CN215841697U - Tail gas treatment device - Google Patents
Tail gas treatment device Download PDFInfo
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- CN215841697U CN215841697U CN202120760409.9U CN202120760409U CN215841697U CN 215841697 U CN215841697 U CN 215841697U CN 202120760409 U CN202120760409 U CN 202120760409U CN 215841697 U CN215841697 U CN 215841697U
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Abstract
The utility model discloses a tail gas treatment device, which comprises a condensation bottle, a cold trap, a filter bottle and a pump, wherein the condensation bottle, the cold trap, the filter bottle and the pump are sequentially connected through a pipeline, the condensation bottle, the cold trap, the filter bottle, the pump and the pipeline form a tail gas circulation channel, and the condensation bottle, the cold trap and the filter bottle collect harmful substances in tail gas.
Description
Technical Field
The utility model belongs to the field of semiconductor manufacturing and solar photovoltaic cell manufacturing, and relates to a tail gas treatment device.
Background
With the semiconductor technology and the solar photovoltaic power generation technology being more and more emphasized, the technical requirements of related equipment are more and more concerned, wherein the manufacturing process comprises processes of low-pressure boron diffusion, low-pressure phosphorus diffusion, low-pressure annealing, low-pressure oxidation, low-pressure chemical vapor deposition and the like, the processes are required to be carried out in a furnace tube, and process gas and process products discharged from a process cavity may form powder or liquid after being cooled and may be attached to cavities of a pipeline and a pump to influence the performance and the maintenance period of the pipeline and the pump.
The tail gas of the diffusion furnace usually contains more unreacted substances or reaction products, the conventional mode is that the tail gas is discharged to a tail gas treatment pipeline through a condensation bottle and then through a pump, reactant or product contained in the tail gas of the diffusion furnace can generate liquid after some condensation, dust can be generated after some condensation, some liquid and dust exist, the tail gas can gather liquid in the condensation bottle or dust aggregate adsorbed on the condensation bottle after passing through the condensation bottle with relatively low temperature, usually, more liquid can be gathered in the condensation bottle in a phosphorus diffusion process, dust aggregate can be adsorbed and gathered in the condensation bottle in a boron diffusion process, as the gas flow is large, the pumping speed of the pump is high, many substances in high-temperature gas can not be completely cooled and gathered in the condensation bottle and can be pumped into the pump, the conventional diffusion equipment generally adopts a diaphragm pump, the substances in the tail gas, particularly, the dust diffused by boron can influence the performance of the diaphragm or even block the pipeline in the pump, the maintenance period of the pump is shortened, the service life of the pump is influenced, and the problem is effectively solved by the utility model.
Disclosure of Invention
The utility model provides a tail gas treatment device for overcoming the defects of the prior art.
In order to achieve the purpose, the utility model adopts the following technical scheme: the utility model provides a tail gas processing apparatus which characterized in that: the tail gas recycling device comprises a condensation bottle, a cold trap, a filter bottle and a pump, wherein the condensation bottle, the cold trap, the filter bottle and the pump are sequentially connected through pipelines, the condensation bottle, the cold trap, the filter bottle, the pump and the pipelines form a tail gas circulation channel, and the condensation bottle, the cold trap and the filter bottle collect harmful substances in tail gas.
Further, the method comprises the following steps of; the pipeline includes first pipeline, second pipeline and third pipeline, and first pipeline intercommunication condensation bottle and cold trap, second pipeline intercommunication cold trap and filter flask, third pipeline intercommunication filter flask and pump.
Further, the method comprises the following steps of; be provided with the siphunculus on the condensation bottle, the siphunculus includes along the condensation bottle side around the return bend of establishing and the straight tube that inserts the condensation bottle, and the return bend terminal surface is provided with the inlet end, and the inlet end is connected with the gas vent of technology cavity, and the straight tube terminal surface has set firmly the end of giving vent to anger, gives vent to anger end and first pipeline intercommunication, and tail gas lets in the siphunculus along gas vent, inlet end, and the condensation bottle catches the harmful substance in the tail gas.
Further, the method comprises the following steps of; the cold-trap includes container and coil pipe, and the container has set firmly the inner chamber, and the coil pipe is installed at the inner chamber, is provided with the coolant liquid in the inner chamber, and the coolant liquid is used for cooling to the tail gas of circulation in the coil pipe, is provided with cold-trap air inlet and cold-trap gas outlet on the coil pipe, cold-trap air inlet and first pipeline intercommunication, cold-trap gas outlet and second pipeline intercommunication, and tail gas lets in the coil pipe along second pipeline and cold-trap air inlet, and the cold-trap catches the harmful substance that is not collected by the condensate bottle.
Further, the method comprises the following steps of; the filter flask includes the bottle lid, filter core and filter flask, the bottle lid has set firmly and has filtered the air inlet and filter the gas port, filter air inlet and second pipeline intercommunication, filter gas port and third pipeline intercommunication, form the circulation region of tail gas between filter flask and the filter core, filter air inlet and this circulation region intercommunication, the filter core internal fixation has worn the chamber, worn the chamber and filter the gas port intercommunication, tail gas through the cold trap gets into the circulation region along the second pipeline with filtering the air inlet, tail gas passes through the wearing chamber that the outer entering filter core of filter core, filter the harmful substance that is not caught by the cold trap through the filter core, filter back tail gas and derive along filtering the gas port.
Further, the method comprises the following steps of; and the two ends of the pump are respectively provided with a pump air inlet and a pump air outlet, the pump air inlet is communicated with a third pipeline, the pump air outlet is communicated with a tail gas treatment system, and tail gas filtered by the filter flask is introduced into the pump along the third pipeline.
Further, the method comprises the following steps of; the vacuum gauge is arranged between the filter bottle and the pump.
Further, the method comprises the following steps of; the cooling liquid adopts cooling water.
Further, the method comprises the following steps of; the coil pipe is provided with a set of, and cold trap air inlet and cold trap gas outlet are located the both ends of a set of coil pipe respectively.
Further, the method comprises the following steps of; the coil pipe is provided with two sets of, and two sets of coil pipes communicate each other, and cold trap air inlet and cold trap gas outlet are located two sets of coil pipes respectively.
In conclusion, the utility model has the advantages that:
1) the utility model greatly reduces the harmful substances in the tail gas through the triple harmful substance collecting device of the condensation bottle, the cold trap and the filter.
2) The utility model can be compatible with conventional equipment, does not need to be provided with additional equipment for assembly, and reduces the cost of the equipment.
3) The utility model collects harmful substances in the tail gas to the pump in the condensation bottle, the cold trap and the filter, thereby greatly prolonging the maintenance period and the service life of the pump.
4) According to the utility model, the vacuum gauge is arranged between the filter and the pump, so that the influence on the vacuum gauge is reduced, and the service life of the vacuum gauge is prolonged.
Drawings
FIG. 1 is a schematic view of the apparatus of the present invention.
Fig. 2 is a front view of the apparatus of the present invention.
FIG. 3 is a schematic diagram of a cold trap of the present invention.
Fig. 4 is an exploded view of the filter flask of the present invention.
Fig. 5 is a schematic diagram of a cold trap in the second embodiment.
The labels in the figure are: the device comprises a condensation bottle 1, a through pipe 11, an air inlet end 12, an air outlet end 13, a cold trap 2, a coil pipe 21, a cold trap air inlet 212, a cold trap air outlet 211, a container 22, cooling liquid 221, a filter bottle 3, a filter air inlet 31, a filter air outlet 32, a bottle cap 33, a filter element 34, a filter bottle 35, a pump 4, a pump air inlet 41, a pump air outlet 42, a first pipeline 51, a second pipeline 52 and a third pipeline 53.
Detailed Description
The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. The utility model is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention. It is to be noted that the features in the following embodiments and examples may be combined with each other without conflict.
It should be noted that the drawings provided in the following embodiments are only for illustrating the basic idea of the present invention, and the components related to the present invention are only shown in the drawings rather than drawn according to the number, shape and size of the components in actual implementation, and the type, quantity and proportion of the components in actual implementation may be changed freely, and the layout of the components may be more complicated.
All directional indicators (such as up, down, left, right, front, rear, lateral, longitudinal … …) in the embodiments of the present invention are only used to explain the relative positional relationship between the components, the movement, etc. in a particular posture, and if the particular posture is changed, the directional indicator is changed accordingly.
The first embodiment is as follows:
as shown in fig. 1-4, a tail gas treatment device comprises a condensation bottle 1, a cold trap 2, a filter flask 3 and a pump 4, wherein the condensation bottle 1, the cold trap 2, the filter flask 3 and the pump 4 are sequentially connected through a pipeline, the condensation bottle 1, the cold trap 2, the filter flask 3, the pump 4 and the pipeline form a tail gas circulation channel, and the condensation bottle 1, the cold trap 2 and the filter flask 3 collect harmful substances in tail gas.
In this embodiment, the pipeline includes a first pipeline 51, a second pipeline 52 and a third pipeline 53, the first pipeline 51 communicates the condensation bottle 1 and the cold trap 2, the second pipeline 52 communicates the cold trap 2 and the filter bottle 3, and the third pipeline 53 communicates the filter bottle 3 and the pump 4.
The harmful substance in the embodiment refers to liquid or/and solid powder substances harmful to the pump in the tail gas, including unreacted substances or reaction products contained in the tail gas.
The condensation bottle 1 is provided with a through pipe 11, as shown in fig. 1-2, the through pipe 11 comprises a bent pipe (not shown) wound along the side surface of the condensation bottle 1 and a straight pipe (not shown) inserted into the condensation bottle 1, the bent pipe increases the circulation stroke of the tail gas in the through pipe 11, and simultaneously increases the contact area between the through pipe 11 and the condensation bottle 1, the temperature of the tail gas passing through the through pipe 11 is greatly reduced through heat exchange, the end surface of the bent pipe is provided with an air inlet end 12, the air inlet end 12 is connected with an exhaust port of the process cavity, the end surface of the straight pipe is fixedly provided with an air outlet end 13, the air outlet end 13 is communicated with a first pipeline 51, the tail gas passes through the through pipe 11 along the exhaust port and the air inlet end 12, the temperature of the condensation bottle 1 is low, and the tail gas gathers liquid or/or adsorbs solid powder substances in the condensation bottle 1 during the circulation process along the through pipe 11, so that harmful substances in the tail gas are greatly reduced.
The cold trap 2 comprises a container 22 and a coil 21, wherein the container 22 is fixedly provided with an inner cavity, the coil 21 is arranged in the inner cavity, a cooling liquid 221 is arranged in the inner cavity, the cooling liquid 221 is used for cooling tail gas flowing in the coil 21, the cooling liquid 221 adopts cooling water or other cooling media, the cooling liquid 221 can be supplemented in a regular supplementing mode, or automatically supplemented through detection, or supplemented through external circulating cooling liquid, the cooling liquid 221 is various in supplementing mode, and the cooling speed of the tail gas is further improved; in this embodiment, coil pipe 21 is provided with a set ofly, the both ends of a set of coil pipe 21 set up to cold-trap air inlet 212 and cold-trap gas outlet 211 respectively, cold-trap air inlet 212 and first pipeline 51 intercommunication, cold-trap gas outlet 211 and second pipeline 52 intercommunication, tail gas lets in coil pipe 21 along second pipeline 52 and cold-trap air inlet, coil pipe 21 increases the stroke of tail gas in the pipeline, increase coil pipe 21 and coolant 221's area of contact, the effectual tail gas temperature that will pass through coil pipe 21 reduces through the heat exchange, the temperature of cold-trap 2 greatly reduces tail gas, further catch the harmful substance that is not collected by condensation bottle 1 through cold-trap 2, the harmful substance quantity of tail gas has been reduced.
The filter bottle 3 comprises a bottle cap 33, a filter element 34 and a filter bottle 35, the bottle cap 33 is fixedly provided with a filter air inlet 31 and a filter air outlet 32, the filter air inlet 31 is communicated with a second pipeline 52, the filter air outlet 32 is communicated with a third pipeline 53, a tail gas circulation area is formed between the filter bottle 35 and the filter element 34, the filter air inlet 31 is communicated with the circulation area, a through cavity is fixedly arranged in the filter element 34 and is communicated with the filter air outlet 32, in the embodiment, tail gas passing through the cold trap 2 enters the circulation area along the second pipeline 52 and the filter air inlet 31, the tail gas enters the through cavity of the filter element 34 through the outer layer of the filter element 34, residual harmful substances which are not captured by the cold trap 2 are filtered through the filtering function of the filter element 34, and the filtered tail gas is led out along the filter air outlet 32.
The two ends of the pump 4 are respectively provided with a pump air inlet 41 and a pump air outlet 42, the pump air inlet 41 is communicated with a third pipeline 53, the pump air outlet 42 is communicated with a tail gas treatment system, and tail gas filtered by the filter flask 3 is introduced into the pump along the third pipeline 53, so that the tail gas entering the pump 4 is low-temperature tail gas with extremely little dust, and the maintenance period and the service life of the pump 4 are greatly prolonged.
Further, a vacuum gauge is arranged between the filter bottle 3 and the pump 4, so that the adverse effect of dust and liquid on the vacuum gauge is reduced, and the service life of the vacuum gauge is prolonged.
Example two:
as shown in fig. 5, the difference between the present embodiment and the first embodiment is that the coils 21 are set as a group, and the cold trap air inlet 212 and the cold trap air outlet 211 are both fixed on a group of coils 21, whereas in the present embodiment, two groups of coils 21 are set, the two groups of coils 21 are communicated with each other, the cold trap air inlet 212 and the cold trap air outlet 211 are respectively located on the two groups of coils 21, so as to further increase the stroke of the tail gas in the pipeline, increase the contact area between the coils 21 and the cooling liquid 221, greatly reduce the temperature of the tail gas passing through the coils 21 through heat exchange, and improve the efficiency.
In other embodiments, the number of coils 21 can be set according to actual needs.
It is to be understood that the described embodiments are merely a few embodiments of the utility model, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Claims (10)
1. The utility model provides a tail gas processing apparatus which characterized in that: the tail gas recycling device comprises a condensation bottle, a cold trap, a filter bottle and a pump, wherein the condensation bottle, the cold trap, the filter bottle and the pump are sequentially connected through pipelines, the condensation bottle, the cold trap, the filter bottle, the pump and the pipelines form a tail gas circulation channel, and the condensation bottle, the cold trap and the filter bottle collect harmful substances in tail gas.
2. The exhaust gas treatment device according to claim 1, wherein: the pipeline includes first pipeline, second pipeline and third pipeline, and first pipeline intercommunication condensation bottle and cold trap, second pipeline intercommunication cold trap and filter flask, third pipeline intercommunication filter flask and pump.
3. The exhaust gas treatment device according to claim 1, wherein: be provided with the siphunculus on the condensation bottle, the siphunculus includes along the condensation bottle side around the return bend of establishing and the straight tube that inserts the condensation bottle, and the return bend terminal surface is provided with the inlet end, and the inlet end is connected with the gas vent of technology cavity, and the straight tube terminal surface has set firmly the end of giving vent to anger, gives vent to anger end and first pipeline intercommunication, and tail gas lets in the siphunculus along gas vent, inlet end, and the condensation bottle catches the harmful substance in the tail gas.
4. The exhaust gas treatment device according to claim 1, wherein: the cold-trap includes container and coil pipe, and the container has set firmly the inner chamber, and the coil pipe is installed at the inner chamber, is provided with the coolant liquid in the inner chamber, and the coolant liquid is used for cooling to the tail gas of circulation in the coil pipe, is provided with cold-trap air inlet and cold-trap gas outlet on the coil pipe, cold-trap air inlet and first pipeline intercommunication, cold-trap gas outlet and second pipeline intercommunication, and tail gas lets in the coil pipe along second pipeline and cold-trap air inlet, and the cold-trap catches the harmful substance that is not collected by the condensate bottle.
5. The exhaust gas treatment device according to claim 1, wherein: the filter flask includes the bottle lid, filter core and filter flask, the bottle lid has set firmly and has filtered the air inlet and filter the gas port, filter air inlet and second pipeline intercommunication, filter gas port and third pipeline intercommunication, form the circulation region of tail gas between filter flask and the filter core, filter air inlet and this circulation region intercommunication, the filter core internal fixation has worn the chamber, worn the chamber and filter the gas port intercommunication, tail gas through the cold trap gets into the circulation region along the second pipeline with filtering the air inlet, tail gas passes through the wearing chamber that the outer entering filter core of filter core, filter the harmful substance that is not caught by the cold trap through the filter core, filter back tail gas and derive along filtering the gas port.
6. The exhaust gas treatment device according to claim 1, wherein: and the two ends of the pump are respectively provided with a pump air inlet and a pump air outlet, the pump air inlet is communicated with a third pipeline, the pump air outlet is communicated with a tail gas treatment system, and tail gas filtered by the filter flask is introduced into the pump along the third pipeline.
7. The exhaust gas treatment device according to claim 1, wherein: the vacuum gauge is arranged between the filter bottle and the pump.
8. The exhaust gas treatment device according to claim 4, wherein: the cooling liquid adopts cooling water.
9. The exhaust gas treatment device according to claim 4, wherein: the coil pipe is provided with a set of, and cold trap air inlet and cold trap gas outlet are located the both ends of a set of coil pipe respectively.
10. The exhaust gas treatment device according to claim 4, wherein: the coil pipe is provided with two sets of, and two sets of coil pipes communicate each other, and cold trap air inlet and cold trap gas outlet are located two sets of coil pipes respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120760409.9U CN215841697U (en) | 2021-04-14 | 2021-04-14 | Tail gas treatment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120760409.9U CN215841697U (en) | 2021-04-14 | 2021-04-14 | Tail gas treatment device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215841697U true CN215841697U (en) | 2022-02-18 |
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ID=80319039
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120760409.9U Active CN215841697U (en) | 2021-04-14 | 2021-04-14 | Tail gas treatment device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215841697U (en) |
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2021
- 2021-04-14 CN CN202120760409.9U patent/CN215841697U/en active Active
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Address after: No.1, Jikang Road, Kengzi street, Pingshan District, Shenzhen City, Guangdong Province Patentee after: Laplace New Energy Technology Co.,Ltd. Address before: No.1, Jikang Road, Kengzi street, Pingshan District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN LAPLACE ENERGY TECHNOLOGY Co.,Ltd. |