CN215713388U - Etching sprays voltage-sharing device - Google Patents
Etching sprays voltage-sharing device Download PDFInfo
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- CN215713388U CN215713388U CN202122093726.2U CN202122093726U CN215713388U CN 215713388 U CN215713388 U CN 215713388U CN 202122093726 U CN202122093726 U CN 202122093726U CN 215713388 U CN215713388 U CN 215713388U
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Abstract
The utility model discloses an etching spraying pressure-equalizing device, which comprises: a pressure equalizing body, a first pressure equalizing cavity, a second pressure equalizing cavity, a third pressure equalizing cavity, at least one liquid inlet communicated with the inside and the outside of the first pressure equalizing cavity, a plurality of first liquid outlets communicated with the first pressure equalizing cavity and the second pressure equalizing cavity, a plurality of second liquid outlets communicated with the second pressure equalizing cavity and the third pressure equalizing cavity, a plurality of third liquid outlets communicated with the inside and the outside of the third pressure equalizing cavity, wherein the liquid inlet and the first liquid outlets are arranged in a staggered way, the plurality of second liquid outlets are arranged in a staggered way corresponding to the plurality of first liquid outlets, the plurality of third liquid outlets and the plurality of second liquid outlets are arranged in a staggered way corresponding to each other, and the third liquid outlets are all connected with a nozzle, the technical proposal is adopted, the spray pressure of each nozzle can be fully guaranteed to be consistent through repeated shunting and pressure equalizing, the liquid spraying amount is consistent, the force acting on the product is consistent in the same area, and the uniformity and the etching quality of the etching surface of the product are guaranteed.
Description
Technical Field
The utility model relates to the technical field of etching spraying correlation, in particular to an etching spraying pressure equalizing device.
Background
Etching (etching) is a technique in which material is removed using a chemical reaction or physical impact. The etching techniques can be classified into wet etching (wet etching) and dry etching (dry etching). Can be used for manufacturing printing concave-convex plates such as copperplate and zinc plate at the earliest time, and is also widely used for processing Weight-saving (Weight Reduction) instrument panels, nameplates, thin workpieces which are difficult to process by the traditional processing method, and the like; after continuous improvement and development of process equipment, the method can also be used for processing precision etching products of electronic thin-sheet parts in aviation, machinery and chemical industries, particularly in semiconductor manufacturing processes.
In continuous plate etching, the more uniform the etching rate, the more uniformly etched plates can be obtained. To meet this requirement, it is necessary to ensure that the etching solution is maintained in an optimum etching state throughout the etching process. The structure of the existing etching spray pipe is as follows: the spray tube is connected to the feed liquor union coupling, connect a plurality of nozzles on the spray tube, liquid gets into behind the spray tube, exist because of inertial force, the hydrojet main force is forward, there is serious vortex phenomenon in single spray tube liquid, the jet pressure of single nozzle is inconsistent on the spray tube, the spraying shape of single nozzle is inconsistent, the spraying shape of single nozzle can not last effectual keeping unanimous, thereby cause the unstability of etching effect, cause to produce the influence to etching surface homogeneity, and then influence the etching quality of product, can't carry out effectual prevention in normal production and overcome simultaneously.
SUMMERY OF THE UTILITY MODEL
In order to overcome the technical defects in the prior art, the utility model aims to provide an etching spray pressure equalizing device to solve the technical problems.
The technical scheme adopted by the utility model for solving the technical problem is as follows:
according to one aspect of the utility model, an etching spray pressure equalizing device is designed, comprising: the pressure equalizing body, be equipped with first pressure equalizing chamber, second pressure equalizing chamber, third pressure equalizing chamber, at least one inside and outside inlet of first pressure equalizing chamber of intercommunication, a plurality of first liquid outlet that communicate with first pressure equalizing chamber and second pressure equalizing chamber, a plurality of second liquid outlets that communicate with second pressure equalizing chamber and third pressure equalizing chamber, a plurality of third liquid outlets that communicate inside and outside of third pressure equalizing chamber, the inlet with first liquid outlet staggers the setting, and a plurality of second liquid outlets correspond the setting of staggering with a plurality of first liquid outlets, and a plurality of third liquid outlets correspond the setting of staggering with a plurality of second liquid outlets, the third liquid outlet all is connected with the nozzle.
By adopting the technical scheme, the liquid inlet and the first liquid outlet are arranged in a staggered manner, when liquid enters the first pressure equalizing cavity from the liquid inlet, the liquid can be subjected to first shunting to two sides, the liquid is prevented from directly outputting from the first liquid outlet after entering the first pressure equalizing cavity, the shunting effect is ensured, when the first liquid outlet and the second liquid outlet are arranged in a staggered manner, the liquid in the first pressure equalizing cavity can be subjected to second shunting to two sides after entering the second pressure equalizing cavity from the first liquid outlet, the liquid is prevented from directly outputting from the second liquid outlet after entering the second pressure equalizing cavity, the shunting effect is ensured, the pressure of each second liquid outlet is balanced, the liquid in the second pressure equalizing cavity can be subjected to third shunting to two sides after entering the third pressure equalizing cavity from the second liquid outlet, the liquid is prevented from directly outputting from the third liquid outlet after entering the third pressure equalizing cavity, the liquid is shunted once more, the pressure of each third liquid outlet is balanced, the spray pressure of each nozzle can be fully guaranteed to be consistent through repeated shunting and pressure equalizing, the liquid spray amount is consistent, the spray shapes of the nozzles are consistent, the spray shapes of the nozzles can be kept consistent and effectively, the force acting on the product is consistent on the same area, and the uniformity and the etching quality of the etching surface of the product are guaranteed.
In order to better solve the technical defects, the utility model also has a better technical scheme that:
in some embodiments, the first liquid outlet and the third liquid outlet are equal in number and size, and are smaller than the second liquid outlet.
The first liquid outlets are designed to have the same number and size as the third liquid outlets, so that the input quantity and the output quantity of liquid in the second pressure equalizing cavity and the third pressure equalizing cavity can be consistent, and a better pressure equalizing effect is realized; the size of the second liquid outlet is designed to be larger than the sizes of the first liquid outlet and the third liquid outlet, so that the liquid outlet amount is increased, the impact and disorder of liquid flow entering the third pressure equalizing cavity can be reduced, and the pressure equalizing effect with better performance is guaranteed.
In some embodiments, the first liquid outlets are arranged in a row, adjacent first liquid outlets are arranged at equal intervals, and the third liquid outlets and the first liquid outlets are arranged in one-to-one correspondence from top to bottom;
the second liquid outlets are arranged in a row, and the second liquid outlets are located below the middle part between two adjacent first liquid outlets in a one-to-one correspondence mode.
Therefore, the pressure equalizing effect is better, the spray pressure of each nozzle is further ensured to be consistent, and the spray liquid amount is consistent.
In some embodiments, the pressure equalizing body is provided with one liquid inlet, and the liquid inlet is positioned in the middle of the pressure equalizing body and is connected with a liquid inlet pipe.
In some embodiments, two liquid inlets are arranged on the pressure equalizing body, the distance from the liquid inlet at the left end of the pressure equalizing body to the left end of the pressure equalizing body is equal to the distance from the liquid inlet at the right end of the pressure equalizing body to the right end of the pressure equalizing body, and the sum of the distance from the liquid inlet at the left end of the pressure equalizing body to the left end of the pressure equalizing body and the distance from the liquid inlet at the right end of the pressure equalizing body to the right end of the pressure equalizing body is greater than the distance between the two liquid inlets.
In some embodiments, two liquid inlets are arranged on the pressure equalizing body, and the two liquid inlets are correspondingly arranged at two three-equal-point positions in the length direction of the pressure equalizing body.
Therefore, after liquid flows entering the first pressure equalizing cavity from the two liquid inlets are respectively divided into two flows, the two flows converge and collide with the middle of the first pressure equalizing cavity in the same time as the two flows collide with the left end and the right end of the first pressure equalizing cavity respectively, the impact and fluctuation of the liquid flows in the first pressure equalizing cavity can be reduced, and the influence on liquid pressure equalization is reduced.
In some embodiments, the middle part of the first pressure equalizing cavity is provided with a baffle plate connected with the inner side wall of the pressure equalizing body. From this, can divide into the first pressure-equalizing chamber of left end and the first pressure-equalizing chamber two parts of right-hand member with first pressure-equalizing chamber through the baffle, after the liquid stream that gets into the first pressure-equalizing chamber of left end and right-hand member from two inlets shunts into two strands respectively, two strands of liquid streams are the same with the time to first pressure-equalizing chamber tip to the time of baffle, can further reduce the fluctuation of liquid stream in first pressure-equalizing chamber, reduce the influence to the liquid pressure-equalizing.
In some embodiments, one of the two inlet ports is connected to a T-pipe joint and the other is connected to a right-angle pipe joint, and the T-pipe joint and the right-angle pipe joint are connected to the same inlet pipe.
In some embodiments, two liquid inlets are connected with right-angle pipe joints, the two right-angle pipe joints are correspondingly connected with two ends of a liquid inlet branch pipe, and the middle part of the liquid inlet branch pipe is connected with a liquid inlet pipe through a T-shaped pipe joint.
In some embodiments, the pressure equalizing body is mainly composed of a first pressure equalizing body, a second pressure equalizing body connected to a lower end of the first pressure equalizing body, and a third pressure equalizing body connected to a lower end of the second pressure equalizing body, or is integrally formed by 3D printing.
Drawings
Fig. 1 is a schematic structural view of an etching spray pressure equalizing device according to an embodiment of the present invention;
FIG. 2 is a schematic structural view of an etching spray pressure equalizing device according to another embodiment of the present invention;
FIG. 3 is a schematic structural view of an etching spray pressure equalizing device according to yet another embodiment of the present invention;
fig. 4 is a schematic structural view of an etching spray pressure equalizing device according to still another embodiment of the present invention;
reference numerals:
1. a pressure equalizing body; 11. a first pressure-equalizing chamber; 12. a second pressure-equalizing chamber; 13. a third pressure equalizing chamber; 21. a first pressure equalizing body; 22. a second pressure equalizing body; 23. a third pressure equalizing body; 14. a liquid inlet; 15. a first liquid outlet; 16. a second liquid outlet; 17. a third liquid outlet; 3. a liquid inlet pipe; 4. a nozzle; 5. a T-shaped pipe joint; 6. a right-angle pipe joint; 7. liquid inlet branch pipes; 8. a separator.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail with reference to the accompanying drawings in conjunction with the following detailed description. It should be understood that the description is intended to be exemplary only, and is not intended to limit the scope of the present invention. Moreover, in the following description, descriptions of well-known structures and techniques are omitted so as to not unnecessarily obscure the concepts of the present invention.
Example 1
Referring to fig. 1, an etching spray pressure equalizing device according to an embodiment of the present invention includes: the pressure equalizing body 1 is provided with a first pressure equalizing cavity 11, a second pressure equalizing cavity 12 and a third pressure equalizing cavity 13 on the pressure equalizing body 1. Further, the pressure equalizing body 1 mainly comprises a first pressure equalizing body 21, a second pressure equalizing body 22 connected to the lower end of the first pressure equalizing body 21 and a third pressure equalizing body 23 connected to the lower end of the second pressure equalizing body 22, the first pressure equalizing body 21 is of a hollow cylinder structure or a hollow cuboid structure, a first pressure equalizing cavity 11 is arranged inside the first pressure equalizing body 21, a first groove is arranged at the upper end of the second pressure equalizing body 22, the bottom of the first pressure equalizing body 21 and the first groove form a second pressure equalizing cavity 12, a second groove is arranged at the upper end of the third pressure equalizing body 23, and the bottom of the second pressure equalizing body 22 and the second groove form a third pressure equalizing cavity 13. In other embodiments, the pressure equalizing body 1 is integrally formed by 3D printing.
The first pressure equalizing body 21 is provided with at least one liquid inlet 14 for communicating the inside and the outside of the first pressure equalizing cavity 11, the liquid inlet 14 is arranged at the top or the side of the first pressure equalizing body 21, the preferred liquid inlet 14 is arranged at the top of the first pressure equalizing body 21 in the embodiment, the liquid inlet 14 can be provided with one, two, three, four or more liquid inlets 14, the preferred liquid inlet 14 in the embodiment is provided with one liquid inlet pipe 3 and is arranged at the middle position of the top of the first pressure equalizing body 21.
Be equipped with the first liquid outlet 15 with first pressure-equalizing body 11 and the intercommunication of second pressure-equalizing body 12 on the first pressure-equalizing body 21, first liquid outlet 15 sets up in first pressure-equalizing body 21 bottom, first liquid outlet 15 is circular structure, or semi-circular structure, or oval structure, or triangular structure, or quadrilateral structure, or pentagonal structure, the preferred first liquid outlet 15 of this embodiment is circular structure, first liquid outlet 15 can set up two, or three, or four, or five, or six, or more, the preferred first liquid outlet 15 of this embodiment sets up four, four first liquid outlets 15 set up one row, and the equidistance setting between adjacent.
Be equipped with the second liquid outlet 16 with second pressure-equalizing chamber 12 and third pressure-equalizing chamber 13 intercommunication on the second pressure-equalizing body 22, second liquid outlet 16 sets up in second pressure-equalizing body 22 bottom, second liquid outlet 16 is circular structure, or semi-circular structure, or oval structure, or triangular structure, or quadrilateral structure, or pentagonal structure, the preferred second liquid outlet 16 of this embodiment is circular structure, second liquid outlet 16 can set up two, or three, or four, or five, or six, or more, the preferred second liquid outlet 16 of this embodiment sets up threely, three second liquid outlet 16 sets up into one row, and the equidistance setting between adjacent. The three second liquid outlets 16 are arranged in a staggered manner corresponding to the four first liquid outlets 15, and further, the second liquid outlets 16 are located below the middle portion between two adjacent first liquid outlets 15 in a one-to-one correspondence manner.
The third pressure equalizing body 23 is provided with a third liquid outlet 17 communicated with the inside and the outside of the third pressure equalizing cavity 13, the third liquid outlet 17 is arranged at the bottom of the third pressure equalizing body 23, the number of the third liquid outlets 17 is equal to that of the first liquid outlets 15, the size of the third liquid outlet 17 is the same as that of the first liquid outlets 15, the size refers to the diameter or the length and the width, and the third liquid outlets 17 and the first liquid outlets 15 are arranged in a one-to-one correspondence manner from top to bottom.
The third liquid outlets 17 are all connected with nozzles 4.
The inlet port 14 is offset from the first outlet port 15.
The first outlet orifice 15 is smaller in size than the second outlet orifice 16.
The arrow direction in fig. 1 represents the flow direction of liquid, and liquid passes first pressure-equalizing chamber, a plurality of first liquid outlets, the chamber is pressure-equalizing to the second, a plurality of second liquid outlets, the chamber is pressure-equalizing to the third, get into the third liquid outlet and spout from the nozzle, can fully guarantee the pressure-equalizing of every nozzle through reposition of redundant personnel and voltage-equalizing many times unanimously, and the liquid jet volume is unanimous, and the dynamics that is used in on the product is unanimous on with the area, and then guarantees product etching surface's homogeneity and etching quality.
Example 2
Referring to fig. 2, the etching spray pressure equalizing device according to another embodiment of the present invention includes: the pressure equalizing body 1 is provided with a first pressure equalizing cavity 11, a second pressure equalizing cavity 12 and a third pressure equalizing cavity 13 on the pressure equalizing body 1. Further, the pressure equalizing body 1 mainly comprises a first pressure equalizing body 21, a second pressure equalizing body 22 connected to the lower end of the first pressure equalizing body 21 and a third pressure equalizing body 23 connected to the lower end of the second pressure equalizing body 22, the first pressure equalizing body 21 is of a hollow cylinder structure or a hollow cuboid structure, a first pressure equalizing cavity 11 is arranged inside the first pressure equalizing body 21, a first groove is arranged at the upper end of the second pressure equalizing body 22, the bottom of the first pressure equalizing body 21 and the first groove form a second pressure equalizing cavity 12, a second groove is arranged at the upper end of the third pressure equalizing body 23, and the bottom of the second pressure equalizing body 22 and the second groove form a third pressure equalizing cavity 13. In other embodiments, the pressure equalizing body 1 is integrally formed by 3D printing.
The first pressure equalizing body 21 is provided with at least one liquid inlet 14 for communicating the inside and the outside of the first pressure equalizing cavity 11, the liquid inlets 14 are arranged at the top or the side of the first pressure equalizing body 21, in this embodiment, preferably, the liquid inlets 14 are arranged at the top of the first pressure equalizing body 21, the liquid inlets 14 may be provided with one, two, three, four, or more, in this embodiment, preferably, the liquid inlets 14 are provided with two, the distance from the liquid inlet 14 at the left end of the two liquid inlets 14 to the left end of the first pressure equalizing body 21 is equal to the distance from the liquid inlet 14 at the right end to the right end of the first pressure equalizing body 21, the sum of the distance from the liquid inlet 14 at the left end of the two liquid inlets 14 to the left end of the first pressure equalizing body 21 and the distance from the liquid inlet 14 at the right end of the first pressure equalizing body 21 is greater than the distance between the two liquid inlets 14, one of the two liquid inlets 14 is connected with a T-shaped pipe joint 5, and the other is connected with a right-angled pipe joint 6, the T-shaped pipe joint 5 and the right-angle pipe joint 6 are connected to the same liquid inlet pipe 3.
Be equipped with the first liquid outlet 15 with first pressure-equalizing body 11 and the intercommunication of second pressure-equalizing body 12 on the first pressure-equalizing body 21, first liquid outlet 15 sets up in first pressure-equalizing body 21 bottom, first liquid outlet 15 is circular structure, or semi-circular structure, or oval structure, or triangular structure, or quadrilateral structure, or pentagonal structure, the preferred first liquid outlet 15 of this embodiment is circular structure, first liquid outlet 15 can set up two, or three, or four, or five, or six, or seven, or eight, or more, the preferred first liquid outlet 15 of this embodiment sets up eight, eight first liquid outlets 15 set up to one row, and the equidistance sets up between adjacent.
The second pressure equalizing body 22 is provided with a second liquid outlet 16 communicated with the second pressure equalizing cavity 12 and the third pressure equalizing cavity 13, the second liquid outlet 16 is arranged at the bottom of the second pressure equalizing body 22, the second liquid outlet 16 is in a circular structure, a semicircular structure, an elliptical structure, a triangular structure, a quadrangular structure or a pentagonal structure, in this embodiment, the second liquid outlet 16 is preferably in a circular structure, the second liquid outlet 16 can be provided with two, three, four, five, six, seven or more, in this embodiment, the second liquid outlet 16 is preferably provided with seven, and the seven second liquid outlets 16 are arranged in a row and are arranged at equal intervals between adjacent rows. The seven second liquid outlets 16 are arranged in a staggered manner corresponding to the eight first liquid outlets 15, and further, the second liquid outlets 16 are located below the middle portion between two adjacent first liquid outlets 15 in a one-to-one correspondence manner.
The third pressure equalizing body 23 is provided with a third liquid outlet 17 communicated with the inside and the outside of the third pressure equalizing cavity 13, the third liquid outlet 17 is arranged at the bottom of the third pressure equalizing body 23, the number of the third liquid outlets 17 is equal to that of the first liquid outlets 15, the size of the third liquid outlet 17 is the same as that of the first liquid outlets 15, the size refers to the diameter or the length and the width, and the third liquid outlets 17 and the first liquid outlets 15 are arranged in a one-to-one correspondence manner from top to bottom.
The third liquid outlets 17 are all connected with nozzles 4.
The inlet port 14 is offset from the first outlet port 15.
The first outlet orifice 15 is smaller in size than the second outlet orifice 16.
The arrow direction in fig. 2 represents the flow direction of liquid, and liquid passes first pressure-equalizing chamber, a plurality of first liquid outlets, the chamber is pressure-equalizing to the second, a plurality of second liquid outlets, the chamber is pressure-equalizing to the third, get into the third liquid outlet and spout from the nozzle, can fully guarantee the pressure-equalizing of every nozzle through reposition of redundant personnel and voltage-equalizing many times unanimously, and the liquid jet volume is unanimous, and the dynamics that is used in on the product is unanimous on with the area, and then guarantees product etching surface's homogeneity and etching quality.
EXAMPLE III
Referring to fig. 3, the etching spray pressure equalizing apparatus according to still another embodiment of the present invention includes: the pressure equalizing body 1 is provided with a first pressure equalizing cavity 11, a second pressure equalizing cavity 12 and a third pressure equalizing cavity 13 on the pressure equalizing body 1. Further, the pressure equalizing body 1 mainly comprises a first pressure equalizing body 21, a second pressure equalizing body 22 connected to the lower end of the first pressure equalizing body 21 and a third pressure equalizing body 23 connected to the lower end of the second pressure equalizing body 22, the first pressure equalizing body 21 is of a hollow cylinder structure or a hollow cuboid structure, a first pressure equalizing cavity 11 is arranged inside the first pressure equalizing body 21, a first groove is arranged at the upper end of the second pressure equalizing body 22, the bottom of the first pressure equalizing body 21 and the first groove form a second pressure equalizing cavity 12, a second groove is arranged at the upper end of the third pressure equalizing body 23, and the bottom of the second pressure equalizing body 22 and the second groove form a third pressure equalizing cavity 13. In other embodiments, the pressure equalizing body 1 is integrally formed by 3D printing.
Be equipped with at least one inlet 14 inside and outside intercommunication first pressure-equalizing chamber 11 on the first pressure-equalizing body 21, inlet 14 sets up at first pressure-equalizing body 21 top or lateral part, the preferred inlet 14 of this embodiment sets up at first pressure-equalizing body 21 top, inlet 14 can set up one, or two, or three, or four, or more, the preferred inlet 14 of this embodiment sets up two, two inlet 14 correspond and locate two three equipotential positions on the first pressure-equalizing body 21 length direction, the distance of inlet 14 of left end apart from the first pressure-equalizing body 21 left end equals with the distance apart from first pressure-equalizing body 21 middle part promptly, and the distance of inlet 14 of left end apart from the first pressure-equalizing body 21 left end equals with the distance of inlet 14 of right end apart from the first pressure-equalizing body 21 right end and apart from the distance of first pressure-equalizing body 21 middle part. Two inlet ports 14 all are connected with right angle coupling 6, and two right angle couplings 6 correspond and are connected with feed liquor branch pipe 7 both ends, and feed liquor branch pipe 7 middle part is connected with feed liquor pipe 3 through T type coupling 5.
Be equipped with the first liquid outlet 15 with first pressure-equalizing body 11 and the intercommunication of second pressure-equalizing body 12 on the first pressure-equalizing body 21, first liquid outlet 15 sets up in first pressure-equalizing body 21 bottom, first liquid outlet 15 is circular structure, or semi-circular structure, or oval structure, or triangular structure, or quadrilateral structure, or pentagonal structure, the preferred first liquid outlet 15 of this embodiment is circular structure, first liquid outlet 15 can set up two, or three, or four, or five, or six, or seven, or eight, or more, the preferred first liquid outlet 15 of this embodiment sets up eight, eight first liquid outlets 15 set up to one row, and the equidistance sets up between adjacent.
The second pressure equalizing body 22 is provided with a second liquid outlet 16 communicated with the second pressure equalizing cavity 12 and the third pressure equalizing cavity 13, the second liquid outlet 16 is arranged at the bottom of the second pressure equalizing body 22, the second liquid outlet 16 is in a circular structure, a semicircular structure, an elliptical structure, a triangular structure, a quadrangular structure or a pentagonal structure, in this embodiment, the second liquid outlet 16 is preferably in a circular structure, the second liquid outlet 16 can be provided with two, three, four, five, six, seven or more, in this embodiment, the second liquid outlet 16 is preferably provided with seven, and the seven second liquid outlets 16 are arranged in a row and are arranged at equal intervals between adjacent rows. The seven second liquid outlets 16 are arranged in a staggered manner corresponding to the eight first liquid outlets 15, and further, the second liquid outlets 16 are located below the middle portion between two adjacent first liquid outlets 15 in a one-to-one correspondence manner.
The third pressure equalizing body 23 is provided with a third liquid outlet 17 communicated with the inside and the outside of the third pressure equalizing cavity 13, the third liquid outlet 17 is arranged at the bottom of the third pressure equalizing body 23, the number of the third liquid outlets 17 is equal to that of the first liquid outlets 15, the size of the third liquid outlet 17 is the same as that of the first liquid outlets 15, the size refers to the diameter or the length and the width, and the third liquid outlets 17 and the first liquid outlets 15 are arranged in a one-to-one correspondence manner from top to bottom.
The third liquid outlets 17 are all connected with nozzles 4.
The inlet port 14 is offset from the first outlet port 15.
The first outlet orifice 15 is smaller in size than the second outlet orifice 16.
The arrow direction in fig. 3 represents the flow direction of liquid, and liquid passes first pressure-equalizing chamber, a plurality of first liquid outlets, the chamber is pressure-equalizing to the second, a plurality of second liquid outlets, the chamber is pressure-equalizing to the third, get into the third liquid outlet and spout from the nozzle, can fully guarantee the pressure of spouting of every nozzle unanimously through reposition of redundant personnel and voltage-equalizing many times, and the liquid jet volume is unanimous, and the dynamics that is used in on the product is unanimous on with the area, and then guarantees product etching surface's homogeneity and etching quality.
Example four
Referring to fig. 4, the etching spray pressure equalizing device according to still another embodiment of the present invention is different from the third embodiment in that: 11 middle parts in first pressure equalizing chamber are equipped with the baffle 8 of being connected with the 21 inside walls of first pressure equalizing body on the pressure equalizing body, baffle 8 divide into the first pressure equalizing chamber of left end and the first pressure equalizing chamber two parts of right-hand member with first pressure equalizing chamber 11, flow when getting into the first pressure equalizing chamber of left end and right-hand member from two inlets divides into two strands of backs respectively, two strands of liquid flow are the same with the time to first pressure equalizing chamber tip to baffle 8's time, can further reduce the fluctuation of liquid flow in first pressure equalizing chamber, reduce the influence to liquid pressure-equalizing.
The above description is only for the embodiments of the present invention, and it is obvious to those skilled in the art that various changes and modifications can be made without departing from the inventive concept of the present invention, and these changes and modifications are all within the scope of the present invention.
Claims (10)
1. The utility model provides an etching sprays voltage-sharing device which characterized in that includes: a pressure equalizing body (1), wherein a first pressure equalizing cavity (11), a second pressure equalizing cavity (12), a third pressure equalizing cavity (13), at least one liquid inlet (14) for communicating the inside and the outside of the first pressure equalizing cavity (11), a plurality of first liquid outlets (15) communicated with the first pressure equalizing cavity (11) and the second pressure equalizing cavity (12), a plurality of second liquid outlets (16) communicated with the second pressure equalizing cavity (12) and the third pressure equalizing cavity (13), and a plurality of third liquid outlets (17) for communicating the inside and the outside of the third pressure equalizing cavity (13) are arranged on the pressure equalizing body (1), the inlet (14) with first liquid outlet (15) stagger the setting, and a plurality of second liquid outlets (16) correspond with a plurality of first liquid outlets (15) and stagger the setting, and a plurality of third liquid outlets (17) correspond with a plurality of second liquid outlets (16) and stagger the setting, third liquid outlet (17) all are connected with nozzle (4).
2. An etching spray pressure equalizing device according to claim 1, wherein the first liquid outlets (15) and the third liquid outlets (17) are equal in number and size, and are smaller than the second liquid outlets (16).
3. The etching spray pressure equalizing device according to claim 1, wherein a plurality of first liquid outlets (15) are arranged in a row, and are arranged at equal intervals between adjacent first liquid outlets (15), and the third liquid outlets (17) are arranged in one-to-one correspondence with the first liquid outlets (15) from top to bottom;
the second liquid outlets (16) are arranged in a row, and the second liquid outlets (16) are located below the middle part between two adjacent first liquid outlets (15) in a one-to-one correspondence mode.
4. An etching spray pressure equalizing device according to any one of claims 1 to 3, characterized in that the pressure equalizing body (1) is provided with one of said liquid inlets (14), and the liquid inlet (14) is located in the middle of the pressure equalizing body (1) and is connected with a liquid inlet pipe (3).
5. An etching spray pressure equalizing device according to any one of claims 1 to 3, wherein two liquid inlets (14) are provided on the pressure equalizing body (1), the distance from the liquid inlet (14) at the left end of the two liquid inlets (14) to the left end of the pressure equalizing body (1) is equal to the distance from the liquid inlet (14) at the right end to the right end of the pressure equalizing body (1), and the sum of the distance from the liquid inlet (14) at the left end to the left end of the pressure equalizing body (1) and the distance from the liquid inlet (14) at the right end to the right end of the pressure equalizing body (1) is greater than the distance between the two liquid inlets (14).
6. The etching spraying pressure equalizing device according to any one of claims 1 to 3, wherein two liquid inlets (14) are provided on the pressure equalizing body (1), and the two liquid inlets (14) are correspondingly provided at two three-equal-point positions in the length direction of the pressure equalizing body (1).
7. An etching spray pressure equalizing device according to claim 6, characterized in that the middle of the first pressure equalizing chamber (11) is provided with a baffle plate (8) connected with the inner side wall of the pressure equalizing body (1).
8. An etching spray pressure equalizing device according to claim 5, characterized in that one of the two liquid inlets (14) is connected with a T-shaped pipe joint (5), the other is connected with a right-angle pipe joint (6), and the T-shaped pipe joint (5) and the right-angle pipe joint (6) are connected to the same liquid inlet pipe (3).
9. The etching spraying pressure equalizing device according to claim 6, wherein two liquid inlets (14) are connected with right-angle pipe joints (6), two right-angle pipe joints (6) are correspondingly connected with two ends of a liquid inlet branch pipe (7), and the middle part of the liquid inlet branch pipe (7) is connected with a liquid inlet pipe (3) through a T-shaped pipe joint (5).
10. An etching spray pressure equalizing device according to claim 1, wherein the pressure equalizing body (1) is mainly composed of a first pressure equalizing body (21), a second pressure equalizing body (22) connected to the lower end of the first pressure equalizing body (21), and a third pressure equalizing body (23) connected to the lower end of the second pressure equalizing body (22), or is integrally formed by 3D printing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122093726.2U CN215713388U (en) | 2021-08-31 | 2021-08-31 | Etching sprays voltage-sharing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122093726.2U CN215713388U (en) | 2021-08-31 | 2021-08-31 | Etching sprays voltage-sharing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215713388U true CN215713388U (en) | 2022-02-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122093726.2U Active CN215713388U (en) | 2021-08-31 | 2021-08-31 | Etching sprays voltage-sharing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215713388U (en) |
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2021
- 2021-08-31 CN CN202122093726.2U patent/CN215713388U/en active Active
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