2 is a schematic structural diagram of one embodiment of the present invention;

FIG. 3 is a block diagram of the architecture of one embodiment of the present invention;

fig. 4 is a perspective view of one embodiment of the present invention.

Reference numerals:

a vacuum chamber assembly 100; a load assembly; a driving member 111; a motor 112; a vacuum barrier 120; a sub-control cabinet 200; a control module 210; a controller 211; a relay 212; a frequency converter 213; a contactor 214; a motor protector 215; a first wired communication module 220; a power supply module 230; a circuit breaker 231; a power adaptation component 232; a control cable set 300; a drive control line group 310; a set of motor control lines 320; a master control cabinet 400; a processing module 410; a second wired communication module 420; a power distribution module 430; a manipulation display module 440; a communication cable 500; a power supply cable set 600; a power distribution cable 700.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.

In the description of the present invention, it should be understood that the orientation or positional relationship referred to in the description of the orientation, such as the upper, lower, front, rear, left, right, etc., is based on the orientation or positional relationship shown in the drawings, and is only for convenience of description and simplification of description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.

In the description of the present invention, if there are first and second described only for the purpose of distinguishing technical features, it is not understood that relative importance is indicated or implied or that the number of indicated technical features or the precedence of the indicated technical features is implicitly indicated or implied.

In the description of the present invention, unless otherwise explicitly limited, terms such as arrangement, installation, connection and the like should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above terms in the present invention in combination with the specific contents of the technical solutions.

As shown in fig. 2 to 4, the magnetron sputtering coating production line system according to the embodiment of the utility model includes: a multi-sectioned vacuum chamber assembly 100, the vacuum chamber assembly 100 comprising a load assembly 110; the sub-control cabinets 200 correspond to the vacuum chamber assemblies 100 one by one, and the sub-control cabinets 200 are provided with control modules 210; the control cable sets 300 correspond to the control modules 210 one by one, and the control modules 210 are electrically connected with the load assemblies 110 through the control cable sets 300; the main control cabinet 400 is provided with a processing module 410, and the processing module 410 is in communication connection with the control module 210.

The control modules 210 in the sub-control cabinets 200 are electrically connected to the load assemblies 110 on the corresponding vacuum chamber assemblies 100 through the control cable sets 300, and the processing modules 410 in the main control cabinet 400 are respectively in communication connection with the control modules 210 in each sub-control cabinet 200, so as to coordinate the different control modules 210 to control the load assemblies 110 to work. With this structure, the control cable groups 300 of different sub-control cabinets 200 are not interfered with each other, the arrangement of the control cable groups 300 can be simplified, and the sub-control cabinets 200 are correspondingly arranged on each section of vacuum chamber assembly 100 one by one, so that the consumption of the wiring length of the control cable groups 300 can be reduced. Meanwhile, when the vacuum chamber assembly 100 is newly inserted, the vacuum chamber assembly 100 and the sub-control cabinet 200 are moved together without disassembling and assembling the control cable group 300 between the control module 210 and the load assembly 110, which is beneficial to simplifying the operation and saving the time. In addition, because the vacuum chamber assemblies 100 correspond to the sub-control cabinets 200 one to one, the number of the vacuum chamber assemblies 100 is increased, the situation that the control points of the control module 210 are insufficient can be avoided, the newly added vacuum chamber assemblies 100 do not need to be additionally installed on the main control cabinet 400, and the operation is more convenient.

The processing module 410 may be an embodiment including a PLC, a single chip, or an embedded processor, etc. having a function of processing data signals.

Referring to FIG. 4, in some embodiments of the utility model, a distribution control cabinet 200 is coupled to the vacuum chamber assembly 100. Thus, the distribution control cabinet 200 can be moved together with the vacuum body assembly 100.

Referring to fig. 2 and 3, in some embodiments of the present invention, the communication cable 500 is further included, the sub-control cabinet 200 is provided with a first wired communication module 220 electrically connected to the control module 210, the main control cabinet 400 is provided with a second wired communication module 420 electrically connected to the processing module 410, and the first wired communication module 220 is electrically connected to the second wired communication module 420 through the communication cable 500.

The first wired communication module 220 in each sub-control cabinet 200 and the second wired communication module 420 in the main control cabinet 400 construct a channel through the communication cable 500, so that the control modules 210 in the sub-control cabinets 200 can exchange data signals with the processing module 410 through the constructed channel, and then the processing module 410 can coordinate the control modules 210 in the plurality of sub-control cabinets 200 to work, so that the production line can run normally. The first wired communication module 220, the second wired communication module 420 and the communication cable are used for transmitting data signals in a wired mode, and therefore stability and reliability of communication are improved.

The first and second wired communication modules 220 and 420 may be implemented by including common CAN communication modules, RS485 communication modules, and other devices or modules capable of realizing wired communication.

In some embodiments of the present invention, the communication connection between the control module 210 and the processing module 410 may also be an implementation in which the sub-control cabinet 200 is provided with a first wireless communication module and the main control cabinet 400 is provided with a second wireless communication module, and data signals are exchanged between the control module 210 and the processing module 410 through the first wireless communication module and the second wireless communication module. The first wireless communication module and the second wireless communication module may be implemented as devices or modules capable of realizing wireless communication, such as a WIFI module and a ZIGBEE module.

Referring to fig. 2, in some embodiments of the present invention, the vacuum chamber assembly 100 is provided with vacuum chambers, a plurality of the vacuum chamber assemblies 100 are connected end to communicate adjacent vacuum chambers, and the vacuum chamber assembly 100 includes a vacuum partition 120, and the vacuum partition 120 can separate the adjacent vacuum chambers from each other.

The vacuum chambers of the vacuum chamber assemblies 100 are communicated in sequence, the vacuum partition plates 120 can separate the adjacent vacuum chambers, when one process is carried out on a product, the vacuum chambers and other vacuum chambers can be separated from each other according to requirements to form a processing space, so that the influence on other vacuum chambers is reduced, after the process is completed, the vacuum partition plates 120 move to enable the adjacent vacuum chambers to be communicated, and the product moves to enter the next process. With this structure, can adjust the real empty room quantity that a process used according to the demand is nimble, satisfy production and processing demand.

Referring to fig. 2 and 3, in some embodiments of the present invention, the load assembly 110 includes a driving member 111 connected to the vacuum barrier 120, the control module 210 includes a controller 211 and a relay 212, the control cable assembly 300 includes a driving control wire set 310, the controller 211 is electrically connected to a control end of the relay 212, and the relay 212 is electrically connected to the driving member 111 through the driving control wire set 310.

The controller 211 controls the relay 212 to engage or disengage, and can control the driving member 111 to drive the vacuum partition 120 to move, thereby controlling whether the vacuum partition 120 separates adjacent vacuum chambers. The relay 212 is used for controlling the driving piece 111 to move, and the structure is simple and convenient to implement.

The controller 211 may be an embodiment including a PLC, a single chip, or an embedded processor, etc. having a control function or device. The driving member 111 may be an embodiment of a device or an apparatus capable of driving the vacuum barrier 120 to move, such as an air cylinder, an electric cylinder, or the like.

Referring to fig. 3, in some embodiments of the present invention, the load assembly 110 includes a motor 112, the control module 210 includes a frequency converter 213, the control cable set 300 includes a motor control line set 320, the controller 211 is electrically connected to a control end of the frequency converter 213, and the frequency converter 213 is electrically connected to the motor 112 through the motor control line set 320.

The motor 112 can provide power to meet the power requirement in the production process, such as driving the product to move as a power source of a conveyor belt, pumping gas out of the vacuum chamber as a power source of a vacuum pump, and the like. The controller 211 controls the frequency of the alternating current output by the frequency converter 213, so that the working conditions such as the rotating speed of the motor 112 can be controlled, and the production requirement can be met.

Referring to fig. 3, in some embodiments of the present invention, the control module 210 further includes a contactor 214, the controller 211 is electrically connected to a control terminal of the contactor 214, the frequency converter 213 is electrically connected to the contactor 214, and the contactor 214 is electrically connected to the motor 112 through the motor control wire set 320.

The controller 211 controls the contactor 214 to be closed or opened, and can control the connection or disconnection between the frequency converter 213 and the motor 112, so that the connection between the frequency converter 213 and the motor 112 can be disconnected in case of an accident or during maintenance and inspection, and the use requirement can be met. Or the frequency converter 213 is connected with the plurality of motors 112 through the plurality of contactors 214, so that the function of controlling the operation of the plurality of motors 112 by one frequency converter 213 can be realized, and the production requirement can be met.

Referring to fig. 3, in some embodiments of the present invention, the control module 210 includes a motor protector 215, the frequency converter 213 is electrically connected to the motor protector 215, and the motor protector 215 is electrically connected to the motor 112 through a motor control line set 320.

Through electric connection between converter 213 and motor 112 has motor protector 215, motor protector 215 generally including detection devices such as current transformer, voltage transformer to detect motor 112's electric current, voltage size, can be when the circumstances such as current overload or voltage underload appear, disconnection motor 112 and converter 213's in the settlement time be connected, produce the alarm and indicate, realize protection motor 112's effect, be favorable to improving the security.

Referring to fig. 2 and 3, in some embodiments of the present invention, the power distribution cabinet 200 further includes a power supply cable set 600 and a power distribution cable 700, the power supply module 230 is disposed on the power distribution cabinet 200, the power supply module 230 is electrically connected to the load assembly 110 through the power supply cable set 600, the main control cabinet 400 is disposed on the power distribution module 430, and the power distribution module 430 is electrically connected to the power supply module 230 through the power distribution cable 700.

When the load device works, power supply and control signals are needed, the control cable groups 300 serving as control signal carriers are all connected with the sub-control cabinets 200, the power supply modules 230 are arranged on the sub-control cabinets 200, the power supply cable groups 600 serving as power supply carriers are electrically connected with the power supply modules 230, namely, the power supply cable groups 600 are also connected with the sub-control cabinets 200, and therefore the control cable groups 300 and the power supply cable groups 600 of the load assemblies 110 in the vacuum cavity assembly 100 are all connected with the corresponding sub-control cabinets 200, and further simplification of cable arrangement is facilitated.

The main control cabinet 400 can control the power distribution condition of the power supply module 230 through the power distribution module 430, and can control the specific sub control cabinet 200 to lose power when in maintenance and repair, so that the maintenance and repair are convenient, and the main control cabinet 400 can control the whole working state of the production line through the processing module 410 and the power distribution module 430, so that the control is convenient for a user.

The power distribution module 430 may be an embodiment of a device commonly used for power distribution including a disconnector, fuse, contactor 214, etc.

Referring to fig. 1 and 2, in the present invention, only the communication cable 500 and the power distribution cable 700 need to be disposed between the main control cabinet 400 and the sub-control cabinet 200, compared with the structure in the prior art, the number of cables between the main control cabinet 400 and the sub-control cabinet 200 can be reduced, which facilitates routing and arrangement and saves cable consumption.

When the vacuum chamber assembly 100 is newly inserted and the vacuum chamber assembly 100 needs to be moved, the communication cable 500 and the power distribution cable 700 connected to the sub-control cabinet 200 that needs to be moved are detached, then the vacuum chamber assembly 100 and the sub-control cabinet 200 are moved together, and after the movement is completed, the communication cable 500 and the power distribution cable 700 are electrically connected to the control module 210 and the power supply module in the sub-control cabinet 200 again, so that the operation of inserting the new vacuum chamber assembly 100 can be completed.

Because each control module only needs one communication cable 500 correspondingly, and the power distribution cable 700 only needs two cables, the number of the control cable group 300 and the power supply cable group 600 is related to the number of the load assemblies 110, and the control cable group 300 and the power supply cable group 600 respectively comprise a plurality of cables, the number of the communication cables 500 and the power distribution cables 700 is obviously less than that of the control cable group 300 and the power supply cable group 600, the number of cables connected with the main control cabinet 400 can be obviously reduced, and the material consumption of the cables is reduced.

Referring to fig. 3, in some embodiments of the present invention, the power supply module 230 includes a circuit breaker 231 and a power adapter 232, the control module 210 is electrically connected to a control terminal of the circuit breaker 231, the distribution cable 700 is electrically connected to the circuit breaker 231, the circuit breaker 231 is electrically connected to the power adapter 232, and the power adapter 232 is electrically connected to the load assembly 110 through the power cable assembly 600.

Control module 210, can be controller 211 during the concrete implementation, can control the circuit breaker 231 closure or break off, and then control distribution cable 700 and power adaptation subassembly 232 and switch on or break off circuit to this can be when the accident that appears or overhaul the maintenance, make circuit breaker 231 break off, make power adaptation subassembly 232 lose the electricity, no longer to the power supply of load subassembly 110, avoid the occurence of failure, conveniently overhaul, be favorable to improving the security.

The power adapter 232 can also be electrically connected to the control module 210 to supply power to the control module 210. The power adapting module 232 may be an implementation of a device or a circuit that can adjust voltage and current, such as a common constant voltage power supply, a common constant current power supply, a common switching power supply, and the like, so as to output the voltage and current required by the operation of the load device, so that the load device can operate normally.

In some embodiments of the present invention, the sub-control cabinet 200 is provided with a first terminal set and a second terminal set, the control module 210 is electrically connected to the first terminal set, the first terminal set is detachably connected to the control cable set 300, the power supply module 230 is electrically connected to the second terminal set, and the second terminal set is detachably connected to the power cable set 600.

Through control cabinet 200 is provided with first binding post group and second binding post group, can conveniently be connected with control cable group 300, power supply cable group 600 detachably, conveniently carries out the dismouting, makes the use more convenient.

Referring to fig. 3, in some embodiments of the present invention, the main control cabinet 400 is provided with an operation display module 440, and the operation display module 440 is electrically connected to the processing module 410 and the power distribution module 430, respectively.

Through being provided with on the main control cabinet 400 and controlling the display module 440, the user can produce and control signal transmission to processing module 410 through controlling the display module 440, processing module 410 produces and transmits the processing signal transmission that corresponds to control module 210 according to controlling the signal, control module 210 is according to the processing signal control load subassembly 110 work that receives to this process can let the user control the operating condition of whole production line through controlling display module 440, convenient operation. Meanwhile, the control module 210 can feed back the working state information of the load assembly 110 to the processing module 410, the processing module 410 can display the working state information of the load assembly 110 through the control display module 440, and the working state information of the power distribution module 430 can be displayed through the control display module 440, so that a user can conveniently know and master the working state condition of the production line.

The manipulation display module 440 may be an embodiment including a knob, a key, and other devices capable of generating a manipulation signal, and a display screen, an indicator light, a nixie tube, and other devices having a display function.

The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

The utility model is not limited to the above embodiments, and those skilled in the art can make equivalent modifications or substitutions without departing from the spirit of the utility model, and such equivalent modifications or substitutions are included in the scope defined by the claims of the present application.

Claims

1. Magnetron sputtering coating production line system, its characterized in that includes:

a multi-sectioned vacuum chamber assembly (100), the vacuum chamber assembly (100) comprising a load assembly (110);

the sub-control cabinets (200) correspond to the vacuum cavity assemblies (100) one by one, and the sub-control cabinets (200) are provided with control modules (210);

the control cable sets (300) correspond to the control modules (210) one by one, and the control modules (210) are electrically connected with the load assemblies (110) through the control cable sets (300);

the main control cabinet (400) is provided with a processing module (410), and the processing module (410) is in communication connection with the control module (210).

2. The magnetron sputtering coating production line system according to claim 1, characterized in that: the intelligent control cabinet is characterized by further comprising a communication cable (500), the sub-control cabinet (200) is provided with a first wired communication module (220) electrically connected with the control module (210), the main control cabinet (400) is provided with a second wired communication module (420) electrically connected with the processing module (410), and the first wired communication module (220) is electrically connected with the second wired communication module (420) through the communication cable (500).

3. The magnetron sputtering coating production line system according to claim 1, characterized in that: the vacuum cavity assembly (100) is provided with vacuum chambers, the vacuum cavity assemblies (100) are connected end to enable the adjacent vacuum chambers to be communicated, the vacuum cavity assembly (100) comprises vacuum partition plates (120), and the vacuum partition plates (120) can enable the adjacent vacuum chambers to be mutually separated.

4. The magnetron sputtering coating production line system according to claim 3, characterized in that: the load assembly (110) comprises a driving part (111) connected with the vacuum partition (120), the control module (210) comprises a controller (211) and a relay (212), the control cable set (300) comprises a driving control wire set (310), the controller (211) is electrically connected with a control end of the relay (212), and the relay (212) is electrically connected with the driving part (111) through the driving control wire set (310).

5. The magnetron sputtering coating production line system according to claim 4, characterized in that: the load assembly (110) comprises a motor (112), the control module (210) comprises a frequency converter (213), the control cable set (300) comprises a motor control line set (320), the controller (211) is electrically connected with a control end of the frequency converter (213), and the frequency converter (213) is electrically connected with the motor (112) through the motor control line set (320).

6. The magnetron sputtering coating production line system according to claim 5, characterized in that: the control module (210) further comprises a contactor (214), the controller (211) is electrically connected with the control end of the contactor (214), the frequency converter (213) is electrically connected with the contactor (214), and the contactor (214) is electrically connected with the motor (112) through the motor control line set (320).

7. The magnetron sputtering coating production line system according to claim 5, characterized in that: the control module (210) comprises a motor protector (215), the frequency converter (213) is electrically connected with the motor protector (215), and the motor protector (215) is electrically connected with the motor (112) through the motor control line group (320).

8. The magnetron sputtering coating production line system according to claim 1, characterized in that: still include power supply cable group (600) and distribution cable (700), branch control cabinet (200) is provided with power module (230), power module (230) pass through power supply cable group (600) with load subassembly (110) electric connection, master control cabinet (400) is provided with distribution module (430), distribution module (430) pass through distribution cable (700) with power module (230) electric connection.

9. The magnetron sputtering coating production line system according to claim 8, characterized in that: the power supply module (230) comprises a circuit breaker (231) and a power supply adapting component (232), the control module (210) is electrically connected with a control end of the circuit breaker (231), the power distribution cable (700) is electrically connected with the circuit breaker (231), the circuit breaker (231) is electrically connected with the power supply adapting component (232), and the power supply adapting component (232) is electrically connected with the load component (110) through the power supply cable assembly (600).

10. The magnetron sputtering coating production line system according to claim 8, characterized in that: the branch control cabinet (200) is provided with a first wiring terminal group and a second wiring terminal group, the control module (210) is electrically connected with the first wiring terminal group, the first wiring terminal group is detachably connected with the control cable group (300), the power supply module (230) is electrically connected with the second wiring terminal group, and the second wiring terminal group is detachably connected with the power supply cable group (600).