CN215589649U - Spacing-adjustable polycrystalline silicon squarer - Google Patents

Spacing-adjustable polycrystalline silicon squarer Download PDF

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Publication number
CN215589649U
CN215589649U CN202121642622.6U CN202121642622U CN215589649U CN 215589649 U CN215589649 U CN 215589649U CN 202121642622 U CN202121642622 U CN 202121642622U CN 215589649 U CN215589649 U CN 215589649U
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China
Prior art keywords
cutting
assembly
wire saw
plate
adjustable
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Inventor
李海威
梁兴华
林胜
范舒彬
李元业
沈锦锋
王建鑫
林光展
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Fuzhou Tianrui Scroll Saw Technology Co Ltd
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Fuzhou Tianrui Scroll Saw Technology Co Ltd
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Abstract

The utility model discloses a polycrystalline silicon squaring machine with adjustable spacing, which comprises an assembly frame, cutting assembly plates, wire saw wheels, wire saws, a driving assembly and a spacing adjustment assembly, wherein a plurality of groups of cutting assembly plates which are arranged in an array are slidably connected to the assembly frame through split nuts of the spacing adjustment assembly, the split nuts are matched with threaded rods to realize clutching of the cutting assembly plates and realize cutting spacing adjustment, the wire saw wheels are independently arranged on each cutting assembly plate to form a plurality of independent cutting units, so that the maintenance of the wire saws of all parts is facilitated, the adjustment of all the wire saws once maintenance is required is avoided, the maintenance difficulty is reduced, the wire saws move along a single plane, the abrasion of the wire saw wheels is reduced, the swinging of the wire saws and the wire saw wheels is avoided, gaps generated during cutting are reduced, and the cutting precision of the wire saws is improved.

Description

Spacing-adjustable polycrystalline silicon squarer
Technical Field
The utility model relates to the technical field of hard and brittle bar processing equipment, in particular to a polycrystalline silicon squaring machine with adjustable spacing.
Background
In the production process of polysilicon, a whole block of polysilicon substrate in a cubic structure needs to be cut for several times in advance to form a polysilicon rod, so that the polysilicon rod can be used in the subsequent production or sampling detection process.
In the prior art, a polycrystalline silicon squarer for cutting a substrate adopts a pay-off cylinder and a storage cylinder, connects the head end and the tail end of a single wire saw, and the single wire saw winds a plurality of wire saw wheels, and the parallel wire saw between the wire saw wheels forms a cutting area, pushes the material into the cutting area, and rotates the cutting direction after cutting into a plurality of substrates, so that the polycrystalline silicon substrate subjected to one-time cutting is cut into a rod-shaped polycrystalline silicon substrate, thereby facilitating subsequent use.
However, there are not few problems in current polycrystalline silicon squaring machine, single coping saw length is long, output position on pay off barrel and winding barrel is keeping changing constantly, the coping saw wheel of contact with it lasts the power that receives the equidirectional not, long-term the use easily causes coping saw wheel to damage and deviates, influence the cutting, and coping saw wheel is fixed mostly, can't carry out the adjustment of interval, in addition, in case take place coping saw damage or ageing needs to be changed, whole set of coping saw need be replaced, the cooperation of all coping saws and coping saw wheel also needs to be adjusted, the maintenance process is extremely loaded down with trivial details, seriously influence the availability factor of equipment.
SUMMERY OF THE UTILITY MODEL
Therefore, the polycrystalline silicon squarer with the adjustable interval needs to be provided to solve the problems that the equipment in the prior art is easy to cause damage and deviation of a wire saw wheel, and the adjustment of the interval and the maintenance process are extremely complicated.
In order to achieve the purpose, the inventor provides a polycrystalline silicon squaring machine with adjustable spacing, which comprises an assembly frame, a cutting assembly plate, a wire saw wheel, a wire saw, a driving assembly and a spacing adjustment assembly;
the cutting and assembling plates are arranged and connected to the assembling frame through sliding rails, the sliding rails are arranged along the arrangement direction of the cutting and assembling plates, and the sliding rails enable the cutting and assembling plates to slide along the arrangement direction;
the number of the wire saw wheels is more than two, and the wire saw wheels are rotatably connected with the cutting assembly plate;
the wire saw is connected end to end and arranged around more than two wire saw wheels, and a cutting area is formed by the wire saw between the wire saw wheels;
the driving assembly is arranged on the cutting assembling plate on one side of the wire saw wheel, and a power output end of the driving assembly is in transmission connection with the wire saw wheel;
the spacing adjustment assembly comprises a split nut, a transmission rod and a transmission rod driving device, the split nut is arranged on the cutting assembly plate, the movable end of the split nut is combined to form a threaded hole, the transmission rod penetrates through the cutting assembly plate arranged in an arranging mode and is matched with the threaded hole of the split nut, and the transmission rod driving device is in transmission connection with the transmission rod.
Further, the assembly frame further comprises a cutting positioning rod, the cutting positioning rod penetrates through the cutting assembly plates arranged in an arrayed mode, and two ends of the cutting assembly plate are connected to the assembly frame.
Further, still include the tensioning assembly, the tensioning assembly includes telescopic link and transfer line, the telescopic link articulates on the cutting assembly plate, and the telescopic link is equipped with flexible end, the transfer line articulates on the cutting assembly plate, and one end is articulated mutually with the coping saw wheel, and the other end is articulated mutually with the activity end of telescopic link.
Furthermore, the transmission rod is of an L-shaped structure, and the bent part of the transmission rod of the L-shaped structure is hinged to the cutting assembly plate.
Furthermore, a sliding groove is formed in the cutting assembly plate, and the wire saw wheel hinged to the transmission rod is connected to the sliding groove in a sliding mode.
Further, the power output end of the driving assembly is in transmission connection with the wire saw wheel through a belt pulley.
The polycrystalline silicon squarer comprises a lifter and a lifting platform, wherein the lifter is provided with a lifting end, and the lifting end is connected with the lifting platform.
Further, the cutting assembly plate is provided with an opening, and the scroll saw wheel shaft is connected to the cutting assembly plate on two sides of the opening.
Further, still include first reinforcing plate and second reinforcing plate, first reinforcing plate is straight plate structure, connects in the side of cutting assembly plate, the second reinforcing plate is L shape structure, connects in the cutting assembly plate side that is equipped with the opening both sides.
Further, the drive assembly runs through the face setting of cutting assembly plate.
Different from the prior art, the technical scheme has the following advantages: the cutting assembly plates arranged and arranged through multiple groups pass through the opening and closing nuts of the interval adjusting assembly, the opening and closing nuts are slidably connected onto the assembly frame, the opening and closing nuts are matched with the threaded rods, separation and reunion of all the cutting assembly plates are achieved, cutting interval adjustment is achieved, wire saw wheels are independently arranged on each cutting assembly plate and wound on the wire saw, a plurality of independent cutting units are formed, the wire saw of each part is conveniently maintained, adjustment of all the wire saws is avoided once maintenance is needed, maintenance difficulty is reduced, the wire saw moves along a single plane, abrasion of the wire saw wheels is reduced, swinging of the wire saw and the wire saw wheels is avoided, gaps generated during cutting are reduced, and cutting precision of the wire saw is improved.
Drawings
FIG. 1 is a schematic perspective view of a first view of a cutting assembly plate according to an embodiment of the present invention;
FIG. 2 is a perspective view of a second view of the cutting assembly plate according to an embodiment of the present invention;
FIG. 3 is a schematic perspective view of a cutter of a polysilicon squarer according to an embodiment of the present invention;
FIG. 4 is a schematic side view of a cutting assembly plate according to an embodiment of the present invention;
FIG. 5 is a schematic view of the combined structure of the cutter and the lifting assembly of the polysilicon squarer according to the embodiment of the present invention;
FIG. 6 is a schematic side view of a lift assembly according to an embodiment of the present invention.
Description of reference numerals:
10. an equipment support;
11. cutting the positioning rod;
20. cutting the assembly plate;
21. a sliding groove; 22. an opening; 23. a first reinforcing plate; 24. a second reinforcing plate;
30. a wire saw wheel;
31. a wire saw guide groove;
40. wire sawing;
50. a drive assembly;
51. a drive motor; 52. a belt pulley; 53. a belt; 54. a belt tensioner;
60. a tensioning assembly;
61. a transmission rod; 62. a hydraulic lever;
70. a spacing adjustment assembly;
71. opening and closing the nut; 72. a transmission rod; 73. a drive device for the transmission rod;
80. a feeding assembly;
81. a first slide rail; 82. a feeding platform; 83. a substrate carrier plate;
90. a lifting assembly;
91. an elevator; 92. a lifting platform; 93. a second slide rail.
Detailed Description
To explain technical contents, structural features, and objects and effects of the technical solutions in detail, the following detailed description is given with reference to the accompanying drawings in conjunction with the embodiments.
Referring to fig. 1 to 3 together, the present embodiment discloses a polysilicon squaring and cutting apparatus, the polysilicon squaring and cutting apparatus is arranged and connected to an apparatus frame 10 through a sliding rail, the sliding rail is arranged along the arrangement direction of the cutting assembly plate, the sliding rail enables the cutting assembly plate to slide along the arrangement direction (in the present embodiment, the sliding rail is provided with four sliding blocks, such as the top four sliding blocks in fig. 2, and the sliding rail is connected with the cutting assembly plate through the sliding blocks), and the apparatus includes a cutting assembly plate 20, a wire saw wheel 30, a wire saw 40, and a driving assembly 50. The number of the wire saw wheel 30 is more than two (in this embodiment, the number of the wire saw wheel is 4, and the wire saw wheel is connected with the cutting assembly plate in the same plane), and is rotatably connected with the cutting assembly plate (in this embodiment, the wire saw wheel is connected with the cutting assembly plate through a rotating shaft). The wire saws 40 are connected end to end and are wound around the wire saws 40 arranged on the outer sides of the wire saw wheels 30 and between the wire saw wheels 30 to form cutting areas. The drive assembly 50 sets up on the cutting mounting plate 20 of scroll saw wheel 30 one side, including driving motor 51, belt pulley 52 and belt 53, driving motor 51 is connected with the cutting mounting plate 20 of scroll saw wheel 30 one side, and driving motor 51 is equipped with power take off (the power take off of motor promptly), the quantity of belt pulley 52 is two, and one of them belt pulley 52 is connected with driving motor 51's power take off, and another belt pulley 52 is connected through the pivot with one of them scroll saw wheel 30 (in this embodiment, the quantity of scroll saw wheel is 4, and scroll saw wheel 30 with belt pulley 52 coaxial coupling is as the action wheel, drives scroll saw 40 and scroll saw wheel 30 syntropy and rotates), and belt 53 overlaps on two belt pulleys 52 for transmit driving motor 51's power to scroll saw wheel 30. The spacing adjustment assembly 70 includes a split nut 71, a drive link 72, and a drive link drive 73. (the nut is a nut with a shaft, connected to the driving plate, the shaft is connected to the cutting assembly plate 20 through a motor, or rotated through manual operation, one side of the driving plate is provided with two driving grooves along the outer side to the center, the distance between the two driving grooves is gradually close to the center of the driving plate, the nut is divided into two halves, which are respectively connected to two sliding blocks, the two sliding blocks are arranged on a preset sliding track and inserted into the driving groove structure of the driving plate through a protrusion, so that when the driving plate is rotated by the driving shaft, the sliding blocks slide on the driving grooves of the driving plate through the protrusion, so as to form a complete nut structure or separate the nut structure along the sliding grooves, the opening and closing nut 71 is arranged on the cutting assembly plate 20, the movable end of the opening and closing nut 71 is combined to form a threaded hole, the driving rod 72 is a threaded rod or a screw rod, and penetrates through the cutting assembly plate 20, and is matched with the threaded hole of the split nut 71, and the transmission rod driving device 73 can be an electric motor, a pneumatic motor or a hydraulic motor and is in transmission connection with the transmission rod 72.
According to above-mentioned structure, in the open cutting device's of polycrystalline silicon working process, slide on the assembly frame through the slide rail between a plurality of cutting assembly plates that set up side by side, the transfer line drive arrangement of interval regulation assembly, it rotates to drive the transfer line, the transfer line drives the cutting assembly plate that each split nut is connected and removes, when single cutting assembly plate reachs the assigned position, split nut's pivot is rotated, it rotates to drive the drive disc, and then drive the separation of the screw hole on two sliders, break away from the transmission with the transfer line, keep the normal position, continue to carry out interval adjustment to other cutting assembly plates still in transmission state. And (4) locking the opening and closing nuts again until the distance adjustment among the cutting and assembling plates is completed, and keeping the relative positions among the cutting and assembling plates. And then starting a driving motor of the driving assembly, rotating a power output shaft of the driving motor, driving a belt pulley to rotate by the power output shaft, rotating the wire saw wheels serving as driving wheels by the belt pulley, and moving the wire saw positioned on the wire saw wheels among the wire saw wheels under the driving of the rotation of the wire saw wheels. The wire saw moving on the assembly plate is cut in a plurality of rows to form a plurality of rows of cutting zones. Polycrystalline silicon substrate is to cutting area direction propelling movement, and the cutting area that the contact multirow coping saw formed is cut into a plurality of flaky substrates, if need further cut into columnar structure with the substrate, then rotates 90 degrees with the substrate, or will assemble the frame, and the cutting area angle that takes each polycrystalline silicon evolution cutting device rotates 90 degrees even, realizes the further cutting to flaky substrate for flaky substrate is the columnar structure by the cutting of second time.
In the above embodiment, between the cutting assembly plate, relative position between cutting assembly plate and the assembly frame, the split nut that sets up on each cutting assembly plate is established to accessible threaded rod cover, through two mobilizable thread grooves of predetermineeing on the split nut, realize the combination and the separation to the threaded rod, realize removing and the locking when combining, it is relatively static to realize the cutting assembly plate that this split nut corresponds when the separation, in order to adjust each interval, also can be through the last predetermined location screw hole of assembly frame, cooperate the nut and press from both sides tight piece, press from both sides each cutting assembly plate of tight piece centre gripping, in order to realize pressing from both sides tight locking to each.
Referring to fig. 3, in some preferred embodiments, the device bracket 10 further includes a cutting positioning rod 11, and the cutting positioning rod 11 penetrates through the cutting assembly plates 20 arranged in an array, and both ends of the cutting assembly plates are connected to the device bracket 10.
Referring to fig. 1 and 2 together, in some preferred embodiments, a tensioning assembly 60 is further included, the tensioning assembly 60 includes a transmission rod 61 and a hydraulic rod 62, the hydraulic rod 62 is hinged to the plate surface of the cutting assembly plate 20 (in this embodiment, the hydraulic rod is disposed parallel to the plate surface of the cutting assembly plate for space saving), the hydraulic rod 62 is provided with a telescopic end, the transmission rod 61 is hinged to the plate surface of the cutting assembly plate 20, one end of the transmission rod 61 is hinged to the jigsaw wheel 30, and the other end of the transmission rod is hinged to the movable end of the hydraulic rod 62 (in this embodiment, for further space saving, the transmission rod may be an L-shaped structure, the bent portion of the transmission rod of the L-shaped structure is hinged to the cutting assembly plate, in other embodiments, the transmission rod may be a linear structure, and the hydraulic rod may be replaced by an electric telescopic rod).
Referring to fig. 1 and fig. 2, in the above embodiment, the cutting assembly plate 20 is provided with a sliding groove 21, and the wire saw wheel 30 hinged to the transmission rod 61 is slidably connected in the sliding groove 21 through a sliding block, so that the wire saw wheel hinged to the transmission rod functions as a tension wheel. In the use, through the flexible end of extension or shortening hydraulic stem, realize the rotation to the transfer link, and then the relative position of adjustment scroll saw wheel in the sliding tray, the interval between the adjustment scroll saw wheel, and the elasticity adjustment of scroll saw also make things convenient for getting of scroll saw in the maintenance process to put equally.
In the above embodiments, the drive assembly and the wire saw wheel are driven by a belt, and in other embodiments, the wire saw wheel is directly connected with the power output shaft of the motor, or a gear is used for driving.
Referring to fig. 2, in certain preferred embodiments, the drive assembly 50 further includes a belt tensioner 54, the belt tensioner 54 being in contact with the belt 53. Through setting up belt take-up pulley for the belt can carry out the adjustment of elasticity through belt take-up pulley at the in-process that carries out power transmission.
Referring to fig. 5 and fig. 6, in some preferred embodiments, the apparatus further includes a feeding assembly 80, the feeding assembly 80 includes a first slide rail 81, a feeding platform 82 and a substrate carrying plate 83, the feeding platform 82 is slidably connected to the first slide rail 81, a lifting and lowering hole is formed in the middle of the feeding platform 82, the size of the lifting and lowering hole is larger than the outer size of the lifting platform, the substrate carrying plate 83 is overlapped on the upper surface of the feeding platform 82, and the substrate is placed above the substrate carrying plate 83. The lifting assembly 90 is arranged at one end of the first sliding rail 81, the polysilicon squarer with the adjustable distance is arranged above the lifting assembly 90 and comprises a lifter 91, a lifting platform 92 and a second sliding rail 93, the lifter 91 is provided with a lifting end, the lifting end is connected with the lifting platform 92, the second sliding rail 93 is arranged at two sides of the lifting platform 92, and the end part of the second sliding rail 93 is butted with the end part of the first sliding rail 81. The cutting assemblies are arranged above the lifting platform 92 and are connected to the equipment rack 10 by sliding rails. In the conveying process, the base material is placed on the base material bearing plate, the base material bearing plate is placed on the feeding platform, and the feeding platform moves to the position above the lifting platform through the first sliding rail and the second sliding rail in sequence (the first sliding rail and the second sliding rail are communicated with each other). The lift work, drive lift platform and pass first bearing platform's lift abdication hole, and contact with the substrate loading board, continue to lift the substrate loading board, push the substrate in the cutting assembly, carry out the cutting of substrate by the coping saw, be cut into a plurality of flaky substrates, if need further cut into the columnar structure with the substrate, then drop lift platform, the substrate loading board gets back to on the feeding platform, feeding platform gets back to on the first slide rail along the second slide rail, operating personnel rotates 90 degrees with the substrate, the repetition pushes in and the lifting with the material, realize the operation to the further cutting of flaky substrate. The automation of the conveying process is realized.
Referring to fig. 5 and fig. 6, in the above embodiment, the polysilicon squarer further includes a feeding assembly 80 and a lifting assembly 90, the polysilicon squarer with adjustable spacing is disposed above the lifting assembly 90, and includes a lifter 91 and a lifting platform 92, the lifter 91 has a lifting end, and the lifting end is connected to the lifting platform 92. In the working process, the substrate is placed on the substrate bearing plate, the substrate bearing plate is placed above the lifting platform, and the lifter works to drive the lifting platform to push in towards the direction of the cutting assembly plate and perform cutting operation. The lifting assembly drives the base material to be lifted instead of driving the cutting assembly to move, so that base material swing in the cutting process is reduced, pressure and energy consumption of the lifting assembly are reduced, cutting gaps are reduced, and cutting precision is improved.
Referring to fig. 1 and 2, the driving assembly 50 is disposed through the plate surface of the cutting and assembling plate 20, one end of a driving motor 51 of the driving assembly is located on one surface of the cutting and assembling plate 20, one end of the driving motor, which is provided with a power output shaft, is located on the other surface of the cutting and assembling plate, the driving motor is fixed to the cutting and assembling plate through a bracket or directly fixed to the cutting and assembling plate through a bolt, and the driving assembly penetrating through the cutting and assembling plate is disposed, so that the occupied space of the driving assembly on one side of the cutting and assembling plate is reduced compared with a motor of a direct-connection wire saw wheel.
Referring to fig. 1 and 2, in the above embodiment, the cutting assembly plate 20 is provided with an opening 22, and the jigsaw wheel 30 is connected to the cutting assembly plate 20 at two sides of the opening 22, so that a space for retaining materials is conveniently reserved on the cutting assembly plate by the opening.
Referring to fig. 1 and 2, in some preferred embodiments, the cutting jig further includes a first reinforcing plate 23 and a second reinforcing plate 24, the first reinforcing plate 23 is a straight plate structure and is connected to the side of the cutting jig 20, and the second reinforcing plate 24 is an L-shaped structure and is connected to the side of the cutting jig 20 on both sides of the opening 22. Through setting up first reinforcing plate and second reinforcing plate, carry out the reinforcement to being equipped with the open-ended cutting pilot plate face, avoid cutting the pilot plate to set up opening back cutting pilot plate and be equipped with the opening both sides position of wire saw wheel and produce because of long-term atress and warp.
Referring to fig. 1, in the above embodiment, the wire saw wheel 30 is provided with a wire saw guide groove 31 on the wheel surface, and the size of the wire saw guide groove 31 is matched with the size of the wire saw 40.
In some preferred embodiments, two wire saw wheels can be used to cover the wire saw, and the diameter length of the wire saw wheel is used as a reserved space after the material is cut to cut the substrate.
It should be noted that, although the above embodiments have been described herein, the utility model is not limited thereto. Therefore, based on the innovative concepts of the present invention, the technical solutions of the present invention can be directly or indirectly applied to other related technical fields by making changes and modifications to the embodiments described herein, or by using equivalent structures or equivalent processes performed in the content of the present specification and the attached drawings, which are included in the scope of the present patent.

Claims (10)

1. The polycrystalline silicon squaring machine with the adjustable space is characterized by comprising an assembly frame, a cutting assembly plate, a wire saw wheel, a wire saw, a driving assembly and a space adjusting assembly;
the cutting and assembling plates are arranged and connected to the assembling frame through sliding rails, the sliding rails are arranged along the arrangement direction of the cutting and assembling plates, and the sliding rails enable the cutting and assembling plates to slide along the arrangement direction;
the number of the wire saw wheels is more than two, and the wire saw wheels are rotatably connected with the cutting assembly plate;
the wire saw is connected end to end and arranged around more than two wire saw wheels, and a cutting area is formed by the wire saw between the wire saw wheels;
the driving assembly is arranged on the cutting assembling plate on one side of the wire saw wheel, and a power output end of the driving assembly is in transmission connection with the wire saw wheel;
the spacing adjustment assembly comprises a split nut, a transmission rod and a transmission rod driving device, the split nut is arranged on the cutting assembly plate, the movable end of the split nut is combined to form a threaded hole, the transmission rod penetrates through the cutting assembly plate arranged in an arranging mode and is matched with the threaded hole of the split nut, and the transmission rod driving device is in transmission connection with the transmission rod.
2. The polysilicon squarer with adjustable spacing of claim 1, wherein the assembly frame further comprises a cutting positioning rod, the cutting positioning rod penetrates through the cutting assembly plate arranged in an array, and two ends of the cutting assembly plate are connected to the assembly frame.
3. The adjustable-spacing polysilicon squarer according to claim 1, further comprising a tensioning assembly, wherein the tensioning assembly comprises a telescopic rod and a transmission rod, the telescopic rod is hinged to the cutting assembly plate, the telescopic rod is provided with a telescopic end, the transmission rod is hinged to the cutting assembly plate, one end of the transmission rod is hinged to the wire saw wheel, and the other end of the transmission rod is hinged to a movable end of the telescopic rod.
4. The spacing-adjustable polycrystalline silicon squarer according to claim 3, wherein the transmission rod is of an L-shaped structure, and the bent part of the transmission rod of the L-shaped structure is hinged on the cutting assembly plate.
5. The adjustable-spacing polysilicon squarer according to claim 3, wherein the cutting assembly plate is provided with a sliding groove, and the wire saw wheel hinged with the transmission rod is connected with the sliding groove in a sliding manner.
6. The adjustable-pitch polysilicon squarer of claim 1 wherein the power take off of the drive assembly is in pulley drive connection with the wire saw wheel.
7. The adjustable-spacing polysilicon squarer according to claim 1, further comprising a lifting assembly, wherein the adjustable-spacing polysilicon squarer is arranged above the lifting assembly and comprises a lifter and a lifting platform, the lifter is provided with a lifting end, and the lifting end is connected with the lifting platform.
8. The adjustable-pitch polysilicon squarer according to claim 1 wherein the cutting assembly plate is provided with an opening and the wire saw wheel shaft is attached to the cutting assembly plate on both sides of the opening.
9. The adjustable-pitch polysilicon squarer according to claim 8, further comprising a first reinforcing plate and a second reinforcing plate, wherein the first reinforcing plate is of a straight plate structure and is connected to the side of the cutting assembly plate, and the second reinforcing plate is of an L-shaped structure and is connected to the side of the cutting assembly plate provided with the two sides of the opening.
10. The adjustable pitch polysilicon squarer of claim 1 wherein the drive assembly is disposed through the face of the cutting assembly plate.
CN202121642622.6U 2021-07-19 2021-07-19 Spacing-adjustable polycrystalline silicon squarer Active CN215589649U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202121642622.6U CN215589649U (en) 2021-07-19 2021-07-19 Spacing-adjustable polycrystalline silicon squarer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202121642622.6U CN215589649U (en) 2021-07-19 2021-07-19 Spacing-adjustable polycrystalline silicon squarer

Publications (1)

Publication Number Publication Date
CN215589649U true CN215589649U (en) 2022-01-21

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CN202121642622.6U Active CN215589649U (en) 2021-07-19 2021-07-19 Spacing-adjustable polycrystalline silicon squarer

Country Status (1)

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CN (1) CN215589649U (en)

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