CN215719336U - Silencing device for vacuum pump outlet - Google Patents
Silencing device for vacuum pump outlet Download PDFInfo
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- CN215719336U CN215719336U CN202121467734.2U CN202121467734U CN215719336U CN 215719336 U CN215719336 U CN 215719336U CN 202121467734 U CN202121467734 U CN 202121467734U CN 215719336 U CN215719336 U CN 215719336U
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- wire mesh
- silencing
- shell
- mesh ring
- end cover
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Abstract
The utility model discloses a silencing device for an outlet of a vacuum pump, which comprises a shell, an upper end enclosure, a lower end enclosure, a first silencing mechanism and a second silencing mechanism, wherein the shell is provided with a first sealing surface and a second sealing surface; the shell is of a vertically arranged hollow cylindrical structure, an upper end enclosure and a lower end enclosure are respectively attached to the upper end and the lower end of the shell, and the shell is sealed and integrally formed; the inside of casing still is equipped with second silencing mechanism and first silencing mechanism from last to down respectively, and gas gets into the inside of casing from the low head, carries out the noise reduction treatment back through first silencing mechanism, second silencing mechanism in proper order, flows from the upper cover again. The combined silencing device has the advantages that the silencing cotton and the spoiler are combined in series to carry out combined silencing, so that the silencing effect is improved.
Description
Technical Field
The utility model relates to a silencer, in particular to a silencer for an outlet of a vacuum pump.
Background
In the semiconductor industry and the panel industry, a large amount of vacuum is applied to the manufacturing process, and the vacuum pump in the industry has the characteristics of high flow and high vacuum, so that the noise value of the outlet of the vacuum pump is up to more than 110dB, and the working environment is seriously polluted. The noise value of the outlet of the vacuum pump needs to be reduced to be lower than 90dB so as to improve the severe working environment and ensure the personal safety; meanwhile, the load of the vacuum pump is increased due to the fact that ultrahigh back pressure cannot be generated, and the vacuum pump is required to adapt to different medium conditions for air exhaust. Therefore, the above problems need to be solved.
Disclosure of Invention
The technical problem to be solved by the utility model is to provide a silencing device for the outlet of a vacuum pump, which performs combined silencing through the serial combination of silencing cotton and a spoiler, thereby improving the silencing effect.
In order to solve the technical problems, the utility model adopts the following technical scheme: the utility model discloses a silencing device for a vacuum pump outlet, which has the innovation points that: the device comprises a shell, an upper end enclosure, a lower end enclosure, a first silencing mechanism and a second silencing mechanism; the shell is of a vertically arranged hollow cylindrical structure, an upper end enclosure and a lower end enclosure are respectively attached to the upper end and the lower end of the shell, and the shell is sealed and integrally formed; the inside of casing still is equipped with second silencing mechanism and first silencing mechanism from last to down respectively, and gas gets into the inside of casing from the low head, carries out the noise reduction treatment back through first silencing mechanism, second silencing mechanism in proper order, flows from the upper cover again.
Preferably, the inner surfaces of the upper seal head and the lower seal head are both provided with arc transition surfaces which are respectively in smooth transition with the inner surface of the shell.
Preferably, the first silencing mechanism comprises an inner wire mesh ring, an outer wire mesh ring, an upper end cover, a lower end cover and silencing cotton; the inner wire mesh ring and the outer wire mesh ring are both cylindrical structures which are coaxial with the shell, and the outer wire mesh ring is sleeved on the inner wire mesh ring at intervals coaxial with the center; silencing cotton is sleeved between the outer wire mesh ring and the inner wire mesh ring coaxially, the lengths of the silencing cotton, the inner wire mesh ring and the outer wire mesh ring are consistent, and the silencing cotton, the inner wire mesh ring and the outer wire mesh ring are abutted and attached together respectively; an upper end cover and a lower end cover are fixedly sleeved on the upper end and the lower end of the outer wire mesh ring coaxially, the lower surface of the upper end cover is abutted and attached to the upper ends of the silencing cotton and the inner wire mesh ring respectively, and the upper surface of the lower end cover is abutted and attached to the lower ends of the silencing cotton and the inner wire mesh ring respectively; the lower surface of the lower end cover is also provided with a welding seat in a coaxial fit mode, the welding seat is of a hollow cylindrical structure, and the lower end cover is fixedly connected with the inner surface of the lower end cover through the welding seat.
Preferably, a cavity is formed between the outer circumferential surface of the outer wire mesh ring and the inner surface of the shell, and the upper surface of the upper end cover is arranged at the upper position of the middle inside the shell; the gas enters the inner part of the inner wire mesh ring through the lower end socket and the welding seat in sequence, and enters the cavity through the outer circumferential surface of the outer wire mesh ring after noise reduction is carried out for one time through the noise reduction cotton.
Preferably, a through hole is embedded in the middle of the upper surface of the upper end cover, vertically penetrates through the lower surface of the upper end cover and is communicated with the inside of the inner wire mesh ring; the lower end cover with still be equipped with the baffle with the horizontal laminating of axle center between the outer wire mesh circle, the baffle be with outer wire mesh circle assorted fretwork form circular structure, and respectively with the amortization cotton with the lower extreme of interior wire mesh circle supports tightly the laminating.
Preferably, the protection device comprises a telescopic rod, a spring, a first spring cover, a second spring cover and a gasket; telescopic rods are sleeved in the through holes of the upper end cover at intervals of the same axis, the diameter of each telescopic rod is smaller than that of each through hole, and the telescopic rods vertically slide up and down along the upper end cover; the upper end of the telescopic rod vertically extends upwards to form the upper surface of the upper end cover, and is clamped with the upper surface of the upper end cover through a gasket to limit the vertical downward movement of the telescopic rod; the lower end of the telescopic rod extends towards the inner direction of the inner wire mesh ring, and a first spring cover and a second spring cover are sequentially sleeved on the telescopic rod at intervals from top to bottom and coaxially, the outer diameter of the first spring cover is larger than the diameter of the through hole, the inner diameter of the first spring cover is larger than the diameter of the telescopic rod, and the first spring cover is fixedly connected with the lower surface of the upper end cover; the second spring cover is fixedly connected with the telescopic rod, a spring is further arranged between the first spring cover and the second spring cover, the spring is sleeved on the telescopic rod, and two ends of the spring are respectively abutted against and attached to the first spring cover and the second spring cover, and the vertical upward movement of the telescopic rod is limited.
Preferably, the gasket is matched with the telescopic rod, the diameter of the gasket is larger than that of the through hole, and the gasket is in sealing fit with the upper surface of the upper end cover.
Preferably, through compression spring, the telescopic link upward movement is with gasket jack-up, and gaseous through-hole from the upper end cover flows out and gets into second noise reduction mechanism and fall the noise.
Preferably, the second silencing mechanism comprises a plurality of spoilers; a plurality of spoilers are arranged in the shell from top to bottom in a parallel and staggered mode from top to bottom at intervals, and each spoiler is arranged right above the upper end cover; each spoiler is of a fan-shaped structure matched with the inside of the shell, and the arc length of each spoiler is three quarters of the inner circumference of the shell; the distance between every two adjacent spoilers is 50-70 mm, and the spoilers are fixedly connected with the inner surface of the shell respectively; the gas after once making an uproar falls enters into the second silencing mechanism from the cavity, reduces the velocity of flow through the spoiler and makes an uproar the back of making an uproar for the second time, flows out from the upper cover again.
Preferably, the device also comprises a supporting leg and a lifting lug; the lower part of the outer surface of the shell is also vertically provided with three support legs which are distributed in a triangular shape, and the upper end of each support leg is fixedly connected with the outer surface of the shell and supports the shell; lifting lugs are vertically arranged on the upper surface of the upper end enclosure in a bilateral symmetry mode.
The utility model has the beneficial effects that:
(1) the combined silencing device has the advantages that the silencing cotton and the spoiler are combined in series to carry out combined silencing, so that the silencing effect is improved;
(2) according to the utility model, the upper seal head and the lower seal head are both provided with arc transition surfaces, so that the gas resistance is reduced;
(3) the three supporting legs are arranged, so that the mounting and fixing are facilitated;
(4) by arranging the protection device, the utility model not only prevents the phenomenon that the work of the vacuum pump is influenced by overlarge back pressure in the inner wire mesh ring, but also avoids the phenomenon that the device is damaged by overlarge pressure in the inner wire mesh ring.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the embodiments are briefly described below, and it is obvious that the drawings in the following description are only some embodiments described in the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic structural view of a silencer for an outlet of a vacuum pump according to the present invention.
Fig. 2 is a sectional view showing an internal structure of the housing of fig. 1.
Fig. 3 is another view of fig. 2.
Fig. 4 is a schematic structural view of the protection device in fig. 3.
Wherein, 1-shell; 2-a support leg; 3-inner wire mesh ring; 4-outer wire mesh ring; 5-lower end cap; 6-a baffle plate; 7-upper end cover; 8-silencing cotton; 9-a protection device; 10-upper end enclosure; 11-lower end enclosure; 12-a spoiler; 13-lifting lugs; 14-a welding seat; 91-a telescopic rod; 92-a spring; 93-a first spring cover; 94-a gasket; 95-second spring cover.
Detailed Description
The technical solution of the present invention will be clearly and completely described by the following detailed description.
The utility model discloses a silencing device for a vacuum pump outlet, which comprises a shell 1, an upper end enclosure 10, a lower end enclosure 11, a first silencing mechanism and a second silencing mechanism, wherein the shell is provided with a first sealing surface and a second sealing surface; the specific structure is shown in fig. 1-3, the shell 1 is a hollow cylindrical structure which is vertically arranged, an upper end enclosure 10 and a lower end enclosure 11 are respectively attached to the upper end and the lower end of the shell, and the shell is sealed and integrally formed; wherein, the inner surfaces of the upper seal head 10 and the lower seal head 11 are both provided with arc transition surfaces and are in smooth transition with the inner surface of the shell 1 respectively, so that the gas resistance is reduced.
In the utility model, a second silencing mechanism and a first silencing mechanism are respectively arranged in the shell 1 from top to bottom, and gas enters the shell 1 from the lower end enclosure 11, is subjected to noise reduction treatment by the first silencing mechanism and the second silencing mechanism in sequence and then flows out from the upper end enclosure 10; the first silencing mechanism comprises an inner wire mesh ring 3, an outer wire mesh ring 4, an upper end cover 7, a lower end cover 5 and silencing cotton 8; as shown in fig. 1 to 3, the inner wire mesh ring 3 and the outer wire mesh ring 4 are both cylindrical structures coaxially arranged with the shell 1, and the outer wire mesh ring 4 is sleeved on the inner wire mesh ring 3 coaxially and at intervals; silencing cotton 8 is sleeved between the outer wire mesh ring 4 and the inner wire mesh ring 3 coaxially, the lengths of the silencing cotton 8, the inner wire mesh ring 3 and the outer wire mesh ring 4 are consistent, and the three are abutted and attached together respectively; an upper end cover 7 and a lower end cover 5 are fixedly sleeved on the upper end and the lower end of the outer wire mesh ring 4 coaxially, the lower surface of the upper end cover 7 is tightly abutted with the upper ends of the silencing cotton 8 and the inner wire mesh ring 3 respectively, and the upper surface of the lower end cover 5 is tightly abutted with the lower ends of the silencing cotton 8 and the inner wire mesh ring 3 respectively; the lower surface of the lower end cover 5 is also provided with a welding seat 14 in coaxial fit, the welding seat 14 is of a hollow cylindrical structure, and the lower end cover 5 is fixedly connected with the inner surface of the lower end socket 11 through the welding seat 14; wherein, a cavity is formed between the outer circumference surface of the outer wire mesh ring 4 and the inner surface of the shell 1, and the upper surface of the upper end cover 7 is arranged at the upper position of the middle inside the shell 1. In the utility model, gas enters the inner part of the inner wire mesh ring 3 through the lower end enclosure 11 and the welding seat 14 in sequence, is subjected to primary noise reduction through the noise reduction cotton 8, and then enters the cavity through the outer circumferential surface of the outer wire mesh ring 4.
As shown in fig. 1 to 3, a through hole is further embedded in the middle of the upper surface of the upper end cover 7, and the through hole vertically penetrates through the lower surface of the upper end cover 7 and is communicated with the inside of the inner wire mesh ring 3; still be equipped with baffle 6 with the horizontal laminating of axle center between lower extreme cover 5 and outer wire mesh circle 4, this baffle 6 be with outer wire mesh circle 4 assorted fretwork form circular structure, and respectively with the lower extreme of amortization cotton 8 and interior wire mesh circle 3 support tightly the laminating.
The protection device 9 comprises an expansion link 91, a spring 92, a first spring cover 93, a second spring cover 95 and a gasket 94; as shown in fig. 3 and 4, the through hole of the upper end cap 7 is also coaxially sleeved with an expansion link 91 at intervals, and the diameter of the expansion link 91 is smaller than that of the through hole and slides vertically along the upper end cap 7; the upper end of the telescopic rod 91 vertically extends upwards to form the upper surface of the upper end cover 7, and is clamped with the upper surface of the upper end cover 7 through a gasket 94 to limit the vertical downward movement of the telescopic rod 91; wherein, the gasket 94 is matched with the telescopic rod 91, the diameter of the gasket is larger than that of the through hole, and the gasket is in sealing fit with the upper surface of the upper end cover 7.
As shown in fig. 3 and 4, the lower end of the telescopic rod 91 extends towards the inner direction of the inner wire mesh ring 3, and a first spring cover 93 and a second spring cover 95 are further sleeved on the telescopic rod from top to bottom coaxially in sequence at intervals, the outer diameter of the first spring cover 93 is larger than the diameter of the through hole, the inner diameter of the first spring cover 93 is larger than the diameter of the telescopic rod 91, and the first spring cover is fixedly connected with the lower surface of the upper end cover 7; second spring cover 95 and telescopic link 91 fixed connection, and still be equipped with spring 92 between first spring cover 93 and second spring cover 95, spring 92 cup joints on telescopic link 91, and its both ends support the close laminating with first spring cover 93 and second spring cover 95 respectively to vertical upward movement to telescopic link 91 carries on spacingly. When the pressure in the shell 1 is too high and exceeds the processing capacity of the shell, the expansion link 91 moves upwards to jack up the gasket 94 by compressing the spring 92, and then the gas flows out of the through hole of the upper end cover 7 and enters the second silencing mechanism to reduce the noise, so that the phenomenon that the work of the vacuum pump is influenced by the too high back pressure in the inner wire mesh ring 3 is prevented, and the phenomenon that the device is damaged due to the too high pressure in the inner wire mesh ring 3 is also avoided.
The second silencing mechanism of the utility model comprises three spoilers 12; as shown in fig. 1 to 3, three spoilers 12 are further arranged in the interior of the housing 1 from top to bottom in a parallel staggered manner at intervals near the upper end thereof, and each spoiler 12 is arranged right above the upper end cover 7; each spoiler 12 is of a sector structure matched with the inside of the shell 1, and the arc length of each spoiler is three quarters of the inner circumference of the shell 1; the distance between every two adjacent spoilers 12 is 50-70 mm, and the spoilers are respectively fixedly connected with the inner surface of the shell 1; the gas after primary noise reduction enters the second noise reduction mechanism from the cavity, and flows out of the upper end enclosure 10 after the flow rate is reduced by the three spoilers 12 to perform secondary noise reduction.
According to the utility model, the three support legs 2 are vertically arranged at the lower position of the outer surface of the shell 1, the three support legs 2 are distributed in a triangular shape, and the upper end of each support leg 2 is fixedly connected with the outer surface of the shell 1 and supports the shell 1, so that the installation and fixation are facilitated; as shown in fig. 1, lifting lugs 13 are vertically arranged on the upper surface of the upper end enclosure 10 in a bilateral symmetry manner, so that the lifting is facilitated.
The working principle of the utility model is as follows:
(1) gas enters the inner part of the inner wire mesh ring 3 through the lower end socket 11 and the welding seat 14 in sequence, is subjected to primary noise reduction through the noise reduction cotton 8 and then enters the cavity through the outer circumferential surface of the outer wire mesh ring 4; then, the gas subjected to primary noise reduction enters the second noise reduction mechanism from the cavity, and flows out of the upper end enclosure 10 after the flow rate is reduced by the three spoilers 12 to carry out secondary noise reduction;
(2) when the pressure in the inner wire mesh ring 3 is too large and exceeds the processing capacity of the inner wire mesh ring, the expansion rod 91 moves upwards to jack up the gasket 94 through the compression spring 92, and then the gas flows out of the through hole of the upper end cover 7 to enter the second silencing mechanism to perform secondary noise reduction and then flows out of the upper end cover 10.
The utility model has the beneficial effects that:
(1) the combined silencing is carried out through the serial combination of the silencing cotton 8 and the spoiler 12, so that the silencing effect is improved;
(2) according to the utility model, the upper seal head 10 and the lower seal head 11 are both provided with arc transition surfaces, so that the gas resistance is reduced;
(3) the three support legs 2 are arranged, so that the installation and the fixation are convenient;
(4) according to the utility model, by arranging the protection device 9, the phenomenon that the work of the vacuum pump is influenced due to overlarge back pressure in the inner wire mesh ring 3 is prevented, and the phenomenon that the device is damaged due to overlarge pressure in the inner wire mesh ring 3 is also avoided.
The above-mentioned embodiments are merely descriptions of the preferred embodiments of the present invention, and do not limit the concept and scope of the present invention, and various modifications and improvements made to the technical solutions of the present invention by those skilled in the art should fall into the protection scope of the present invention without departing from the design concept of the present invention, and the technical contents of the present invention as claimed are all described in the technical claims.
Claims (10)
1. A silencing device for an outlet of a vacuum pump is characterized in that: the device comprises a shell, an upper end enclosure, a lower end enclosure, a first silencing mechanism and a second silencing mechanism; the shell is of a vertically arranged hollow cylindrical structure, an upper end enclosure and a lower end enclosure are respectively attached to the upper end and the lower end of the shell, and the shell is sealed and integrally formed; the inside of casing still is equipped with second silencing mechanism and first silencing mechanism from last to down respectively, and gas gets into the inside of casing from the low head, carries out the noise reduction treatment back through first silencing mechanism, second silencing mechanism in proper order, flows from the upper cover again.
2. A silencing apparatus for an outlet of a vacuum pump as set forth in claim 1, wherein: the inner surfaces of the upper seal head and the lower seal head are respectively provided with an arc transition surface which is in smooth transition with the inner surface of the shell.
3. A silencing apparatus for an outlet of a vacuum pump as set forth in claim 1, wherein: the first silencing mechanism comprises an inner wire mesh ring, an outer wire mesh ring, an upper end cover, a lower end cover and silencing cotton; the inner wire mesh ring and the outer wire mesh ring are both cylindrical structures which are coaxial with the shell, and the outer wire mesh ring is sleeved on the inner wire mesh ring at intervals coaxial with the center; silencing cotton is sleeved between the outer wire mesh ring and the inner wire mesh ring coaxially, the lengths of the silencing cotton, the inner wire mesh ring and the outer wire mesh ring are consistent, and the silencing cotton, the inner wire mesh ring and the outer wire mesh ring are abutted and attached together respectively; an upper end cover and a lower end cover are fixedly sleeved on the upper end and the lower end of the outer wire mesh ring coaxially, the lower surface of the upper end cover is abutted and attached to the upper ends of the silencing cotton and the inner wire mesh ring respectively, and the upper surface of the lower end cover is abutted and attached to the lower ends of the silencing cotton and the inner wire mesh ring respectively; the lower surface of the lower end cover is also provided with a welding seat in a coaxial fit mode, the welding seat is of a hollow cylindrical structure, and the lower end cover is fixedly connected with the inner surface of the lower end cover through the welding seat.
4. A silencing apparatus for an outlet of a vacuum pump as set forth in claim 3, wherein: a cavity is formed between the outer circumferential surface of the outer wire mesh ring and the inner surface of the shell, and the upper surface of the upper end cover is arranged at the upper position of the middle inside the shell; the gas enters the inner part of the inner wire mesh ring through the lower end socket and the welding seat in sequence, and enters the cavity through the outer circumferential surface of the outer wire mesh ring after noise reduction is carried out for one time through the noise reduction cotton.
5. A silencing apparatus for an outlet of a vacuum pump as set forth in claim 3, wherein: a through hole is embedded in the middle of the upper surface of the upper end cover and vertically penetrates through the lower surface of the upper end cover and is communicated with the inside of the inner wire mesh ring; the lower end cover with still be equipped with the baffle with the horizontal laminating of axle center between the outer wire mesh circle, the baffle be with outer wire mesh circle assorted fretwork form circular structure, and respectively with the amortization cotton with the lower extreme of interior wire mesh circle supports tightly the laminating.
6. A silencing apparatus for an outlet of a vacuum pump as set forth in claim 5, wherein: the protection device comprises a telescopic rod, a spring, a first spring cover, a second spring cover and a gasket; telescopic rods are sleeved in the through holes of the upper end cover at intervals of the same axis, the diameter of each telescopic rod is smaller than that of each through hole, and the telescopic rods vertically slide up and down along the upper end cover; the upper end of the telescopic rod vertically extends upwards to form the upper surface of the upper end cover, and is clamped with the upper surface of the upper end cover through a gasket to limit the vertical downward movement of the telescopic rod; the lower end of the telescopic rod extends towards the inner direction of the inner wire mesh ring, and a first spring cover and a second spring cover are sequentially sleeved on the telescopic rod at intervals from top to bottom and coaxially, the outer diameter of the first spring cover is larger than the diameter of the through hole, the inner diameter of the first spring cover is larger than the diameter of the telescopic rod, and the first spring cover is fixedly connected with the lower surface of the upper end cover; the second spring cover is fixedly connected with the telescopic rod, a spring is further arranged between the first spring cover and the second spring cover, the spring is sleeved on the telescopic rod, and two ends of the spring are respectively abutted against and attached to the first spring cover and the second spring cover, and the vertical upward movement of the telescopic rod is limited.
7. A silencing apparatus for an outlet of a vacuum pump as set forth in claim 6, wherein: the gasket with the telescopic link phase-match, and its diameter is greater than the diameter of through-hole, and with the upper surface sealing laminating of upper end cover.
8. A silencing apparatus for an outlet of a vacuum pump as set forth in claim 7, wherein: through compression spring, telescopic link upward movement is with gasket jack-up, and gaseous through-hole from the upper end cover flows out and gets into second noise reduction mechanism and fall the noise.
9. A silencing apparatus for an outlet of a vacuum pump as set forth in claim 8, wherein: the second silencing mechanism comprises a plurality of spoilers; a plurality of spoilers are arranged in the shell from top to bottom in a parallel and staggered mode from top to bottom at intervals, and each spoiler is arranged right above the upper end cover; each spoiler is of a fan-shaped structure matched with the inside of the shell, and the arc length of each spoiler is three quarters of the inner circumference of the shell; the distance between every two adjacent spoilers is 50-70 mm, and the spoilers are fixedly connected with the inner surface of the shell respectively; the gas after once making an uproar falls enters into the second silencing mechanism from the cavity, reduces the velocity of flow through the spoiler and makes an uproar the back of making an uproar for the second time, flows out from the upper cover again.
10. A silencing apparatus for an outlet of a vacuum pump as set forth in claim 1, wherein: the lifting device also comprises supporting legs and lifting lugs; the lower part of the outer surface of the shell is also vertically provided with three support legs which are distributed in a triangular shape, and the upper end of each support leg is fixedly connected with the outer surface of the shell and supports the shell; lifting lugs are vertically arranged on the upper surface of the upper end enclosure in a bilateral symmetry mode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121467734.2U CN215719336U (en) | 2021-06-30 | 2021-06-30 | Silencing device for vacuum pump outlet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121467734.2U CN215719336U (en) | 2021-06-30 | 2021-06-30 | Silencing device for vacuum pump outlet |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215719336U true CN215719336U (en) | 2022-02-01 |
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ID=80046237
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121467734.2U Active CN215719336U (en) | 2021-06-30 | 2021-06-30 | Silencing device for vacuum pump outlet |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215719336U (en) |
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2021
- 2021-06-30 CN CN202121467734.2U patent/CN215719336U/en active Active
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