CN215799868U

CN215799868U - Observation window assembly of vacuum coating equipment

Info

Publication number: CN215799868U
Application number: CN202121992863.3U
Authority: CN
Inventors: 苏艳波
Original assignee: Beijng Naura Vacuum Technology Co Ltd
Current assignee: Beijng Naura Vacuum Technology Co Ltd
Priority date: 2021-08-19
Filing date: 2021-08-19
Publication date: 2022-02-11
Anticipated expiration: 2031-08-19

Abstract

The application relates to an observation window especially relates to a vacuum coating equipment observation window subassembly, and its technical scheme main points are: an observation window assembly of vacuum coating equipment comprises a base, a flange and observation window glass, wherein the base is used for being fixed on the wall of a coating chamber; the flange is bolted with a cover plate which is used for pressing the observation window glass on the step tread of the mounting hole, and the cover plate is provided with an upper observation hole opposite to the observation window glass; the purposes of reducing the workload of detaching the observation window of the vacuum coating equipment and facilitating the maintenance of the interior of the coating cavity are achieved.

Description

Observation window assembly of vacuum coating equipment

Technical Field

The application relates to an observation window, in particular to an observation window assembly of vacuum coating equipment.

Background

In a vacuum coating process, coating is usually realized on the surface of a workpiece by PVD or CVD and the like in a coating chamber under a high-temperature and high-vacuum environment; an observation window is arranged on the wall of a coating chamber of the vacuum coating equipment, and a worker can observe the coating condition and the component operation condition in the coating chamber through the observation window.

The observation window of the vacuum coating equipment recorded in the related art is of a split structure, and because the interior of a coating cavity is always in a high-temperature and high-vacuum environment, when the observation window is not used, the observation window needs to be shielded so as to prevent the observation window from being coated with a film to influence subsequent observation; however, when the observation window needs to be disassembled to overhaul the observation window or the interior of the coating chamber, the observation window with the split structure causes the disassembly of the observation window to sequentially disassemble all the components, so that the workload of disassembling the observation window and maintaining the interior of the coating chamber is increased.

SUMMERY OF THE UTILITY MODEL

In order to reduce the work load that vacuum coating equipment observation window dismantled and make things convenient for the inside maintenance of coating chamber, this application provides a vacuum coating equipment observation window subassembly.

The application provides a vacuum coating equipment observation window subassembly adopts following technical scheme:

an observation window assembly of vacuum coating equipment comprises a base, a flange and observation window glass, wherein the base is used for being fixed on the wall of a coating chamber, the flange is bolted on the base, the observation window glass is arranged on the flange, a lower observation hole opposite to the observation window glass is formed in the base, and a stepped mounting hole is formed in the flange; the flange is bolted with a cover plate which is used for pressing the observation window glass on the step tread of the mounting hole, and the cover plate is provided with an upper observation hole opposite to the observation window glass.

By adopting the technical scheme, when the observation window needs to be detached to overhaul and maintain the interior of the coating cavity, the bolt between the flange and the base is directly detached, and the coating cavity is further communicated with the external environment through the lower observation hole in the base so that a worker can overhaul and maintain the interior of the coating cavity; compare in split type observation window subassembly, the observation window subassembly of this application need not demolish each part in proper order, directly dismantle the flange and can will rely on each part including observation window glass, apron etc. of flange mounting to demolish from the coating film cavity, reduced the work load that vacuum coating equipment observation window was dismantled and make things convenient for the inside maintenance of coating film cavity.

Optionally, a splash-proof baffle cylinder communicated with the lower observation hole is fixed on one side of the base, which is far away from the flange; a shaft sleeve positioned on one side of the observation window glass is fixedly arranged on the flange in a penetrating way, and the shaft sleeve penetrates through the lower observation hole and the splash-proof baffle cylinder and extends towards one side of the base, which is far away from the flange; the inside sunshade axle of being connected with the axle sleeve rotation of wearing to be equipped with of axle sleeve, the epaxial splashproof sunshade that can shelter from splashproof fender section of thick bamboo and keep away from base one end that is fixed with of sunshade, the eccentric setting of sunshade axle on the splashproof sunshade.

Through adopting above-mentioned technical scheme, splashproof sunshade cooperation splashproof fender section of thick bamboo can effectively reduce target and cause observation window glass to be coated film and influence the field of vision definition on escaping to observation window glass.

Optionally, the shaft sleeve extends towards one side of the flange away from the base, a sealing hole is formed in the end face of the end of the shaft sleeve, two first sealing rings surrounding the shutter shaft are arranged in the sealing hole, and a sealing support is arranged between the two first sealing rings; the shaft sleeve is screwed with an end cover, and a sealing gasket used for pressing the first sealing ring in the sealing hole is arranged on the end cover.

Through adopting above-mentioned technical scheme, realize sealed to the axle sleeve, prevent that coating film cavity is inside to influence vacuum environment's production through axle sleeve and external atmosphere intercommunication.

Optionally, a reflecting screen made of a heat insulating material is fixed on the baffle shaft, and the reflecting screen is arranged on one side of the splash-proof baffle cylinder, which is far away from the flange, and is used for reducing heat entering the splash-proof baffle cylinder.

The overhigh temperature can damage sealing parts, observation window components and the like, and can cause safety accidents that the temperature of the shutter shaft is overhigh and workers are scalded; through adopting above-mentioned technical scheme, can effectively reduce the heat and enter into the splash proof fender section of thick bamboo inside and spread near observation window glass, realize the thermal-insulated effect to observation window glass.

Optionally, the reflecting screen is provided in plurality and distributed along the axial direction of the shutter shaft.

By adopting the technical scheme, the heat insulation capability is further improved.

Optionally, spacer rings are arranged between adjacent reflecting screens and between the splash-proof shielding plate and the adjacent reflecting screens, pin shafts penetrating through the splash-proof shielding plate and the plurality of reflecting screens are arranged inside the spacer rings in a penetrating mode, and split pins are arranged on one side, far away from each other, of the two spacer rings on the outermost side of the pin shafts in a penetrating mode in the radial direction of the pin shafts.

Through adopting above-mentioned technical scheme for separate each other between the adjacent reflecting screen, prevent to reduce thermal-insulated effect because the reflecting screen contacts each other.

Optionally, an annular cooling water channel with two closed ends is formed in the end face, far away from the flange, of the base, and an end plate for sealing the cooling water channel is fixed on the end face; two water-cooling connecting pipes which are respectively communicated with two ends of the cooling water channel are fixed on the base, and one water-cooling connecting pipe is externally connected with a cooling water source.

Through adopting above-mentioned technical scheme, realize the cooling to the base, further reduce the temperature of whole subassembly.

Optionally, an annular pressure reduction pad is disposed between the sight glass and the cover plate.

By adopting the technical scheme, the pressure of the cover plate on the observation window glass is reduced, and further the damage to the observation window glass is reduced.

Optionally, a second sealing ring is arranged between the step tread of the mounting hole and the observation window glass, an annular groove for embedding the second sealing ring is formed in the step tread of the mounting hole, and the second sealing ring is pressed on the surface of the observation window glass.

Through adopting above-mentioned technical scheme, realize sealed between to observation window glass and the flange, prevent that coating film cavity is inside through observing hole and mounting hole and external atmosphere intercommunication and influence vacuum environment's production down.

In summary, the present application has the following technical effects:

1. by arranging the base, the flange, the observation window glass and the cover plate, all parts including the observation window glass, the cover plate and the like which are installed by depending on the flange can be detached from the coating chamber by directly detaching the flange, so that the workload of detaching the observation window of the vacuum coating equipment is reduced, and the maintenance of the interior of the coating chamber is facilitated;

2. by arranging the splash-proof blocking cylinder, the shaft sleeve, the blocking plate shaft and the splash-proof blocking plate, after observation is finished, the blocking plate shaft is rotated to enable the splash-proof blocking plate to rotate to the position near the splash-proof blocking cylinder, and then the splash-proof blocking plate is matched with the splash-proof blocking cylinder, so that the phenomenon that the target material is escaped onto observation window glass to cause that the observation window glass is coated with a film and the visual field definition is influenced can be effectively reduced;

3. by arranging the reflecting screen, heat can be effectively reduced from entering the anti-splash baffle cylinder and diffusing to the vicinity of the observation window glass, and the heat insulation effect on the observation window glass is realized;

4. through having seted up the cooling water course on the base, two water-cooling takeovers of cooling water course intercommunication realize the cooling to the base, further reduce the temperature of whole subassembly.

Drawings

FIG. 1 is a schematic cross-sectional view of a vacuum coating apparatus observation window assembly in an embodiment of the present application;

FIG. 2 is an enlarged view of a portion of FIG. 1 at A;

FIG. 3 is a schematic view showing the entire structure of a window assembly of a vacuum coating apparatus in an embodiment of the present application;

FIG. 4 is an enlarged view of a portion of FIG. 1 at B;

FIG. 5 is an enlarged view of a portion of FIG. 1 at C;

fig. 6 is a view of a vacuum deposition apparatus viewing window assembly positioned on a side of a splash shield away from a base in an embodiment of the present application.

In the figure, 1, a base; 101. a lower viewing aperture; 102. a cooling water channel; 2. a flange; 201. mounting holes; 3. an observation window glass; 4. a cover plate; 401. an upper viewing aperture; 5. a splash-proof blocking cylinder; 6. a shaft sleeve; 601. sealing the hole; 7. a shutter shaft; 8. a splash shield; 901. a first seal ring; 902. sealing the bracket; 903. an end cap; 904. a sealing gasket; 10. a reflective screen; 11. a spacer ring; 12. a pin shaft; 13. a cotter pin; 14. water-cooling the connecting pipe; 15. a pressure reducing pad; 16. a second seal ring; 17. a handle; 18. and an end plate.

Detailed Description

The present application is described in further detail below with reference to the attached drawings.

Referring to fig. 1 and 2, the application provides an observation window assembly of vacuum coating equipment, which comprises a cylindrical base 1 and a flange 2 coaxially bolted on the end face of the base 1, wherein the peripheral surface of the base 1 is fixed on the wall of a coating chamber in a fixing mode such as welding; a lower observation hole 101 is coaxially formed in the base 1, a stepped mounting hole 201 is eccentrically formed in the flange 2, the end, with the smaller diameter, of the mounting hole 201 is formed close to the lower observation hole 101, and the end, with the smaller diameter, of the mounting hole 201 is smaller than the diameter of the lower observation hole 101 and is communicated with the lower observation hole 101; an observation window glass 3 is arranged in the end with the larger diameter of the mounting hole 201, and the observation window glass 3 is lapped on the step tread of the mounting hole 201; one end of the flange 2, which is far away from the base 1, is bolted with a cover plate 4 which is coaxially arranged with the mounting hole 201, one end of the cover plate 4, which is close to the flange 2, is abutted against the observation window glass 3 and presses the observation window glass 3 on the step tread of the mounting hole 201, and the cover plate 4 is coaxially provided with an upper observation hole 401.

Therefore, when the interior of the coating chamber needs to be overhauled and maintained and the observation window needs to be detached from the wall of the coating chamber, the bolts between the flange 2 and the base 1 are detached to enable the flange 2 to be detached from the base 1, and further the flange 2 and parts including the observation window glass 3, the cover plate 4 and the like which are installed by relying on the flange 2 are detached from the coating chamber; furthermore, in order to reduce the pressure of the cover plate 4 against the observation pane 3 to reduce the likelihood of damage to the observation pane 3 due to excessive pressure, an annular pressure relief gasket 15 is provided between the cover plate 4 and the observation pane 3.

Referring to fig. 1 and 3, in order to prevent the target material in the film coating chamber from coating on the observation window glass 3 and causing the observation window glass 3 to have low definition or be scrapped, a splash-proof baffle cylinder 5 coaxially communicated with the lower observation hole 101 is arranged at one end of the base 1 away from the flange 2, the splash-proof baffle cylinder 5 and the base 1 are fixedly connected with each other by welding or the like, and the splash-proof baffle cylinder 5 is fixed on the chamber wall of the film coating chamber by welding or the like; a shaft sleeve 6 positioned on one side of the mounting hole 201 is arranged through the flange 2, the shaft sleeve 6 is fixed on the flange 2 in a welding mode and the like, and extends towards the lower observation hole 101 and the inner part of the splash-proof baffle cylinder 5; a cover plate shaft 7 which is rotatably connected with the shaft sleeve 6 is coaxially arranged in the shaft sleeve 6 in a penetrating manner, one end of the cover plate shaft 7 extends towards one side of the cover plate 4 far away from the flange 2 and is hinged with a handle 17 which is convenient for rotating the cover plate shaft 7; the other end of the splash guard shaft 7 extends towards one side, far away from the flange 2, of the splash guard barrel 5 and is fixedly provided with a splash guard plate 8, the splash guard plate 8 is positioned on one side, far away from the flange 2, of the splash guard barrel 5, the diameter of the splash guard plate 8 is not smaller than that of the splash guard barrel 5 so that the end face of the splash guard barrel 5 can be shielded, and the splash guard plate 8 is perpendicular to the axis of the splash guard barrel 5; the shutter shaft 7 is eccentrically disposed on the splashguard 8.

When the inside of the coating chamber needs to be observed through the observation window glass 3, the shutter shaft 7 is rotated to rotate the splash shield 8 around the axis of the shutter shaft 7 until the splash shield 8 is moved away from the end of the splash shield 5, so that the observation window glass 3 can observe the inside of the coating chamber through the splash shield 5; after the observation is finished, the baffle shaft 7 is rotated to enable the splash baffle 8 to rotate to the position near the splash baffle cylinder 5, the splash baffle cylinder 5 and the inner part of the film coating cavity are separated by the splash baffle 8, and then the splash baffle 8 is matched with the splash baffle cylinder 5 to effectively reduce the phenomenon that the target material is escaped to the observation window glass 3 to cause the observation window glass 3 to be coated with the film and influence the visual field definition.

However, the above structure has a problem that the external environment is easily communicated with the inside of the coating chamber through the gap between the upper observation hole 401 and the mounting hole 201 or the gap between the shaft sleeve 6 and the shield shaft 7, thereby affecting the generation of the vacuum environment inside the coating chamber.

Therefore, referring to fig. 2, a second sealing ring 16 is arranged between the observation window glass 3 and the step tread surface of the mounting hole 201, an annular groove for the second sealing ring 16 to be embedded is coaxially formed on the step tread surface of the mounting hole 201, the second sealing ring 16 is pressed between the groove bottom of the groove and the observation window glass 3, and further the sealing between the upper observation hole 401 and the mounting hole 201 is realized.

In addition, referring to fig. 4, a sealing hole 601 is coaxially formed in an end face of the shaft sleeve 6, which is far away from the splash guard 8, two first sealing rings 901 are arranged in the sealing hole 601 and surround the guard shaft 7, one of the first sealing rings 901 abuts against the bottom of the sealing hole 601, and a sealing support 902 is arranged between the two first sealing rings 901; an end cover 903 is in threaded connection with one end, far away from the splash guard 8, of the shaft sleeve 6, and a sealing gasket 904 arranged around the guard shaft 7 is pressed between the end cover 903 and a first sealing ring 901 far away from the bottom of the sealing hole 601; the sealing washer 904, the sealing bracket 902 and the two first sealing washers 901 are pressed between the end cover 903 and the groove bottom of the sealing hole 601, so that the sealing between the shaft sleeve 6 and the shutter shaft 7 is realized.

Referring to fig. 1, the inside of the coating chamber is often in a high-temperature and high-vacuum environment during the coating process, which easily causes damage to components such as a base 1, a flange 2, a cover plate 4, an observation window glass 3 and the like due to high temperature, and causes safety accidents such as scalding of workers due to overhigh temperature of a shutter shaft; in order to reduce the possibility of occurrence of the above situation, a plurality of reflecting screens 10 made of heat insulating materials are arranged on one side of the splash guard 8 close to the splash guard barrel 5, and the reflecting screens 10 are fixed on the guard shaft 7 and are arranged coaxially with the splash guard 8, so that heat entering the splash guard barrel 5 and diffusing to the vicinity of the observation window glass 3 can be effectively reduced, and the heat insulation effect on the observation window glass 3 is realized.

Specifically, referring to fig. 5, the fixing manner between the reflection screens 10 and the screen shaft 7 and between the splash proof screen 8 and the screen shaft 7 is that a spacer ring 11 is respectively arranged between two adjacent reflection screens 10 and between the screen shaft 7 and the reflection screen 10 adjacent to the spacer ring 11, and the spacer ring 11 is used for separating the two adjacent reflection screens 10 and between the screen shaft 7 and the reflection screen 10 from each other, so as to prevent the reflection screens 10 from reducing self heat insulation effect due to mutual contact; a pin shaft 12 penetrating through the splash guard plate 8 and the plurality of reflection screens 10 simultaneously penetrates through the insides of the plurality of spacing rings 11, the pin shaft 12 extends towards one side, away from each other, of the two spacing rings 11 on the outermost side and penetrates through a cotter pin 13 along the radial direction of the pin shaft 12, and therefore the adjacent reflection screens 10 and the reflection screens 10 are fixed with the splash guard plate 8; referring to fig. 6 again, the spacer ring 11 is provided at a plurality of positions on the splashboard 8 and the reflective screen 10 to improve the installation stability between the splashboard 8 and the plurality of reflective screens 10; furthermore, a plurality of spacers 11 are also fitted around the shutter shaft 7, and each spacer 11 is disposed between two adjacent reflection screens 10 and between a reflection screen 10 and the splatter shield 8.

Further, the radial section of one end of the shield plate shaft 7, which is far away from the handle 17, is in an oval shape, a rectangular shape or other non-circular shapes, a split pin 13 is also radially penetrated through the end penetrating through the shield plate shaft 7 along the end, and the split pin 13 is arranged on one side of the splash-proof shield plate 8, which is far away from the reflection screen 10, so that the reflection screen 10 and the splash-proof shield plate 8 are fixed on the shield plate shaft 7.

Referring to fig. 1 and 3, in order to lower the temperature of the base 1 to further reduce the possibility of damage to the base 1, the flange 2, the cover plate 4, the observation window glass 3 and other components due to high temperature, an annular cooling water channel 102 with two closed ends is coaxially opened on the end surface of the base 1 far away from the flange 2, and an annular end plate 18 for sealing the cooling water channel 102 is fixed; two water-cooling connecting pipes 14 respectively communicated with two ends of the cooling water channel 102 are fixed on the base 1, wherein one water-cooling connecting pipe 14 is externally connected with a cooling water source, and the other water-cooling connecting pipe 14 is used for discharging cooling water with higher temperature; the cooling water absorbs the heat of base 1 and then plays the effect of cooling base 1 at the inside in-process that flows of base 1, plays the effect of cooling to whole observation window subassembly promptly.

The present embodiment is only for explaining the present application, and it is not limited to the present application, and those skilled in the art can make modifications of the present embodiment without inventive contribution as needed after reading the present specification, but all of them are protected by patent law within the scope of the claims of the present application.

Claims

1. The utility model provides a vacuum coating equipment observation window subassembly which characterized in that: the film coating device comprises a base (1) fixed on the wall of a film coating chamber, a flange (2) bolted on the base (1) and observation window glass (3) arranged on the flange (2), wherein a lower observation hole (101) opposite to the observation window glass (3) is formed in the base (1), and a stepped mounting hole (201) is formed in the flange (2); a cover plate (4) used for pressing the observation window glass (3) on the step tread of the mounting hole (201) is bolted to the flange (2), and an upper observation hole (401) opposite to the observation window glass (3) is formed in the cover plate (4).

2. The observation window assembly of a vacuum coating apparatus according to claim 1, wherein: a splash-proof baffle cylinder (5) communicated with the lower observation hole (101) is fixed on one side of the base (1) far away from the flange (2); a shaft sleeve (6) positioned on one side of the observation window glass (3) is fixedly arranged on the flange (2) in a penetrating way, and the shaft sleeve (6) penetrates through the lower observation hole (101) and the splash-proof baffle cylinder (5) and extends towards one side of the base (1) far away from the flange (2); the inner part of the shaft sleeve (6) is provided with a baffle plate shaft (7) which is rotatably connected with the shaft sleeve (6), a splash-proof baffle plate (8) which can shield the splash-proof baffle cylinder (5) and is far away from one end of the base (1) is fixed on the baffle plate shaft (7), and the baffle plate shaft (7) is eccentrically arranged on the splash-proof baffle plate (8).

3. The observation window assembly of a vacuum coating apparatus according to claim 2, wherein: the shaft sleeve (6) extends towards one side, away from the base (1), of the flange (2), a sealing hole (601) is formed in the end face of the end of the shaft sleeve (6), two first sealing rings (901) surrounding the shutter shaft (7) are arranged inside the sealing hole (601), and a sealing support (902) is arranged between the two first sealing rings (901); an end cover (903) is connected to the shaft sleeve (6) in a threaded mode, and a sealing gasket (904) used for pressing the first sealing ring (901) inside the sealing hole (601) is arranged on the end cover (903).

4. The observation window assembly of a vacuum coating apparatus according to claim 2, wherein: a reflecting screen (10) made of heat insulating materials is fixed on the baffle shaft (7), and the reflecting screen (10) is arranged on one side, away from the flange (2), of the splash-proof baffle cylinder (5) and used for reducing heat entering the splash-proof baffle cylinder (5).

5. The observation window assembly of vacuum coating equipment according to claim 4, wherein: the reflecting screens (10) are arranged in a plurality and distributed along the axial direction of the shutter shaft (7).

6. The observation window assembly of vacuum coating equipment according to claim 5, wherein: spacer rings (11) are arranged between adjacent reflecting screens (10) and between the splash-proof shielding plate (8) and the adjacent reflecting screens (10), pin shafts (12) which simultaneously penetrate through the splash-proof shielding plate (8) and the plurality of reflecting screens (10) are arranged inside the plurality of spacer rings (11) in a penetrating mode, and split pins (13) are arranged on the pin shafts (12) in a penetrating mode in the radial direction of the pin shafts along the extending direction of one side, far away from the two spacer rings (11) on the outermost side.

7. The observation window assembly of a vacuum coating apparatus according to claim 1, wherein: an annular cooling water channel (102) with two closed ends is formed in the end face, far away from the flange (2), of the base (1), and an end plate (18) used for sealing the cooling water channel (102) is fixed on the end face; two water-cooling connecting pipes (14) which are respectively communicated with two ends of the cooling water channel (102) are fixed on the base (1), and a cooling water source is externally connected to one water-cooling connecting pipe (14).

8. The observation window assembly of a vacuum coating apparatus according to claim 1, wherein: an annular decompression pad (15) is arranged between the observation window glass (3) and the cover plate (4).

9. The observation window assembly of a vacuum coating apparatus according to claim 1, wherein: a second sealing ring (16) is arranged between the step tread of the mounting hole (201) and the observation window glass (3), an annular groove for embedding the second sealing ring (16) is formed in the step tread of the mounting hole (201), and the second sealing ring (16) is pressed on the surface of the observation window glass (3).