CN215647528U

CN215647528U - Detection and control circuit for plasma arc in alternating current coating power supply

Info

Publication number: CN215647528U
Application number: CN202121808225.1U
Authority: CN
Inventors: 阚龙
Original assignee: Shanghai Hard Stone Technology Co ltd
Current assignee: Shanghai Hard Stone Technology Co ltd
Priority date: 2021-08-04
Filing date: 2021-08-04
Publication date: 2022-01-25
Anticipated expiration: 2031-08-04

Abstract

The utility model discloses a detection and control circuit of plasma arc in an alternating current coating power supply, which comprises an alternating current coating power supply, a direct current DC module, an alternating current AC chopping module, a logic control module and a plasma cavity, wherein the alternating current coating power supply is connected with the logic control module; the direct current DC module, the alternating current AC chopping module and the logic control module are all arranged on the alternating current film coating power supply, and the direct current DC module is connected with the alternating current AC chopping module; the alternating current AC chopping module is connected with the plasma cavity, and a load connecting wire is arranged at the joint of the alternating current AC chopping module and the plasma cavity. After the generation of the arc is judged, the power supply immediately gives the reverse voltage of the current output voltage, and the power supply rapidly absorbs and neutralizes the arc energy in the power supply and in the load cavity at the moment, so that the influence of the arc on the target and the product in the cavity is reduced to the maximum extent, the power output can be recovered more quickly subsequently, and the production efficiency is improved.

Description

Detection and control circuit for plasma arc in alternating current coating power supply

Technical Field

The utility model relates to a detection and control circuit for plasma arc in an alternating current coating power supply.

Background

As shown in fig. 1, a current arc processing mechanism, at time t1, a current arc occurs; after the current arc occurs, the output current of the power supply rises sharply, the current arc reaches the current arc judgment threshold at the time t2, the power supply regards the arc as generated, the power supply is immediately turned off, and the output is recovered after the time is delayed to the time t 3.

Because parasitic inductance and capacitance exist in plasma cavity, load connecting wire etc. this part can store some energy, and after the power supply turn-off output, this part energy can not disappear immediately, but vibrate a period of time on the load, consumed on the load, this part energy is not that technology needs, can cause the damage to the product, and this part energy also needs a certain time to consume in addition, has influenced production efficiency.

Disclosure of Invention

The technical problem to be solved by the utility model is to provide a detection and control circuit of plasma arc in an alternating current coating power supply, which is applied to detecting and controlling the arc generated in the plasma glow discharge process of the alternating current coating power supply and reducing the influence of the arc on sputtering coating.

The detection and control circuit of the plasma arc in the AC coating power supply is realized by the following technical scheme: the plasma coating device comprises an alternating current coating power supply, a direct current DC module, an alternating current AC chopping module, a logic control module and a plasma cavity;

the direct current DC module, the alternating current AC chopping module and the logic control module are all arranged on the alternating current film coating power supply, and the direct current DC module is connected with the alternating current AC chopping module; the alternating current AC chopping module is connected with the plasma cavity, and a load connecting wire is arranged at the joint of the alternating current AC chopping module and the plasma cavity.

As a preferred technical scheme, a current lead is arranged between the junction of the alternating current AC chopping module and the plasma cavity and the logic control module, and an output current sample is arranged on the current lead and connected with the current lead; two voltage wires are arranged between the junction of the AC chopping module and the plasma cavity and the logic control module, and output voltage sampling is connected in parallel between the voltage wires.

As a preferable technical scheme, a comparison module, a clock module and a driving module are arranged in the logic control module.

The utility model has the beneficial effects that: after the generation of the arc is judged, the power supply immediately gives the reverse voltage of the current output voltage, and the power supply rapidly absorbs and neutralizes the arc energy in the power supply and in the load cavity at the moment, so that the influence of the arc on the target and the product in the cavity is reduced to the maximum extent, the power output can be recovered more quickly subsequently, and the production efficiency is improved.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

FIG. 1 is a prior art current arc threshold graph;

fig. 2 is a schematic structural diagram of the present invention.

FIG. 3 is a graph of current arc threshold values for the present invention;

fig. 4 is a diagram of an embodiment of the present invention.

Detailed Description

All of the features disclosed in this specification, or all of the steps in any method or process so disclosed, may be combined in any combination, except combinations of features and/or steps that are mutually exclusive.

Any feature disclosed in this specification (including any accompanying claims, abstract and drawings), may be replaced by alternative features serving equivalent or similar purposes, unless expressly stated otherwise. That is, unless expressly stated otherwise, each feature is only an example of a generic series of equivalent or similar features.

In the description of the present invention, it is to be understood that the terms "one end", "the other end", "outside", "upper", "inside", "horizontal", "coaxial", "central", "end", "length", "outer end", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, should not be construed as limiting the present invention.

Further, in the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

The use of terms such as "upper," "above," "lower," "below," and the like in describing relative spatial positions herein is for the purpose of facilitating description to describe one element or feature's relationship to another element or feature as illustrated in the figures. The spatially relative positional terms may be intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "below" or "beneath" other elements or features would then be oriented "above" the other elements or features. Thus, the exemplary term "below" can encompass both an orientation of above and below. The device may be otherwise oriented and the spatially relative descriptors used herein interpreted accordingly.

In the present invention, unless otherwise explicitly specified or limited, the terms "disposed," "sleeved," "connected," "penetrating," "plugged," and the like are to be construed broadly, e.g., as a fixed connection, a detachable connection, or an integral part; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

As shown in fig. 2-4, the detecting and controlling circuit for plasma arc in AC coating power supply of the present invention comprises an AC coating power supply 1, a DC/DC module 2, an AC chopper module 3, a logic control module 4 and a plasma cavity 5;

the direct current DC module 2, the alternating current AC chopping module 3 and the logic control module 4 are all arranged on the alternating current film coating power supply 1, and the direct current DC module 2 is connected with the alternating current AC chopping module 3; the alternating current AC chopper module 3 is connected with the plasma cavity 5, and a load connecting wire 8 is arranged at the joint of the alternating current AC chopper module 3 and the plasma cavity 5.

In the embodiment, a current lead is arranged between the junction of the alternating current AC chopper module 3 and the plasma cavity 5 and the logic control module 4, an output current sample 6 is arranged on the current lead, and the output current sample 6 is connected; two voltage leads are arranged between the junction of the AC chopping module 3 and the plasma cavity 5 and the logic control module 4, and an output voltage sample 7 is connected in parallel between the voltage leads.

In this embodiment, the logic control module 4 is internally provided with a comparison module 9, a clock module 10 and a driving module; the comparison module 9 is used for enabling the sampling values of the output current and the output voltage of the power supply to be at the set voltage arc threshold value and the set current arc threshold value; the clock module 10 is used to control the time inside the power supply.

The arc treatment mode is shown in FIG. 3, and at the time t1, current arc occurs; after the current arc occurs, the output current of the power supply sharply rises, the current arc reaches a current arc judgment threshold value at the moment of t2, the power supply considers that the arc occurs, the power supply immediately turns off the output at the moment and reversely outputs the highest voltage, the output current value is 0 at the moment of t3, the power supply is thoroughly turned off at the moment, the output is recovered at the moment of t4 after a period of time delay

The above description is only an embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that are not thought of through the inventive work should be included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope defined by the claims.

Claims

1. A detection and control circuit of plasma electric arc in AC coating power supply is characterized in that: the plasma processing device comprises an alternating current coating power supply (1), a direct current DC module (2), an alternating current AC chopping module (3), a logic control module (4) and a plasma cavity (5);

the direct current DC module (2), the alternating current AC chopping module (3) and the logic control module (4) are all arranged on the alternating current film coating power supply (1), and the direct current DC module (2) is connected with the alternating current AC chopping module (3); the alternating current AC chopping module (3) is connected with the plasma cavity (5), and a load connecting line (8) is arranged at the joint of the alternating current AC chopping module (3) and the plasma cavity (5).

2. The circuit of claim 1 for detecting and controlling plasma arcing in an ac coating power supply, wherein: a current lead is arranged between the junction of the alternating current AC chopping module (3) and the plasma cavity (5) and the logic control module (4), an output current sample (6) is arranged on the current lead, and the output current sample (6) is connected; two voltage wires are arranged between the junction of the alternating current AC chopping module (3) and the plasma cavity (5) and the logic control module (4), and an output voltage sample (7) is connected in parallel between the voltage wires.

3. The circuit of claim 1 for detecting and controlling plasma arcing in an ac coating power supply, wherein: and a comparison module (9), a clock module (10) and a driving module are arranged in the logic control module (4).