CN215790930U - Wire guide wheel and cutting machine - Google Patents

Abstract

The utility model discloses a wire guide wheel and a cutting machine, relates to the technical field of silicon wafer cutting, and is used for reducing the wire breakage rate of a cutting wire in the cutting process so as to improve the production efficiency. The wire guide wheel comprises: the wire guide wheel comprises a wire guide wheel body, wherein the circumferential surface of the wire guide wheel body is provided with an annular wear-resistant structure, and the annular wear-resistant structure is provided with an annular groove for accommodating a cutting wire; the groove bottom of the annular groove is an annular surface, and the axial width of the groove bottom is larger than the diameter of the cutting line. The cutting machine comprises the wire guide wheel provided by the technical scheme.

Description

Wire guide wheel and cutting machine

Technical Field

The utility model relates to the technical field of silicon wafer cutting, in particular to a wire guide wheel and a cutting machine.

Background

At present, a diamond wire cutting machine is generally needed in the process of cutting a silicon single crystal rod or a silicon single crystal block into silicon single crystal pieces, and due to the structural problem of a wire guide wheel used in the existing cutting machine, the cutting wire is easy to twist in the using process to cause the deformation and even breakage of the cutting wire.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a wire guide wheel and a cutting machine, which are used for reducing the wire breakage rate of a cutting wire in the cutting process so as to improve the production efficiency.

In a first aspect, the present invention provides a wire guide wheel comprising: the circumference of the wire guide wheel body is provided with an annular wear-resistant structure. The annular wear-resisting structure is provided with an annular groove for accommodating the cutting line. The groove bottom of the annular groove is an annular surface. The axial width of the groove bottom is greater than the diameter of the cutting line.

Under the condition of adopting above-mentioned technical scheme, when the cutting, the line of cut that is located the annular groove directly contacts with the tank bottom of annular wear-resisting structure to along the extending direction repetitive motion of line of cut in the annular groove. Because the groove bottom of the annular groove is an annular surface, and the axial width of the groove bottom is larger than the diameter of the cutting line, the cutting line in the annular groove is only supported by the vertical upward supporting force provided by the groove bottom when the cutting line is static, and is only supported by the supporting force and the friction force provided by the groove bottom when the cutting line is cut. Compared with the V-shaped groove in the prior art, the wire guide wheel provided by the utility model ensures that the cutting wire is not subjected to oblique supporting force from the side walls at the two sides of the annular groove any more and is only subjected to supporting force and friction force from the bottom of the groove in the cutting process, so that the phenomenon that the cutting wire is twisted due to the oblique supporting force provided by the side walls at the two sides of the annular groove is avoided, the wire breakage rate of the cutting wire is reduced, and the production efficiency is improved.

In one possible implementation, the axial width extent of the annular wear structure is reduced to greater than or equal to 5mm and less than 6 mm. The radial dimension of the annular wear-resistant structure is reduced to a range greater than or equal to 6.5mm and less than 10 mm.

Under the condition of adopting the technical scheme, compared with the prior art that the axial width of the annular wear-resistant structure is 6mm and the radial dimension is 10mm, the axial width and the radial dimension of the annular wear-resistant structure on the wire guide wheel are reduced, the weight of the annular wear-resistant structure is reduced, and further the whole weight of the wire guide wheel is reduced. Because the moment of inertia is the physical quantity of representation rigid body inertia, and receives the influence of object mass, so after lightening the quality of wire wheel, the moment of inertia of wire wheel reduces, and the inertia of wire wheel also diminishes correspondingly, consequently, the frictional force that the line of cut received in the cutting process reduces, has reduced the broken string rate of line of cut, has improved production efficiency. In addition, the cost of the wire guide wheel can be reduced by lightening the quality of the wire guide wheel, and further the production cost is reduced.

In one possible implementation, the width of the groove bottom ranges from 2mm or more to 3mm or less. The groove depth range of the annular groove is more than or equal to 0.5mm and less than or equal to 1 mm. Compared with the V-shaped groove in the prior art, the annular groove provided by the utility model is only the groove bottom in contact with the cutting line. The width of the groove bottom is far larger than the diameter of the cutting line, so that the cutting line can not contact with the groove walls at two sides of the annular groove in the annular groove and only receives the supporting force and the friction force provided by the groove bottom, the twisting of the cutting line caused by the oblique supporting force is avoided, and the line breakage rate of the cutting line is reduced.

In one possible embodiment, the width of the opening of the annular groove is greater than the width of the groove base. The width of the opening of the annular groove is larger than that of the groove bottom, so that the cutting line is not contacted with the groove walls at two sides of the annular groove when entering and leaving the corresponding wire guide wheel, the cutting line is prevented from twisting, and the cutting line is prevented from breaking.

In a possible realization, the angle between one side wall of the annular groove and the groove bottom is a first angle α. The angle between the groove wall at the other side of the annular groove and the groove bottom is a second angle beta. Alpha is more than or equal to 105 degrees and less than or equal to 165 degrees. Beta is more than or equal to 105 degrees and less than or equal to 165 degrees. The first angle alpha and the second angle beta are parameters for representing the inclination degree of the groove walls at two sides in the annular groove. If the first angle alpha and the second angle beta are too small, the cutting line has the risk of contacting with two side walls of the annular groove when entering and exiting the wire guide wheel or the wire guide wheel runs badly; if the first angle α and the second angle β are too large, there is a risk that the cutting wire will slip when the wire guide wheel is in operation.

In a possible implementation mode, the thickness of two side walls at the top of the annular groove is greater than or equal to 0.5mm and less than or equal to 1 mm. The thickness of the two side walls at the top of the annular groove can be changed according to the inclination degree of the two side walls of the annular groove. If the thickness of the two side walls at the top of the annular groove is too small, the strength of the side walls of the annular groove is weak, and the annular wear-resistant structure is damaged.

In one possible implementation, the wire wheel body also has a plurality of mounting holes that are evenly distributed around the center of the wire wheel body. The plurality of mounting holes are used for fixing the wire guide wheel. Through mutually supporting between a plurality of mounting holes, can fix the wire wheel better for the wire wheel is more stable at the operation in-process. A plurality of mounting holes are evenly distributed around the center of the wire guide wheel body, so that the stress of the wire guide wheel is more even, and the smooth proceeding of subsequent production is facilitated.

In one possible implementation, the mounting hole is an adjustment hole extending in the circumferential direction.

In a possible implementation manner, the wire guide wheel body is further provided with a plurality of hollowed-out holes, and the plurality of hollowed-out holes are uniformly distributed along the circumferential direction. The plurality of hollow holes formed in the wire guide wheel body can reduce the mass of the wire guide wheel, further reduce the rotational inertia of the wire guide wheel, weaken the friction force of the wire guide wheel on a cutting line, and accordingly reduce the line breakage rate of the cutting line. A plurality of fretwork holes are along circumferencial direction evenly distributed for the mass distribution of wire wheel is even, has avoided the unbalance of wire wheel, has further avoided the broken string of line of cut.

In a second aspect, the present invention further provides a cutting machine, including the wire guide wheel described in the first aspect or any one of the possible implementations of the first aspect.

The beneficial effects of the cutting machine provided by the second aspect are the same as those of the wire guide wheel described in the first aspect or any possible implementation manner of the first aspect, and are not described herein again.

Drawings

The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the utility model and not to limit the utility model. In the drawings:

FIG. 1 is a schematic radial cross-section of a groove of a prior art wire guide wheel;

fig. 2 is a schematic front view of a wire guide wheel according to an embodiment of the present invention;

fig. 3 is a radial cross-sectional view of a wire guide wheel provided in accordance with an embodiment of the present invention;

fig. 4 is a partial schematic view of a wire guide wheel provided in an embodiment of the present invention;

FIG. 5 is a schematic radial cross-sectional view of an annular groove provided in accordance with an embodiment of the present invention;

FIG. 6 is a graph comparing the wire breakage rate of the wire guide wheel according to the embodiment of the present invention;

FIG. 7 is a graph comparing the wire jumper rates of wire guide wheels provided in accordance with embodiments of the present invention;

fig. 8 is a comparison graph of the grade a yield of the wire guide wheel according to the embodiment of the present invention.

Reference numerals:

1-a wire guide wheel, 10-a wire guide wheel body,

100-ring wear-resistant structure, 1000-ring groove,

1000 a-groove bottom, 1000 b-groove wall,

a-a first angle, a-a second angle,

11-a central hole, 12-a mounting hole,

13-hollow holes, 2-V-shaped grooves,

3-cutting line.

Detailed Description

In order to make the technical problems, technical solutions and advantageous effects to be solved by the present invention more clearly apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the utility model and are not intended to limit the utility model.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise. The meaning of "a number" is one or more unless specifically limited otherwise.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.

In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

As shown in fig. 1, the groove of the wire guiding wheel in the prior art is a V-shaped groove 2, when cutting, the cutting wire 3 is located in the V-shaped groove 2 and is supported by the oblique supporting force of the groove walls at both sides, and because the cutting wire 3 is kept in a tensioned state when cutting, the cutting wire 3 is easily twisted during the reciprocating motion of the cutting wire 3, resulting in wire breakage.

In view of the above problems, the embodiment of the present invention provides a wire guide wheel 1, which reduces the breakage rate of the cutting wire 3 during the cutting process, thereby improving the production efficiency.

As shown in fig. 2 to 5, the wire guide wheel 1 according to the embodiment of the present invention includes: the wire guide wheel comprises a wire guide wheel body 10, wherein the circumferential surface of the wire guide wheel body 10 is provided with an annular wear-resistant structure 100. The annular wear structure 100 defines an annular groove 1000 for receiving the cutting line 3. The groove bottom 1000a of the annular groove 1000 is an annular surface. The groove bottom 1000a has an axial width greater than the diameter of the cutting line 3.

In specific implementation, when cutting is not started, the cutting line 3 is located on the groove bottom 1000a in the annular groove 1000 and is not in contact with the groove walls 1000b on both sides of the annular groove 1000, and the cutting line 3 at this time is only supported vertically and upwards by the groove bottom 1000a of the annular groove 1000; as the cutting process proceeds, the cutting line 3 moves back and forth on the groove bottom 1000a of the annular groove 1000 in the extending direction of the cutting line 3, and the cutting line 3 is supported vertically upward by the groove bottom 1000a and also subjected to a frictional force in the extending direction of the cutting line 3.

As can be seen from the above-mentioned composition and implementation of the wire guide wheel 1, during cutting, the cutting line 3 located in the annular groove 1000 directly contacts with the groove bottom 1000a of the annular wear-resistant structure 100, and repeatedly moves in the annular groove 1000 along the extending direction of the cutting line 3. Since the groove bottom 1000a of the annular groove 1000 is an annular surface and the axial width of the groove bottom 1000a is greater than the diameter of the cutting line 3, the cutting line 3 in the annular groove 1000 is subjected to only the vertically upward supporting force provided by the groove bottom 1000a when stationary, and is subjected to only the supporting force provided by the groove bottom 1000a and the frictional force when cutting. Compared with the V-shaped groove 2 in the prior art, the wire guide wheel 1 provided by the utility model has the advantages that the cutting wire 3 is not subjected to oblique supporting force from the groove walls 1000b at the two sides of the annular groove 1000 any more in the cutting process, and is only subjected to supporting force and friction force from the groove bottom 1000a, so that the phenomenon that the cutting wire 3 is twisted due to the oblique supporting force provided by the groove walls 1000b at the two sides of the annular groove 1000 is avoided, the wire breakage rate of the cutting wire 3 is reduced, and the production efficiency is improved.

For example, the wire guide wheel body 10 may be a plastic skeleton, and the annular wear-resistant structure 100 may be made of a polymer material.

As a possible implementation, as shown in fig. 2 to 5, the axial width range of the annular wear-resistant structure 100 is reduced to greater than or equal to 5mm and less than 6 mm. The radial dimension of the annular wear structure 100 is reduced to greater than or equal to 6.5mm and less than 10 mm.

Based on this, as shown in fig. 1 to 5, compared with the prior art in which the axial width of the annular wear-resistant structure 100 is 6mm and the radial dimension is 10mm, the axial width and the radial dimension of the annular wear-resistant structure 100 on the wire guide wheel 1 provided by the present invention are both reduced, thereby reducing the weight of the annular wear-resistant structure 100 and further reducing the overall weight of the wire guide wheel 1. Because the moment of inertia is the physical quantity of representation rigid body inertia, and receives the influence of object mass, so after lightening wire wheel 1's quality, wire wheel 1's moment of inertia reduces, and wire wheel 1's inertia also diminishes correspondingly, consequently, the frictional force that the line of cut 3 received reduces in the cutting process, has reduced the broken string rate of line of cut 3, has improved production efficiency. In addition, the cost of the wire guide wheel 1 can be reduced by lightening the quality of the wire guide wheel 1, and further the production cost is reduced.

Illustratively, as shown in fig. 2-5, the annular wear structure 100 has an axial width of 5mm and the radial dimension of the annular wear structure 100 is 6.5 mm.

In a specific embodiment, as shown in fig. 6 to 8, since the wire guide wheel 1 provided in the embodiment of the present invention has the groove bottom 1000a of the annular groove 1000 as the annular surface, the axial width of the groove bottom 1000a is greater than the diameter of the cutting wire 3, and when the axial width of the annular wear-resistant structure 100 is 5mm and the radial dimension is 6.5mm, compared with the prior art, the twisting of the cutting wire 3 is reduced by 6 turns by the wire guide wheel 1 provided in the embodiment of the present invention, the weight of the annular wear-resistant structure 100 portion of the wire guide wheel 1 can be reduced by 10g, and further the wire breakage rate of the cutting wire 3 is reduced from 5.68% to zero. In addition, the jumper rate of the cutting line 3 is also reduced from the original 4.55% to 2.33%. During the cutting of the silicon wafer, the A-grade yield of the silicon wafer is also increased from 92.22 percent to 93.78 percent.

As a possible implementation manner, as shown in fig. 1 to 5, the width of the groove bottom 1000a is greater than or equal to 2mm and less than or equal to 3mm, the groove depth of the annular groove 1000 is greater than or equal to 0.5mm and less than or equal to 1mm, the diameter of the cutting line 3 is generally less than or equal to 0.06mm, the width of the groove bottom 1000a is at least 33 times the diameter of the cutting line 3, and the groove depth of the annular groove 1000 is at least 8 times the diameter of the cutting line 3. Compared with the V-groove 2 in the prior art, the annular groove 1000 provided by the utility model is the annular groove 1000 with only the groove bottom 1000a contacting with the cutting line 3. The width of the groove bottom 1000a is far larger than the diameter of the cutting line 3, so that the cutting line 3 can not contact with the groove walls 1000b at two sides of the annular groove 1000 in the annular groove 1000, and only receives the supporting force and the friction force provided by the groove bottom 1000a, thereby avoiding the twisting of the cutting line 3 caused by the oblique supporting force and reducing the wire breakage rate of the cutting line 3.

In some examples, the cutting line 3 is a diamond wire having a diameter of 0.06mm or less, in which case the groove bottom 1000a has a width ranging from 2mm or more to 3mm or less, and the annular groove 1000 has a groove depth ranging from 0.5mm or more to 1mm or less.

Illustratively, as shown in fig. 2-5, the groove bottom 1000a may have a width of 2mm and the annular groove 1000 may have a groove depth of 1 mm. The diameter of the diamond wire commonly used in production is generally 0.053mm, and the width of the groove bottom 1000a is much larger than the diameter of the cutting wire 3.

In addition, in the prior art, part of the grooves on the main roller may also be flat-bottom grooves, but the width of the groove bottom needs to be smaller than the diameter of the cutting line 3, which is mainly because the cutting line 3 is spirally wound on the main roller, the extending direction of the cutting line 3 forms a certain included angle with the axial direction of the main roller, so that the main roller generates a force along the axial direction of the main roller to the cutting line 3, if the width of the groove bottom is larger than the diameter of the cutting line, the cutting line 3 will be influenced by the axial force to slide in the cutting process, and further the cutting line 3 is broken, while the wire guiding wheel 1 provided by the embodiment of the utility model only receives the friction force along the extending direction of the cutting line 3 and the supporting force perpendicular to the groove bottom 1000a during the working, and cannot be influenced by other forces, therefore, the situation that the cutting line 3 slides in the groove bottom 1000a does not exist, otherwise, because the width of the groove bottom 1000a is larger than the diameter of the cutting line 3, the cutting line 3 may not contact with the groove walls 1000b of the two sides of the annular groove 1000 in the annular groove 1000, and only receives the supporting force and the friction force provided by the groove bottom 1000a, so that the cutting line 3 is prevented from being twisted by the oblique supporting force, and the breakage rate of the cutting line 3 is reduced.

As a possible implementation, as shown in fig. 2 to 5, the width of the opening of the annular groove 1000 is larger than the width of the groove bottom 1000 a. The width of the opening of the annular groove 1000 is greater than the width of the groove bottom 1000a, so that the cutting line 3 does not contact with the groove walls 1000b on the two sides of the annular groove 1000 when entering and leaving the corresponding wire guide wheel 1, the cutting line 3 is prevented from twisting, and the cutting line 3 is prevented from breaking.

For example, as shown in fig. 2 to 5, when the width of the groove bottom 1000a is 2mm, the opening width of the annular groove 1000 may be 3 mm.

As a possible implementation manner, an angle between the groove wall 1000b on one side of the annular groove 1000 and the groove bottom 1000a is a first angle α, an angle between the groove wall 1000b on the other side of the annular groove 1000 and the groove bottom 1000a is a second angle β, and the first angle α and the second angle β are parameters representing the inclination degree of the groove walls 1000b on both sides in the annular groove 1000, wherein α is greater than or equal to 105 ° and less than or equal to 165 °, and β is greater than or equal to 105 ° and less than or equal to 165 °. If the first angle α and the second angle β are too small, the cutting wire 3 may be in contact with both side walls of the annular groove 1000 when entering and exiting the wire guide wheel 1 or when the wire guide wheel 1 is poorly operated; if the first angle α and the second angle β are too large, there is a risk that the cutting wire 3 will slip when the wire guide wheel 1 is in operation.

Illustratively, as shown in fig. 2-5, the first angle α and the second angle β may both be 130 °, in which case the radial cross-section of the annular groove 1000 is isosceles trapezoid. The first angle α and the second angle β may also be different, as long as they are within the angular range.

In addition, the side wall of the annular groove 1000 may also be curved, while ensuring the above-mentioned angular range and ensuring that the cutting line 3 does not hang on the side wall.

As a possible implementation manner, the thicknesses of both side walls at the top of the annular groove 1000 are 0.5mm or more and 1mm or less. The top both side wall thickness of the annular groove 1000 may vary depending on the degree of inclination of the both side groove walls 1000b of the annular groove 1000. If the two sidewalls at the top of the annular groove 1000 are too thick, the strength at the sidewalls of the annular groove 1000 may be weak, resulting in damage to the annular wear-resistant structure 100.

For example, as shown in fig. 2-5, the top two sidewalls of the annular groove 1000 may be 1mm thick.

As a possible realization, the wire guide wheel 1 has a central hole 11 for mounting the wire guide wheel 1, as shown in fig. 2 and 3.

As a possible implementation, as shown in fig. 2 and 3, the wire wheel body 10 further has a plurality of mounting holes 12, and the plurality of mounting holes 12 are evenly distributed around the center of the wire wheel body 10. A plurality of mounting holes 12 are used for fixing the wire guide wheel 1. By the cooperation of the central hole 11 with the plurality of mounting holes 12, the wire guide wheel 1 can be better fixed, so that the wire guide wheel 1 is more stable during operation. The installation holes 12 are uniformly distributed around the center of the wire guide wheel body 10, so that the stress of the wire guide wheel 1 is more uniform, and the subsequent production is favorably and smoothly carried out.

Illustratively, as shown in fig. 2 and 3, the wire guide wheel body 10 has 3 mounting holes 12, and the 3 mounting holes 12 are evenly distributed around the center of the wire guide wheel body 10.

In some examples, the installation hole 12 is an adjustment hole extending along a circumferential direction, the adjustment hole may be in the shape of a kidney-shaped hole, a gourd-shaped hole, or the like, and when the adjustment hole is installed in cooperation with an external connector, the external connector may be adjusted in position in the adjustment hole, thereby facilitating installation of the guide wheel 1.

As a possible implementation manner, as shown in fig. 2 and 3, the wire wheel body 10 further has a plurality of hollowed holes 13, and the plurality of hollowed holes 13 are uniformly distributed along the circumferential direction. The plurality of hollowed holes 13 formed in the wire guide wheel body 10 can reduce the mass of the wire guide wheel 1, further reduce the moment of inertia of the wire guide wheel 1, and weaken the friction force of the wire guide wheel 1 on the cutting wire 3, thereby reducing the breakage rate of the cutting wire 3. A plurality of fretwork holes 13 are along circumferencial direction evenly distributed for the mass distribution of wire wheel 1 is even, has avoided the unbalance of wire wheel 1, has further avoided the broken string of line of cut 3.

Illustratively, as shown in fig. 2 and 3, the wire guide wheel body 10 has 6 hollow holes 13, and the 6 hollow holes 13 are uniformly distributed along the circumferential direction.

The embodiment of the utility model also provides a cutting machine which comprises the wire guide wheel 1.

Compared with the prior art, the cutting wheel provided by the embodiment of the utility model has the same beneficial effects as the wire guide wheel 1, and the description is omitted here.

In the foregoing description of embodiments, the particular features, structures, materials, or characteristics may be combined in any suitable manner in any one or more embodiments or examples.

The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present invention, and all the changes or substitutions should be covered within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the appended claims.

Claims (10)

1. A wire guide wheel, characterized in that the wire guide wheel comprises: the wire guide wheel comprises a wire guide wheel body, wherein the circumferential surface of the wire guide wheel body is provided with an annular wear-resistant structure, and the annular wear-resistant structure is provided with an annular groove for accommodating a cutting wire; the groove bottom of the annular groove is an annular surface, and the axial width of the groove bottom is larger than the diameter of the cutting line.

2. The wire guide wheel of claim 1, wherein the axial width extent of the annular wear structure is reduced to greater than or equal to 5mm and less than 6 mm; the radial dimension of the annular wear-resistant structure is reduced to a range greater than or equal to 6.5mm and less than 10 mm.

3. The wire guide wheel according to claim 1, wherein the groove bottom has a width ranging from 2mm or more to 3mm or less, and the annular groove has a groove depth ranging from 0.5mm or more to 1mm or less.

4. The wire guide wheel of claim 1, wherein the width of the opening of the annular groove is greater than the width of the groove bottom.

5. The wire guide wheel of claim 1, wherein the angle between one side wall of the annular groove and the groove bottom is a first angle α, and the angle between the other side wall of the annular groove and the groove bottom is a second angle β; alpha is more than or equal to 105 degrees and less than or equal to 165 degrees, and beta is more than or equal to 105 degrees and less than or equal to 165 degrees.

6. The wire guide wheel according to claim 1, wherein the top both side walls of the annular groove have a thickness of 0.5mm or more and 1mm or less.

7. The wire guide wheel of claim 1, wherein the wire guide wheel body further has a plurality of mounting holes, the plurality of mounting holes being evenly distributed around a center of the wire guide wheel body.

8. The wire guide wheel of claim 7, wherein the mounting hole is an adjustment hole extending in a circumferential direction.

9. The wire guide wheel according to claim 1, wherein the wire guide wheel body further comprises a plurality of hollowed-out holes, and the plurality of hollowed-out holes are uniformly distributed along the circumferential direction.

10. A cutting machine comprising the wire guide wheel according to any one of claims 1 to 9.

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