CN215626769U - Liquid medicine supply device and cleaning system of liquid medicine pool - Google Patents
Liquid medicine supply device and cleaning system of liquid medicine pool Download PDFInfo
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- CN215626769U CN215626769U CN202121461640.4U CN202121461640U CN215626769U CN 215626769 U CN215626769 U CN 215626769U CN 202121461640 U CN202121461640 U CN 202121461640U CN 215626769 U CN215626769 U CN 215626769U
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- liquid medicine
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- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
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Abstract
The utility model relates to the technical field of cleaning, in particular to a liquid medicine supply device which comprises a lower groove, a first functional pipeline and a second functional pipeline, wherein the first functional pipeline and the second functional pipeline are arranged in a split mode, the first functional pipeline is communicated into the lower groove, and the second functional pipeline is communicated into the lower groove. The utility model also relates to a cleaning system of the liquid medicine pool, which comprises the liquid medicine supply device and the acid-base control device, wherein the acid-base control device comprises an acid supply pool and an alkali supply pool, the acid supply pool is communicated with the first functional pipeline, and the alkali supply pool is communicated with the second functional pipeline. The liquid medicine supply device and the cleaning system of the liquid medicine pool can inject the liquid medicine into the lower tank through the first functional pipeline and the second functional pipeline, and workers do not need to carry the liquid medicine, so that the automation degree during liquid medicine supply and cleaning operation is improved, the cost of manual carrying is saved, and the environmental protection and the personal safety are facilitated.
Description
[ technical field ] A method for producing a semiconductor device
The utility model relates to the technical field of cleaning, in particular to a cleaning system for a liquid medicine supply device and a liquid medicine pool.
[ background of the utility model ]
Some liquid medicine ponds on the market clean mode, it is by the liquid medicine pond that the staff will have the cleaning action to lift the liquid medicine to the liquid medicine pond and pour to the liquid medicine pond, realize the cleanness to the liquid medicine pond mostly. But the mode through artifical transport has relatively poor degree of automation, comparatively extravagant human cost, has stronger corrosivity when the liquid medicine is acidizing fluid or alkali lye simultaneously, and at the artifical handling in-process, if the liquid medicine spills the part and can produce great potential safety hazard to environment and staff, is unfavorable for environmental protection and personal safety.
Therefore, the prior art is not sufficient and needs to be improved.
[ Utility model ] content
In order to overcome the technical problems of low automation degree and potential safety hazard caused by manual liquid medicine carrying for cleaning, the utility model provides a liquid medicine supply device and a cleaning system of a liquid medicine pool.
The utility model provides a liquid medicine supply device, which comprises a lower tank, a first functional pipeline and a second functional pipeline, wherein the first functional pipeline and the second functional pipeline are arranged in a split mode, the first functional pipeline is communicated into the lower tank, and the second functional pipeline is communicated into the lower tank.
Preferably, the chemical liquid supply device further comprises an auxiliary tank, the auxiliary tank is separated from the lower tank, and the auxiliary tank is communicated with the lower tank pipeline.
Preferably, the liquid medicine supply device further comprises a liquid medicine recovery device located below the injection device.
Preferably, the liquid medicine supply device further comprises a liquid medicine filtering device, and the liquid medicine filtering device is respectively communicated with the liquid medicine recovery device and the auxiliary tank pipeline.
Preferably, the liquid medicine supply device further comprises a pre-treatment device, and the pre-treatment device is communicated with the auxiliary tank.
The utility model also provides a cleaning system of the liquid medicine pool, which comprises the liquid medicine supply device and the acid-base control device, wherein the acid-base control device comprises an acid supply pool and an alkali supply pool, the acid supply pool is communicated with the first functional pipeline, and the alkali supply pool is communicated with the second functional pipeline.
Preferably, the acid-base control device further comprises a first power mechanism, the first power mechanism is connected between the acid supply tank and the first functional pipeline and is respectively communicated with the acid supply tank and the first functional pipeline, and the acid supply tank is connected with the first functional pipeline through the first power mechanism.
Preferably, the acid-base control device further comprises a second power mechanism, the second power mechanism is connected between the alkali supply tank and the second functional pipeline and is respectively communicated with the alkali supply tank and the second functional pipeline, and the alkali supply tank and the second functional pipeline are connected through the second power mechanism.
Preferably, the acid-base control device further comprises a control mechanism, and the control mechanism is electrically connected with the first power mechanism and the second power mechanism respectively.
Preferably, the acid-base control device further comprises a timer, and the timer is electrically connected with the control mechanism.
Compared with the prior art, the cleaning system for the liquid medicine supply device and the liquid medicine pool has the following advantages:
the liquid medicine is injected into the lower tank through the first functional pipeline and the second functional pipeline, the liquid medicine is not required to be carried by workers, the degree of automation during liquid medicine supply and cleaning operation is improved, the cost of manual carrying is favorably saved, when the liquid medicine is acid liquor or alkali liquor, the adverse effects on the environment and people caused by the fact that the liquid medicine leaks out of the parts in the manual carrying process are also reduced, and the environment protection and the personal safety are favorably realized.
[ description of the drawings ]
FIG. 1 is a perspective view of a chemical liquid supply apparatus according to the present invention.
FIG. 2 is a schematic diagram of the specific circuit connection structure of the chemical liquid supply device according to the present invention.
FIG. 3 is a schematic diagram of a specific circuit connection structure of the acid-base controlling device of the present invention.
Description of reference numerals:
10. a liquid medicine supply device; 11. a lower groove; 12. a secondary groove; 13. a first functional conduit; 14. a second functional conduit; 15. a liquid medicine recovery device; 16. a liquid medicine filtering device; 17. a control device; 18. a first power mechanism; 19. a second power mechanism; 20. a timer; 21. a control unit; 22. a pretreatment device.
[ detailed description ] embodiments
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the utility model and are not intended to limit the utility model.
Referring to fig. 1 to 3, the present invention provides a cleaning system for a liquid medicine tank, including a liquid medicine supply device 10 and an acid-base control device 17, wherein the acid-base control device 17 is in pipeline communication with the liquid medicine supply device 10. The acid-base control device 17 is used for providing acid liquor and alkali liquor to the medicine liquid supply device 10 to clean the medicine liquid supply device 10, and the medicine liquid supply device 10 is used for providing medicine liquid to the injection device so that the injection device can inject medicine to a product to be injected. It is understood that the ejection device of the present invention is a device for ejecting a liquid medicine.
Further, the chemical liquid supply device 10 includes a lower tank 11, an auxiliary tank 12, a first functional pipeline 13, a second functional pipeline 14, a control unit 21, a chemical liquid recovery device 15, and a chemical liquid filtering device 16, the lower tank 11 and the auxiliary tank 12 are separately provided, the first functional pipeline 13 and the second functional pipeline 14 are separately provided, one end of the first functional pipeline 13 communicates with the lower tank 11, one end of the second functional pipeline 14 communicates with the lower tank 11, the chemical liquid recovery device 15 is located below the injection device, the chemical liquid filtering device 16 communicates with the chemical liquid recovery device 15 and the auxiliary tank 12 respectively, and the chemical liquid recovery device 15 and the chemical liquid filtering device 16 are respectively electrically connected with the control unit 21.
Preferably, the first functional pipe 13 is an acid adding pipe, and the second functional pipe 14 is an alkali adding pipe, including but not limited to this, and the functions of the first functional pipe 13 and the second functional pipe 14 can be set correspondingly according to the functions to be realized.
The overall size of the auxiliary tank 12 is larger than that of the lower tank 11, the auxiliary tank 12 is used as a storage pool of liquid medicine and provides the liquid medicine for the lower tank 11, the lower tank 11 is used for providing the liquid medicine for the injection device, the other end of the first functional pipeline 13 and the other end of the second functional pipeline 14 are respectively communicated with the acid-base control device 17 through pipelines to obtain acid liquid or alkali liquid, the liquid medicine recovery device 15 is used for recovering the liquid medicine ejected by the injection device and flowing down, so that the recovery and collection of the liquid medicine are realized, the waste of the liquid medicine and the pollution to the environment are reduced, the liquid medicine filtering device 16 is used for filtering the liquid medicine in the liquid medicine recovery device 15 and conveying the liquid medicine to the auxiliary tank 12, so that the cleaning degree of the liquid medicine meets the requirement of a product, and the possibility of the pollution of the product is reduced.
Further, the liquid medicine supply device 10 further includes a pretreatment device 22, the pretreatment device 22 is communicated with the sub-tank 12, the pretreatment device 22 is electrically communicated with the control portion 21, and the pretreatment device 22 is used for diluting, mixing or temporarily storing the liquid medicine in the sub-tank 12, so that the liquid medicine in the sub-tank 12 needs to be diluted, mixed and adjusted in temperature to meet the requirements of the lower tank 11 on the liquid medicine.
Further, the acid-base control device 17 includes a control device 17, an acid supply tank, an alkali supply tank, a first power mechanism 18, a second power mechanism 19 and a timer 20, the first power mechanism 18, the second power mechanism 19 and the timer 20 are respectively electrically connected to the control device 17, the first power mechanism 18 is connected between the acid supply tank and the first functional pipeline 13 and respectively communicated with the acid supply tank and the first functional pipeline 13 through a pipeline, that is, the acid supply tank is connected with the first functional pipeline 13 through the first power mechanism 18, the second power mechanism 19 is connected between the alkali supply tank and the second functional pipeline 14 and respectively communicated with the alkali supply tank and the second functional pipeline 14 through a pipeline, that is, the alkali supply tank is connected with the second functional pipeline 14 through the second power mechanism 19.
The acid supply tank is filled with acid liquor, the alkali supply tank is filled with alkali liquor, the first power mechanism 18 is used for conveying the acid liquor between the lower tank 11 and the acid supply tank, the second power mechanism 19 is used for conveying the alkali liquor between the lower tank 11 and the acid supply tank, the timer 20 is used for timing, and the control device 17 is used for controlling the first power mechanism 18, the second power mechanism 19 and the timer 20 to realize cleaning of the lower tank 11 by timing acid addition and alkali addition.
When the acid-base control device 17 works, the timer 20 sends a timing signal to the control device 17 when the set time is reached, the control device 17 controls the first power mechanism 18 to pump the acid liquid in the acid supply tank to the lower tank 11 for cleaning, when the acid liquid cleaning is completed, the first power mechanism 18 is controlled to pump the acid liquid in the lower tank 11 back to the acid supply tank for the next cleaning, the control device 17 controls the second power mechanism 19 to pump the alkali liquid in the alkali supply tank to the lower tank 11 for cleaning, and when the alkali liquid cleaning is completed, the second power mechanism 19 is controlled to pump the alkali liquid in the lower tank 11 back to the alkali supply tank for the next cleaning.
Compared with the prior art, the cleaning system for the liquid medicine supply device and the liquid medicine pool has the following advantages:
the liquid medicine is injected into the lower tank through the first functional pipeline and the second functional pipeline, the liquid medicine is not required to be carried by workers, the degree of automation during liquid medicine supply and cleaning operation is improved, the cost of manual carrying is favorably saved, when the liquid medicine is acid liquor or alkali liquor, the adverse effects on the environment and people caused by the fact that the liquid medicine leaks out of the parts in the manual carrying process are also reduced, and the environment protection and the personal safety are favorably realized.
The above description is only a preferred embodiment of the present invention, and not intended to limit the scope of the present invention, and any modifications, equivalents, improvements, etc. made within the spirit of the present invention should be included in the scope of the present invention.
Claims (10)
1. A liquid medicine supply device for supplying a liquid medicine to an injection device, characterized in that: the liquid medicine supply device comprises a lower groove, a first functional pipeline and a second functional pipeline, wherein the first functional pipeline and the second functional pipeline are arranged in a split mode, the first functional pipeline is communicated into the lower groove, and the second functional pipeline is communicated into the lower groove.
2. The medical liquid supply device as claimed in claim 1, wherein: the liquid medicine supply device further comprises an auxiliary groove, the auxiliary groove and the lower groove are arranged in a split mode, and the auxiliary groove is communicated with the lower groove pipeline.
3. The medical liquid supply device as claimed in claim 2, wherein: the liquid medicine supply device also comprises a liquid medicine recovery device which is positioned below the injection device.
4. The medical liquid supply device as claimed in claim 3, wherein: the liquid medicine supply device also comprises a liquid medicine filtering device which is respectively communicated with the liquid medicine recovery device and the auxiliary tank pipeline.
5. The medical liquid supply device as claimed in claim 2, wherein: the liquid medicine supply device further comprises a pretreatment device, and the pretreatment device is communicated with the auxiliary tank.
6. A cleaning system of liquid medicine pond which characterized in that: the cleaning system of the liquid medicine pool comprises the liquid medicine supply device and the acid-base control device according to any one of claims 1 to 5, wherein the acid-base control device comprises an acid supply pool and an alkali supply pool, the acid supply pool is communicated with a first functional pipeline, and the alkali supply pool is communicated with a second functional pipeline.
7. The cleaning system for a bath according to claim 6, wherein: the acid-base control device further comprises a first power mechanism, the first power mechanism is connected between the acid supply tank and the first functional pipeline and is respectively communicated with the acid supply tank and the first functional pipeline, and the acid supply tank is connected with the first functional pipeline through the first power mechanism.
8. The system for cleaning a reservoir of claim 7, wherein: the acid-base control device further comprises a second power mechanism, the second power mechanism is connected between the alkali supply tank and the second functional pipeline and is respectively communicated with the alkali supply tank and the second functional pipeline, and the alkali supply tank and the second functional pipeline are connected through the second power mechanism.
9. The system for cleaning a reservoir of claim 8, wherein: the acid-base control device further comprises a control mechanism, and the control mechanism is electrically connected with the first power mechanism and the second power mechanism respectively.
10. The system for cleaning a reservoir of claim 9, wherein: the acid-base control device further comprises a timer, and the timer is electrically connected with the control mechanism.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121461640.4U CN215626769U (en) | 2021-06-28 | 2021-06-28 | Liquid medicine supply device and cleaning system of liquid medicine pool |
| TW110214422U TWM628048U (en) | 2021-06-28 | 2021-12-03 | Cleaning system of reagent solution supply device and reagent solution pool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121461640.4U CN215626769U (en) | 2021-06-28 | 2021-06-28 | Liquid medicine supply device and cleaning system of liquid medicine pool |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215626769U true CN215626769U (en) | 2022-01-25 |
Family
ID=79946614
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121461640.4U Active CN215626769U (en) | 2021-06-28 | 2021-06-28 | Liquid medicine supply device and cleaning system of liquid medicine pool |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN215626769U (en) |
| TW (1) | TWM628048U (en) |
-
2021
- 2021-06-28 CN CN202121461640.4U patent/CN215626769U/en active Active
- 2021-12-03 TW TW110214422U patent/TWM628048U/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| TWM628048U (en) | 2022-06-11 |
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