CN215638717U - Vacuum furnace stove bottom gas guide hole structure - Google Patents
Vacuum furnace stove bottom gas guide hole structure Download PDFInfo
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- CN215638717U CN215638717U CN202121535396.1U CN202121535396U CN215638717U CN 215638717 U CN215638717 U CN 215638717U CN 202121535396 U CN202121535396 U CN 202121535396U CN 215638717 U CN215638717 U CN 215638717U
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- guide hole
- air guide
- vacuum furnace
- furnace
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Abstract
The utility model relates to a bottom air guide hole structure of a vacuum furnace, which is arranged at the bottom end of a furnace body of the vacuum furnace, wherein a water cooling structure for connecting cooling water to form an air guide hole is arranged on the inner wall of the furnace body; the air guide hole is simple in structure, not easy to block, capable of improving negative pressure stability in the furnace and capable of reducing cost.
Description
Technical Field
The utility model relates to a gas guide hole structure, in particular to a vacuum furnace bottom gas guide hole structure, and belongs to the photovoltaic and semiconductor manufacturing industry.
Background
The vacuum furnace is characterized in that a vacuum system (formed by elaborately assembling elements such as a vacuum pump, a vacuum measuring device, a vacuum valve and the like) is utilized to discharge partial substances in a furnace chamber in a specific space of the furnace chamber, so that the pressure in the furnace chamber is less than a standard atmospheric pressure, and the space in the furnace chamber realizes a vacuum state, namely the vacuum furnace.
Along with the progress of the technology, the single furnace operation time of the vacuum furnace is longer and longer, and the air guide hole of the furnace body is easy to be blocked, so that the problems of pressure rise in the furnace, ash return in the furnace, the operation frequency of a vacuum pump and the like are caused; the single furnace operation time of the vacuum furnace is affected due to the blockage of the air guide holes of the vacuum furnace.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem of overcoming the defects of the prior art and provides a furnace bottom air guide hole structure of a vacuum furnace, which is simple in structure, not easy to block, capable of improving the stability of negative pressure in the furnace and reducing the cost.
In order to solve the technical problems, the utility model provides a furnace bottom air guide hole structure of a vacuum furnace, which is arranged at the bottom end of a furnace body of the vacuum furnace, wherein a channel is arranged on the inner wall of the furnace body and is connected with cooling water to form a water cooling structure of an air guide hole.
The technical scheme of the utility model is further defined as follows:
furthermore, in the air guide hole structure at the bottom of the vacuum furnace, the heat insulation layer is made of any one of high-temperature resistant carbon felt, carbon solid felt and quartz sand.
In the air hole structure at the bottom of the vacuum furnace, the air guide cylinder is made of any one of high-temperature-resistant graphite, carbon-carbon solid felt, quartz and stainless steel.
In the air hole structure at the bottom of the vacuum furnace, the thicknesses of the heat-insulating layer and the air guide cylinder are respectively controlled to be 10-50 mm.
In the air guide hole structure at the bottom of the vacuum furnace, the outer wall of the air guide hole is surrounded with a water cooling structure with the air guide hole, and the bottommost end of the water cooling structure is flush with the step in the air guide hole.
The bottom end of the water cooling structure is flush with the step in the gas guide hole, so that the gas guide hole is cooled by cooling water, and the problems of pressure rise in the furnace, ash return and the like caused by cooling and enriching of silicon steam and volatile matters in the gas guide hole are solved, the gas guide hole is blocked, the pressure rise in the furnace, the ash return in the furnace, the operation frequency of a vacuum pump and the like are solved; meanwhile, the flushing can only treat the inner wall part of the air guide hole which is surrounded by cooling water, the whole air guide hole is not required to be treated, the resource is saved, and the cost is reduced.
The utility model has the beneficial effects that:
the utility model increases the inner diameter of the water-cooled part of the air guide hole to form a step for placing the insulating layer and the air guide cylinder, does not need additional parts, can adjust the inside, saves the space and reduces the cost.
According to the utility model, the part of the step with the increased inner diameter is filled and assembled by the heat-insulating layer and the gas guide cylinder which are made of high-temperature-resistant materials, so that the double-layer guarantee further ensures the influence of cooling water on the gas guide hole, and the problems of pressure rise, ash return and the like in the furnace caused by the fact that silicon steam and volatile matters in the furnace cannot be cooled and enriched in the gas guide hole under the combined action;
in the utility model, a small amount of silicon vapor and volatile matters are gradually cooled in the air guide holes and the rear end pipeline and are taken away by high-speed argon or other protective gas;
the silicon steam and the volatile matter finally reach the vacuum filter tank under the action of the vacuum pump, and the air guide holes are prevented from being blocked comprehensively and sequentially.
Drawings
FIG. 1 is a schematic structural diagram of a bottom gas vent structure of a vacuum furnace in the prior art;
FIG. 2 is a schematic structural diagram of a bottom gas guide hole structure of a vacuum furnace in an embodiment of the utility model;
in the figure: 1-furnace body, 2-cooling water, 3-air guide hole, 4-heat insulation layer, 5-air guide cylinder and 6-step.
Detailed Description
Example 1
The vacuum furnace stove bottom gas guide hole structure that this embodiment provided, the structure is as shown in fig. 2, sets up in the bottom of vacuum furnace body 1, and the inner wall of furnace body 1 has the water-cooling structure that the passageway inserts cooling water 2 formation gas guide hole, including gas guide hole 3, heat preservation 4 and gas guide tube 5, and gas guide hole 3 symmetry sets up in the bottom of furnace body 1, and the increase internal diameter that expands outward in the upper end of gas guide hole 3 inner wall forms step 6, and it has gas guide tube 5 and heat preservation 4 of vertical setting to fill on step 6, and heat preservation 4 sets up between gas guide hole 3 inner wall and gas guide tube 5 outer walls.
In this embodiment, the insulating layer 4 is made of high temperature resistant carbon felt.
In the present embodiment, the gas cartridge 5 is made of high temperature resistant graphite.
In this embodiment, the thickness of the insulating layer 4 and the gas cylinder 5 is controlled to 30mm, respectively.
In this embodiment, the outer wall of the air guide hole 3 is surrounded by a water cooling structure of the air guide hole 3, and the bottom end of the water cooling structure is flush with the step 6 in the air guide hole 3.
The structure of the air guide hole in the prior art is shown in figure 1, the air guide hole is arranged at the bottom end of a furnace body, cooling water directly surrounds the upper end of the outer wall of the air guide hole and directly acts on the air guide hole, the temperature of original waste gas passing through the air guide hole is a sudden change process, so that silicon steam and volatile matters in the furnace are easily cooled and enriched in the air guide hole to block the air guide hole.
The anti-blocking principle of the air guide hole is adopted:
(1) under the combined action of the heat preservation layer and the gas guide cylinder, the silicon steam and the volatile matters in the furnace can not be cooled and enriched in the gas guide holes;
(2) a small amount of silicon vapor and volatile matters are gradually cooled in the air guide holes and the rear end pipeline and are taken away by high-speed argon or other protective gas;
(3) the silicon vapor and volatile matters finally reach the vacuum filtration tank under the action of a vacuum pump.
The negative pressure stable operation time of the vacuum furnace can be prolonged by more than 30% by using the air guide hole structure; the running frequency of the vacuum pump can be reduced by more than 15%, and the power consumption of the vacuum pump is saved by more than 10%; the negative pressure stability in the furnace is improved; the ash return accident caused by the blockage of the air guide hole is eliminated.
In addition to the above embodiments, the present invention may have other embodiments. All technical solutions formed by adopting equivalent substitutions or equivalent transformations fall within the protection scope of the claims of the present invention.
Claims (5)
1. The utility model provides a vacuum furnace stove bottom air guide hole structure sets up in the bottom of vacuum furnace body (1), the inner wall of furnace body (1) has the water-cooling structure that passageway access cooling water (2) formed the air guide hole, its characterized in that: including air guide hole (3), heat preservation (4) and air guide cylinder (5), air guide hole (3) symmetry set up in the bottom of furnace body (1), the upper end of air guide hole (3) inner wall expands outward and increases the internal diameter and form step (6), it has vertical setting to fill on step (6) air guide cylinder (5) and heat preservation (4), heat preservation (4) set up in between air guide hole (3) inner wall and air guide cylinder (5) outer wall.
2. The vacuum furnace bottom air guide hole structure of claim 1, characterized in that: the heat-insulating layer (4) is made of any one of high-temperature-resistant carbon felt, carbon-made solid felt and quartz sand.
3. The vacuum furnace bottom air guide hole structure of claim 1, characterized in that: the gas cylinder (5) is made of any one of high-temperature-resistant graphite, carbon-carbon solid felt, quartz and stainless steel.
4. The vacuum furnace bottom air guide hole structure of claim 1, characterized in that: the thicknesses of the heat-insulating layer (4) and the gas cylinder (5) are respectively controlled to be 10-50 mm.
5. The vacuum furnace bottom air guide hole structure of claim 1, characterized in that: the outer wall of the air guide hole (3) is surrounded with a water cooling structure of the air guide hole (3), and the bottommost end of the water cooling structure is flush with the step (6) in the air guide hole (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121535396.1U CN215638717U (en) | 2021-07-07 | 2021-07-07 | Vacuum furnace stove bottom gas guide hole structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121535396.1U CN215638717U (en) | 2021-07-07 | 2021-07-07 | Vacuum furnace stove bottom gas guide hole structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215638717U true CN215638717U (en) | 2022-01-25 |
Family
ID=79948410
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121535396.1U Active CN215638717U (en) | 2021-07-07 | 2021-07-07 | Vacuum furnace stove bottom gas guide hole structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215638717U (en) |
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2021
- 2021-07-07 CN CN202121535396.1U patent/CN215638717U/en active Active
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