CN215828376U

CN215828376U - Self-circulation ultrapure water equipment

Info

Publication number: CN215828376U
Application number: CN202121511203.9U
Authority: CN
Inventors: 蔡健
Original assignee: Suzhou Yongsheng System Engineering Co ltd
Current assignee: Suzhou Yongsheng System Engineering Co ltd
Priority date: 2021-07-05
Filing date: 2021-07-05
Publication date: 2022-02-15
Anticipated expiration: 2031-07-05

Abstract

The utility model relates to a self-circulation ultrapure water device, which comprises a bottom plate, wherein one side above the bottom plate is provided with an upright post, one side of the upright post is provided with a control box, a hydraulic cylinder is arranged above the control box and positioned on the surface of the upright post, the output end of the hydraulic cylinder is connected with a top plate, one side of the top plate is fixedly connected with a slide block, the interior of the slide block is connected with a guide rod in a penetrating way, two ends of the guide rod are embedded into a positioning block, one side below the slide block is provided with a pressure spring, and the pressure spring is sleeved outside the guide rod. The air outlet can be opened to enter the center of the equipment body, and the equipment body is convenient to overhaul and maintain.

Description

Self-circulation ultrapure water equipment

Technical Field

The utility model relates to a self-circulation ultrapure water device, belonging to the technical field of semiconductor production.

Background

The ultrapure water is also called UP water, the water has few impurities except water molecules, and has no organic matters such as bacteria, viruses, chlorine-containing dioxin and the like, the ultrapure water is water produced by applying distillation, deionization, reverse osmosis technology or other proper supercritical fine technology in order to develop ultrapure materials (semiconductor raw materials, nano fine ceramic materials and the like), and the ultrapure water has the resistivity which is more than 18M omega cm or close to the limit value (25 ℃) of 18.3M omega cm, and is simply the water which almost removes all atoms except oxygen and hydrogen.

When producing semiconductor material, more and more use ultrapure water equipment of self-loopa to produce ultrapure water, however, ultrapure water production equipment in the factory building production environment is relatively poor, the dust is piled up very easily, and temperature in the factory building, humidity often along with weather constantly changes, influence ultrapure water equipment's life, ultrapure water equipment is because structure and part are more, staff often need dismantle more part just can get into ultrapure water equipment internal maintenance when overhauing the maintenance, waste time and energy during the maintenance, therefore, need an ultrapure water equipment of self-loopa.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a self-circulation ultrapure water device, which is provided with a box body, wherein the box body can seal a device body, so that the contact between the device body and the tail environment is reduced, the phenomenon that the device body is rusted or impacted due to the factors of the external environment is reduced, the box body can be driven by a hydraulic cylinder and a top plate to move upwards, when a worker overhauls the device body, an air outlet can be opened to enter the center of the device body, the overhaul and maintenance of the device body are facilitated, and the problems in the background art are solved.

In order to achieve the purpose, the utility model provides the following technical scheme:

a self-circulation ultrapure water device comprises a bottom plate, wherein one side above the bottom plate is provided with a stand column, one side of the stand column is provided with a control box, a hydraulic cylinder is arranged on the surface of the upright column above the control box, the output end of the hydraulic cylinder is connected with a top plate, one side of the top plate is fixedly connected with a sliding block, the inside of the sliding block is connected with a guide rod in a penetrating way, two ends of the guide rod are embedded into the positioning block, a pressure spring is arranged on one side below the sliding block and is sleeved outside the guide rod, the bottom of the pressure spring is connected with a backing plate, one side of the sliding block is fixedly connected with a box body, an equipment body is arranged in the box body, an air inlet is arranged on one side above the equipment body, an air blower is arranged in the air inlet, an air outlet is arranged at the bottom of the box body, the handle is connected with below the air outlet, and a temperature sensor is arranged on one side of the upper portion inside the box body.

Further, the slider quantity is eight and locates respectively on eight angles of box, roof quantity is four groups and locates respectively four of box top on the slider, roof one end extends to the stand outside, the slider is in sliding connection on the guide bar.

Furthermore, a support is arranged on one side below the base plates, and the distance between the adjacent base plates is larger than the diameter of the air outlet.

Furthermore, the box top is located be equipped with the vent on the box inner wall, the air intake the air outlet with all be equipped with dustproof filter screen on the vent.

Furthermore, the handle quantity is two and the symmetry is located the air outlet below, the air outlet is equipped with the screw thread through the outside, the air outlet pass through the screw thread with the box is connected.

Furthermore, a PLC controller is arranged in the control box, the output end of the temperature sensor is electrically connected with the input end of the control box through a wire, and the output end of the control box is electrically connected with the input end of the air blower through a wire.

The utility model has the beneficial effects that:

1. through setting up the box, the box can be sealed with the equipment body, thereby reduce the contact of equipment body and afterbody environment, the factor that reduces external environment makes the equipment body take place to rust or phenomenons such as striking, the box outside is equipped with the slider, the slider below is equipped with pressure spring, when taking place vibrations because of mechanical production in the factory building, pressure spring deformation shrink, thereby can reduce vibrations to the transmission of box, be equipped with air-blower and temperature sensor on the box, temperature sensor can the temperature of the interior equipment operation of real-time supervision box, the heat of in the box is discharged in the operation when the inside high temperature of box, thereby make the equipment body can work under suitable temperature, the life of extension equipment.

2. Through setting up the air outlet that can dismantle in the box below, and the box can promote the roof through the pneumatic cylinder and reciprocate, when equipment body need overhaul, can use the pneumatic cylinder upwards to rise the box, then turning handle, can drive the air outlet during turning handle and rotate, thereby can dismantle the air outlet, make the staff pass through and get into equipment body inside from the air outlet through the space between the backing plate, make things convenient for the staff to overhaul from equipment bottom and equipment inside, reduce the dismantlement quantity of part, reduce staff's the maintenance degree of difficulty.

Drawings

The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the utility model without limiting the utility model.

FIG. 1 is a sectional view of a self-circulating ultrapure water apparatus of the present invention;

FIG. 2 is a plan view of a self-circulating ultrapure water apparatus of the present invention;

FIG. 3 is an enlarged view of a region A of a self-circulating ultrapure water apparatus of the present invention;

reference numbers in the figures: 1. a base plate; 2. a column; 3. a control box; 4. a hydraulic cylinder; 5. a top plate; 6. a slider; 7. a guide bar; 8. positioning blocks; 9. a pressure spring; 10. a base plate; 11. a box body; 12. an apparatus body; 13. an air inlet; 14. a blower; 15. an air outlet; 16. a handle; 17. a temperature sensor; 18. and a vent.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-3, the present invention provides a technical solution:

a self-circulation ultrapure water device comprises a bottom plate 1, wherein a stand column 2 is arranged on one side above the bottom plate 1, a control box 3 is arranged on one side of the stand column 2, a hydraulic cylinder 4 is arranged on the surface of the stand column 2 above the control box 3, the output end of the hydraulic cylinder 4 is connected with a top plate 5, a slide block 6 is fixedly connected on one side of the top plate 5, a guide rod 7 is connected in the slide block 6 in a penetrating manner, two ends of the guide rod 7 are embedded in a positioning block 8, a pressure spring 9 is arranged on one side below the slide block 6, the pressure spring 9 is sleeved outside the guide rod 7, the bottom of the pressure spring 9 is connected with a base plate 10, a box body 11 is fixedly connected on one side of the slide block 6, a device body 12 is arranged in the box body 11, an air inlet 13 is arranged on one side above the device body 12, an air blower 14 is arranged in the air inlet 13, and an air outlet 15 is arranged at the bottom of the box body 11, a handle 16 is connected below the air outlet 15, and a temperature sensor 17 is arranged on one side above the inside of the box body 11.

Specifically, as shown in fig. 1 and 2, the number of the sliders 6 is eight and is respectively arranged at eight corners of the box body 11, the number of the top plates 5 is four, and is respectively arranged at four positions above the box body 11, the sliders 6 are arranged at the two ends of the top plate 5, one end of each of the top plates extends to the outer side of the corresponding upright post 2, the sliders 6 are slidably connected to the guide rods 7, and the sliders 6 can move up and down on the guide rods 7, so that the box body 11 can be conveniently driven to lift up and down.

Specifically, as shown in fig. 1 and 3, one side of the lower portion of the backing plate 10 is provided with a support, and is adjacent to the distance between the backing plates 10, which is greater than the diameter of the air outlet 15, the handles 16 are symmetrically arranged in two numbers at the lower portion of the air outlet 15, the air outlet 15 is provided with threads through the outside, the air outlet 15 is connected with the box body 11 through threads, and the space between the backing plates 10 facilitates the workers to enter the lower portion of the box body 11, so that the workers can conveniently enter the interior of the equipment body 12 through the air outlet 15.

Specifically, as shown in fig. 1 and 2, the upper portion of the box body 11 is located on the inner wall of the box body 11, the air inlet 13, the air outlet 15 and the air vent 18 are respectively provided with a dustproof filter screen, and the air inlet 13, the air outlet 15 and the air vent 18 facilitate air circulation inside the box body 11.

Specifically, as shown in fig. 1, a PLC controller is arranged inside the control box 3, the output end of the temperature sensor 17 is electrically connected to the input end of the control box 3 through a wire, the output end of the control box 3 is electrically connected to the input end of the air blower 14 through a wire, and the temperature sensor 17 can detect the temperature inside the box body 11, so that the air blower 14 can be started to discharge the heat inside the box body 11 when the temperature inside the box body 11 is too high.

The working principle of the utility model is as follows: when the device is used, when the device body 12 needs to be overhauled, the hydraulic cylinder 4 can be started, the hydraulic cylinder 4 can drive the top plate 5 to move upwards during operation, so as to drive the slide block 6 to move upwards along the guide rod 7, the slide block 6 can drive the box body 11 to move upwards during movement, after the box body 11 moves upwards to a proper position, the hydraulic cylinder 4 is closed, a worker enters the lower part of the box body 11, then the handle 16 is rotated by hands, the air outlet 15 can be driven to rotate when the handle 16 is rotated, so as to take the air outlet 15 off from the box body 11, then the worker enters the device body 12 through the air outlet 15 for overhauling and maintenance, when the temperature in the box body 11 is overhigh during operation of the device, the control box 3 detects the abnormal temperature of the temperature sensor 17, sends an instruction to start the air blower 14, the air blower 14 operates to discharge hot air in the box body 11 through the air outlet 15 and the vent 18, thereby reducing the temperature of the equipment body 12, enabling the equipment body 12 to operate normally and prolonging the service life of the equipment body 12.

It will be evident to those skilled in the art that the utility model is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims

1. A self-circulating ultrapure water device comprising a base plate (1), characterized in that: a stand column (2) is arranged on one side above the bottom plate (1), a control box (3) is arranged on one side of the stand column (2), a hydraulic cylinder (4) is arranged on the surface of the stand column (2) above the control box (3), the output end of the hydraulic cylinder (4) is connected with a top plate (5), a sliding block (6) is fixedly connected on one side of the top plate (5), a guide rod (7) is connected in the sliding block (6) in a penetrating manner, two ends of the guide rod (7) are embedded in a positioning block (8), a pressure spring (9) is arranged on one side below the sliding block (6), the pressure spring (9) is sleeved on the outer portion of the guide rod (7), the bottom of the pressure spring (9) is connected with a backing plate (10), a box body (11) is fixedly connected on one side of the sliding block (6), an equipment body (12) is arranged in the box body (11), an air inlet (13) is arranged on one side above the equipment body (12), air-blower (14) is equipped with in air intake (13), box (11) bottom is equipped with air outlet (15), air outlet (15) below is connected with handle (16), box (11) inside top one side is equipped with temperature sensor (17).

2. A self-circulating ultrapure water apparatus as recited in claim 1 wherein: slider (6) quantity is eight and locates respectively on eight angles of box (11), roof (5) quantity is four groups and locates respectively four of box (11) top on slider (6), roof (5) one end extend to stand (2) outside, slider (6) are in sliding connection on guide bar (7).

3. A self-circulating ultrapure water apparatus as recited in claim 1 wherein: a support is arranged on one side below the backing plates (10), and the distance between every two adjacent backing plates (10) is larger than the diameter of the air outlet (15).

4. A self-circulating ultrapure water apparatus as recited in claim 1 wherein: the box (11) top is located be equipped with vent (18) on box (11) inner wall, air intake (13) air outlet (15) with all be equipped with dustproof filter screen on vent (18).

5. A self-circulating ultrapure water apparatus as recited in claim 1 wherein: the air outlet (15) is provided with threads through the outside, and the air outlet (15) is connected with the box body (11) through the threads.

6. A self-circulating ultrapure water apparatus as recited in claim 1 wherein: the control box is characterized in that a PLC (programmable logic controller) is arranged in the control box (3), the output end of the temperature sensor (17) is electrically connected with the input end of the control box (3) through a wire, and the output end of the control box (3) is electrically connected with the input end of the air blower (14) through a wire.