CN215806272U - Sealing structure of quartz bell jar - Google Patents
Sealing structure of quartz bell jar Download PDFInfo
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- CN215806272U CN215806272U CN202121754334.XU CN202121754334U CN215806272U CN 215806272 U CN215806272 U CN 215806272U CN 202121754334 U CN202121754334 U CN 202121754334U CN 215806272 U CN215806272 U CN 215806272U
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- bell jar
- quartz bell
- flange
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- quartz
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Abstract
The utility model belongs to the technical field of the vacuum degassing furnace is sealed and specifically relates to a seal structure of quartz bell jar is related to, including the rigid coupling at the flange of quartz bell jar open end, set up sealing washer between flange and the water-cooling flange and be used for fixing the mounting on the water-cooling flange with flange, the sealing washer does not expose inside the quartz bell jar. The quartz bell jar sealing structure has the effects of strengthening the sealing performance of the quartz bell jar and reducing the probability that outside air enters the quartz bell jar.
Description
Technical Field
The application relates to the field of vacuum degassing furnace sealing, in particular to a sealing structure of a quartz bell jar.
Background
At present, when some workpieces are subjected to heat treatment, the workpieces need to be heated in a vacuum state, and the used equipment is to improve a vacuum environment for the workpieces through a vacuum degassing furnace and then heat the workpieces through a heating device, so that the purpose of heating the workpieces in the vacuum environment is achieved.
The vacuum degassing furnace comprises a vacuum furnace body and a quartz bell jar detachably connected to the vacuum furnace body and used for placing workpieces, the quartz bell jar is integrally in a tubular shape with one open end, and the open end of the quartz bell jar is installed on the vacuum furnace body through a water-cooling flange. When the quartz bell jar is used, a workpiece is directly placed in the quartz bell jar, air in the quartz bell jar is pumped out through a vacuumizing system of the vacuum degassing furnace, the inside of the quartz bell jar can be kept in a vacuum state, and then the workpiece in the quartz bell jar is subjected to vacuum-isolated heating through the heating device, so that the heating requirement of the workpiece in a vacuum environment can be met.
However, in the process of processing the workpiece, the external gas easily enters into the quartz bell jar from between the water-cooling flange and the quartz bell jar, and the processing of the workpiece is influenced. Therefore, how to ensure the sealing performance of the quartz bell jar and reduce the probability of external gas entering the quartz bell jar are very important.
SUMMERY OF THE UTILITY MODEL
In order to enhance the sealing performance of the quartz bell jar and reduce the probability of external gas entering the quartz bell jar, the application provides a sealing structure of the quartz bell jar.
The application provides a quartz bell jar's seal structure adopts following technical scheme:
a sealing structure of a quartz bell jar comprises a connecting flange fixedly connected to the opening end of the quartz bell jar, a sealing ring arranged between the connecting flange and a water-cooling flange and a fixing piece used for fixing the connecting flange on the water-cooling flange, wherein the sealing ring is not exposed inside the quartz bell jar.
Through adopting above-mentioned technical scheme, during the installation, directly install flange on the water-cooling flange through the mounting, can realize the installation of quartz clock cover, the setting of sealing washer, on the basis of guaranteeing the leakproofness between flange and the water-cooling flange, owing not expose in quartz clock cover inside, so reduced gas and passed through the sealing washer and got into to the inside probability of quartz clock cover. The sealing performance of the quartz bell jar is enhanced, and the probability that outside air enters the quartz bell jar is reduced.
Optionally, a containing groove for embedding the sealing ring is formed in one side, facing the quartz bell jar, of the water-cooling flange.
Through adopting above-mentioned technical scheme, the sealing washer is embedded into the storage tank, has realized when sealing up water-cooling flange and flange, still does not expose in the quartz bell jar is inside.
Optionally, the accommodating groove is a dovetail groove.
Through adopting above-mentioned technical scheme, when the sealing washer was embedded into the storage tank, the dovetail can fix the position of sealing washer in the storage tank, avoids the sealing washer roll-off from the storage tank.
Optionally, the sealing ring is an O-ring.
By adopting the technical scheme, the novel multifunctional electric heating device is low in price, simple to manufacture, reliable in function and simple in installation requirement.
Optionally, the fixing piece comprises a pressing block arranged on one side, far away from the water-cooling flange, of the connecting flange, and the pressing block is connected with the water-cooling flange through a bolt.
Through adopting above-mentioned technical scheme, fix the briquetting on the water-cooling flange through adopting the bolt, can with flange centre gripping between briquetting and water-cooling flange to fix flange's position, realize the installation to quartz clock cover.
Optionally, a protective pad is arranged between the pressing block and the connecting flange.
Through adopting above-mentioned technical scheme, the protection is filled up and can be provided the protection for flange, avoids the briquetting direct extrusion flange and causes the damage to flange.
Optionally, the quartz bell jar is made of quartz glass, and the connecting flange is made of quartz glass.
Through adopting above-mentioned technical scheme for the quartz bell jar that the preparation was accomplished has higher heat resistance, and can be penetrated through by heating device's magnetic field, and the heating device of being convenient for separates the empty heating through electromagnetism to the inside work piece of quartz bell jar, and the quartz glass material can see through ultraviolet ray and infrared ray, is convenient for follow-up temperature to the work piece in the quartz bell jar to detect.
Optionally, the water-cooling flange is made of stainless steel, and the pressing block is made of stainless steel.
By adopting the technical scheme, the processing and manufacturing are convenient.
In summary, the present application includes at least one of the following beneficial technical effects:
1. the connection of the connecting flange and the water-cooling flange can be realized through the arrangement of the fixing piece, so that the installation of the quartz bell jar is realized, the sealing ring is not exposed in the quartz bell jar, the sealing between the connecting flange and the water-cooling flange is realized, and meanwhile, gas cannot flow into the quartz bell jar from the sealing ring, the sealing performance of the quartz bell jar is enhanced, and the probability that external gas enters the quartz bell jar is reduced;
2. the dovetail groove is arranged to fix the position of the sealing ring in the accommodating groove, so that the sealing ring is prevented from sliding out of the accommodating groove;
3. the setting of protection pad for thereby flange is by the centre gripping when fixing flange position between briquetting and water-cooling flange, can also protect flange, avoids briquetting pressure too big and crushing flange.
Drawings
Fig. 1 is a schematic view of a conventional quartz bell jar seal structure.
Fig. 2 is a schematic view of the overall structure of the present application.
Fig. 3 is an enlarged schematic view at a in fig. 2.
Description of reference numerals: 1. a quartz bell jar; 2. water-cooling the flange; 21. a placement groove; 22. a containing groove; 3. a seal ring; 4. a connecting flange; 5. a fixing member; 51. briquetting; 6. a protective pad.
Detailed Description
The present application is described in further detail below with reference to figures 1-3.
Referring to fig. 1, in order to provide a sealing structure of a conventional quartz bell jar 1, the quartz bell jar 1 is tubular with an open end, a placing groove 21 into which the open end of the quartz bell jar 1 is inserted is formed in a water-cooled flange 2, and the quartz bell jar 1 and the water-cooled flange 2 can be connected by inserting the open end of the quartz bell jar 1 into the placing groove 21. In order to ensure the sealing between the quartz bell jar 1 and the water-cooling flange 2, a sealing ring 3 is placed in the placing groove 21, the sealing ring 3 is a U-shaped sealing ring, the U-shaped sealing ring is positioned between the opening end of the quartz bell jar 1 and the bottom of the placing groove 21, and the sealing between the quartz bell jar 1 and the placing groove 21 can be realized through the U-shaped sealing ring. However, since the U-shaped seal ring 3 is partially located in the quartz bell jar 1 and the inside of the quartz bell jar 1 is in a vacuum state, a small gap is formed on the surface or inside of the U-shaped seal ring 3, and gas passes through the small gap, thereby affecting the sealing between the quartz bell jar 1 and the water-cooling flange 2.
In order to strengthen the sealing of the quartz bell jar 1, the embodiment of the application discloses a sealing structure of the quartz bell jar. Referring to fig. 2 and 3, the sealing structure of the quartz bell jar comprises a connecting flange 4 integrally fixed to an open end of the quartz bell jar 1, a sealing ring 3 disposed between the connecting flange 4 and the water-cooled flange 2, and a fixing member 5 for fixing the connecting flange 4 to the water-cooled flange 2, wherein the sealing ring 3 is not exposed to the inside of the quartz bell jar 1. Therefore, the sealing ring 3 can not form a gap for gas to flow through because of being positioned in a vacuum state, the probability that the outside gas enters the quartz bell jar 1 is reduced, and the sealing performance of the quartz bell jar 1 is enhanced.
Wherein, quartz glass material is selected for quartz bell jar 1, and it has higher heat resistance, and can pierce through by heating device's magnetic field, and the heating device of being convenient for carries out the electromagnetism to the work piece of quartz bell jar 1 inside externally and separates the empty heating, and the quartz glass material can see through ultraviolet ray and infrared ray, and the infrared ray of being convenient for follow-up temperature measuring device can see through quartz bell jar 1 and detect the work piece temperature that is located quartz bell jar 1. Therefore, the connecting flange 4 integrally formed with the quartz bell jar 1 is made of quartz glass, and the manufacture is more convenient.
Wherein, the water-cooling flange 2 can select to use stainless steel material, and the sealing washer 3 does not expose in the inside concrete embodiment of quartz bell jar 1 and can be embodied as, offer the storage tank 22 that supplies sealing washer 3 embedding in the one side of flange 4 towards water-cooling flange 2 or in the one side of flange 2 towards flange 4, this application explains with the storage tank 22 offers on the water-cooling flange 2 of workable as an example. In a normal state, the water-cooling flange 2 is directly attached to the connecting flange 4, the sealing ring 3 is pressed in the containing groove 22 and is abutted to the connecting flange 4 under the self elastic action of the sealing ring, so that the water-cooling flange 2 and the connecting flange 4 are sealed, the situation of poor sealing caused by exposure of the sealing ring 3 in a vacuum environment is avoided while the quartz bell jar 1 is sealed, the sealing of the quartz bell jar 1 is greatly improved, and the probability of external gas entering the quartz bell jar 1 is reduced.
Meanwhile, in order to ensure that the sealing performance between the water-cooling flange 2 and the connecting flange 4 is better, after the quartz bell jar 1 and the connecting flange 4 are integrally formed, the surface, contacting with the water-cooling flange 2, of the connecting flange 4 is ground in a secondary grinding mode, so that the end face, used for sealing the quartz bell jar 1, of the connecting flange 4 can obtain higher flatness, and the sealing effect is better.
Referring to fig. 3, the receiving groove 22 may be formed as a dovetail groove, when the sealing ring 3 is placed in the receiving groove 22, the side wall of the sealing ring 3 will extend out of the receiving groove 22 to abut against the connecting flange 4 for sealing, and the opening end of the dovetail groove can limit the position of the sealing ring 3 in the receiving groove 22, so as to prevent the sealing ring 3 from sliding out of the receiving groove 22.
The O-shaped ring can be selected as the sealing ring 3, the O-shaped ring can be made of fluororubber, and the O-shaped ring is low in price, simple to manufacture, reliable in function and simple in installation requirement.
Referring to fig. 2 and 3, the fixing member 5 includes a pressing block 51 disposed on a side of the connecting flange 4 away from the water-cooled flange 2, and the pressing block 51 is annular as a whole and is fitted over the quartz bell jar 1. One side of the pressing block 51 is simultaneously attached to the connecting flange 4 and the water-cooling flange 2 and detachably connected with the water-cooling flange 2 through bolts, and the pressing block 51 can be fixed on the water-cooling flange 2 through the bolts, so that the connecting flange 4 is clamped between the pressing block 51 and the water-cooling flange 2, the position of the quartz bell jar 1 on the water-cooling flange 2 is fixed, and the installation of the quartz bell jar 1 is completed. Meanwhile, the connecting flange 4 also extrudes the sealing ring 3 to achieve the sealing effect. When a workpiece needs to be placed in the quartz bell jar 1 or the workpiece in the quartz bell jar 1 needs to be taken out, the bolt is directly screwed off, and the pressing block 51 is taken down, so that the quartz bell jar 1 can be detached.
Wherein, briquetting 51 also can select the stainless steel material, and processing is convenient.
Meanwhile, in order to prevent the pressure block 51 from pressing the connection flange 4 toward the water-cooled flange 2 and damaging the connection flange 4 when the pressure block 51 is fixed to the water-cooled flange 2 by bolts, a protection pad 6 is disposed between the pressure block 51 and the connection flange 4. The protection pad 6 can be made of rubber, can protect the connecting flange 4, and avoids the pressing block 51 from being directly contacted with the connecting flange 4 to damage the connecting flange 4.
The implementation principle of the sealing structure of the quartz bell jar in the embodiment of the application is as follows: when a workpiece needs to be processed, the workpiece is directly installed in the quartz bell jar 1, the open end of the quartz bell jar 1 is attached to the water-cooling flange 2, then the pressing block 51 is sleeved on the quartz bell jar 1, the pressing block 51 is attached to the connecting flange 4 and the water-cooling flange 2 at the same time, the protection pad 6 is placed between the pressing block 51 and the connecting flange 4, the pressing block 51 is fixed on the water-cooling flange 2 through bolts, the pressing block 51 pushes the connecting flange 4 towards the water-cooling flange 2, the connecting flange 4 is clamped between the water-cooling flange 2 and the pressing block 51, and the connecting flange 4 extrudes the sealing ring 3 to achieve sealing between the connecting flange 4 and the water-cooling flange 2. When the quartz bell jar 1 is sealed, a tiny gap cannot be formed due to the fact that the sealing ring 3 is in contact with vacuum gas in the quartz bell jar 1 to affect sealing, the sealing performance of the quartz bell jar 1 is enhanced, and the probability that outside gas enters the quartz bell jar 1 is reduced.
The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.
Claims (8)
1. A sealing structure of a quartz bell jar is characterized in that: the quartz bell jar sealing device is characterized by comprising a connecting flange (4) fixedly connected at the opening end of a quartz bell jar (1), a sealing ring (3) arranged between the connecting flange (4) and a water-cooling flange (2) and a fixing piece (5) used for fixing the connecting flange (4) on the water-cooling flange (2), wherein the sealing ring (3) is not exposed inside the quartz bell jar (1).
2. A sealing structure of a quartz bell jar according to claim 1, wherein: and one side of the water-cooling flange (2) facing the quartz bell jar (1) is provided with a containing groove (22) for embedding the sealing ring (3).
3. A sealing structure of a quartz bell jar according to claim 2, characterized in that: the containing groove (22) is a dovetail groove.
4. A sealing structure of a quartz bell jar according to claim 1, wherein: the sealing ring (3) is an O-shaped ring.
5. A sealing structure of a quartz bell jar according to claim 1, wherein: the fixing piece (5) comprises a pressing block (51) which is arranged on one side of the connecting flange (4) far away from the water-cooling flange (2), and the pressing block (51) is connected with the water-cooling flange (2) through bolts.
6. A seal structure of a quartz bell jar according to claim 5, characterized in that: a protective pad (6) is arranged between the pressing block (51) and the connecting flange (4).
7. A sealing structure of a quartz bell jar according to claim 1, wherein: the quartz bell jar (1) is a quartz bell jar (1) made of quartz glass materials, and the connecting flange (4) is a connecting flange (4) made of quartz glass materials.
8. A seal structure of a quartz bell jar according to claim 5, characterized in that: the water-cooling flange (2) is made of stainless steel materials (2), and the pressing block (51) is made of stainless steel materials (51).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121754334.XU CN215806272U (en) | 2021-07-29 | 2021-07-29 | Sealing structure of quartz bell jar |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121754334.XU CN215806272U (en) | 2021-07-29 | 2021-07-29 | Sealing structure of quartz bell jar |
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| Publication Number | Publication Date |
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| CN215806272U true CN215806272U (en) | 2022-02-11 |
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| CN202121754334.XU Active CN215806272U (en) | 2021-07-29 | 2021-07-29 | Sealing structure of quartz bell jar |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116332485A (en) * | 2023-03-23 | 2023-06-27 | 北京凯德石英股份有限公司 | Vertical quartz process tube and processing method |
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2021
- 2021-07-29 CN CN202121754334.XU patent/CN215806272U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116332485A (en) * | 2023-03-23 | 2023-06-27 | 北京凯德石英股份有限公司 | Vertical quartz process tube and processing method |
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