CN215711881U

CN215711881U - Water vapor evaporation system with spiral steam pipe

Info

Publication number: CN215711881U
Application number: CN202121610214.2U
Authority: CN
Inventors: 宋立禄; 张海林; 滕玉朋; 刘国霞; 吴寄浩
Original assignee: Sairuida Intelligent Electronic Equipment Wuxi Co ltd
Current assignee: Sairuida Intelligent Electronic Equipment Wuxi Co ltd
Priority date: 2021-07-15
Filing date: 2021-07-15
Publication date: 2022-02-01
Anticipated expiration: 2031-07-15

Abstract

The utility model discloses a water vapor evaporation system with a spiral steam pipe, which comprises a water supply system and an air supply system, wherein the water supply system is used for providing quantitative pure water, the air supply system is used for providing quantitative carried gas, the water supply system and the air supply system are communicated with the steam pipe through an air-water tee joint, the pure water and the carried gas are mixed to form an air-water mixture, the steam pipe is spiral, and the steam pipe is surrounded by an evaporation heater and is used for providing a high-temperature environment for the steam pipe and vaporizing the air-water mixture. According to the utility model, the heating length of the steam pipe in the high-temperature area inside the evaporation heater is prolonged by 3 times through the spiral steam pipe, so that pure water can be easily vaporized completely under the condition that the same length and temperature parameters of the evaporation heater are not changed, and the vaporization effect is more perfect; meanwhile, the spiral steam pipe can shorten the length of the evaporation heater under the condition of ensuring that the entering trace pure water is completely vaporized, is more favorable for reducing the space of a water vapor evaporation system, and realizes the ingenuity and the miniaturization.

Description

Water vapor evaporation system with spiral steam pipe

Technical Field

The utility model relates to the field of semiconductors and photovoltaics, in particular to a water vapor evaporation system with a spiral steam pipe.

Background

In the prior art, substances such as boric acid and the like are gradually remained on the inner wall of a process chamber, a furnace opening and a furnace door of a BBr3 low-pressure diffusion furnace after a process, the substances belong to sticky properties, after a plurality of furnace times of process, the furnace door is stuck by the sticky substances remained and accumulated on the furnace opening, the furnace door cannot be normally opened, the same sticky substance residues exist on the inner wall of the process tube, the work is stopped under the condition that the boat in the process chamber is adhered, the heater is powered off to cool down, after the working temperature of 1050 ℃ is reduced to be close to the room temperature, the process tube cavity sleeved in the heater is disassembled, cleaned or replaced, at least two shifts of time are needed for one-time disassembly or replacement, wherein the cooling time needs 12-15 hours, the disassembly and replacement needs 2-3 hours, the productivity is wasted, the workload of workers is increased, and the process tube chamber (made of quartz material) can be damaged in the processes of disassembly, cleaning and replacement.

SUMMERY OF THE UTILITY MODEL

The utility model aims to solve the problems and designs a water vapor evaporation system with a spiral steam pipe.

The technical scheme of the utility model is that the water vapor evaporation system with the spiral steam pipe comprises a water supply system and an air supply system, wherein the water supply system is used for providing quantitative pure water, the air supply system is used for providing quantitative carrying gas, the water supply system and the air supply system are communicated with the steam pipe through an air-water tee joint and mix the pure water and the carrying gas to form an air-water mixture, the steam pipe is spiral, and the steam pipe is encircled by an evaporation heater and is used for providing a high-temperature environment for the steam pipe and vaporizing the air-water mixture.

As a further explanation of the utility model, the water supply system comprises a small micro-positive pressure water tank which is provided with a water level gauge and is sealed, the small micro-positive pressure water tank is communicated with a pressure control air inlet pipe through a small water tank air inlet pipe, a gap is reserved between the bottom end of the small water tank air inlet pipe and a preset highest water surface and is used for providing gas with preset pressure and extruding pure water in the small micro-positive pressure water tank, a small water tank water outlet pipe is further inserted into the small micro-positive pressure water tank, and a gap is reserved between the bottom end of the small water tank water outlet pipe and the bottom surface of the small micro-positive pressure water tank and is lower than a preset lowest water surface.

As a further explanation of the utility model, a small water tank water supplementing pipe is inserted into the micro-positive pressure small water tank, a valve is arranged on the small water tank water supplementing pipe, and a gap is reserved between the bottom end of the small water tank water supplementing pipe and the preset highest water level.

As a further explanation of the utility model, the outlet pipe of the small water tank is provided with a pressure gauge for adjusting the gas pressure of the inlet pipe of the small water tank and displaying the pressure value of the outlet pipe of the small water tank.

As a further explanation of the utility model, the water outlet pipe of the small water tank is provided with a water valve for controlling whether water needs to be fed or not, and a water flow meter for accurately controlling the water feeding quantity.

As a further elaboration of the utility model, the gas supply system comprises a carrier gas inlet pipe provided with a valve.

As a further explanation of the utility model, the gas-carrying air inlet pipe is also provided with a gas flow meter for accurately controlling the air inflow.

As a further explanation of the utility model, two ends of the evaporation heater are provided with heater heat preservation covers.

As a further illustration of the utility model, a housing is included for protecting the entire vapor evaporation system, the housing being supported by the support.

As a further explanation of the present invention, the other end of the steam pipe is connected with a process inlet pipe of the valve through a connecting pipe with a valve, and the process inlet pipe is communicated with the process chamber.

The steam evaporation system with the spiral steam pipe has the advantages that the structure of a steam evaporation core component is particularly optimized, the straight tubular steam pipe in the prior art is optimized into the spiral steam pipe, the heating length of the steam pipe in a high-temperature area in the evaporation heater is prolonged by 3 times, pure water can be easily evaporated completely under the condition that the length and temperature parameters of the same evaporation heater are unchanged, and the evaporation effect is more perfect; meanwhile, the spiral steam pipe can shorten the length of the evaporation heater under the condition of ensuring that the entering trace pure water is completely vaporized, is more favorable for reducing the space of a water vapor evaporation system, and realizes the ingenuity and the miniaturization; in addition, the heater heat preservation covers are arranged at the two ends of the evaporation heater, so that the temperature of the evaporation heating cavity in the evaporation heater is kept from losing, the temperature of the evaporation heater is fully utilized, energy is saved, and the length of the evaporation heater is shortened.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a partially enlarged schematic view of portion A of FIG. 1;

FIG. 3 is a partially enlarged schematic view of a portion B of FIG. 1;

in the figure, 101 is a small water tank with micro-positive pressure; 102. a small water tank air inlet pipe; 103. controlling the pressure of an air inlet pipe; 104. a water outlet pipe of the small water tank; 105. a small water tank water replenishing pipe; 106. a pressure gauge; 107. a water valve; 108. a water flow meter; 201. a carrier gas inlet pipe; 202. a valve for the air valve; 203. a gas flow meter; 3. a gas-water tee joint; 401. a steam pipe; 402. an evaporation heater; 403. a heater heat-insulating cover; 5. a housing; 6. a support; 7. a connecting pipe; 8. a process air inlet pipe; 9. a process chamber.

Detailed Description

The present invention will be described in detail with reference to the accompanying drawings, and as shown in fig. 1 to 3, a vapor evaporation system with a spiral vapor pipe includes a water supply system for supplying quantitative pure water and an air supply system for supplying quantitative carried gas, the water supply system and the air supply system are connected to a vapor pipe 401 through a gas-water tee 3 and mix the pure water and the carried gas to form a gas-water mixture, the vapor pipe 401 is spiral, and the vapor pipe 401 is surrounded by an evaporation heater 402 and is used for providing a high temperature environment for the vapor pipe 401 to vaporize the gas-water mixture.

Wherein, the water supply system comprises a closed micro-positive pressure small water tank 101 with a water level meter, pure water with a certain water level is contained in the water tank, the micro-positive pressure small water tank 101 can be supplemented with water by a small water tank water supplementing pipe 105, the small water tank water supplementing pipe 105 is provided with a valve which generally adopts an electric control valve for controlling water supplementing action or not, the micro-positive pressure small water tank 101 is not full of water, the water level is monitored by the water level meter (not marked in the figure), the micro-positive pressure small water tank 101 can preset the highest water level and the lowest water level, water supplementing is stopped when the water level is lower than the preset lowest water level, water supplementing is stopped when the water level is higher than the preset highest water level, a small height space (small volume) is reserved above the water level at the preset highest water level, the small volume space is filled with micro-positive pressure gas (using a little amount of gas) by a small water tank gas inlet pipe 102, the small water tank gas inlet pipe 102 is positioned above the preset highest water level in the micro-positive pressure small water tank 101, and the micro-positive pressure gas entering the small space at the upper part of the water level generates pressure to the water level, because a gap is reserved between the bottom end of a small water tank outlet pipe 104 inserted into the micro-positive pressure small water tank 101 and the bottom surface of the micro-positive pressure small water tank 101 and is lower than the preset lowest water level, water inside the micro-positive pressure small water tank 101 is pressed into the small water tank outlet pipe 104 from the bottom so as to continuously output pure water, the small water tank outlet pipe 104 is provided with a pressure gauge, a pressure control air inlet pipe 103 arranged at the upper part of a small water tank air inlet pipe 102 is matched for adjusting the gas pressure of the small water tank air inlet pipe 102, the pressure value of the small water tank outlet pipe 104 is displayed, the small water tank outlet pipe 104 is also provided with a water valve 107 and a water flow meter 108, and the water inlet and the accurate water inlet quantity are respectively controlled.

The gas supply system comprises a carrying gas inlet pipe 201, wherein the carrying gas inlet pipe 201 is provided with a valve 202 for controlling whether carrying gas is supplied or not, and the carrying gas is generally nitrogen; the carrier gas intake pipe 201 is also provided with a gas flow meter 203 for accurately controlling the intake air amount.

Pure water and carrier gas are mixed by the gas-water three-way pipe 3 to form a gas-water mixture, and the gas-water mixture is quantitatively supplied to the spiral steam pipe 401.

Because the heating areas of the spiral steam pipe 401 are all located in the evaporation heater 402 and surrounded by the high temperature of the evaporation heater, trace quantitative water enters the spiral steam pipe 401 along with the carrying gas in the carrying gas, and in the whole process of entering and passing through the spiral steam pipe 401, the entering and passing gas-water mixture containing the quantitative trace water and the carrying gas is heated by the high temperature of the evaporation heater 402 so that the trace water is completely vaporized to form steam which is provided for external equipment.

In addition, the utility model provides an embodiment of external equipment, which is a process chamber in the semiconductor industry, the other end of the steam pipe 401 is connected with a process gas inlet pipe 8 of a valve through a connecting pipe 7 with the valve, and the process gas inlet pipe 8 is communicated with the process chamber 9, so that steam can selectively enter the process chamber 9 independently or along with process gas.

As an optimized embodiment, the heater heat preservation covers 403 are arranged at the two ends of the evaporation heater 402, so that the temperature of the evaporation heating cavity inside the evaporation heater 402 is better kept from losing, the temperature of the evaporation heater 402 is better fully utilized, energy is saved, and the length of the evaporation heater 402 is also effectively shortened.

The utility model also comprises a casing 5 for protecting the entire vapour evaporation system, said casing 5 being supported by means of brackets 6, for aesthetic and protection device considerations.

Application scenarios:

1. the method is used for boron diffusion process equipment such as a BBr3 low-pressure diffusion furnace, and aims to prevent the phenomenon that the normal use of the equipment is affected by excessive viscous substances after the internal residual chemical substances are accumulated after the process, the method comprises the steps of stopping process air inlet after each normal boron diffusion process is finished, opening a furnace door, taking out a crystal boat and a wafer, closing the furnace door, performing a water cleaning function on a process chamber of a cavity, opening a valve, introducing quantitative micro-water vapor through a vapor evaporation system, and performing a cleaning function after the process chamber 9 is filled with the vapor and the chemical substances remained on the inner wall after the just finished normal boron diffusion process are contacted to realize a neutralization function, so that the water cleaning function of the process chamber 9 is realized, or according to experience, the cleaning function can be performed for once after the boron diffusion process is finished for several times, so as to avoid the generation of residual substances inside the process chamber 9 and at the pipe orifice, the unclean effect in the furnace door and the process chamber is adhered, the disassembly and cleaning period of the process chamber is prolonged, the utilization rate of equipment is improved, the productivity is improved, and the workload of disassembling and replacing the process pipe is reduced;

2. the process gas which is used for supplying water vapor in a wet oxygen process in an oxidation furnace or a BCI3 low-pressure boron diffusion furnace, wherein the water vapor contains oxygen, the water vapor is accurately controlled to enter, the oxygen content required by a wet oxygen growth oxidation film is met, and the growth of an oxygen-containing film on the surface of a wafer is realized.

The technical solutions described above only represent the preferred technical solutions of the present invention, and some possible modifications to some parts of the technical solutions by those skilled in the art all represent the principles of the present invention, and fall within the protection scope of the present invention.

Claims

1. The utility model provides a take steam vaporization system of spiral steam pipe, its characterized in that includes water supply system for provide ration pure water, and air supply system, be used for providing ration and carry gas, water supply system and air supply system pass through air water tee bend (3) and steam pipe (401) intercommunication to with pure water and carry gas mixture formation air water mixture, steam pipe (401) are the heliciform, steam pipe (401) are embraced by evaporative heater (402), are used for giving steam pipe (401) provide high temperature environment, vaporization air water mixture.

2. The water vapor evaporation system with the spiral steam pipe as claimed in claim 1, wherein the water supply system comprises a small water tank (101) with a water level gauge and a closed micro-positive pressure, the small water tank (101) with the micro-positive pressure is communicated with a pressure control air inlet pipe (103) through a small water tank air inlet pipe (102), a gap is reserved between the bottom end of the small water tank air inlet pipe (102) and a preset highest water surface for providing gas with preset pressure to extrude pure water in the small water tank (101) with the micro-positive pressure, a small water tank water outlet pipe (104) is further inserted into the small water tank (101) with the micro-positive pressure, and a gap is reserved between the bottom end of the small water tank water outlet pipe (104) and the bottom surface of the small water tank (101) with the micro-positive pressure and is lower than the preset lowest water surface.

3. The steam evaporation system with the spiral steam pipe as claimed in claim 2, wherein a small water tank water replenishing pipe (105) is further inserted into the small positive pressure water tank (101), the small water tank water replenishing pipe (105) is provided with a valve, and a gap is reserved between the bottom end of the small water tank water replenishing pipe (105) and a preset highest water level.

4. The steam evaporation system with the spiral steam pipe as claimed in claim 2, wherein the outlet pipe (104) of the small water tank is provided with a pressure gauge (106) for adjusting the gas pressure of the inlet pipe (102) of the small water tank and displaying the pressure value of the outlet pipe (104) of the small water tank.

5. Steam evaporation system with spiral steam pipe according to claim 2, characterized in that the small water tank outlet pipe (104) is provided with a water valve (107) for controlling whether water inflow is required and a water flow meter (108) for accurately controlling the water inflow.

6. Steam evaporation system with spiral steam pipe according to claim 1, characterized in that the gas supply system comprises a carrier gas inlet pipe (201), and the carrier gas inlet pipe (201) is provided with a valve (202).

7. The steam evaporation system with the spiral steam pipe as claimed in claim 6, wherein the gas carrying inlet pipe (201) is further provided with a gas flow meter (203) for accurately controlling the amount of inlet gas.

8. The steam evaporation system with spiral steam pipe as claimed in claim 1, wherein both ends of the evaporation heater (402) are provided with heater insulation covers (403).

9. Steam evaporation system with spiral steam pipe according to claim 1, further comprising a casing (5) for protecting the whole steam evaporation system, said casing (5) being supported by means of brackets (6).

10. Steam evaporation system with spiral steam pipe according to claim 1, characterized in that the other end of the steam pipe (401) is connected with the process inlet pipe (8) with valve through the connecting pipe (7) with valve, the process inlet pipe (8) is connected with the process chamber (9).