CN215575900U

CN215575900U - Micro-lighting system and laser equipment

Info

Publication number: CN215575900U
Application number: CN202121777024.XU
Authority: CN
Inventors: 贾睿; 黄小伟; 桂文; 罗超; 林金福; 孙杰; 高云峰
Original assignee: Han s Laser Technology Industry Group Co Ltd
Current assignee: Shenzhen Hans Semiconductor Equipment Technology Co Ltd
Priority date: 2021-07-30
Filing date: 2021-07-30
Publication date: 2022-01-18
Anticipated expiration: 2031-07-30

Abstract

The embodiment of the utility model discloses a micro-illumination system and laser equipment, which comprise a light source, a first lens, a second lens and an objective lens, wherein the light source, the first lens, the second lens and the objective lens are sequentially arranged from an object space to an image space; the first lens and the second lens are both plano-convex lenses with positive focal power; the focal points of the first lens and the second lens are located at the TONG-in of the objective lens. According to the micro-illumination system provided by the embodiment of the utility model, the first lens, the second lens and the objective lens are matched, and the focuses of the first lens and the second lens are positioned on the TONG-in part of the objective lens, so that a uniform illumination surface is formed on the working plane of the objective lens, the illumination surface with the diameter phi of 0.68mm is achieved, the uniformity is more than or equal to 95%, the energy efficiency utilization rate is 98.2%, and the maximum imaging field of view phi of the objective lens can be uniformly covered with the diameter phi of 0.46 mm.

Description

Micro-lighting system and laser equipment

Technical Field

The utility model relates to the technical field of laser processing, in particular to a micro-lighting system and laser equipment.

Background

Laser machining is a commonly used machining means. The laser processing technology is a one-step processing technology for cutting, welding, surface processing, punching, micro-processing and the like of materials (including metals and non-metals) by utilizing the interaction characteristic of a laser beam and a substance.

In a processing scene with the laser processing precision requirement of less than or equal to 1um, laser light spot aggregation needs to be carried out by using an ultra-short-focus lens, and a detection imaging system simultaneously needs to meet the imaging requirement of small visual field and high resolution. It is necessary to use a laser co-concentration microscopy system for the processing of the product. The system comprises a laser processing system, a micro-illumination system and a micro-imaging system.

For a microscopic illumination system, on the premise of meeting the structural design of the whole system, the requirement of good illumination uniformity in an observation visual field is met. The prior microscopic illumination system has complex structure, poor illumination uniformity and poor illumination effect.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a microscopic illumination system and a laser device, which have high illumination uniformity and good illumination effect.

The embodiment of the utility model discloses a micro-lighting system, which comprises a light source, a first lens, a second lens and an objective lens, wherein the light source, the first lens, the second lens and the objective lens are sequentially arranged from an object space to an image space; the first lens and the second lens are both plano-convex lenses with positive focal power; the focal points of the first lens and the second lens are positioned at the entrance pupil of the objective lens.

Optionally, the micro-illumination system further comprises an adjustable aperture stop, the aperture stop being located between the light source and the first lens.

Optionally, the micro-lighting system further includes a polarizer, and the polarizer is located between the aperture stop and the first lens.

Optionally, the micro-illumination system further includes a field stop, and the field stop is located between the polarizer and the first lens.

Optionally, a ratio of the transmittance of the S polarized light to the transmittance of the P polarized light of the polarizer is greater than 50: 1.

Optionally, the aperture stop has an adjustment range of 0.3mm to 1.6 mm.

Optionally, the refractive index of the first lens ranges from 1.461 to 1.650, and the abbe number ranges from 40 to 70; the refractive index of the second lens G2 ranges from 1.461 to 1.650, and the Abbe number ranges from 40 to 70.

Optionally, the convex surface of the first lens and the convex surface of the second lens face each other.

Optionally, the objective lens is a 50-fold objective lens.

The embodiment of the utility model also discloses laser equipment comprising the micro-illumination system.

According to the micro-illumination system provided by the embodiment of the utility model, the first lens, the second lens and the objective lens are matched, and the focuses of the first lens and the second lens are positioned at the entrance pupil of the objective lens, so that a uniform illumination surface is formed on the working plane of the objective lens, the illumination surface with the diameter phi of 0.68mm is achieved, the uniformity is more than or equal to 95%, the energy efficiency utilization rate is 98.2%, and the maximum imaging field of view phi of the objective lens can be uniformly covered with the diameter phi of 0.46 mm.

Drawings

The accompanying drawings, which are included to provide a further understanding of the embodiments of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the principles of the utility model. It is obvious that the drawings in the following description are only some embodiments of the utility model, and that for a person skilled in the art, other drawings can be derived from them without inventive effort. In the drawings:

FIG. 1 is a schematic view of a microscope illumination system according to an embodiment of the utility model;

FIG. 2 is an analysis of an illumination surface according to an embodiment of the present invention;

FIG. 3 is a graph of the focus-spot radius relationship for an embodiment of the present invention.

Wherein, 1, a light source; 2. a first lens; 3. a second lens; 4. an objective lens; 5. an aperture diaphragm; 6. a polarizer; 7. and a field stop.

Detailed Description

It is to be understood that the terminology, the specific structural and functional details disclosed herein are for the purpose of describing particular embodiments only, and are representative, but that the present invention may be embodied in many alternate forms and should not be construed as limited to only the embodiments set forth herein.

The utility model is described in detail below with reference to the figures and alternative embodiments.

As shown in fig. 1, as an embodiment of the present invention, a micro-illumination system is disclosed, which includes a light source 1, a first lens 2, a second lens 3, and an objective lens 4 arranged in order from an object side to an image side; the first lens 2 and the second lens 3 are both plano-convex lenses with positive focal power; the focal points of the first lens 2 and the second lens 3 are located at the entrance pupil of the objective lens 4.

According to the micro-illumination system provided by the embodiment of the utility model, the first lens 2, the second lens 3 and the objective lens 4 are matched, and the focuses of the first lens 2 and the second lens 3 are positioned at the entrance pupil of the objective lens 4, so that a uniform illumination surface is formed on the working plane of the objective lens 4, the illumination surface with the diameter phi of 0.68mm is achieved, the uniformity is not less than 95%, the energy efficiency utilization rate is 98.2% as shown in fig. 2, and the maximum imaging view field phi of the objective lens 4 can be uniformly covered with the diameter phi of 0.46 mm. Referring to FIG. 3, the size of the light spot is changed by only 2% within the defocusing range of +/-1 mm, and the production and debugging are easy.

Specifically, the first lens 2 and the second lens 3 are both plano-convex lenses having positive optical power, and the convex surface of the first lens 2 and the convex surface of the second lens 3 face each other. The first lens 2 may convert the point light source 1 into parallel light, and the second lens 3 may condense the parallel light into the objective lens 4. The light source 1 may be an LED, and the objective lens 4 is a 50-fold objective lens 4.

Further, the micro-illumination system may further comprise an adjustable Aperture stop 5 (Aperture stop), the Aperture stop 5 being located between the light source 1 and the first lens 2. The aperture stop 5 can limit the size of the light beam entering the optical system. In the scheme, the incident quantity of light can be adjusted by adjusting the aperture diaphragm 5, and the brightness of the illumination surface is controlled. For example, when the luminance of the illumination surface needs to be bright, the aperture stop 5 may be adjusted to increase the incident amount of light. When the brightness of the illumination surface needs to be dark, the aperture diaphragm 5 can be adjusted to be small, and the incident quantity of light rays is reduced. More specifically, the aperture stop 5 has an adjustment range of 0.3mm to 1.6mm, and the degree of brightness in this range can satisfy most of the requirements of micro-illumination.

Further, the micro-illumination system may further comprise a Polarizer 6(Polarizer), the Polarizer 6 being located between the aperture stop 5 and the first lens 2. The polarizer 6 is also called a polarizing plate, a polarizing film, or the like, and is an optical element capable of converting natural light into polarized light. In the scheme, the polaroid 6 is arranged between the aperture diaphragm 5 and the first lens 2, so that the scattering phenomenon of light beams can be eliminated, stray light reflected by the surface of a product is effectively eliminated, and the interference of illumination is reduced. In addition, the polarizer 6 may further increase the illumination uniformity of the illumination. More specifically, the polarizer 6 has a ratio of S-polarized light transmittance (Ts) to P-polarized light transmittance (Tp) of more than 50:1, that is, Ts: tp is more than 50:1, the polarization degree is high, and the polarization effect is good.

Further, the micro-lighting system may further include a field stop 7, and the field stop 7 is located between the polarizer 6 and the first lens 2. The field stop 7 may limit the object imaging range. In the scheme, a field diaphragm 7 is arranged between the polaroid 6 and the first lens 2, and the size of the light emitting surface of the incident light source 1 is controlled through the field diaphragm 7, so that the size of the micro-lighting surface is controlled.

Further, the refractive index of the first lens 2 ranges from 1.461 to 1.650, and the Abbe number ranges from 40 to 70; the refractive index of the second lens 3G2 ranges from 1.461 to 1.650, and the Abbe number ranges from 40 to 70.

More specifically, the data of the microscope illumination system in the embodiment of the present invention are as follows:

referring to table 1, in the surface numbers, the thickness 8mm corresponding to the surface number 1 indicates the distance from the light source 1 to the aperture stop 5. The thickness of the aperture stop 5 corresponding to 30mm indicates the distance from the aperture stop 5 to the polarizer 6. The thickness of the polarizer 6 is 5mm, which represents the distance from the polarizer 6 to the field stop 7. The thickness 103.753mm corresponding to the field stop 7 indicates the distance of the field stop 7 from the first lens 2. Surface number 5 is the planar side of the first lens 2, and surface number 6 is the convex side of the first lens 2. Wherein the thickness corresponding to the surface number 5 is the thickness of the first lens 2 itself, that is, the thickness of the first lens 2 is 4.880mm, the refractive index is 1.52, and the abbe number is 64.2; the thickness 140mm corresponding to the surface number 6 indicates the distance from the first lens 2 to the second lens 3. Surface number 7 is the convex surface side of the second lens 3, and surface number 8 is the flat surface side of the first lens 2. The thickness corresponding to the surface number 7 is the thickness of the first lens 2 itself, that is, the thickness of the first lens 2 is 4.270mm, the refractive index is 1.52, and the abbe number is 64.2; the thickness 197.450mm corresponding to the surface number 8 indicates the distance from the second lens 3 to the objective lens 4. The thickness corresponding to the surface number 10 indicates the focal plane of the objective lens 4, the surface number 12 indicates the working distance of the objective lens 4, and the thickness corresponding to the objective lens 4 indicates the length of the objective lens 4.

As another embodiment of the present invention, a laser apparatus is disclosed, comprising the micro-illumination system as described above. The laser equipment also comprises a laser processing system and a microscopic imaging system. The laser processing system is used for laser processing, the microscopic imaging system is used for microscopic imaging, and the microscopic illumination system is used for illumination in a matching mode. The laser device of the embodiment adopts a micro-illumination system, and a uniform illumination surface is formed on the working plane of the objective lens 4 by matching the first lens 2, the second lens 3 and the objective lens 4 and enabling the focuses of the first lens 2 and the second lens 3 to be located at the entrance pupil of the objective lens 4.

The foregoing is a more detailed description of the utility model in connection with specific alternative embodiments, and the practice of the utility model should not be construed as limited to those descriptions. For those skilled in the art to which the utility model pertains, several simple deductions or substitutions can be made without departing from the spirit of the utility model, and all shall be considered as belonging to the protection scope of the utility model.

Claims

1. A micro-illumination system is characterized by comprising a light source, a first lens, a second lens and an objective lens which are sequentially arranged from an object side to an image side; the first lens and the second lens are both plano-convex lenses with positive focal power; the focal points of the first lens and the second lens are positioned at the entrance pupil of the objective lens.

2. The micro-illumination system of claim 1, further comprising an adjustable aperture stop, the aperture stop being positioned between the light source and the first lens.

3. The micro-illumination system of claim 2, further comprising a polarizer positioned between the aperture stop and the first lens.

4. The micro-illumination system of claim 3, further comprising a field stop, the field stop being positioned between the polarizer and the first lens.

5. The micro-illumination system of claim 3, wherein the polarizer has a ratio of S-polarized light transmission to P-polarized light transmission greater than 50: 1.

6. The micro-illumination system of claim 2, wherein the aperture stop is adjustable in a range of 0.3mm to 1.6 mm.

7. The micro-illumination system of any of claims 1 to 6, wherein the first lens has a refractive index in the range of 1.461 to 1.650, an Abbe number in the range of 40 to 70; the refractive index of the second lens G2 ranges from 1.461 to 1.650, and the Abbe number ranges from 40 to 70.

8. The micro-illumination system of claim 1, wherein the convex surface of the first lens and the convex surface of the second lens face each other.

9. The micro-illumination system of claim 1, wherein the objective lens is a 50 x objective lens.

10. A laser device comprising a micro-illumination system as claimed in any one of claims 1 to 9.