CN215656638U

CN215656638U - Semiconductor chip scribing device with washing function

Info

Publication number: CN215656638U
Application number: CN202120878451.0U
Authority: CN
Inventors: 葛光华; 吴浩栋; 曾兰英; 罗江萍; 刘磊
Original assignee: Wuxi Xintong Electronic Technology Co ltd
Current assignee: Wuxi Xintong Electronic Technology Co ltd
Priority date: 2021-04-25
Filing date: 2021-04-25
Publication date: 2022-01-28
Anticipated expiration: 2031-04-25

Abstract

The utility model relates to the technical field of scribing, in particular to a semiconductor chip scribing device with a flushing function. The utility model aims to solve the technical problem that the existing grinding wheel scribing device has no function of washing a semiconductor chip. In order to solve the technical problem, the utility model provides a semiconductor chip scribing device with a flushing function, which mainly comprises an adjusting mechanism and a flushing mechanism, wherein a second stepping motor is started to drive a screw rod to drive a threaded sleeve to move up and down through the working principle of the screw rod, so that a flushed chip is driven to ascend to a fan, the quick air drying is facilitated, and the scribing working efficiency is improved; the chip can be clamped by the two electric push rods, the chip can be washed without dead angles by the aid of the third stepping motor, the chip can be rotated by the aid of the third stepping motor, and the rotary spray head is matched with the chip, so that the surface cleanliness of the chip is guaranteed.

Description

Semiconductor chip scribing device with washing function

Technical Field

The utility model relates to the technical field of scribing, in particular to a semiconductor chip scribing device with a flushing function.

Background

The earliest scribing method and diamond scribing method are the first generation scribing technology developed in the industry, scribing separates the chip into individual particles along the aligned position, and the scribing device is a device for completing the scribing work, and at present, a laser scribing device and a grinding wheel scribing device are mainly used, but the existing grinding wheel scribing device has many problems or defects;

the existing grinding wheel scribing device has no function of washing a semiconductor chip, impurities exist on the semiconductor chip which is not scribed, and the service life of a grinding wheel and a motor thereof can be shortened if the scribing work is directly performed without cleaning.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a semiconductor chip scribing device with a flushing function, which solves the problems in the background technology by arranging an adjusting mechanism and a flushing mechanism.

In order to achieve the purpose, the utility model provides the following technical scheme: the utility model provides a semiconductor chip scribing device with washing function, includes scribing case and bearing, the horizontal fixed mounting of inside half department of scribing case has the diaphragm, the top fixed mounting of diaphragm has first sharp module, the removal end fixed mounting of first sharp module has the scribing board, fixed mounting has the straight line module of second on the inside roof of scribing case, the removal end fixed mounting of the straight line module of second has first step motor, the output of first step motor has linked firmly the scribing board, fixed mounting has adjustment mechanism and washing mechanism between the inside both sides board of scribing case, from last fixed mounting down has fan and water pump on the dorsal scale board of scribing incasement portion, the fixed cover of output of water pump has connect rotatory nozzle, the input of water pump runs through scribing case dorsal scale board.

The adjusting mechanism comprises adjusting boxes, a slide rod, a screw rod, a second stepping motor and an electric push rod, the adjusting boxes are vertically and fixedly arranged on two side plates in the scribing box, one side of each adjusting box, which is close to the other side, is of a hollow structure, a sliding rod is vertically and fixedly connected between the inner top plate and the bottom plate of one of the adjusting boxes, the outer wall of the sliding rod is movably sleeved with a sliding sleeve, a screw rod is vertically and rotatably connected between the inner top plate and the bottom plate of the other adjusting box through two bearings, the top end of the screw rod movably penetrates through the top plate of the adjusting box, and is fixedly connected with the output end of a second stepping motor which is fixedly arranged at the bottom of the transverse plate, the outer wall screw thread that the lead screw is located the regulating box inside has cup jointed the thread bush, the equal horizontal fixedly connected with electric putter in a side that thread bush and sliding sleeve are close to each other, two fixed mounting has the mechanism of washing between electric putter's the output.

The washing mechanism comprises a third stepping motor, clamping rods, a mounting plate and a chip, wherein one of the third stepping motor is fixedly mounted at the output end of the electric push rod, the clamping rods are fixedly connected at the output end of the third stepping motor, the other clamping rods are fixedly mounted at the output end of the electric push rod, one side face, close to the third stepping motor, of the mounting plate is rotatably connected with the clamping rods through bearings, and the chip is clamped between the clamping rods.

The arrangement of the base plate and the non-slip mat is used for better fixing the scribing box, preferably, the base plate is fixedly arranged at the bottom of the scribing box, and the non-slip mat is fixedly arranged at the bottom of the base plate.

The pipeline is arranged so that water after washing can flow out of the scribing box, and preferably, the pipeline penetrates through the bottom of one side plate of the scribing box horizontally.

The door bodies are arranged to take out or put in the chip, preferably, three door bodies are arranged on the front side surface of the scribing box from top to bottom.

The shockproof rubber pad is arranged for shock absorption, preferably, the shockproof rubber pad is fixedly arranged between the second stepping motor and the transverse plate.

The vertical arrangement is used for carrying out all-dimensional scribing on the chip, and preferably, the second linear module and the first linear module are located at positions vertical to each other.

Compared with the prior art, the utility model has the beneficial effects that:

(1) the scribing machine is provided with the adjusting mechanism, and the second stepping motor is started to drive the screw rod to drive the threaded sleeve to move up and down through the working principle of the screw rod, so that a washed chip is driven to ascend to a fan, the scribing machine is convenient to air and dry quickly, and the scribing working efficiency is improved;

(2) the chip washing device is provided with the washing mechanism, the chip can be clamped through the two electric push rods, the chip can be rotated through the third stepping motor, and the chip can be washed without dead angles by three hundred and sixty degrees by matching with the rotary spray head, so that the surface cleanliness of the chip is ensured, and compared with the prior art, the service life of the device can be prolonged.

Drawings

FIG. 1 is a schematic sectional front view of the present invention;

FIG. 2 is a schematic right sectional view of the present invention;

FIG. 3 is an enlarged view of the structure at A in FIG. 1 according to the present invention;

fig. 4 is a schematic perspective view of the present invention.

In the figure: 1. a scribing box; 2. an electric push rod; 3. a sliding sleeve; 4. a slide bar; 5. an adjusting box; 6. a transverse plate; 7. a first linear module; 8. a second linear module; 9. a first stepper motor; 10. a grinding wheel; 11. scribing a plate; 12. a second stepping motor; 13. a fan; 14. a bearing; 15. a screw rod; 16. a chip; 17. a threaded sleeve; 18. a water pipe; 19. rotating the spray head; 20. a water pump; 21. a clamping rod; 22. a third step motor; 23. a door body; 24. and (7) mounting the plate.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

The first embodiment is as follows:

according to the figures 1-4, a semiconductor chip scribing device with a washing function comprises a scribing box 1 and a bearing 14, a transverse plate 6 is horizontally and fixedly installed at one half of the inside of the scribing box 1, a first linear module 7 is fixedly installed at the top of the transverse plate 6, a scribing plate 11 is fixedly installed at the moving end of the first linear module 7, a second linear module 8 is fixedly installed on the top plate inside the scribing box 1, a first stepping motor 9 is fixedly installed at the moving end of the second linear module 8, the output end of the first stepping motor 9 is fixedly connected with the scribing plate 11, an adjusting mechanism and a washing mechanism are fixedly installed between the two side plates inside the scribing box 1, a fan 13 and a water pump 20 are fixedly installed on the back side plate inside the scribing box 1 from top to bottom, a rotary spray nozzle 19 is fixedly connected to the output end of the water pump 20, and the input end of the water pump 20 penetrates through the back side plate of the scribing box 1.

The adjusting mechanism comprises adjusting boxes 5, sliding rods 4, a screw rod 15, a second stepping motor 12 and an electric push rod 2, the adjusting boxes 5 are vertically and fixedly installed on two side plates inside the scribing box 1, one side, close to each other, of each adjusting box 5 is of a hollow structure, the sliding rod 4 is vertically and fixedly connected between an inner top plate and a bottom plate of one adjusting box 5, a sliding sleeve 3 is movably sleeved on the outer wall of each sliding rod 4, the screw rod 15 is vertically and rotatably connected between the inner top plate and the bottom plate of the other adjusting box 5 through two bearings 14, the top end of the screw rod 15 movably penetrates through the top plate of the adjusting box 5 and is fixedly connected with the output end of the second stepping motor 12, the second stepping motor 12 is fixedly installed at the bottom of the transverse plate 6, a thread sleeve 17 is sleeved on the outer wall thread of the screw rod 15 inside the adjusting box 5, and one side face, close to each other, of the thread sleeve 17 and the sliding sleeve 3, is horizontally and fixedly connected with the electric push rod 2, a flushing mechanism is fixedly arranged between the output ends of the two electric push rods 2.

Opening the lowest door body 23, putting the chip 16 between the two clamping rods 21, starting the two electric push rods 2, enabling the two clamping rods 21 to firmly clamp the chip 16 by the output ends of the two electric push rods 2, closing the door body 23, after flushing is completed by the flushing mechanism, starting the second stepping motor 12, enabling the second stepping motor 12 to drive the screw rod 15, enabling the screw sleeve 17 sleeved on the outer wall of the screw rod 15 to move upwards by rotation of the screw rod 15, so as to drive the chip 16 to move upwards together, enabling the sliding sleeve 3 to slide upwards on the outer wall of the sliding rod 4 along with the screw rod until the chip 16 reaches the fan 13, then starting the fan 13, enabling air blown by the fan 13 to accelerate air drying of the chip 16, after air drying is completed, opening the middle door body 23, starting the two electric push rods 2 to loosen the chip 16, thereby taking out the chip 16, and placing the chip 16 on the top of the scribing plate 11, and starting the first stepping motor 9, carrying the rotary grinding wheel 10 by the first stepping motor 9 to scribe the chip 16, and finally starting the second linear module 8 and the first linear module 7 according to a certain period, so as to scribe the surface of the chip 16 in multiple directions.

The backing plate and the non-slip mat are arranged to better fix the scribing box 1, specifically, the backing plate is fixedly installed at the bottom of the scribing box 1, and the non-slip mat is fixedly installed at the bottom of the backing plate.

The door 23 is provided to allow the chip 16 to be taken out or put in, and specifically, three doors 23 are provided from top to bottom on the front side of the scribing box 1.

The shockproof rubber pad is arranged for shock absorption, and particularly, the shockproof rubber pad is fixedly arranged between the second stepping motor 12 and the transverse plate 6.

The vertical arrangement is for performing all-directional scribing on the chip 16, and specifically, the second linear module 8 and the first linear module 7 are located at positions perpendicular to each other.

Example two:

The flushing mechanism comprises a third stepping motor 22, clamping rods 21, a mounting plate 24 and a chip 16, wherein the output end of one electric push rod 2 is fixedly provided with the third stepping motor 22, the output end of the third stepping motor 22 is fixedly connected with the clamping rods 21, the output end of the other electric push rod 2 is fixedly provided with the mounting plate 24, one side surface, close to the third stepping motor 22, of the mounting plate 24 is rotatably connected with the clamping rods 21 through a bearing 14, and the chip 16 is clamped between the two clamping rods 21.

After the chip 16 is clamped by the two clamping rods 21, the third stepping motor 22 is started, the third stepping motor 22 drives the chip 16 to rotate by three hundred sixty degrees, the water pump 20 is started again, the input end of the water pump 20 is communicated with an external water pipe, and the water pump 20 can spray water onto the surface of the chip 16 through the rotary spray nozzle 19, so that the washing work is carried out.

The pipeline 18 is arranged to enable water after washing to flow out of the inside of the scribing box 1, and specifically, the pipeline 18 horizontally penetrates through the bottom of one side plate of the scribing box 1.

The working principle is as follows: when the electric appliance elements in the application are used, the electric appliance elements are externally connected with a power supply and a control switch, the device is provided with an adjusting mechanism, the lowermost door body 23 is opened, the chip 16 is placed between two clamping rods 21, then two electric push rods 2 are started, the two clamping rods 21 can firmly clamp the chip 16 by the output ends of the two electric push rods 2, the door body 23 is closed, after the chip is washed by a flushing mechanism, the second stepping motor 12 can be started, the second stepping motor 12 is provided with a rotating screw rod 15, the rotating screw rod 15 can enable a thread sleeve 17 sleeved on the outer wall of the screw rod to move upwards by the rotation of the screw rod 15, so that the chip 16 is driven to move upwards together, the sliding sleeve 3 slides upwards on the outer wall of the sliding rod 4 until the chip 16 reaches the fan 13, then the fan 13 is started, the air blown by the fan 13 can accelerate the air drying of the chip 16, after the air drying is finished, the middle door body 23 is opened, and starting the two electric push rods 2 to loosen the chip 16, taking out the chip 16, placing the chip 16 on the top of the scribing plate 11, starting the first stepping motor 9, scribing the chip 16 by the first stepping motor 9 with the rotary grinding wheel 10, and finally starting the second linear module 8 and the first linear module 7 according to a certain period, thereby scribing the surface of the chip 16 in multiple directions.

This device is installed and is washed the mechanism, after chip 16 was by two supporting rod 21 centre grippings, starts third step motor 22, and third step motor 22 can drive chip 16 three hundred sixty degrees rotatoryly, restarts water pump 20, and water pump 20's input and outside water pipe switch-on, water pump 20 can spout the surface of chip 16 with water through rotatory nozzle 19 to wash work.

The present invention relates to circuits, electronic components and control modules all of which are well within the skill of those in the art and, needless to say, the present invention is not directed to software and process improvements.

In the description of the present invention, it is to be understood that the terms "center", "middle", "eccentric", "longitudinal", "lateral", "length", "width", "thickness", "height", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like, indicate the orientation or positional relationship indicated based on the orientation or positional relationship shown in the drawings, and are only for convenience of describing and simplifying the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the utility model.

It will be evident to those skilled in the art that the utility model is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims

1. The utility model provides a semiconductor chip scribing device with washing function which characterized in that: including scribing box (1) and bearing (14), the horizontal fixed mounting of inside half department of scribing box (1) has diaphragm (6), the top fixed mounting of diaphragm (6) has first straight line module (7), the removal end fixed mounting of first straight line module (7) has scribing board (11), fixed mounting has second straight line module (8) on the inside roof of scribing box (1), the removal end fixed mounting of second straight line module (8) has first step motor (9), the output of first step motor (9) has linked firmly scribing board (11), fixed mounting has adjustment mechanism and washing mechanism between the inside both sides board of scribing box (1), from last to fixed mounting down on the inside dorsal scale board of scribing box (1) fan (13) and water pump (20), the fixed cover of output of water pump (20) has connect rotatory nozzle (19), the input end of the water pump (20) penetrates through the back side plate of the scribing box (1);

the adjusting mechanism comprises adjusting boxes (5), sliding rods (4), screw rods (15), a second stepping motor (12) and an electric push rod (2), the adjusting boxes (5) are vertically and fixedly mounted on two side plates inside the scribing box (1), one side, close to each other, of each adjusting box (5) is of a hollow structure, one sliding rod (4) is vertically and fixedly connected between an inner top plate and a bottom plate of each adjusting box (5), a sliding sleeve (3) is movably sleeved on the outer wall of each sliding rod (4), the other side is vertically and rotatably connected with the screw rods (15) through two bearings (14) between the inner top plate and the bottom plate of each adjusting box (5), the top ends of the screw rods (15) movably penetrate through the top plate of each adjusting box (5) and are fixedly connected with the output end of the second stepping motor (12), and the second stepping motor (12) is fixedly mounted at the bottom of the corresponding transverse plate (6), the outer wall of the screw rod (15) positioned in the adjusting box (5) is in threaded sleeve connection with a threaded sleeve (17), one side face, close to each other, of the threaded sleeve (17) and one side face, close to each other, of the sliding sleeve (3) are horizontally and fixedly connected with electric push rods (2), and a flushing mechanism is fixedly installed between the output ends of the two electric push rods (2);

the flushing mechanism comprises a third step motor (22), clamping rods (21), a mounting plate (24) and chips (16), wherein one of the third step motor (22) is fixedly mounted at the output end of the electric push rod (2), the clamping rods (21) are fixedly connected at the output end of the third step motor (22), the other one of the clamping rods (21) is fixedly mounted at the output end of the electric push rod (2), the mounting plate (24) is rotatably connected with the clamping rods (21) through bearings (14) at one side face, close to the third step motor (22), of the mounting plate (24), and the chips (16) are clamped between the clamping rods (21).

2. The semiconductor chip dicing apparatus with a rinsing function according to claim 1, wherein: the bottom of the scribing box (1) is fixedly provided with a base plate, and the bottom of the base plate is fixedly provided with an anti-slip pad.

3. The semiconductor chip dicing apparatus with a rinsing function according to claim 1, wherein: a pipeline (18) horizontally penetrates through the bottom of one side plate of the scribing box (1).

4. The semiconductor chip dicing apparatus with a rinsing function according to claim 1, wherein: the front side surface of the scribing box (1) is provided with three door bodies (23) from top to bottom.

5. The semiconductor chip dicing apparatus with a rinsing function according to claim 1, wherein: and a shockproof rubber pad is fixedly arranged between the second stepping motor (12) and the transverse plate (6).

6. The semiconductor chip dicing apparatus with a rinsing function according to claim 1, wherein: the second straight line module (8) and the first straight line module (7) are perpendicular to each other.