CN215815800U

CN215815800U - Diffusion furnace with efficient work and smoke purification function

Info

Publication number: CN215815800U
Application number: CN202121961083.2U
Authority: CN
Inventors: 高毛毛
Original assignee: Shanghai Tianye Construction Group Co ltd
Current assignee: Shanghai Tianye Construction Group Co ltd
Priority date: 2021-08-20
Filing date: 2021-08-20
Publication date: 2022-02-11
Anticipated expiration: 2031-08-20

Abstract

The utility model discloses a diffusion furnace which is efficient in work and has a flue gas purification function, and the diffusion furnace comprises a box body, wherein a filter box is fixedly connected to the left end of the top of the box body, an air inlet cover is fixedly connected to the left side of the inner cavity of the filter box, an HEPA filter screen, an active carbon filter screen and a cotton wool filter screen are sequentially and fixedly connected to the inner cavity of the filter box from left to right, a preheating box is arranged at the upper end of the left side of the box body, pull rods are fixedly connected to the left end and the right end of the top of the inner cavity of the preheating box, and an exhaust cover is fixedly connected to the bottom of each pull rod. The utility model solves the problems that the existing diffusion furnace needs to be repeatedly heated after processing materials are put in each time, the processing time is further prolonged, the working efficiency is reduced, and the existing diffusion furnace does not have a flue gas purification function.

Description

Diffusion furnace with efficient work and smoke purification function

Technical Field

The utility model relates to the technical field of diffusion furnaces, in particular to a diffusion furnace which is efficient in working and has a smoke purification function.

Background

The diffusion furnace is one of important process equipment of a front process of a semiconductor production line, is used for diffusion, oxidation, annealing, alloying, sintering and other processes in industries such as large-scale integrated circuits, discrete devices, power electronics, photoelectric devices, optical fibers and the like, but the existing diffusion furnace needs to be heated repeatedly after processing materials are put in each time, so that the processing time is prolonged, the working efficiency is reduced, and meanwhile, the diffusion furnace does not have a smoke purification function.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a diffusion furnace with high working efficiency and a flue gas purification function, which has the advantages of high working efficiency and a flue gas purification function, and solves the problems that the conventional diffusion furnace needs to be repeatedly heated after a processing material is put in each time, so that the processing time is prolonged, the working efficiency is reduced, and the conventional diffusion furnace does not have a flue gas purification function.

In order to achieve the purpose, the utility model provides the following technical scheme: the utility model provides a high-efficient diffusion furnace that just possesses flue gas purification function of work, the power distribution box comprises a box body, the left end fixedly connected with rose box at box top, the left side fixedly connected with air inlet hood of rose box inner chamber, the inner chamber of rose box is fixedly connected with HEPA filter screen and active carbon filter screen and absorbent cotton filter screen in proper order from a left side to the right side, the left upper end of box is provided with preheating box, the equal fixedly connected with pull rod in both ends about preheating box inner chamber top, the bottom fixedly connected with air discharge hood of pull rod, the equal fixedly connected with bracing piece in both ends about preheating box inner chamber bottom, the top fixedly connected with of bracing piece carries the seat, the left side fixed mounting of rose box has the fan.

Preferably, the control box is fixedly installed at the left end of the front surface of the box body, and a display screen and a control key are arranged at the top of the control box.

Preferably, the upper end of the front surface of the box body is movably connected with a maintenance door through a hinge, and one end of the maintenance door is fixedly provided with a handle.

Preferably, the left side of the preheating box is movably connected with a sealing door through a hinge, and the left side of the preheating box is provided with a notch.

Preferably, the upper end of the inner cavity of the box body is provided with a diffusion furnace tube, the top of the diffusion furnace tube is communicated with a flue gas tube, and the upper end of the flue gas tube is communicated with the bottom of the filter box.

Preferably, the air inlet end of the fan is communicated with the left side of the air inlet hood through a pipeline, and the air outlet end of the fan is communicated with the middle end of the top of the exhaust hood through a pipeline.

Compared with the prior art, the utility model has the following beneficial effects:

the utility model can realize the multi-stage filtration and purification capability of harmful gas through the pipeline after the fan is opened by the control box and the harmful gas introduced into the diffusion furnace tube through the flue gas tube enters the filter box when the gas flows, and the harmful gas passes through the absorbent cotton filter screen, the active carbon filter screen and the HEPA filter screen, and the purified gas is sucked by the fan through the air inlet cover and then is transferred into the exhaust hood to be uniformly discharged, so as to realize the pre-heating capability of the material to be processed placed at the top of the conveying seat in the preheating box, further reduce the heating time after entering the diffusion furnace tube, further improve the working efficiency of the diffusion furnace, solve the problem that the existing diffusion furnace needs to be repeatedly heated after the material is put in the diffusion furnace each time, further prolong the processing time, thereby reducing the working efficiency and simultaneously solving the problem of no smoke purification function.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic cross-sectional view of a filter box according to the present invention;

FIG. 3 is a schematic sectional view of the box of the present invention in a front view.

In the figure: 1. a box body; 2. a control box; 3. a preheating box; 4. a sealing door; 5. a fan; 6. a filter box; 7. a flue gas pipe; 8. repairing the door; 9. an air intake hood; 10. a HEPA filter screen; 11. an active carbon filter screen; 12. a cotton wool filter screen; 13. a notch; 14. a pull rod; 15. an exhaust hood; 16. a conveying seat; 17. a support bar; 18. a diffusion furnace tube.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

In the description of the application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "disposed," "connected," and the like are to be construed broadly, such as "connected," which may be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood in a specific case by those of ordinary skill in the art.

The box body 1, the control box 2, the preheating box 3, the sealing door 4, the fan 5, the filter box 6, the flue gas pipe 7, the maintenance door 8, the air inlet hood 9, the HEPA filter screen 10, the activated carbon filter screen 11, the absorbent cotton filter screen 12, the notch 13, the pull rod 14, the exhaust hood 15, the conveying seat 16, the support rod 17 and the diffusion furnace tube 18 are all universal standard parts or parts known by technicians in the field, and the structure and the principle of the utility model can be known by technicians in the technical manual or by conventional experimental methods.

Referring to fig. 1-3, a diffusion furnace with high efficiency and flue gas purification function comprises a box body 1, a control box 2 is fixedly installed at the left end of the front surface of the box body 1, a display screen and a control key are arranged at the top of the control box 2, the upper end of the front surface of the box body 1 is movably connected with a maintenance door 8 through a hinge, a handle is fixedly installed at one end of the maintenance door 8, a filter box 6 is fixedly connected with the left end of the top of the box body 1, an air inlet cover 9 is fixedly connected at the left side of the inner cavity of the filter box 6, an HEPA filter screen 10, an active carbon filter screen 11 and a cotton wool filter screen 12 are fixedly connected in sequence from left to right in the inner cavity of the filter box 6, a preheating box 3 is arranged at the upper end of the left side of the box body 1, a sealing door 4 is movably connected at the left side of the preheating box 3 through a hinge, a notch 13 is formed in the left side of the preheating box 3, pull rods 14 are fixedly connected at the left end and right ends of the top of the inner cavity of the preheating box 3, the bottom of the pull rod 14 is fixedly connected with an exhaust hood 15, the left end and the right end of the bottom of the inner cavity of the preheating box 3 are fixedly connected with supporting rods 17, the top of each supporting rod 17 is fixedly connected with a conveying seat 16, the upper end of the inner cavity of the box body 1 is provided with a diffusion furnace tube 18, the top of each diffusion furnace tube 18 is communicated with a flue gas tube 7, the upper end of each flue gas tube 7 is communicated with the bottom of the filter box 6, the left side of the filter box 6 is fixedly provided with a fan 5, the air inlet end of the fan 5 is communicated with the left side of the air inlet hood 9 through a pipeline, the air outlet end of the fan 5 is communicated with the middle end of the top of the exhaust hood 15 through a pipeline, under the action of the filter box 6, and when the diffusion furnace works, after the fan 5 is opened by the control box 2, the fan 5 can suck gas in the filter box 6 through the pipeline, and when the gas flows, harmful gas in the diffusion furnace 18 can be introduced through the flue gas tubes 7 to enter the filter box 6, after harmful gas passes through the absorbent cotton filter screen 12, the activated carbon filter screen 11 and the HEPA filter screen 10, the capability of multistage filtration and purification of the harmful gas is realized, the purified gas is sucked by the fan 5 through the air inlet hood 9 and then is transferred into the air exhaust hood 15 to be uniformly discharged, the capability of preheating materials to be processed placed at the top of the conveying seat 16 in the preheating box 3 can be realized, the heating time after the materials enter the diffusion furnace tube 18 is further reduced, and therefore the working efficiency of the diffusion furnace is improved.

When the diffusion furnace is used, under the action of the filter box 6, after the fan 5 is opened by the control box 2 when the diffusion furnace works, the fan 5 can suck gas in the filter box 6 through the pipeline through the air inlet cover 9, and when the gas flows, harmful gas introduced into the diffusion furnace tube 18 through the flue gas pipe 7 enters the filter box 6, and after the harmful gas passes through the absorbent cotton filter screen 12, the active carbon filter screen 11 and the HEPA filter screen 10, the capability of multistage filtering and purifying the harmful gas is realized, the purified gas is sucked by the fan 5 through the air inlet cover 9 and then is transferred into the exhaust hood 15 to be uniformly discharged, so that the capability of preheating materials to be processed placed at the top of the conveying seat 16 in the preheating box 3 can be realized, the heating time after entering the diffusion furnace tube 18 is reduced, the working efficiency of the diffusion furnace is improved, and the problem that after the existing diffusion furnace puts in the processing materials every time is solved, repeated heating is needed, and further, the processing time is prolonged, so that the working efficiency is reduced, and meanwhile, the smoke purification function is not achieved.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a work is high-efficient and possess diffusion furnace of gas cleaning function, includes box (1), its characterized in that: the left end fixedly connected with rose box (6) at box (1) top, the left side fixedly connected with air inlet cover (9) of rose box (6) inner chamber, the inner chamber of rose box (6) is fixedly connected with HEPA filter screen (10) and active carbon filter screen (11) and absorbent cotton filter screen (12) in proper order from a left side to a right side, box (1) left upper end is provided with preheating box (3), preheating box (3) inner chamber top about equal fixedly connected with pull rod (14) in both ends, the bottom fixedly connected with air discharge cover (15) of pull rod (14), preheating box (3) inner chamber bottom about equal fixedly connected with bracing piece (17) in both ends, the top fixedly connected with of bracing piece (17) carries seat (16), the left side fixed mounting of rose box (6) has fan (5).

2. The diffusion furnace with high work efficiency and the flue gas purification function according to claim 1, characterized in that: the left end fixed mounting on the positive surface of box (1) has control box (2), and the top of control box (2) is provided with display screen and control key.

3. The diffusion furnace with high work efficiency and the flue gas purification function according to claim 1, characterized in that: the upper end of the front surface of the box body (1) is movably connected with a maintenance door (8) through a hinge, and one end of the maintenance door (8) is fixedly provided with a handle.

4. The diffusion furnace with high work efficiency and the flue gas purification function according to claim 1, characterized in that: the left side of preheating case (3) has sealing door (4) through hinge swing joint, notch (13) have been seted up in the left side of preheating case (3).

5. The diffusion furnace with high work efficiency and the flue gas purification function according to claim 1, characterized in that: the upper end of the inner cavity of the box body (1) is provided with a diffusion furnace tube (18), the top of the diffusion furnace tube (18) is communicated with a flue gas tube (7), and the upper end of the flue gas tube (7) is communicated with the bottom of the filter box (6).

6. The diffusion furnace with high work efficiency and the flue gas purification function according to claim 1, characterized in that: the air inlet end of the fan (5) is communicated with the left side of the air inlet cover (9) through a pipeline, and the air outlet end of the fan (5) is communicated with the middle end of the top of the exhaust cover (15) through a pipeline.