CN215644396U

CN215644396U - Test tool for semiconductor production and processing

Info

Publication number: CN215644396U
Application number: CN202122026764.6U
Authority: CN
Inventors: 华铁军; 黄春城
Original assignee: Jiangsu Haichuang Microelectronics Co ltd
Current assignee: Jiangsu Haichuang Microelectronics Co ltd
Priority date: 2021-08-26
Filing date: 2021-08-26
Publication date: 2022-01-25
Anticipated expiration: 2031-08-26

Abstract

The utility model relates to the technical field of semiconductor production test tools, in particular to a test tool for semiconductor production and processing, which comprises a bottom plate, wherein surrounding flanges are arranged on the periphery of the top of the bottom plate, tool unit blocks are arranged on the top of the bottom plate and positioned on the inner sides of the surrounding flanges, tool holes are formed in the tops of the tool unit blocks, fixed pressing plates are fixedly connected to the tops of the surrounding flanges, step grooves matched with the fixed pressing plates are formed in the front and back of the tops of the tool unit blocks, and positioning pressing grooves matched with the fixed pressing plates are formed in the two sides of the top of the surrounding flanges. According to the tool table structure, the plurality of tool unit blocks are combined to form the tool table structure, when a certain tool hole is damaged, the corresponding tool unit block can be detached and replaced, the problem that a tool station needs to be changed or the whole tool table needs to be scrapped after a local tool hole of the tool table of a traditional integrated structure is damaged is solved, material waste can be reduced, and the tool use cost is reduced.

Description

Test tool for semiconductor production and processing

Technical Field

The utility model relates to the technical field of semiconductor production test tools, in particular to a test tool for semiconductor production and processing.

Background

Semiconductor materials are important upstream base materials of industry, and semiconductor materials are important base materials for IC manufacturing and are important supports for the rapid development of modern electronic information society.

Among the prior art, flexible frock platform generally adopts the integral forming mesa structure, the frock hole is equidistant array distribution on the mesa, in the in-service use process, the frock hole frequency of use of different regions is different, some frock holes easily cause the hole site to damage because of the high frequency uses, need carry out the transform of clamping frock position after the regional hole site of high frequency use damages, and can not satisfy the fixed demand of frock after the hole site damages in certain area within range, need carry out the whole change of frock platform, and other hole sites can not effectively be utilized because of not using for a long time, form extravagantly, therefore, a test fixture for semiconductor production and processing is proposed, in order to solve above-mentioned not enough.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a test tool for semiconductor production and processing.

In order to achieve the purpose, the utility model adopts the following technical scheme:

the utility model provides a test fixture is used in semiconductor production and processing, includes the bottom plate, all be provided with all around at bottom plate top and enclose the flange, the top of bottom plate and the inboard that is located to enclose the flange are provided with the frock unit piece, the frock hole has been seted up at the top of frock unit piece, the top fixedly connected with holding plate of enclosing the flange, the step groove with holding plate looks adaptation is all seted up at the front and the back at frock unit piece top, the location indent with holding plate looks adaptation is all seted up to the both sides at enclosing the flange top.

Preferably, the fixing holes are formed in two sides of the inner portion of the fixing pressing plate, and fixing screw holes corresponding to the fixing holes are formed in two sides of the top of the enclosing flange and the bottom of the positioning pressing groove.

Preferably, one side and the front side of the tool unit block are integrally formed with connecting portions, and one side and the back side of the tool unit block, which are far away from the connecting portions, are integrally formed with connecting grooves matched with the connecting portions.

Preferably, the connecting part is arranged in a dovetail shape, and the connecting groove is a dovetail groove.

Preferably, the side grooves are formed in the tool unit block and located on two sides of the tool hole.

Preferably, the depth of the positioning pressing groove is equal to that of the step groove, and the depth of the positioning pressing groove is equal to the thickness of the fixed pressing plate.

The utility model has at least the following beneficial effects:

through the setting of frock unit piece, utilize a plurality of frock unit pieces to make up into frock platform structure, when certain frock hole damages, can demolish and change the frock unit piece that corresponds, need change frock station or the whole condemned problem of frock platform after avoiding the local frock hole of frock platform of traditional integrative structure to damage, reducible material is extravagant, helps reducing frock use cost.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.

FIG. 1 is a top view of a structure of the present invention;

FIG. 2 is a top view of the containment ledge structure of the present invention;

FIG. 3 is a schematic view of the structure of the bottom plate and the tooling block of the present invention;

fig. 4 is a schematic perspective view of a tooling unit block structure according to the present invention.

In the figure: 1. a base plate; 2. enclosing a flange; 3. a tooling unit block; 4. a tooling hole; 5. fixing the pressing plate; 6. a step groove; 7. positioning a pressure groove; 8. a fixing hole; 9. fixing screw holes; 10. a connecting portion; 11. connecting grooves; 12. and a side groove.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the utility model and are not intended to limit the utility model.

Referring to fig. 1-4, a test fixture for semiconductor production and processing, including bottom plate 1, all be provided with around bottom plate 1 top and enclose flange 2, the top of bottom plate 1 and the inboard that is located to enclose flange 2 are provided with frock unit block 3, frock hole 4 has been seted up at the top of frock unit block 3, the top fixedly connected with fixed pressing plate 5 of enclosing flange 2, the step groove 6 with fixed pressing plate 5 looks adaptation is all seted up at the front and the back at frock unit block 3 top, the location indent 7 with fixed pressing plate 5 looks adaptation is all seted up to the both sides at enclosing flange 2 top, bottom plate 1 provides bottom sprag and limiting displacement for frock unit block 3, make frock unit block 3 keep the bottom parallel and level after installing.

The scheme has the following working processes:

when a tooling hole 4 on a certain tooling unit block 3 is damaged, a fixed pressing plate 5 corresponding to the top of the tooling unit block 3 can be removed, the limitation on the top of the tooling unit block 3 to be changed is removed, a finger or a special tool can stretch into the tooling hole 4, a stress supporting point is provided through a side groove 12 to pull out the tooling unit block 3 upwards, the good tooling unit block 3 is replaced and installed, the fixed pressing plate 5 can be fixed again, and when the same tooling fixed position state is used, some unused tooling unit blocks 3 and the damaged tooling unit blocks 3 can be exchanged in position for use.

Further, the inside both sides of holding plate 5 have all been seted up fixed orifices 8, enclose the both sides at 2 tops of flange and lie in the bottom of location indent 7 and all set up the fixed screw 9 corresponding with fixed orifices 8, wear to establish fixed orifices 8 through set screw and be connected the realization to holding plate 5's fixed mounting with fixed screw 9.

Further, one side and the front of the tooling unit block 3 are all integrally formed with a connecting portion 10, one side and the back of the tooling unit block 3 far away from the connecting portion 10 are all integrally formed with a connecting groove 11 matched with the connecting portion 10, and the inner side of the surrounding edge 2 is provided with the connecting portion 10 matched with the tooling unit block 3 at the peripheral portion and the connecting groove 11 in the corresponding direction.

Further, connecting portion 10 is the dovetail setting to connecting groove 11 is the dovetail, and connecting portion 10 and the 11 cooperation of connecting groove of dovetail shape make and keep the mortise-tenon state between the adjacent frock unit piece 3, improve the connection stability between the frock unit piece 3, can place the condition of rocking because of the atress takes place between the frock unit piece 3.

Further, the side grooves 12 are formed in the inner portion of the tool unit block 3 and located on two sides of the tool hole 4, the tool unit block 3 is convenient to replace and install due to the fact that the two side grooves 12 are arranged, and stress supporting points are provided for the tool unit block 3 through the side grooves 12 when the tool unit block is disassembled and assembled.

Further, the depth of location indent 7 and step groove 6 equals to the degree of depth of location indent 7 equals with fixed clamp plate 5's thickness, and the depth of location indent 7, step groove 6 equals with fixed clamp plate 5 thickness, makes fixed clamp plate 5 install the back keep top and the parallel and level of frock unit piece 3, avoids the condition that the unevenness appears in frock bench top.

The foregoing shows and describes the general principles, essential features, and advantages of the utility model. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are merely illustrative of the principles of the utility model, but that various changes and modifications may be made without departing from the spirit and scope of the utility model, which fall within the scope of the utility model as claimed. The scope of the utility model is defined by the appended claims and equivalents thereof.

Claims

1. The utility model provides a test fixture is used in semiconductor production and processing, includes bottom plate (1), its characterized in that, all be provided with around bottom plate (1) top and enclose flange (2), the top of bottom plate (1) and the inboard that is located to enclose flange (2) are provided with frock unit piece (3), frock hole (4) have been seted up at the top of frock unit piece (3), enclose top fixedly connected with holding plate (5) of flange (2), step groove (6) with holding plate (5) looks adaptation are all seted up at the front and the back at frock unit piece (3) top, the location indent (7) with holding plate (5) looks adaptation are all seted up to the both sides at enclosure flange (2) top.

2. The test tool for semiconductor production and processing according to claim 1, wherein fixing holes (8) are formed in both sides of the inside of the fixing pressure plate (5), and fixing screw holes (9) corresponding to the fixing holes (8) are formed in both sides of the top of the surrounding rib (2) and the bottom of the positioning pressure groove (7).

3. The test tool for the production and processing of semiconductors according to claim 1, wherein the connecting portion (10) is integrally formed on one side and the front surface of the tool unit block (3), and the connecting groove (11) adapted to the connecting portion (10) is integrally formed on one side and the back surface of the tool unit block (3) far away from the connecting portion (10).

4. The test tool for semiconductor production and processing according to claim 3, wherein the connecting portion (10) is dovetail-shaped, and the connecting groove (11) is a dovetail groove.

5. The test tool for the production and processing of semiconductors according to claim 1, wherein side grooves (12) are formed in the tool unit block (3) and located on two sides of the tool hole (4).

6. The test tool for the production and processing of semiconductors according to claim 1, wherein the depth of the positioning pressure groove (7) is equal to that of the step groove (6), and the depth of the positioning pressure groove (7) is equal to the thickness of the fixed pressure plate (5).