CN215668291U - Ingot casting protection device of polycrystalline ingot furnace - Google Patents
Ingot casting protection device of polycrystalline ingot furnace Download PDFInfo
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- CN215668291U CN215668291U CN202121686866.4U CN202121686866U CN215668291U CN 215668291 U CN215668291 U CN 215668291U CN 202121686866 U CN202121686866 U CN 202121686866U CN 215668291 U CN215668291 U CN 215668291U
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Abstract
The utility model relates to the field of polycrystalline silicon ingot furnaces, in particular to an ingot casting protection device of a polycrystalline silicon ingot furnace, which comprises a bottom plate, wherein a quartz crucible is arranged above the bottom plate, a protective plate is also arranged on the bottom plate and surrounds the quartz crucible, a cover plate is also arranged on the protective plate above the quartz crucible, a hanging wall is also arranged above the bottom plate and is fixed with the protective plate through a plurality of side heaters, two graphite electrodes are also arranged on the hanging wall and are fixed with the hanging wall through a CFC screw and a ceramic screw, the CFC screw and the ceramic screw both penetrate through the hanging wall, the bottom of the ceramic screw is arranged below the CFC screw, and a top heater is also fixed on the hanging wall above the cover plate. This device can avoid apron and top heater contact to cause the phenomenon of striking sparks, effectively reduces the ingot casting process and causes the blowing out because of the phenomenon of striking sparks, reduces the occurence of failure of ingot casting process, reduces loss of property, improves production efficiency.
Description
[ technical field ] A method for producing a semiconductor device
The utility model relates to the field of polycrystalline silicon ingot furnaces, in particular to an ingot casting protection device of a polycrystalline ingot furnace.
[ background of the utility model ]
The polycrystalline silicon ingot furnace is silicon raw material re-melting equipment and is used for producing solar grade polycrystalline silicon ingots at low cost. The method has the function that the polycrystalline silicon raw material is heated, melted, directionally crystallized, annealed and cooled according to a set process to form the polycrystalline silicon ingot growing along a certain direction.
In the polycrystalline silicon ingot casting process, the cover plate is often deformed due to high temperature and touches the heater to cause the ignition phenomenon, thereby causing furnace shutdown and property loss.
The utility model is provided for overcoming the defects of the prior art.
[ Utility model ] content
The utility model aims to overcome the defects of the prior art and provide an ingot casting protection device of a polycrystalline ingot casting furnace, wherein each graphite electrode is provided with an insulating ceramic bolt, so that the ignition phenomenon in the ingot casting process is effectively protected, the furnace shutdown caused by the ignition phenomenon in the ingot casting process is effectively reduced, the accident in the ingot casting process is reduced, the property loss is reduced, the production efficiency is improved, and the damage to a thermal field is reduced.
The utility model can be realized by the following technical scheme:
the utility model discloses an ingot casting protection device of a polycrystal ingot casting furnace, which comprises a bottom plate, wherein a quartz crucible is arranged above the bottom plate, a protection plate is also arranged on the bottom plate, the protection plate is arranged around the quartz crucible, a cover plate is also arranged on the protection plate above the quartz crucible, a hanging wall is also arranged above the bottom plate, the hanging wall is fixed with the protection plate through a plurality of side heaters, two graphite electrodes are also arranged on the hanging wall, the graphite electrodes are fixed with the hanging wall through a CFC screw and a ceramic screw, the CFC screw and the ceramic screw both penetrate through the hanging wall, the bottom of the ceramic screw is arranged below the CFC screw, and a top heater is also fixed on the hanging wall above the cover plate. The silicon crystal is placed in a quartz crucible, the side heater and the top heater are electrified through the two graphite electrodes, the side heater and the top heater heat the silicon crystal in the quartz crucible, the silicon crystal forms liquid silicon, the liquid silicon forms a silicon ingot after being cooled, the graphite electrodes are fixed through the ceramic screw, the bottom of the ceramic screw penetrates through the hanging wall, the bottom of the ceramic screw is arranged below the CFC screw, after the cover plate is heated and deformed, the cover plate can only be contacted with the ceramic screw because the bottom of the ceramic screw is arranged below the CFC screw, the ignition phenomenon caused by the contact of the cover plate and the top heater can be avoided because the ceramic cannot conduct electricity, the furnace shutdown caused by the ignition phenomenon in the ingot casting process is effectively reduced, the accident occurrence in the ingot casting process is reduced, the property loss is reduced, the production efficiency is improved, and the damage to a thermal field is reduced.
Preferably, the top heater and the side heater are both electrically connected to a power supply through the two graphite electrodes.
Preferably, the bottom plate is further fixed on the support column through a DS block.
Compared with the prior art, the utility model has the following advantages:
the device can effectively reduce the blowing-out of the furnace caused by the phenomenon of striking sparks in the ingot casting process, reduce the accident in the ingot casting process, reduce property loss, improve the production efficiency and reduce the damage to a thermal field.
[ description of the drawings ]
The following detailed description of embodiments of the utility model is provided in conjunction with the appended drawings, in which:
FIG. 1 is a schematic structural view of the present invention;
in the figure: 1. a graphite electrode; 2. a ceramic screw; 3. a CFC screw; 4. hanging a wall; 5. silicon; 6. a cover plate; 7. a top heater; 8. a side heater; 9. a quartz crucible; 10. a guard plate; 11. a base plate; 12. a DS block; 13. a support pillar;
[ detailed description ] embodiments
The embodiments of the present invention will be described in detail below with reference to the accompanying drawings:
as shown in figure 1, the utility model discloses an ingot casting protection device of a polycrystal ingot furnace, which comprises a bottom plate 11, wherein a quartz crucible 9 is arranged above the bottom plate 11, a protective plate 10 is further arranged on the bottom plate 11, the protective plate 10 is arranged around the quartz crucible 9, a cover plate 6 is further arranged on the protective plate 10 above the quartz crucible 9, a hanging wall 4 is further arranged above the bottom plate 11, the hanging wall 4 is fixed with the protective plate 10 through a plurality of side heaters 8, two graphite electrodes 1 are further arranged on the hanging wall 4, the graphite electrodes 1 are fixed with the hanging wall 4 through CFC screws 3 and ceramic screws 2, the CFC screws 3 and the ceramic screws 2 penetrate through the hanging wall 4, the bottoms of the ceramic screws 2 are arranged below the CFC screws 3, and top heaters 7 are further fixed on the hanging wall 4 above the cover plate 6. Placing the silicon crystal in a quartz crucible 9, electrifying a side heater 8 and a top heater 7 through two graphite electrodes 1, heating the silicon crystal in the quartz crucible 9 by the side heater 8 and the top heater 7, forming liquid silicon 5 by the silicon crystal, cooling the liquid silicon 5 to form a silicon 5 ingot, and the graphite electrode 1 is fixed by the ceramic screw 2, the bottom of the ceramic screw 2 passes through the hanging wall 4 and the bottom of the ceramic screw 2 is arranged below the CFC screw 3, when the cover plate 6 is deformed by heat, because the bottom of the ceramic screw 2 is arranged below the CFC screw 3, the cover plate 6 can only contact with the ceramic screw 2, because the pottery can not electrically conduct, can avoid apron 6 and 7 contacts of top heater to cause the phenomenon of striking sparks, effectively reduce the ingot casting process and cause the blowing out because of the phenomenon of striking sparks, reduce the occurence of failure of ingot casting process, reduce loss of property, improve production efficiency, reduce the damage to the thermal field.
Wherein, the top heater 7 and the side heater 8 are both electrically connected with a power supply through the two graphite electrodes 1.
Wherein the bottom plate 11 is further fixed on the support column 13 by the DS block 12.
The above description is only a preferred embodiment of the present invention, and it should be noted that a person skilled in the art can make various changes, modifications, substitutions and alterations to the embodiments without departing from the technical principles of the present invention, and such changes, modifications, substitutions and alterations should also be regarded as the protection scope of the present invention.
Claims (3)
1. The utility model provides a polycrystal ingot furnace ingot casting protection device, contains the bottom plate, its characterized in that: the improved heating furnace is characterized in that a quartz crucible is arranged above the bottom plate, a protective plate is further arranged on the bottom plate, the protective plate is arranged around the quartz crucible, a cover plate is further arranged on the protective plate above the quartz crucible, a hanging wall is further arranged above the bottom plate, the hanging wall is fixed with the protective plate through a plurality of side heaters, two graphite electrodes are further arranged on the hanging wall, the graphite electrodes are fixed with the hanging wall through a CFC screw and a ceramic screw, the CFC screw and the ceramic screw penetrate through the hanging wall, the bottom of the ceramic screw is arranged below the CFC screw, and a top heater is further fixed on the hanging wall above the cover plate.
2. The ingot protection device of the polycrystalline ingot furnace of claim 1, wherein: the top heater and the side heater are both electrically connected with a power supply through the two graphite electrodes.
3. The ingot protection device of the polycrystalline ingot furnace of claim 1, wherein: the bottom plate is further fixed on the supporting column through the DS block.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121686866.4U CN215668291U (en) | 2021-07-23 | 2021-07-23 | Ingot casting protection device of polycrystalline ingot furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121686866.4U CN215668291U (en) | 2021-07-23 | 2021-07-23 | Ingot casting protection device of polycrystalline ingot furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215668291U true CN215668291U (en) | 2022-01-28 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121686866.4U Active CN215668291U (en) | 2021-07-23 | 2021-07-23 | Ingot casting protection device of polycrystalline ingot furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215668291U (en) |
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2021
- 2021-07-23 CN CN202121686866.4U patent/CN215668291U/en active Active
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