CN215601509U

CN215601509U - Split type vertical heating furnace

Info

Publication number: CN215601509U
Application number: CN202121713614.6U
Authority: CN
Inventors: 季斌; 郭鑫斌; 赵东
Original assignee: Jiangsu Changnai Energy Technology Co ltd
Current assignee: Jiangsu Changnai Energy Technology Co ltd
Priority date: 2021-07-26
Filing date: 2021-07-26
Publication date: 2022-01-21
Anticipated expiration: 2031-07-26

Abstract

The utility model relates to the field of semiconductor heating, and particularly discloses a split type vertical heating furnace which comprises a heating furnace body, wherein a furnace body liner is arranged in the heating furnace body, a plurality of heating bins are arranged in an array by taking the circle center of the heating furnace body as an axis on the inner side wall of the furnace body liner, a containing groove is arranged on the other side of the heating furnace body, binding posts are arranged in the containing groove, heating wires are arranged in the heating bins, and a power supply binding post is arranged on the outer side wall of each heating bin, which is positioned on the outer side of the heating furnace body. The inside of every storehouse of generating heat all has independent heat-generating body, and every heat-generating body all has independent temperature-controlled sensor, can realize the subregion heating, and a plurality of storehouses of generating heat also can establish ties whole heating simultaneously, and the heating member is fixed on the furnace body inner bag, has a holistic furnace body shell in the shell outside for it is thermal-insulated.

Description

Split type vertical heating furnace

Technical Field

The utility model relates to the field of semiconductor heating, in particular to a split type vertical heating furnace.

Background

In a semiconductor device manufacturing process, there is a process for forming an insulating film, since a silicon oxide film has excellent characteristics such as excellent insulating property and low dielectric constant, the silicon oxide film is widely used as an insulating film or an interlayer film, in an atomic layer deposition process, TMA (trimethyl aluminum) needs to be evaporated and mixed with an inert gas and then transported to a reaction chamber to contact with a wafer, the deposition process needs to be performed at a set temperature for reaction, and the wafer in the reaction chamber is fully preheated and then reaches a process temperature, so that a transport pipe needs to be heated during the transportation of the process gas, the process temperature before the process gas reaches the reaction chamber is maintained, the process temperature during the deposition of the thin film on the surface of the wafer is stabilized, and the quality and stability of the film formation are improved.

However, the heating mechanism of the traditional heating furnace cannot play a good sectional control device in the heating process, and the heating effect of the furnace body cannot be ensured.

SUMMERY OF THE UTILITY MODEL

Aiming at the existing problems, the utility model provides a split type vertical heating furnace, and the device assembly comprises a heating bin, a wiring groove, a containing groove and a wiring terminal, and the problems in the background art can be effectively solved by matching the heating bin, the wiring groove, the containing groove and the wiring terminal.

In order to solve the problems, the utility model adopts the following technical scheme:

the utility model provides a split type vertical heating furnace, includes the heating furnace body, the heating furnace body gets inside and is provided with the furnace body inner bag, the inside wall of furnace body inner bag with the centre of a circle of heating furnace body is provided with a plurality of storehouses that generate heat for the axis permutation, one side in storehouse that generates heat is provided with the wiring groove, the opposite side of heating furnace body is provided with accomodates the groove, the inside in accomodating the groove is provided with the terminal, the internally mounted in storehouse that generates heat has the heater strip, the lateral wall in storehouse that generates heat is located power terminal is installed in the outside of heating furnace body.

As a still further scheme of the utility model: the heating furnace comprises a heating furnace body and is characterized in that a furnace body shell is arranged on the outer surface of the heating furnace body, a protective cover is arranged on the side surface of the furnace body shell on the outer side of a power supply wiring terminal, and a heat insulation layer is arranged between a furnace body liner and a heating bin.

As a still further scheme of the utility model: one side of the heating wire is located the side surface of the furnace body shell is provided with a temperature sensor, and one side of the heating bin is located the side surface of the furnace body shell is provided with an over-temperature sensor.

As a still further scheme of the utility model: the heater strip with the wiring groove reaches terminal electric connection, the terminal with accomodate groove sliding connection.

As a still further scheme of the utility model: the outer surface of the protective housing is provided with heat dissipation holes in a penetrating mode, and the heat insulation layer is made of aluminum silicate fibers.

As a still further scheme of the utility model: the overtemperature sensor is electrically connected with the heating bin, and the temperature sensor is fixedly connected with the heating wire.

As a still further scheme of the utility model: the heater strip with storehouse fixed connection generates heat, the terminal with the wiring groove joint, the power terminal with storehouse electric connection generates heat.

Compared with the prior art, the utility model has the beneficial effects that:

1. every heat-generating storehouse's inside all has independent heat-generating body, every heat-generating body all has independent temperature sensor, can realize the subregion heating, and a plurality of heat-generating storehouses also can establish ties the bulk heating simultaneously, and the heating member is fixed on the furnace body inner bag, and the furnace body inner bag has the one deck cavity, fills with aluminium silicate fiber and forms the heat preservation, prevents loss of heat and prevents that the furnace body shell is overheated, has a holistic furnace body shell in the shell outside for it is thermal-insulated.

2. The terminal of the heating bin is positioned between the furnace body liner and the furnace body shell, and is provided with a corresponding protective cover shell to ensure electrical safety, and two over-temperature sensors are arranged in the heating furnace and are used for preventing uncontrolled heating caused by temperature control failure.

3. When a plurality of heating bins are controlled to be integrally connected in series for installation, the wiring terminal is slid in the accommodating groove by utilizing the wiring terminal, the wiring terminal is connected in the accommodating groove in the previous heating bin in a clamping manner, the plurality of heating bins are connected in series, integral heating can be carried out, and the connection of the accommodating groove and the wiring terminal is disconnected, so that the heating effect can be controlled in a segmented manner.

Drawings

FIG. 1 is a schematic structural view of a split type vertical heating furnace;

FIG. 2 is a sectional view of a heating furnace body in a split type vertical heating furnace;

FIG. 3 is a schematic view of the internal structure of a heating chamber of a split vertical heating furnace;

fig. 4 is a schematic structural view of a heating chamber in a split vertical heating furnace.

In the figure: 1. a heating furnace body; 2. a furnace body liner; 3. a furnace body shell; 4. a heating bin; 5. a power supply wiring terminal; 6. a protective housing; 7. a temperature sensor; 8. an overtemperature sensor; 9. a heat-insulating layer; 401. heating wires; 402. a wiring slot; 403. a receiving groove; 404. and (4) binding posts.

Detailed Description

The utility model is further described below in connection with specific embodiments.

As shown in fig. 1, 3 and 4, in the present embodiment, the present embodiment is described with reference to fig. 1, 3 and 4, and provides a split vertical heating furnace, which includes a furnace body inner container 2, four heating chambers 4 are installed in an aligned row on the inner side wall of the furnace body inner container 2 with the center of circle as the axis, the four heating chambers 4 have the same structure, a heating wire 401 is installed inside the heating chamber 4, a wiring groove 402 is installed on one side of the heating chamber 4, a receiving groove 403 is installed on the other side of the heating furnace body 1, a terminal 404 is installed inside the receiving groove 403, the connection between the heating chambers 4 can be controlled, when the plurality of heating chambers 4 are required to be controlled to be installed in series, the terminal 404 slides inside the receiving groove 403, so that the terminal 404 is clamped inside the receiving groove 403 inside the previous heating chamber 4, make a plurality of storehouses 4 that generate heat present the tandem system, can carry out the bulk heating, the outside of furnace body inner bag 2 is provided with furnace body shell 3, one side that heater strip 401 is located furnace body shell 3's side surface and installs temperature sensor 7, one side that storehouse 4 that generates heat is located furnace body shell 3's side surface and installs over-temperature sensor 8, temperature sensor 7 is used for controlling the temperature of heat-generating body, over-temperature sensor 8 can establish ties with the power supply circuit in storehouse 4 that generates heat, the electric temperature control part when storehouse 4 that generates heat breaks down, when the temperature is uncontrolled, over-temperature sensor 8 detects the temperature of heater and surpasss the highest limit temperature of settlement, can cut off the power supply circuit who establishes ties with it, in order to ensure whole heater and inside process gas pipeline's safety.

As shown in fig. 1-2, in this embodiment, the furnace body liner 2 and the furnace body shell 3 constitute the heating furnace body 1, a heat insulating layer 9 is installed between the furnace body liner 2 and the heating bin 4, the heat insulating layer 9 is made of aluminum silicate fiber, and has excellent heat insulating effect, excellent thermal stability, good pulverization resistance, low heat storage property, excellent compression resistance and bending strength, the outer side wall of the heating bin 4 is located on the outer side of the heating furnace body 1 and is provided with the power supply terminal 5, the outer side of the power supply terminal 5 is located on the side surface of the furnace body shell 3 and is provided with the protection housing 6, the outer surface of the protection housing 6 is provided with heat dissipation holes in a penetrating manner, the protection housing 6 can provide good heat dissipation for the power supply terminal 5, ensure electrical safety, and cannot be touched accidentally.

The working principle of the utility model is as follows: the four heating chambers 4 have the same structure, the heating chambers 4 are integrally installed inside the furnace body liner 2, when the plurality of heating chambers 4 are required to be controlled to be integrally installed in series, the binding post 404 slides inside the accommodating groove 403, so that the binding post 404 is clamped inside the accommodating groove 403 inside the previous heating chamber 4, the plurality of heating chambers 4 are in a series connection mode and can be integrally heated, the furnace body shell 3 is arranged outside the furnace body liner 2, the temperature sensor 7 is installed on the side surface, located on one side of the furnace body shell 3, of one side of the heating wire 401, the over-temperature sensor 8 is installed on the side surface, located on one side of the furnace body shell 3, of the heating chamber 4, the temperature sensor 7 is used for controlling the temperature of the heating body, the over-temperature sensor 8 can be connected with the power supply loop of the heating chambers 4 in series, when the electric temperature control part of the heating chambers 4 breaks down and the temperature is not controlled, the overtemperature sensor 8 detects that the temperature of the heater exceeds a set maximum limit temperature, and can cut off a power supply loop connected in series with the overtemperature sensor to ensure the safety of the whole heater and an internal process gas conveying pipeline.

The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the scope of the present invention, and the technical solutions and the utility model concepts of the present invention are equivalent to or changed within the scope of the present invention.

Claims

1. The utility model provides a split type vertical heating furnace, includes heating furnace body (1), its characterized in that, heating furnace body (1) gets inside and is provided with furnace body inner bag (2), the inside wall of furnace body inner bag (2) with the centre of a circle of heating furnace body (1) is provided with a plurality of storehouse (4) of generating heat for the axis permutation, one side of storehouse (4) of generating heat is provided with wiring groove (402), the opposite side of heating furnace body (1) is provided with accomodates groove (403), the inside of accomodating groove (403) is provided with terminal (404), the internally mounted of storehouse (4) of generating heat has heater strip (401), the lateral wall of storehouse (4) of generating heat is located power terminal (5) are installed in the outside of heating furnace body (1).

2. The split type vertical heating furnace according to claim 1, wherein a furnace body shell (3) is arranged on the outer surface of the heating furnace body (1), a protective cover (6) is arranged on the side surface of the furnace body shell (3) on the outer side of the power supply wiring terminal (5), and a heat insulation layer (9) is arranged between the furnace body liner (2) and the heating bin (4).

3. The split vertical heating furnace according to claim 2, wherein a temperature sensor (7) is installed on one side of the heating wire (401) on the side surface of the furnace body shell (3), and an over-temperature sensor (8) is installed on one side of the heating bin (4) on the side surface of the furnace body shell (3).

4. The split vertical furnace according to claim 1, wherein the heating wire (401) is electrically connected to the wire connection groove (402) and the terminal (404), and the terminal (404) is slidably connected to the receiving groove (403).

5. The split vertical heating furnace according to claim 2, wherein the outer surface of the protective casing (6) is provided with heat dissipation holes, and the heat insulation layer (9) is made of aluminum silicate fiber.

6. The split vertical heating furnace according to claim 3, wherein the over-temperature sensor (8) is electrically connected with the heating chamber (4), and the temperature sensor (7) is fixedly connected with the heating wire (401).

7. The split vertical heating furnace according to claim 1, wherein the heating wire (401) is fixedly connected with the heating chamber (4), the wiring terminal (404) is clamped with the wiring groove (402), and the power supply wiring terminal (5) is electrically connected with the heating chamber (4).