CN215757583U

CN215757583U - Vacuum magnetron sputtering coating machine

Info

Publication number: CN215757583U
Application number: CN202122494319.2U
Authority: CN
Inventors: 曹倩
Original assignee: Tangshan Zhongtu Science And Technology Development Co ltd
Current assignee: Tangshan Zhongtu Science And Technology Development Co ltd
Priority date: 2021-10-15
Filing date: 2021-10-15
Publication date: 2022-02-08
Anticipated expiration: 2031-10-15

Abstract

The utility model discloses a vacuum magnetron sputtering film coating machine, which relates to the technical field of film coating machines and comprises a mounting plate and a film coating machine body, wherein a first fixing plate is fixedly mounted at the top of the mounting plate, a first sliding chute is formed in one side of the first fixing plate, a first sliding block is connected inside the first sliding chute in a sliding manner, a second fixing plate is fixedly connected to one side of the first sliding block, and a mounting groove is formed in the second fixing plate, the vacuum magnetron sputtering film coating machine has the beneficial effects that: through the rotation that utilizes the gear, can be provided with the rack with the limiting plate outside and mesh and be connected, can drive the limiting plate from this and remove, can block the limiting plate card into to the inside of spacing groove from this, accomplish spacing and fixed to the coating machine body, guaranteed the result of use of coating film work piece, protected the inside electronic component of coating machine, through utilizing the limiting plate to remove and drive the inside slip of second slider at the second spout simultaneously, can guarantee the stability when limiting plate slides.

Description

Vacuum magnetron sputtering coating machine

Technical Field

The utility model relates to the technical field of coating machines, in particular to a vacuum magnetron sputtering coating machine.

Background

Along with the improvement of the living standard of residents, the demand of people on glass products is higher and higher, glass develops from traditional transparent colorless to the present, various glass products appear in the market, in recent years, people use a vacuum coating machine to carry out coating treatment on the glass products to make the glass products look more beautiful, and the vacuum coating machine mainly refers to a type of coating which needs to be carried out under higher vacuum degree, and specifically comprises various types, including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering and the like. The main idea is to divide into evaporation and sputtering.

However, when the existing film plating machine works, certain vibration can be generated, the using effect of a coated workpiece is reduced, electronic components inside the film plating machine can be damaged seriously, certain economic loss is caused, and after the existing film plating machine is used for a long time, the outer side of the existing film plating machine can be covered with a layer of dust, the use of the film plating machine can be influenced, certain working efficiency is reduced, and the practicability is low.

SUMMERY OF THE UTILITY MODEL

Aiming at the defects of the prior art, the utility model provides a vacuum magnetron sputtering coating machine, which solves the problems in the background technology.

In order to achieve the purpose, the utility model is realized by the following technical scheme: the utility model provides a vacuum magnetron sputtering coating machine, includes mounting panel, coating machine body, the top fixed mounting of mounting panel has first fixed plate, first spout has been seted up to one side of first fixed plate, the inside sliding connection of first spout has first slider, one side fixedly connected with second fixed plate of first slider, the mounting groove has been seted up to the inside of second fixed plate, two second spouts have been seted up to the inside of second fixed plate and the one side that is located the mounting groove, the inside rotation of mounting groove is connected with the gear, one side fixedly connected with motor of gear.

Preferably, the inside of the two second sliding grooves is connected with a second sliding block in a sliding mode, one side of the second sliding block is fixedly connected with a limiting plate, limiting grooves are formed in two sides of the coating machine body, and the limiting grooves are matched with the limiting plates.

Preferably, a rack is arranged on the outer side of the limiting plate, and the gear is meshed with the rack.

Preferably, the inside of first spout rotates and is connected with the lead screw, the top fixed mounting of first fixed plate has motor body, motor body's output and lead screw fixed connection, the lead screw runs through first slider and with first slider threaded connection.

Preferably, the top fixed mounting of second fixed plate has the water tank, the inside fixed mounting of water tank has the water pump, output end fixedly connected with connects the water pipe when the water pump, the one end of connecting the water pipe runs through the water tank and extends to one side of water tank, the filling opening has been seted up at the top of water tank.

Preferably, one side fixedly connected with of water tank washs the case, the inside of wasing the case is provided with annular water pipe, annular water pipe and connection water pipe fixed connection.

Preferably, a second through groove is formed in the outer side of the second fixing plate, and a first through groove is formed in the outer side of the cleaning box.

The utility model provides a vacuum magnetron sputtering coating machine, which has the following beneficial effects:

1. this vacuum magnetron sputtering coating machine, through the rotation that utilizes the gear, can be provided with the rack with the limiting plate outside and mesh and be connected, can drive the limiting plate from this and remove, can block the limiting plate card into to the inside of spacing groove from this, accomplish spacing and fixed to the coating machine body, guaranteed the result of use of coating film work piece, protected the inside electronic component of coating machine, through utilizing the limiting plate to remove and drive the inside slip of second slider at the second spout simultaneously, stability when can guarantee the limiting plate and slide.

2. This vacuum magnetron sputtering coating machine can carry the inside water of water tank for annular water pipe through connecting the water pipe through utilizing the water pump, then utilizes annular water pipe to go out the washing of water ejection completion to the coating machine body, utilizes motor body to drive the lead screw and rotates, can drive first slider and slide, can adjust annular water pipe's position from this, has reduced the limitation of using, has guaranteed the rate of utilization of coating machine, has improved certain work efficiency.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a top view of a second retaining plate according to the present invention;

FIG. 3 is an enlarged view of the utility model at A in FIG. 1.

In the figure: 1. mounting a plate; 2. a film plating machine body; 3. a screw rod; 4. a first fixing plate; 5. a first slider; 6. a first chute; 7. a motor body; 8. an injection port; 9. a water pump; 10. connecting a water pipe; 11. a water tank; 12. an annular water pipe; 13. a first through groove; 14. a second through groove; 15. mounting grooves; 16. a second slider; 17. a second chute; 18. a limiting plate; 19. a second fixing plate; 20. a gear; 21. a limiting groove; 22. a rack; 23. and (5) cleaning the tank.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.

Referring to fig. 1 to 3, the present invention provides a technical solution: a vacuum magnetron sputtering coating machine comprises a mounting plate 1 and a coating machine body 2, wherein one side of a first slide block 5 is fixedly connected with a second fixing plate 19, a mounting groove 15 is formed inside the second fixing plate 19, two second slide grooves 17 are formed inside the second fixing plate 19 and positioned on one side of the mounting groove 15, a gear 20 capable of driving a limiting plate 18 to move is rotatably connected inside the mounting groove 15, one side of the gear 20 is fixedly connected with a motor, the insides of the two second slide grooves 17 are both slidably connected with a second slide block 16, the stability of the limiting plate 18 during sliding can be ensured by driving the second slide block 16 to slide inside the second slide grooves 17 by utilizing the movement of the limiting plate 18, one side of the second slide block 16 is fixedly connected with a limiting plate 18 capable of limiting the coating machine body 2, both sides of the coating machine body 2 are both provided with limiting grooves 21, and the limiting grooves 21 are matched with the limiting plate 18, the rack 22 is arranged on the outer side of the limiting plate 18, the gear 20 is meshed with the rack 22, the rack 22 can be meshed with the rack 22 arranged on the outer side of the limiting plate 18 through rotation of the gear 20, the limiting plate 18 can be driven to move, the limiting plate 18 can be clamped into the limiting groove 21, and limiting and fixing of the coating machine body 2 are achieved.

The top fixed mounting of mounting panel 1 has first fixed plate 4, first spout 6 has been seted up to one side of first fixed plate 4, the inside sliding connection of first spout 6 has first slider 5, the inside of first spout 6 rotates and is connected with lead screw 3, the top fixed mounting of first fixed plate 4 has can drive lead screw 3 and carry out pivoted motor body 7, motor body 7's output and lead screw 3 fixed connection, lead screw 3 run through first slider 5 and with 5 threaded connection of first slider, it slides to drive lead screw 3 through utilizing motor body 7, can drive first slider 5 from this and go up and down, can adjust the spacing position of coating machine body 2 through the lift that utilizes first slider 5, and can adjust annular water pipe 12 abluent position according to the circumstances.

Top fixed mounting of second fixed plate 19 has water tank 11, second logical groove 14 has been seted up in the outside of second fixed plate 19, first logical groove 13 has been seted up in the outside of wasing case 23, one side fixedly connected with of water tank 11 washs case 23, the inside of wasing case 23 is provided with annular water pipe 12, annular water pipe 12 with be connected water pipe 10 fixed connection, the inside fixed mounting of water tank 11 has water pump 9, output end fixedly connected with connects water pipe 10 when water pump 9, the one end of connecting water pipe 10 runs through water tank 11 and extends to one side of water tank 11, filling opening 8 has been seted up at the top of water tank 11, can carry the inside water of water tank 11 for annular water pipe 12 through connecting water pipe 10 through utilizing water pump 9, then utilize annular water pipe 12 to go out the washing of coating film machine body 2 with water, the rate of utilization of coating machine has been guaranteed, certain work efficiency has been improved.

In conclusion, when the vacuum magnetron sputtering coating machine is used, firstly, the motor body 7 is utilized to drive the screw rod 3 to rotate, the first slide block 5 can be driven to slide, so that the position of the second fixing plate 19 can be adjusted according to requirements, then, the gear 20 is utilized to rotate, the gear can be meshed and connected with the rack 22 arranged on the outer side of the limiting plate 18, so that the limiting plate 18 can be driven to move, the limiting plate 18 can be clamped into the limiting groove 21, the limiting and the fixing of the coating machine body 2 are completed, meanwhile, the second slide block 16 is driven to slide in the second sliding groove 17 by utilizing the movement of the limiting plate 18, the stability of the limiting plate 18 in the sliding process can be ensured, when the coating machine body 2 needs to be cleaned, the water in the water tank 11 can be conveyed to the annular water pipe 12 through the connecting water pipe 10, and then, the annular water pipe 12 is utilized to spray water to complete the cleaning of the coating machine body 2, utilize motor body 7 to drive lead screw 3 and rotate, can drive first slider 5 and slide, can accomplish the cleaning work to coating machine body 2 from this.

The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and equivalent alternatives or modifications according to the technical solution of the present invention and the inventive concept thereof should be covered by the scope of the present invention.

Claims

1. The utility model provides a vacuum magnetron sputtering coating machine, includes mounting panel (1), coating machine body (2), its characterized in that: the top fixed mounting of mounting panel (1) has first fixed plate (4), first spout (6) have been seted up to one side of first fixed plate (4), the inside sliding connection of first spout (6) has first slider (5), one side fixedly connected with second fixed plate (19) of first slider (5), mounting groove (15) have been seted up to the inside of second fixed plate (19), two second spouts (17) have been seted up to the inside of second fixed plate (19) and the one side that is located mounting groove (15), the inside rotation of mounting groove (15) is connected with gear (20), one side fixedly connected with motor of gear (20).

2. The vacuum magnetron sputtering coating machine according to claim 1, characterized in that: the inside equal sliding connection of two second spout (17) has second slider (16), one side fixedly connected with limiting plate (18) of second slider (16), spacing groove (21) have all been seted up to the both sides of coating machine body (2), limiting groove (21) and limiting plate (18) looks adaptation.

3. The vacuum magnetron sputtering coating machine according to claim 2, characterized in that: the outer side of the limiting plate (18) is provided with a rack (22), and the gear (20) is meshed with the rack (22).

4. The vacuum magnetron sputtering coating machine according to claim 1, characterized in that: the inside of first spout (6) is rotated and is connected with lead screw (3), the top fixed mounting of first fixed plate (4) has motor body (7), the output and lead screw (3) fixed connection of motor body (7), lead screw (3) run through first slider (5) and with first slider (5) threaded connection.

5. The vacuum magnetron sputtering coating machine according to claim 1, characterized in that: the top fixed mounting of second fixed plate (19) has water tank (11), the inside fixed mounting of water tank (11) has water pump (9), output end fixedly connected with connects water pipe (10) when water pump (9), the one end of connecting water pipe (10) runs through water tank (11) and extends to one side of water tank (11), filling opening (8) have been seted up at the top of water tank (11).

6. The vacuum magnetron sputtering coating machine according to claim 5, characterized in that: one side fixedly connected with of water tank (11) washs case (23), the inside of wasing case (23) is provided with annular water pipe (12), annular water pipe (12) and connecting water pipe (10) fixed connection.

7. The vacuum magnetron sputtering coating machine according to claim 6, characterized in that: a second through groove (14) is formed in the outer side of the second fixing plate (19), and a first through groove (13) is formed in the outer side of the cleaning box (23).