CN215595816U - Cold pump and cold pump system - Google Patents
Cold pump and cold pump system Download PDFInfo
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- CN215595816U CN215595816U CN202121475224.XU CN202121475224U CN215595816U CN 215595816 U CN215595816 U CN 215595816U CN 202121475224 U CN202121475224 U CN 202121475224U CN 215595816 U CN215595816 U CN 215595816U
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Abstract
The application discloses cold pump and cold pump system includes: the cold pump comprises a cold pump body, a support piece, a bottom plate and trundles; the cold pump body is positioned on one side of the supporting piece, and the other side of the supporting piece is connected with the bottom plate; the caster is positioned on one side of the bottom plate far away from the support piece; the cold pump body is used for manufacturing a vacuum environment; the support piece and the bottom plate are used for supporting the cold pump body; the truckle is used for removing the cold pump body, and so design can make things convenient for the removal and the work of cold pump, has improved whole operating efficiency.
Description
Technical Field
The application relates to the field of semiconductor manufacturing, in particular to a cold pump and a cold pump system.
Background
Currently, in the chip manufacturing process, an evaporation stage (e.g., MARK50 evaporation stage) is used, and a cold pump (typically 16 inches) is used for establishing high vacuum, and needs to be replaced and maintained after a certain period of use. Because the cold pump is heavy in weight, 2 persons are generally required to lift and 1 person is required to load and unload each time of replacement. And because the installation space is narrow and small, the operation cooperation is difficult, and work efficiency is low. From the safety perspective, potential safety hazards such as personal injury are easily caused.
SUMMERY OF THE UTILITY MODEL
The application provides a cold pump and cold pump system, can convenience of customers remove, dismantle, operation such as maintenance.
In a first aspect, an embodiment of the present application provides a cold pump, which includes a cold pump body, a support member, a bottom plate, and casters;
the cold pump body is positioned on one side of the supporting piece, and the other side of the supporting piece is connected with the bottom plate;
the caster is positioned on one side of the bottom plate far away from the support piece;
the cold pump body is used for manufacturing a vacuum environment;
the support piece and the bottom plate are used for supporting the cold pump body;
the truckle is used for removing the cold pump body.
In one possible embodiment, the support comprises a first support column, a second support column, and a third support column;
the projections of the first supporting column, the second supporting column and the third supporting column on the bottom plate are connected in pairs to form a triangle.
In a possible embodiment, one side of the first support column close to the cold pump body comprises a first projection, and one side of the first support column close to the bottom plate comprises a first groove;
one side of the cold pump body, which is close to the first supporting column, comprises a first mounting hole corresponding to the first bump, and the cold pump body and the first supporting column are connected through the first bump and the first mounting hole;
one side that the bottom plate is close to first support column includes the erection column that corresponds with first recess, and bottom plate and first support column pass through first recess and first erection column and connect.
In one possible embodiment, the first protrusion and the first mounting hole are detachably connected.
In one possible embodiment, the base plate comprises a first support area and a second support area, the first support column being located in the first support area, the second support column and the third support column being located in the second support area, the first support area being smaller than the second support area.
In one possible embodiment, the caster comprises a base, a connector, and a pulley;
one side of the base close to the base plate comprises a limiting groove, one side of the base close to the base comprises a limiting part corresponding to the limiting groove, and the base plate are connected through the limiting groove and the limiting part;
one side of the connecting piece is connected with one side of the base far away from the bottom plate;
the other side of the connecting piece is movably connected with the pulley so that the pulley can rotate along a plurality of directions.
In a possible embodiment, the distance between the base and the ground is a preset distance, a reserved space formed by the base and the ground is used for accommodating a jack, and the height of the jack is smaller than the preset distance.
In a possible embodiment, the base plate comprises a first guiding edge and a second guiding edge, the first guiding edge and the second guiding edge are respectively positioned at two opposite sides of the base plate, and the first guiding edge and the second guiding edge form a splayed shape.
In a possible embodiment, the limiting groove comprises an internal thread and the limiting element comprises an external thread cooperating with the internal thread.
In a second aspect, embodiments of the present application provide a cold pump system, which includes a jack and the cold pump in at least one possible implementation manner of the first aspect, wherein the jack is used for lifting the cold pump.
Compared with the prior art, the beneficial effects provided by the application comprise: the application discloses cold pump and cold pump system includes: the cold pump comprises a cold pump body, a support piece, a bottom plate and trundles; the cold pump body is positioned on one side of the supporting piece, and the other side of the supporting piece is connected with the bottom plate; the caster is positioned on one side of the bottom plate far away from the support piece; the cold pump body is used for manufacturing a vacuum environment; the support piece and the bottom plate are used for supporting the cold pump body; the truckle is used for removing the cold pump body, and so design can make things convenient for the removal and the work of cold pump, has improved whole operating efficiency.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiments will be briefly described below. It is appreciated that the following drawings depict only certain embodiments of the application and are therefore not to be considered limiting of its scope. For a person skilled in the art, it is possible to derive other relevant figures from these figures without inventive effort.
Fig. 1 is a schematic overall structure diagram of a cold pump provided in an embodiment of the present application;
FIG. 2 is a partial schematic structural diagram of a base plate according to an embodiment of the present disclosure;
fig. 3 is a schematic structural diagram of a first support column according to an embodiment of the present disclosure;
fig. 4 is a schematic structural diagram of a caster provided in an embodiment of the present application;
fig. 5 is a schematic overall structural diagram of another cold pump provided in an embodiment of the present application.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. The components of the embodiments of the present application, generally described and illustrated in the figures herein, can be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present application, presented in the accompanying drawings, is not intended to limit the scope of the claimed application, but is merely representative of selected embodiments of the application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present application, it is to be understood that the terms "upper", "lower", "inner", "outer", "left", "right", and the like, refer to orientations or positional relationships that are based on the orientations or positional relationships shown in the drawings, or the orientations or positional relationships that the products of the application conventionally position when in use, or the orientations or positional relationships that are conventionally understood by those skilled in the art, and are used for convenience in describing the present application and simplifying the description, but do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated, and therefore, should not be construed as limiting the present application.
Furthermore, the terms "first," "second," and the like are used merely to distinguish one description from another, and are not to be construed as indicating or implying relative importance.
In the description of the present application, it is also to be noted that, unless otherwise explicitly stated or limited, the terms "disposed" and "connected" are to be interpreted broadly, for example, "connected" may be a fixed connection, a detachable connection, or an integral connection; can be mechanically or electrically connected; the connection may be direct or indirect via an intermediate medium, and may be a communication between the two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.
The following detailed description of embodiments of the present application will be made with reference to the accompanying drawings.
In order to solve the technical problem in the foregoing background art, fig. 1 is a schematic overall structural diagram of a cold pump 1 provided in an embodiment of the present application, and the cold pump 1 is described in detail below.
The embodiment of the application provides a cold pump 1, which comprises a cold pump body 10, a support member 20, a bottom plate 30 and a caster 40. The cold pump body 10 is located on one side of the support member 20, and the other side of the support member 20 is connected to the bottom plate 30. The caster 40 is located on the side of the base plate 30 remote from the support 20. The cold pump body 10 is used to create a vacuum environment. The support member 20 and the base plate 30 are used to support the cold pump body 10. The caster 40 is used to move the cold pump body 10.
Through the setting, do not have any bearing structure in comparison with traditional cold pump 1, need the use of many users' transport, the cold pump 1 that this application embodiment provided has configured the bearing structure who comprises support piece 20, bottom plate 30 and truckle 40 for the user need not to consume too much manpower at the removal, the in-process of using cold pump body 10, only needs a user can accomplish the removal. Meanwhile, the cold pump 1 can be easily calibrated, adjusted in angle and the like in the using process.
Referring to fig. 2, in one possible embodiment, the supporting member 20 includes a first supporting column 201, a second supporting column 202 and a third supporting column 203. The first support column 201, the second support column 202 and the third support column 203 form a triangle after being projected on the bottom plate 30 and connected two by two, preferably form an equilateral triangle.
In this embodiment, the weight of the cold pump 1 is heavier, so the constructed support structure needs to be relatively stable, the first support column 201, the second support column 202 and the third support column 203 can be adopted to cooperate to support the cold pump body 10, and the projections of the three on the bottom plate 30 can form an equilateral triangle. By such a design, the first support column 201, the second support column 202, and the third support column 203 can constitute a structure with high stability.
Referring to fig. 3, in a possible embodiment, a side of the first supporting column 201 close to the cold pump body 10 includes a first protrusion 2011, and a side of the first supporting column 201 close to the bottom plate 30 includes a first recess 2012. One side that cold pump body 10 is close to first support column 201 includes the first mounting hole that corresponds with first lug 2011, and cold pump body 10 and first support column 201 are connected through first lug 2011 and first mounting hole. The side of the bottom plate 30 close to the first supporting column 201 comprises a mounting column corresponding to the first groove 2012, and the bottom plate 30 and the first supporting column 201 are connected with the first mounting column through the first groove 2012.
In this embodiment, a first protrusion 2011 and a first groove 2012 may be respectively disposed at two ends of the first support column 201, and correspondingly, a first mounting hole matched with the first protrusion 2011 may be disposed on the cold pump body 10, and a mounting column matched with the first groove 2012 may also be disposed on the floor. In the embodiment of the present application, a protrusion or a groove may be disposed at both ends of the first support column 201, and the cold pump body 10 and the bottom plate 30 are correspondingly disposed with a structure capable of being fixed, which is not limited herein. It should be noted that, the structures of the second supporting column 202 and the third supporting column 203 and the connection manner with the cold pump body 10 and the bottom plate 30 can refer to the first supporting column 201, and are not described again.
In one possible embodiment, the first tab 2011 is removably coupled to the first mounting hole.
After the user moves the cold pump 1 to the preset position, the structure other than the cold pump body 10 needs to be removed for the use of the cold pump body 10. Therefore, the first support column 201 is detachably connected with the cold pump body 10, that is, the first protrusion 2011 is detachably connected with the first mounting hole. The second support column 202 and the third support column 203 are arranged in the same way as the first support column 201, and are not described in detail here.
In one possible embodiment, the base plate 30 comprises a first support area where the first support column 201 is located and a second support area where the second support column 202 and the third support column 203 are located, the first support area being smaller than the second support area.
In this embodiment of the application, the first supporting column 201 may be disposed in the first supporting region, and the second supporting column 202 and the third supporting column 203 are disposed in the second supporting region wider than the first supporting region, so that the size of the bottom plate 30 can be reduced to a certain extent, and the non-traditional bottom plate 30 is designed to be circular, and can be more suitable for the narrow environment in which the cold pump 1 works.
Referring to fig. 4, in one possible embodiment, caster 40 includes a base 401, a connector 402, and a pulley 403. One side of the base 401 close to the bottom plate 30 comprises a limiting groove, one side of the bottom plate 30 close to the base 401 comprises a limiting part corresponding to the limiting groove, and the base 401 and the bottom plate 30 are connected through the limiting groove and the limiting part. The side of the connector 402 is connected to the side of the base 401 remote from the base plate 30. The other side of the link 402 is movably connected to a pulley 403 to enable the pulley 403 to rotate in multiple directions.
In the embodiment of the present application, the pulley 403 is movably connected to the connecting member 402, the pulley 403 can be used as a universal wheel, and a user can push the cold pump body 10 to move in any direction.
Referring to fig. 5, in a possible embodiment, the distance between the base 401 and the ground is a predetermined distance, a reserved space formed between the base 401 and the ground is used for accommodating the jack 50, and the height of the jack 50 is smaller than the predetermined distance.
After the cryopump 1 reaches the preset position, the jack 50 needs to be further adjusted, and a position for placing the jack 50 can be reserved under the base 401.
In one possible embodiment, the base plate 30 includes a first guide edge and a second guide edge, the first guide edge and the second guide edge being located on opposite sides of the base plate 30, respectively, and the first guide edge and the second guide edge forming a figure-of-eight.
In order to further satisfy the smooth movement of the cold pump 1 in a narrow environment, a first guide edge and a second guide edge can be respectively arranged on two sides of the base 401, so that the direction of the cold pump 1 can be quickly adjusted after encountering an obstacle in the moving process.
In a possible embodiment, the limiting groove comprises an internal thread and the limiting element comprises an external thread cooperating with the internal thread.
The cold pump 1 provided in the embodiment of the present application can also be placed stably by using the self-possessed structure when being idle, and it is not necessary to additionally find a tool for fixing, and only the pulley 403 needs to be fixed.
To more clearly describe the solution provided by the present application, the following description will be given by taking as an example the workflow of the 16-inch cold pump 1 working with the MARK50 evaporator stage. Firstly, the 16-inch cold pump body 10 is inverted, the first support column 201, the second support column 202 and the third support column 203 are installed, the bottom plate 30 is fixed by using 3 screws, and the installation is completed. Then, the 16-inch cold pump body 10 is placed, the lower portion of the opening of the cold pump body 10 is pushed to be aligned with the screw hole below the cold trap, the hydraulic jack 50 is placed under the clamp, and the hydraulic jack 50 is lifted. Then, 12 fixing screws are installed at the 5mm position of the opening of the refrigeration trap and are fastened. Then, the hydraulic jack 50 is lowered and taken out, and the other structures attached to and detached from the 16-inch cold pump body 10 are disassembled. It is worth explaining that the installation process only needs 2 persons, does not need manpower to be lifted, saves time and labor, needs 2 hours for installing the cold pump 1 in the past, can be installed and completed only 0.5 hour at present, and greatly improves the installation efficiency.
The embodiment of the present application provides a cold pump system, which includes a jack 50 and a cold pump 1 in at least one possible implementation manner described above, where the jack 50 is used for lifting the cold pump 1.
To sum up, the application discloses cold pump and cold pump system includes: the cold pump comprises a cold pump body, a support piece, a bottom plate and trundles; the cold pump body is positioned on one side of the supporting piece, and the other side of the supporting piece is connected with the bottom plate; the caster is positioned on one side of the bottom plate far away from the support piece; the cold pump body is used for manufacturing a vacuum environment; the support piece and the bottom plate are used for supporting the cold pump body; the truckle is used for removing the cold pump body, and so design can make things convenient for the removal and the work of cold pump, has improved whole operating efficiency.
The foregoing description, for purpose of explanation, has been described with reference to specific embodiments. However, the illustrative discussions above are not intended to be exhaustive or to limit the application to the precise forms disclosed. Many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the application and its practical application, to thereby enable others skilled in the art to best utilize the application and various embodiments with various modifications as are suited to the particular use contemplated. The foregoing description, for purpose of explanation, has been described with reference to specific embodiments. However, the illustrative discussions above are not intended to be exhaustive or to limit the application to the precise forms disclosed. Many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the application and its practical application, to thereby enable others skilled in the art to best utilize the application and various embodiments with various modifications as are suited to the particular use contemplated.
Claims (10)
1. A cold pump is characterized by comprising a cold pump body, a supporting piece, a bottom plate and trundles;
the cold pump body is positioned on one side of the supporting piece, and the other side of the supporting piece is connected with the bottom plate;
the caster is positioned on one side of the bottom plate far away from the support;
the cold pump body is used for manufacturing a vacuum environment;
the support piece and the bottom plate are used for supporting the cold pump body;
the caster wheel is used for moving the cold pump body.
2. A cold pump according to claim 1, wherein said support comprises a first support column, a second support column and a third support column;
the projections of the first supporting column, the second supporting column and the third supporting column on the bottom plate are connected in pairs to form a triangle.
3. The cold pump of claim 2, wherein a side of the first support pillar adjacent to the cold pump body comprises a first protrusion, and a side of the first support pillar adjacent to the bottom plate comprises a first groove;
one side of the cold pump body, which is close to the first supporting column, comprises a first mounting hole corresponding to the first lug, and the cold pump body and the first supporting column are connected through the first lug and the first mounting hole;
one side that the bottom plate is close to first support column include with the erection column that first recess corresponds, the bottom plate with first support column passes through first recess with first erection column connects.
4. A cold pump according to claim 3, wherein said first protrusion is removably attached to said first mounting hole.
5. A cold pump according to claim 2, wherein the base plate comprises a first support area and a second support area, the first support column being located in the first support area and the second and third support columns being located in the second support area, the first support area being smaller than the second support area.
6. A cold pump according to claim 1, wherein said caster comprises a base, a connector and a pulley;
one side of the base, which is close to the bottom plate, comprises a limiting groove, one side of the bottom plate, which is close to the base, comprises a limiting part corresponding to the limiting groove, and the base and the bottom plate are connected through the limiting groove and the limiting part;
one side of the connecting piece is connected with one side of the base far away from the bottom plate;
the other side of the connecting piece is movably connected with the pulley so that the pulley can rotate along multiple directions.
7. A cold pump according to claim 6, wherein the base is a predetermined distance from the ground, a space reserved between the base and the ground is used for accommodating a jack, and the height of the jack is smaller than the predetermined distance.
8. A cold pump according to claim 6, wherein said base plate comprises a first guiding edge and a second guiding edge, said first guiding edge and said second guiding edge being located on opposite sides of said base plate, respectively, said first guiding edge and said second guiding edge forming a figure of eight.
9. A cold pump according to claim 6, wherein the limiting groove comprises an internal thread and the limiting member comprises an external thread cooperating with the internal thread.
10. A cold pump system, comprising a jack for lifting the cold pump and a cold pump according to any of claims 1-9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121475224.XU CN215595816U (en) | 2021-06-30 | 2021-06-30 | Cold pump and cold pump system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121475224.XU CN215595816U (en) | 2021-06-30 | 2021-06-30 | Cold pump and cold pump system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215595816U true CN215595816U (en) | 2022-01-21 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121475224.XU Active CN215595816U (en) | 2021-06-30 | 2021-06-30 | Cold pump and cold pump system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215595816U (en) |
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2021
- 2021-06-30 CN CN202121475224.XU patent/CN215595816U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230627 Address after: 132000 No.99 Shenzhen street, high tech Zone, Jilin City, Jilin Province Patentee after: JILIN SINO-MICROELECTRONICS Co.,Ltd. Patentee after: JILIN MAGIC SEMICONDUCTOR Co.,Ltd. Address before: 132000 No.99 Shenzhen street, high tech Zone, Jilin City, Jilin Province Patentee before: JILIN SINO-MICROELECTRONICS Co.,Ltd. |
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| TR01 | Transfer of patent right |