CN215628289U - Furnace door rotating opening and closing mechanism suitable for tubular PECVD (plasma enhanced chemical vapor deposition) equipment - Google Patents
Furnace door rotating opening and closing mechanism suitable for tubular PECVD (plasma enhanced chemical vapor deposition) equipment Download PDFInfo
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- CN215628289U CN215628289U CN202120702503.9U CN202120702503U CN215628289U CN 215628289 U CN215628289 U CN 215628289U CN 202120702503 U CN202120702503 U CN 202120702503U CN 215628289 U CN215628289 U CN 215628289U
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Abstract
The utility model discloses a furnace door rotating opening and closing mechanism suitable for tubular PECVD equipment, which comprises: a rotary driver; the connecting rod module is in transmission connection with the power output end of the rotary driver; the furnace door assembly is in transmission connection with the power output end of the opening and closing driver; wherein, the rotary driver drives the furnace door assembly to rotate through the connecting rod module. According to the utility model, the opening and closing driver drives the furnace door assembly to reciprocate along the X-axis direction, and the rotary driver drives the furnace door assembly to rotate so as to open and close the furnace door, so that the floor space of a machine table is reduced, and meanwhile, the impact force generated when the rotary driver and the opening and closing driver drive the furnace door to move is reduced, so that the furnace door is well buffered, the reliability of the structure is enhanced, and the stability and the convenience of the equipment are greatly improved.
Description
Technical Field
The utility model relates to the field of tubular PECVD equipment. More particularly, the utility model relates to a furnace door rotating opening and closing mechanism suitable for a tubular PECVD device.
Background
In the field of tubular PECVD equipment, it is known to use various structural forms of furnace door opening and closing mechanisms to open and close the furnace door. In the process of researching and realizing the opening and closing of the oven door, the inventor finds that the oven door opening and closing mechanism in the prior art has at least the following problems:
firstly, the existing furnace door opening mode is to drive the furnace door to respectively move along the transverse direction and the longitudinal direction to open and close the furnace door, and the floor space of a machine table is larger in the mode; secondly, the stability of the existing furnace door opening and closing mechanism is poor, and the impact force generated when the furnace door is opened and closed cannot be reduced, so that the furnace door is damaged.
In view of the above, there is a need to develop a furnace door rotating opening and closing mechanism suitable for a tubular PECVD apparatus, so as to solve the above problems.
SUMMERY OF THE UTILITY MODEL
Aiming at the defects in the prior art, the utility model mainly aims to provide a furnace door rotating opening and closing mechanism suitable for tubular PECVD equipment, which drives a furnace door assembly to reciprocate along the X-axis direction through an opening and closing driver, drives the furnace door assembly to rotate through a rotating driver so as to open and close a furnace door, reduces the occupied space of a machine table, reduces the impact force generated when the rotating driver and the opening and closing driver drive the furnace door to move, enables the furnace door to obtain better buffering, enhances the reliability of the structure and greatly improves the stability and the convenience of the equipment.
To achieve these objects and other advantages and in accordance with the purpose of the utility model, a furnace door rotating opening and closing mechanism for a tubular PECVD apparatus is provided, comprising: a rotary driver;
the connecting rod module is in transmission connection with the power output end of the rotary driver; and
the furnace door assembly is in transmission connection with the power output end of the opening and closing driver;
wherein, the rotary driver drives the furnace door assembly to rotate through the connecting rod module.
Preferably, the link module includes: the adapter plate is in transmission connection with the power output end of the rotary driver; and
a longarm panel, comprising: a hinge portion and a fixing portion integrally formed with the hinge portion;
wherein the hinge part is hinged with the adapter plate.
Preferably, a first hinge hole is formed in the surface of the adapter plate, a second hinge hole is formed in the surface of the hinge portion, and the adapter plate is hinged to the hinge portion through the cooperation of the first hinge hole, the second hinge hole and the hinge shaft.
Preferably, the method further comprises the following steps: the opening and closing driver is fixedly arranged on the surface of the fixing part, and the power output end of the opening and closing driver is in transmission connection with the oven door assembly;
the opening and closing driver drives the furnace door assembly to reciprocate along the X-axis direction.
Preferably, the door assembly includes: a furnace door panel; and
the triangular support is fixedly arranged at the front end of the furnace door plate;
at least two elastic pieces are arranged between the furnace door plate and the triangular support.
Preferably, the surface of the furnace door plate is provided with at least two pillar parts, the pillar parts extend along the direction vertical to the furnace door plate, and the pillar parts are regularly arrayed;
each of the elastic members is fitted over a surface of a corresponding one of the column portions.
Preferably, the tripod comprises: the connecting part is fixedly connected with the connecting rod module; and
at least two fixing parts, wherein each fixing part is integrally combined with the periphery of the connecting part and extends outwards along the periphery of the connecting part;
each of the fixing portions is fixedly connected with a corresponding one of the column portions.
Preferably, the elastic member is a buffer spring.
One of the above technical solutions has the following advantages or beneficial effects: according to the utility model, the opening and closing driver drives the furnace door assembly to reciprocate along the X-axis direction, and the rotary driver drives the furnace door assembly to rotate so as to open and close the furnace door, so that the floor space of a machine table is reduced, and meanwhile, the impact force generated when the rotary driver and the opening and closing driver drive the furnace door to move is reduced, so that the furnace door is well buffered, the reliability of the structure is enhanced, and the stability and the convenience of the equipment are greatly improved.
Additional advantages, objects, and features of the utility model will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the utility model.
Drawings
In order to more clearly illustrate the technical solution of the embodiments of the present invention, the drawings of the embodiments will be briefly described below, and it is apparent that the drawings in the following description relate only to some embodiments of the present invention and are not limiting thereof, wherein:
FIG. 1 is a three-dimensional structural view of a furnace door rotary opening and closing mechanism suitable for a tubular PECVD apparatus according to one embodiment of the utility model;
FIG. 2 is an exploded view of a rotary door opening and closing mechanism for a tubular PECVD apparatus according to one embodiment of the present invention;
fig. 3 is a three-dimensional structural view of a furnace door assembly in a furnace door rotary opening and closing mechanism suitable for a tubular PECVD apparatus according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.
In the drawings, the shape and size may be exaggerated for clarity, and the same reference numerals will be used throughout the drawings to designate the same or similar components.
Unless defined otherwise, technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art to which this invention belongs. The use of "first," "second," and similar terms in the description and claims of the present application do not denote any order, quantity, or importance, but rather the terms are used to distinguish one element from another. Also, the use of the terms "a," "an," or "the" and similar referents do not denote a limitation of quantity, but rather denote the presence of at least one. The word "comprise" or "comprises", and the like, means that the element or item listed before "comprises" or "comprising" covers the element or item listed after "comprising" or "comprises" and its equivalents, and does not exclude other elements or items. "upper", "lower", "left", "right", and the like are used merely to indicate relative positional relationships, and when the absolute position of the object being described is changed, the relative positional relationships may also be changed accordingly.
In the following description, terms such as center, thickness, height, length, front, back, rear, left, right, top, bottom, upper, lower, etc., are defined with respect to the configurations shown in the respective drawings, and in particular, "height" corresponds to a dimension from top to bottom, "width" corresponds to a dimension from left to right, "depth" corresponds to a dimension from front to rear, which are relative concepts, and thus may be varied accordingly depending on the position in which it is used, and thus these or other orientations should not be construed as limiting terms.
Terms concerning attachments, coupling and the like (e.g., "connected" and "attached") refer to a relationship wherein structures are secured or attached, either directly or indirectly, to one another through intervening structures, as well as both movable or rigid attachments, unless expressly described otherwise.
According to an embodiment of the present invention, referring to fig. 1 to 3, it can be seen that a furnace door rotary opening and closing mechanism suitable for a tubular PECVD apparatus includes: a rotation driver 11;
the connecting rod module 12 is in transmission connection with the power output end of the rotary driver 11; and
the oven door assembly 14 is in transmission connection with a power output end of the opening and closing driver 14;
wherein, the rotary driver 11 drives the oven door assembly 14 to rotate through the connecting rod module 12.
The utility model provides a furnace door rotating opening and closing mechanism suitable for tubular PECVD equipment, which drives a furnace door assembly 14 to rotate through a rotating driver 11 so as to open and close the furnace door, so that the occupied space of the machine is reduced, and the reliability of the structure is enhanced, thereby greatly improving the stability and the convenience of the equipment.
Further, the link module 12 includes: an adapter plate 121, which is in transmission connection with the power output end of the rotary driver 11; and
an elongated arm plate 122, comprising: a hinge 1221 and a fixing portion 1222 integrally formed with the hinge 1221;
the hinge 1221 is hinged to the adapter plate 121.
Further, a first hinge hole 1231 is formed in the surface of the adaptor plate 121, a second hinge hole 1222 is formed in the surface of the hinge portion 1221, and the adaptor plate 121 and the hinge portion 1221 are hinged to each other through the cooperation among the first hinge hole 1231, the second hinge hole 1223 and the hinge shaft 123.
It can be understood that the rotary driver 11 drives the adaptor plate 121 to reciprocate along the Y-axis direction, so as to drive the long arm plate 122 to rotate around the hinge shaft 123, and finally drive the oven door assembly 14 to rotate around the hinge shaft 123.
In a preferred embodiment, assuming that the door assembly 14 rotates around the hinge shaft 123 by an angle α, the angle α is 0 to 90 °.
In one embodiment of the present invention, the size of the angle α is 0, in another embodiment of the present invention, the size of the angle α is 45 °, and in a preferred embodiment of the present invention, the size of the angle α is 90 °.
Further, the furnace door rotating opening and closing mechanism suitable for the tubular PECVD equipment further comprises: the opening and closing driver 13 is fixedly arranged on the surface of the fixing part 1222, and the power output end of the opening and closing driver 13 is in transmission connection with the oven door assembly 14;
the opening and closing driver 13 drives the oven door assembly 14 to reciprocate along the X-axis direction.
It can be understood that the opening and closing driver 13 drives the oven door assembly 14 to reciprocate along the X-axis direction to initially open or further close the oven door assembly 14.
Further, the oven door assembly 14 includes: a furnace door panel 141; and
a triangular bracket 142 fixedly attached to a front end of the furnace door panel 141;
at least two elastic pieces 143 are arranged between the furnace door panel 141 and the triangular bracket 142.
The oven door comprises an oven door body, a triangular support and a rotary driver, wherein the triangular support is arranged on the oven door body, the rotary driver is arranged on the triangular support, and the rotary driver and the opening/closing driver are arranged on the triangular support.
Further, the surface of the furnace door panel 141 is provided with at least two pillar parts 1411, the pillar parts 1411 extend in a direction vertical to the furnace door panel 141, and the pillar parts 1411 are regularly arrayed;
each of the elastic members 143 is fitted over a surface of a corresponding one of the pillar portions 1411.
In a preferred embodiment, the strut parts 1311 are in a regular array of triangles.
Further, the elastic member 143 is a buffer spring.
Further, the triangular bracket 142 includes: a connecting portion 1421 fixedly connected to the link module 12; each fixing portion 1422 is integrally combined to the outer periphery of the connecting portion 1421 and extends outwards along the outer periphery of the connecting portion 1421; each of the fixing portions 1422 is fixedly connected to a corresponding one of the pillar portions 1411.
In summary, the present invention provides a furnace door rotation opening and closing mechanism suitable for a tubular PECVD apparatus, which drives a furnace door assembly to reciprocate along an X-axis direction through an opening and closing driver, and drives the furnace door assembly to rotate through a rotation driver, so as to open and close a furnace door, reduce a floor space of a machine, reduce impact force generated when the rotation driver and the opening and closing driver drive the furnace door to move, enable the furnace door to obtain good buffering, enhance reliability of the structure, and greatly improve stability and convenience of the apparatus.
The number of apparatuses and the scale of the process described herein are intended to simplify the description of the present invention. Applications, modifications and variations of the present invention will be apparent to those skilled in the art.
While embodiments of the utility model have been disclosed above, it is not intended to be limited to the uses set forth in the specification and examples. It can be applied to all kinds of fields suitable for the present invention. Additional modifications will readily occur to those skilled in the art. It is therefore intended that the utility model not be limited to the exact details and illustrations described and illustrated herein, but fall within the scope of the appended claims and equivalents thereof.
Claims (8)
1. The utility model provides a rotatory mechanism that opens and shuts of furnace gate suitable for tubular PECVD equipment which characterized in that includes: a rotary drive (11);
the connecting rod module (12) is in transmission connection with the power output end of the rotary driver (11); and
the oven door assembly (14) is in transmission connection with a power output end of the opening and closing driver (14);
wherein the rotary driver (11) drives the oven door assembly (14) to rotate through the connecting rod module (12).
2. The furnace door rotary opening and closing mechanism for a tubular PECVD apparatus as recited in claim 1, wherein the link module (12) comprises: the adapter plate (121) is in transmission connection with a power output end of the rotary driver (11); and
an elongated arm plate (122) comprising: a hinge section (1221) and a fixing section (1222) integrally formed with the hinge section (1221);
wherein the hinge (1221) is hinged to the adapter plate (121).
3. The furnace door rotating opening and closing mechanism suitable for the tubular PECVD apparatus as recited in claim 2, wherein a first hinge hole (1231) is formed on the surface of the adapter plate (121), a second hinge hole (1222) is formed on the surface of the hinge portion (1221), and the adapter plate (121) and the hinge portion (1221) are hinged through the cooperation of the first hinge hole (1231), the second hinge hole (1223) and the hinge shaft (123).
4. The furnace door rotary opening and closing mechanism suitable for the tubular PECVD apparatus of claim 2, further comprising: the opening and closing driver (13) is fixedly arranged on the surface of the fixing part (1222), and the power output end of the opening and closing driver (13) is in transmission connection with the oven door assembly (14);
the opening and closing driver (13) drives the oven door assembly (14) to reciprocate along the X-axis direction.
5. The furnace door rotary opening and closing mechanism for a tubular PECVD apparatus according to claim 1, wherein the furnace door assembly (14) comprises: a furnace door panel (141); and
a triangular bracket (142) fixedly mounted on the front end of the furnace door panel (141);
at least two elastic pieces (143) are arranged between the furnace door panel (141) and the triangular support (142).
6. The furnace door rotating opening and closing mechanism suitable for the tubular PECVD device as recited in claim 5, characterized in that the surface of the furnace door panel (141) is provided with at least two pillar parts (1411), the pillar parts (1411) extend along the direction vertical to the furnace door panel (141), and the pillar parts (1411) are regularly arrayed;
each elastic piece (143) is sleeved on the surface of the corresponding strut part (1411).
7. The furnace door rotary opening and closing mechanism for a tubular PECVD apparatus as recited in claim 6, wherein the triangular support (142) comprises: a connecting part (1421) fixedly connected with the connecting rod module (12); and
at least two fixing parts (1422), wherein each fixing part (1422) is integrally combined with the periphery of the connecting part (1421) and extends outwards along the periphery of the connecting part (1421);
each fixing part (1422) is fixedly connected with one corresponding pillar part (1411).
8. The furnace door rotary opening and closing mechanism for a tubular PECVD apparatus as recited in claim 5, wherein the elastic member (143) is a buffer spring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120702503.9U CN215628289U (en) | 2021-04-07 | 2021-04-07 | Furnace door rotating opening and closing mechanism suitable for tubular PECVD (plasma enhanced chemical vapor deposition) equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120702503.9U CN215628289U (en) | 2021-04-07 | 2021-04-07 | Furnace door rotating opening and closing mechanism suitable for tubular PECVD (plasma enhanced chemical vapor deposition) equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215628289U true CN215628289U (en) | 2022-01-25 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120702503.9U Active CN215628289U (en) | 2021-04-07 | 2021-04-07 | Furnace door rotating opening and closing mechanism suitable for tubular PECVD (plasma enhanced chemical vapor deposition) equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215628289U (en) |
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2021
- 2021-04-07 CN CN202120702503.9U patent/CN215628289U/en active Active
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