CN215696308U

CN215696308U - Overflow structure of cleaning machine tank

Info

Publication number: CN215696308U
Application number: CN202122407468.0U
Authority: CN
Inventors: 王进; 张进元; 王永利; 胡宏峰
Original assignee: Shanghai Junzhu Precision Machinery Co ltd
Current assignee: Shanghai Youdian Green Energy Automation Co ltd
Priority date: 2021-10-08
Filing date: 2021-10-08
Publication date: 2022-02-01
Anticipated expiration: 2031-10-08

Abstract

The utility model discloses a cleaning machine tank overflow structure, and relates to the field of silicon wafer cleaning. This cleaning machine cell body overflow structure, multiunit circulation cell body is installed in proper order to the side of feeding cell body, and the overflow launder has been seted up at the junction top of feeding cell body and circulation cell body, installs the inlet tube on the inside wall of feeding cell body, and the play basin has been seted up to the terminal side of circulation cell body. This cleaning machine cell body overflow structure carries out the water injection to feeding cell body inside through the inlet tube, and after the water that feeding cell body inside was filled up, water can be through the overflow launder to the inside flow of circulation cell body, and water can flow into inside the overflow box through going out the basin after constantly pouring into simultaneously to finally outwards discharge through the pipe in the water and then carry out the inside that the secondary circulation entered into the inlet tube, guarantee that the comparatively clear water source in upper strata can circulation cycle use many times.

Description

Overflow structure of cleaning machine tank

Technical Field

The utility model relates to the technical field of silicon wafer cleaning, in particular to a tank overflow structure of a cleaning machine.

Background

In the process of silicon wafer production, the silicon wafer must be strictly cleaned, trace pollution can also cause device failure, the cleaning aims to remove surface pollution impurities, including organic matters and inorganic matters, some impurities are attached in an atomic state or an ionic state, some impurities exist on the surface of the silicon wafer in a film form or a particle form, and the methods for removing the pollution include physical cleaning and chemical cleaning.

At present, most of all the integrated cleaning machines are used for cleaning, and in the cleaning process, a plurality of water tanks are usually adopted for cleaning different types of impurities on the surfaces of the integrated cleaning machines step by step, but no circulation is arranged between the plurality of cleaning tanks, so that the water source waste is serious when the integrated cleaning machines are cleaned, and a corresponding water saving system is lacked, so that the problem needs to be solved by providing a cleaning machine tank body overflow structure.

SUMMERY OF THE UTILITY MODEL

Technical problem to be solved

Aiming at the defects of the prior art, the utility model discloses a tank body overflow structure of a cleaning machine, which aims to solve the problems in the background technology.

(II) technical scheme

In order to achieve the purpose, the utility model is realized by the following technical scheme: cleaning machine cell body overflow structure, including the feeding cell body, the side of feeding cell body installs multiunit circulation cell body in proper order, the overflow launder has been seted up at the junction top of feeding cell body and circulation cell body, install the inlet tube on the inside wall of feeding cell body, the terminal side of circulation cell body has seted up out the basin.

Preferably, the middle parts of the lower surfaces of the feeding groove body and the circulation groove body are provided with a slag discharging groove, the lower surface of one end of the slag discharging groove is fixedly provided with a water guide pipe, and the other end of the slag discharging groove is fixedly provided with a water blocking cover.

Preferably, the outer fixed surface of the water retaining cover is provided with a locking hinge, one end of the locking hinge is movably hinged with a locking rod, and the other end of the locking hinge is provided with a locking clamping groove.

Preferably, the side surface of the circulation tank body is fixedly connected with an aeration pipe, the inner bottom of the circulation tank body is fixedly provided with an aeration nozzle, the aeration pipe is communicated with the inside of the aeration nozzle, and the top of the aeration nozzle is provided with a baffle.

Preferably, the bottom of feeding cell body and circulation cell body is inside all fixedly mounted to have the electrothermal tube, the equal fixedly connected with shower in side of feeding cell body and circulation cell body, fixedly connected with mounting bar on the inside wall of feeding cell body and circulation cell body.

Preferably, the overflow box is fixedly installed at the tail end of the flow conversion groove body, the water outlet groove is opposite to the overflow box, and the outer surface of the overflow box is fixedly connected with a downpipe.

The utility model discloses a cleaning machine groove body overflow structure, which has the following beneficial effects:

1. this cleaning machine cell body overflow structure, carry out the water injection to feeding cell body inside through the inlet tube, after the water of feeding cell body inside is filled, water can flow to the circulation cell body inside through the overflow launder, finally make feeding cell body and circulation cell body inside all fill water, water can flow into inside the overflow box through the play basin after constantly pouring into simultaneously, and finally outside discharge then carry out the inside that the secondary moved into the inlet tube through the pipe in the water, guarantee that the comparatively clear water source in upper strata can the circulation many times use, practice thrift the water source.

2. This cleaning machine cell body overflow structure, in the cleaning process, the impurity of wasing out can final deposit to arrange the sediment inslot portion, and this moment is through locating external water source from the aqueduct, then will lock the hinge and take off, open the manger plate lid, will deposit outside the discharge of the impurity of arranging sediment inslot portion under the water conservancy diversion effect of intaking of aqueduct this moment, conveniently carry out the impurity clearance.

Drawings

FIG. 1 is a schematic view of the overall front structure of the present invention;

FIG. 2 is a schematic view of the overall backside structure of the present invention;

FIG. 3 is a schematic view of the internal structure of the feed trough and the circulation trough of the present invention;

FIG. 4 is a schematic view of the lower surface structures of the feed trough and the circulation trough of the present invention;

FIG. 5 is an enlarged view of the portion A of FIG. 4 according to the present invention.

In the figure: 1. a feed trough body; 2. a circulation trough body; 3. a water conduit; 4. a water inlet pipe; 5. an overflow trough; 6. a baffle plate; 7. a slag discharge groove; 8. an electric heating tube; 9. an aeration pipe; 10. mounting a bar; 11. an aeration nozzle; 12. a locking lever; 13. a water blocking cover; 14. locking the hinge; 15. locking the clamping groove; 16. a shower pipe; 17. a water outlet groove; 18. a downpipe; 19. an overflow box.

Detailed Description

The embodiment of the utility model discloses a tank body overflow structure of a cleaning machine, which comprises a feeding tank body 1, wherein a plurality of groups of circulation tank bodies 2 are sequentially arranged on the side surface of the feeding tank body 1, an overflow groove 5 is formed in the top of the joint of the feeding tank body 1 and the circulation tank body 2, a water inlet pipe 4 is arranged on the inner side wall of the feeding tank body 1, and a water outlet groove 17 is formed in the side surface of the tail end of the circulation tank body 2, as shown in figures 1-5.

Referring to the attached drawings 3-5, the middle parts of the lower surfaces of the feeding tank body 1 and the circulation tank body 2 are provided with a slag discharging groove 7, the lower surface of one end of the slag discharging groove 7 is fixedly provided with a water guide pipe 3, the other end of the slag discharging groove 7 is fixedly provided with a water blocking cover 13, the outer surface of the water blocking cover 13 is fixedly provided with a locking hinge 14, one end of the locking hinge 14 is movably hinged with a locking rod 12, the other end of the locking hinge 14 is provided with a locking clamping groove 15, in the cleaning process, the cleaned impurities are finally deposited inside the slag discharging groove 7, at the moment, an external water source is arranged from the water guide pipe 3, then the locking hinge 14 is taken down, the water blocking cover 13 is opened, and at the moment, the impurities deposited inside the slag discharging groove 7 are discharged outwards under the water inlet flow guide effect of the water guide pipe 3.

Referring to the attached drawing 3, the aeration pipe 9 is fixedly connected to the side surface of the circulation tank body 2, the aeration nozzle 11 is fixedly mounted at the inner bottom of the circulation tank body 2, the aeration pipe 9 is communicated with the inside of the aeration nozzle 11, the baffle 6 is mounted at the top of the aeration nozzle 11, and aeration equipment is connected to the outer end of the aeration pipe 9, so that the aeration nozzle 11 performs aeration cleaning on the inside of the circulation tank body 2 from the bottom.

Referring to the attached drawings 1 and 3, the electric heating pipe 8 is fixedly mounted inside the bottom ends of the feeding tank body 1 and the circulation tank body 2, the spraying pipe 16 is fixedly connected to the side faces of the feeding tank body 1 and the circulation tank body 2, the mounting strip 10 is fixedly connected to the inner side wall of the feeding tank body 1 and the circulation tank body 2, and the water body is heated through the electric heating pipe 8, so that the temperature of the water body rises, and the cleaning effect is improved.

Referring to the attached drawings 1-2, an overflow box 19 is fixedly installed at the tail end of the circulation groove body 2, a water outlet groove 17 is opposite to the overflow box 19, a downpipe 18 is fixedly connected to the outer surface of the overflow box 19, when the feeding groove body 1 and the circulation groove body 2 are filled with water, the water flows into the overflow box 19 through the water outlet groove 17 after being injected continuously, and finally is discharged outwards through the downpipe 18 and then flows for the second time to enter the water inlet pipe 4 for internal recycling.

The working principle is as follows: when the device is used, the inserting sheet flower basket stored with silicon wafers is placed inside the feeding groove body 1, water is injected into the feeding groove body 1 through the water inlet pipe 4, after the water in the feeding groove body 1 is filled, the water flows into the flowing groove body 2 through the overflow groove 5, finally, the feeding groove body 1 and the flowing groove body 2 are filled with water, meanwhile, the water flows into the overflow box 19 through the water outlet groove 17 after being injected continuously, is discharged outwards through the water falling pipe 18 finally, then is subjected to secondary flowing, enters the water inlet pipe 4, and meanwhile, the inserting sheet flower basket is sequentially cleaned step by step inside the flowing groove bodies 2;

and be connected with aeration equipment through the outer end at aeration pipe 9 in the in-process that uses, make aeration shower nozzle 11 from the inside aeration cleaning that carries out of bottom convection cell body 2, simultaneously the aeration in-process heats the water through electrothermal tube 8, make the water temperature rise, promote the cleaning performance, simultaneously in the cleaning process, the impurity of wasing out can finally deposit inside slag discharging groove 7, this moment through locating external water source from aqueduct 3, then take off locking hinge 14, open retaining cover 13, at this moment with the inside impurity of deposit at slag discharging groove 7 outwards discharge under the water conservancy diversion effect of intaking of aqueduct 3.

The foregoing shows and describes the general principles and broad features of the present invention and advantages thereof. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the utility model as claimed. The scope of the utility model is defined by the appended claims and equivalents thereof.

Claims

1. Cleaning machine cell body overflow structure, including feeding tank body (1), its characterized in that: the improved feeding device is characterized in that a plurality of groups of circulation groove bodies (2) are sequentially mounted on the side face of the feeding groove body (1), an overflow groove (5) is formed in the top of the joint of the feeding groove body (1) and the circulation groove bodies (2), a water inlet pipe (4) is mounted on the inner side wall of the feeding groove body (1), and a water outlet groove (17) is formed in the side face of the tail end of the circulation groove body (2).

2. The cleaning machine tank body overflow structure of claim 1, wherein: the lower surface middle part of feeding cell body (1) and circulation cell body (2) has all been seted up and has been arranged sediment groove (7), the one end fixed surface of arranging sediment groove (7) installs aqueduct (3), the other end fixed mounting of arranging sediment groove (7) has water retaining cover (13).

3. The cleaning machine tank body overflow structure of claim 2, wherein: the outer fixed surface of retaining cover (13) installs locking hinge (14), the one end activity of locking hinge (14) articulates there is check lock pole (12), locking draw-in groove (15) have been seted up to the other end of locking hinge (14).

4. The cleaning machine tank body overflow structure of claim 1, wherein: the side fixedly connected with aeration pipe (9) of circulation cell body (2), the interior bottom fixed mounting of circulation cell body (2) has aeration shower nozzle (11), aeration pipe (9) and aeration shower nozzle (11) inside are linked together, baffle (6) are installed at the top of aeration shower nozzle (11).

5. The cleaning machine tank body overflow structure of claim 1, wherein: the bottom of feeding cell body (1) and circulation cell body (2) is inside equal fixed mounting to have electrothermal tube (8), the equal fixedly connected with shower (16) in side of feeding cell body (1) and circulation cell body (2), fixedly connected with mounting bar (10) on the inside wall of feeding cell body (1) and circulation cell body (2).

6. The cleaning machine tank body overflow structure of claim 1, wherein: an overflow box (19) is fixedly installed at the tail end of the circulation groove body (2), the water outlet groove (17) is opposite to the overflow box (19), and a downpipe (18) is fixedly connected to the outer surface of the overflow box (19).