CN215573481U

CN215573481U - Offline detection device for vacuum magnetron sputtering coating end

Info

Publication number: CN215573481U
Application number: CN202121752998.2U
Authority: CN
Inventors: 刘文龙; 王斌; 张明华; 骆陈喜
Original assignee: Suzhou Jingbote Coated Glass Co ltd
Current assignee: Suzhou Jingbote Coated Glass Co ltd
Priority date: 2021-07-29
Filing date: 2021-07-29
Publication date: 2022-01-18
Anticipated expiration: 2031-07-29

Abstract

The off-line detection device comprises an end head, a base and a clamping block, wherein a fixed block is arranged on the bottom wall of the end head, a fixed groove is formed in the upper end of the base, the fixed block is inserted into the fixed groove, a sliding groove for the clamping block to slide is formed in the side wall of the fixed groove, and a clamping groove communicated with the sliding groove is formed in the side wall of the fixed block; the joint piece is connected with the driving piece, the joint piece can stretch into or keep away from under the drive of driving piece the joint groove. This application has the effect that makes things convenient for the end installation.

Description

Offline detection device for vacuum magnetron sputtering coating end

Technical Field

The application relates to the field of vacuum magnetron sputtering coating end detection, in particular to an off-line detection device for a vacuum magnetron sputtering coating end.

Background

The rotary target is used as an important component device in vacuum magnetron sputtering coating equipment, can rotate in a vacuum chamber when the coating equipment works, and a mechanism for driving the target to rotate is a rotary end. The maintenance cycle of a rotating tip is usually one year, and the tip needs to be removed for maintenance after one year of installation and use, wherein the key parameter is that the tip rotation torque cannot exceed 0.7 nm, otherwise the tip is considered to be unqualified for maintenance and needs to be removed again for maintenance.

Chinese patent with publication number CN210221358U discloses an off-line detection device for vacuum magnetron sputtering coating end, which comprises a driving mechanism, a platform, a first base and a second base, wherein the first base is provided with a first rotating end, the second base is provided with a second rotating end, the first rotating end comprises a first upper end and a first lower end, the second rotating end comprises a second upper end and a second lower end, the first upper end and the second upper end are both provided with inner cavities therein, and the first upper end and the second upper end are connected through a connecting shaft; the first base is provided with a center hole, the driving piece penetrates through the center hole to be rotatably connected with the first upper end, and the driving mechanism drives the first lower end to rotate so as to drive the inner cavity of the first upper end to rotate along the axis direction of the driving mechanism and further drive the inner cavity of the second upper end to rotate. When the first end is installed, the first lower end at the bottom of the first end and the nut screwing sleeve are required to be located on the same axis, then the cavity of the first upper end is aligned with the cavity of the second upper end, the two cavities are located on the same axis, and finally the nut screwing sleeve is rotated, so that the first end is fixed.

In the related art, the lower end of the end is aligned with the nut-tightening sleeve before the nut is tightened to tighten the nut-tightening sleeve, thereby fixing the end. The staff often need just can screw up the nut with the help of the instrument and tighten the sleeve pipe in operation process, and the operation is more complicated.

SUMMERY OF THE UTILITY MODEL

In order to facilitate the installation of the end head, the application provides an off-line detection device for the vacuum magnetron sputtering coating end head.

The application provides an off-line detection device for vacuum magnetron sputtering coating end adopts following technical scheme:

an off-line detection device for a vacuum magnetron sputtering coating end comprises an end head and a base, wherein a fixed block is arranged on the bottom wall of the end head, a fixed groove is formed in the upper end of the base, the fixed block is inserted into the fixed groove, the off-line detection device also comprises a clamping block, a sliding groove for the clamping block to slide is formed in the side wall of the fixed groove, and a clamping groove communicated with the sliding groove is formed in the side wall of the fixed block; the joint piece is connected with the driving piece, the joint piece can stretch into or keep away from under the drive of driving piece the joint groove.

Through adopting above-mentioned technical scheme, when the fixed block inserted the fixed slot, the drive driving piece can make the joint piece remove to the joint inslot to fix the end, need not screw up the sleeve pipe and can install the end, made things convenient for the installation of end.

Preferably, the joint piece is provided with a limiting block, and the side wall of the sliding groove is provided with a limiting groove for the limiting block to slide.

Through adopting above-mentioned technical scheme, can prevent that the joint piece is unexpected to break away from out of the groove that slides when removing.

Preferably, the driving piece comprises a pull rod and a handle, the pull rod is located at one end, far away from the fixed block, of the clamping block, the pull rod extends out of the side wall of the base, and the handle is located at one end, far away from the fixed block, of the pull rod.

Through adopting above-mentioned technical scheme, can drive the joint piece through pulling handle and remove, conveniently control the joint piece.

Preferably, the sliding groove is internally provided with a first elastic part, one end of the first elastic part is connected with the clamping block, and the other end of the first elastic part is connected with the side wall of the sliding groove far away from the fixed block.

Through adopting above-mentioned technical scheme, can prevent that the joint piece accident from breaking away from out the joint groove.

Preferably, the clamping block is close to one end of the fixing block is provided with an inclined plane, and the inclined plane faces to the notch of the fixing groove.

Through adopting above-mentioned technical scheme, when the fixed block inserted the fixed slot, the joint piece removed to the direction of keeping away from the fixed block under the guide on inclined plane to reach the purpose that makes things convenient for the fixed block installation.

Preferably, the driving part comprises a driving ring and a driving arm which are arranged at the bottom of the fixed groove, a connecting arm is arranged on the side wall of the driving ring, one end of the driving arm is rotatably connected with the connecting arm, and the other end of the driving arm is rotatably connected with the clamping block; the side wall of the fixed groove is provided with a containing groove for containing the connecting arm and the driving arm; the one end that the joint piece is close to the fixed block is equipped with the inclined plane, the inclined plane orientation the tank bottom of fixed slot.

Through adopting above-mentioned technical scheme, when the fixed block inserted the fixed slot, can drive the tank bottom removal of drive ring to the fixed slot to make the joint piece insert the joint groove, made things convenient for the installation of end.

Preferably, a second elastic part is arranged between the side wall of the limiting block close to the fixing block and the groove wall of the limiting groove.

Through adopting above-mentioned technical scheme, when taking out the end, the joint piece can move down out of the joint groove under the effect of second elastic component, has made things convenient for taking out of end.

Preferably, a third elastic member is disposed between a side wall of the driving ring close to the bottom of the fixed groove and the bottom wall of the fixed groove.

Through adopting above-mentioned technical scheme, when the fixed block shifted out the fixed slot, the drive ring can be under the effect of third elastic component to the direction removal of keeping away from the fixed slot tank bottom, makes things convenient for the installation of end next time.

Preferably, the lateral wall of fixed block is equipped with the guide block, be equipped with on the lateral wall of fixed slot and supply the gliding guide way of guide block.

Through adopting above-mentioned technical scheme, can fix a position the cavity orientation on the end when the end is installed, make things convenient for detection device's operation.

Preferably, the edge at the notch of the fixing groove is arranged in a chamfer.

Through adopting above-mentioned technical scheme, can make things convenient for the fixed block to insert the fixed slot.

In summary, the present application includes at least one of the following beneficial technical effects:

1. the clamping block is additionally arranged, and the end can be locked by changing the position of the clamping block, so that the installation and fixation of the end are facilitated;

2. the side wall of the fixed block is provided with the guide block, and the groove wall of the fixed groove is provided with the guide groove matched with the guide block, so that the positioning of the end head during installation is facilitated;

3. the edge at the notch of the fixing groove is arranged to be in an inverted angle shape, so that the fixing block can be conveniently inserted, and the installation of the end is facilitated.

Drawings

Fig. 1 is a schematic view of the overall structure of embodiment 1 of the present application.

Fig. 2 is a schematic view of the overall structure of the tip according to embodiment 1 of the present application.

Fig. 3 is a schematic view of a base structure in embodiment 1 of the present application.

Fig. 4 is a schematic view of a connection structure of the base and the tip according to embodiment 1 of the present application.

Fig. 5 is an enlarged view of a portion a in fig. 4.

Fig. 6 is a schematic view of the base structure of embodiment 2 of the present application.

Fig. 7 is an enlarged view of a portion B in fig. 6.

Description of reference numerals: 1. a tip; 11. a drive shaft; 12. a rotating shaft; 13. a fixed block; 131. a guide block; 132. a clamping groove; 2. a base; 21. fixing grooves; 22. a guide groove; 23. a sliding groove; 24. a limiting groove; 25. accommodating grooves; 3. a clamping block; 31. a pull rod; 32. a handle; 33. a first elastic member; 34. a limiting block; 4. a drive ring; 41. a connecting arm; 42. a drive arm; 5. a second elastic member; 6. a third elastic member; 7. a support; 71. a connecting shaft; 72. an electric motor.

Detailed Description

The present application is described in further detail below with reference to figures 1-7.

The embodiment of the application discloses an off-line detection device for a vacuum magnetron sputtering coating end.

Example 1

Referring to fig. 1 and 2, the off-line detection device for the vacuum magnetron sputtering coating end comprises a support 7, wherein two bases 2 are arranged on the upper surface of the support 7. All can dismantle on two bases 2 and be connected with end 1, the 1 bottom of end is vertical to be equipped with drive shaft 11, is equipped with the through-hole that supplies drive shaft 11 to pass on the base 2. The head 1 is horizontally provided with a rotating shaft 12, and the rotating shaft 12 can be driven by a driving shaft 11 to rotate. The rotating shafts 12 of the two end heads 1 can synchronously rotate through the connecting shaft 71, the bottom end of one base 2 is provided with a motor 72, the shaft of the motor 72 drives the driving shaft 11 to rotate, and the motor 72 is fixed on the bracket 7.

Referring to fig. 2, a fixing block 13 is disposed at the bottom end of the tip 1, the fixing block 13 is ring-shaped, and the driving shaft 11 is located inside the fixing block 13. Referring to fig. 3, a fixing groove 21 for inserting the fixing block 13 is formed in the top end of the base 2, an edge at a notch of the fixing groove 21 is formed in a chamfered shape, a guide groove 22 is formed in a groove wall of the fixing groove 21, and a guide block 131 capable of sliding up and down in the guide groove 22 is formed in the outer side wall of the fixing block 13.

Referring to fig. 4 and 5, a clamping groove 132 is formed in the outer side wall of the fixing block 13, a sliding groove 23 communicated with the clamping groove 132 is formed in the side wall of the fixing groove 21, a clamping block 3 is arranged in the sliding groove 23, and the clamping block 3 can extend into or separate from the clamping groove 132 in the sliding groove 23. The driving piece in this embodiment includes pull rod 31 and handle 32, and pull rod 31 is located joint piece 3 and keeps away from the one end of fixed block 13 and pull rod 31 stretches out base 2, and handle 32 is located the one end that joint piece 3 was kept away from to pull rod 31, through pulling handle 32, can remove joint piece 3.

The cover is equipped with first elastic component 33 on the pull rod 31, and first elastic component 33 is the spring, and the one end of spring and the one end butt that fixed block 13 was kept away from to joint piece 3, the cell wall butt that the other end and sliding groove 23 kept away from 3 one ends of joint piece. The side wall of the clamping block 3 is provided with a limiting block 34, and the groove wall of the sliding groove 23 is provided with a limiting groove 24 for the limiting block 34 to slide. The one end that joint piece 3 is close to fixed block 13 is equipped with the inclined plane, and the notch of inclined plane orientation fixed slot 21.

The implementation principle of the embodiment 1 is as follows: when the end 1 is installed, the guide block 131 is aligned to the guide groove 22, then the fixing block 13 is inserted into the fixing groove 21 downwards, the bottom end of the fixing block 13 is in contact with the clamping block 3, the clamping block 3 moves towards one end far away from the fixing block 13 under the guide of the inclined plane, the fixing block 13 is continuously inserted until the sliding groove 23 is communicated with the clamping groove 132, at the moment, the clamping block 3 slides into the clamping groove 132 under the action of the first elastic piece 33, and the end 1 is in a locking state at the moment. On the contrary, if want to take out the end 1, only need to pull handle 32 to the direction of keeping away from fixed block 13 until joint piece 3 breaks away from joint groove 132 completely, end 1 removes the locking state this moment, takes out end 1 after, unclamps handle 32, joint piece 3 slides to the normal position under the effect of first elastic component 33, can not break away from out of sliding groove 23 under the effect of stopper 34.

Example 2

The present embodiment differs from embodiment 1 in that:

referring to fig. 6 and 7, the driving member includes a driving ring 4 and a driving arm 42, the driving ring 4 is located in the fixing groove 21, a connecting arm 41 is disposed on a side wall of the driving ring 4, the driving arm 42 is located at one end of the connecting arm 41 away from the driving ring 4, one end of the driving arm 42 is rotatably connected to the connecting arm 41, the other end of the driving arm is rotatably connected to the bottom of the clamping block 3, an accommodating groove 25 is disposed on a groove wall of the fixing groove 21, and the connecting arm 41 and the driving arm 42 can move in the accommodating groove 25.

Referring to fig. 6 and 7, the inclined surface of the clamping block 3 is located at one end of the clamping block 3 close to the fixed block 13, and the inclined surface faces the bottom of the fixed groove 21. The limiting groove 24 is internally provided with a second elastic part 5, the second elastic part 5 is a spring, one end of the second elastic part 5 is abutted against one end of the limiting block 34 close to the fixing block 13, and the other end of the second elastic part is abutted against the groove wall of the limiting groove 24 close to the fixing block 13.

Referring to fig. 7, the driving ring 4 is provided at its bottom end with a third elastic member 6, the third elastic member 6 is a spring, one end of the spring abuts against the bottom end of the driving ring 4, and the other end abuts against the bottom wall of the fixing groove 21.

The implementation principle of the embodiment 2 is as follows: when the end 1 is installed, the fixing block 13 is inserted into the fixing groove 21, when the bottom end of the fixing block 13 is not in contact with the driving ring 4, the clamping block 3 is located at one end, away from the fixing block 13, of the sliding groove 23 under the action of the second elastic piece 5, the driving arm 42 is in an inclined state, one end, close to the clamping block 3, of the driving arm 42 is away from the fixing block 13, and one end, close to the connecting arm 41, of the driving arm 42 is close to the fixing block 13. Continuing to insert fixed block 13, when the bottom of fixed block 13 contacts with drive ring 4, fixed block 13 can drive ring 4 and move down, linking arm 41 on the lateral wall of drive ring 4 can exert a downward force for actuating arm 42, under the effect of downward force, the one end that actuating arm 42 is close to joint piece 3 can be close to fixed block 13 gradually, thereby drive joint piece 3 to slide to the direction that is close to fixed block 13 until joint piece 3 inserts joint groove 132, end 1 is in the locking state this moment, under the effect of the gravity of end 1 itself, can keep the locking state all the time. On the contrary, if the end 1 is to be taken out, only the end 1 needs to be directly pulled out upwards, the clamping block 3 will move in a direction away from the fixed block 13 under the action of the second elastic member 5, and simultaneously, the driving ring 4 moves upwards under the action of the third elastic member 6, so that the driving arm 42 is changed from a vertical state to an inclined state, and one end of the driving arm 42 close to the clamping block 3 can be away from the fixed block 13.

The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.

Claims

1. The utility model provides an off-line detection device for vacuum magnetron sputtering coating end, includes end (1) and base (2), be equipped with fixed block (13) on the diapire of end (1), base (2) upper end is equipped with fixed slot (21), fixed block (13) are inserted fixed slot (21), its characterized in that: the fixing groove is characterized by further comprising a clamping block (3), a sliding groove (23) for the clamping block (3) to slide is formed in the side wall of the fixing groove (21), and a clamping groove (132) communicated with the sliding groove (23) is formed in the side wall of the fixing block (13); the joint piece (3) is connected with the driving piece, the joint piece (3) can stretch into or keep away from under the drive of driving piece the joint groove (132).

2. The off-line detection device for the vacuum magnetron sputtering coating end according to claim 1, characterized in that: be equipped with stopper (34) on joint piece (3), be equipped with the confession on the lateral wall in groove (23) that slides stopper (34) gliding spacing groove (24).

3. The off-line detection device for the vacuum magnetron sputtering coating end according to claim 2, characterized in that: the driving piece includes pull rod (31) and handle (32), pull rod (31) are located joint piece (3) are kept away from the one end of fixed block (13), pull rod (31) stretch out the lateral wall of base (2), handle (32) are located pull rod (31) are kept away from the one end of fixed block (13).

4. The off-line detection device for the vacuum magnetron sputtering coating end according to claim 3, characterized in that: be equipped with first elastic component (33) in groove (23) slides, first elastic component (33) one end with joint piece (3) are connected, first elastic component (33) other end with groove (23) slides and keeps away from the lateral wall of fixed block (13) is connected.

5. The off-line detection device for the vacuum magnetron sputtering coating end according to claim 3, characterized in that: the clamping block (3) is close to one end of the fixing block (13) and is provided with an inclined plane, and the inclined plane faces to a notch of the fixing groove (21).

6. The off-line detection device for the vacuum magnetron sputtering coating end according to claim 2, characterized in that: the driving piece comprises a driving ring (4) and a driving arm (42) which are arranged at the bottom of the fixed groove (21), a connecting arm (41) is arranged on the side wall of the driving ring (4), one end of the driving arm (42) is rotatably connected with the connecting arm (41), and the other end of the driving arm is rotatably connected with the clamping block (3); the side wall of the fixed groove (21) is provided with a containing groove (25) for containing the connecting arm (41) and the driving arm (42); the clamping block (3) is close to one end of the fixed block (13) and is provided with an inclined plane, and the inclined plane faces to the bottom of the fixed groove (21).

7. The off-line detection device for the vacuum magnetron sputtering coating end according to claim 6, characterized in that: and a second elastic part (5) is arranged between the side wall of the limiting block (34) close to the fixing block (13) and the groove wall of the limiting groove (24).

8. The off-line detection device for the vacuum magnetron sputtering coating end according to claim 6, characterized in that: and a third elastic piece (6) is arranged between the side wall of the driving ring (4) close to the bottom of the fixing groove (21) and the bottom wall of the fixing groove (21).

9. The off-line detection device for the vacuum magnetron sputtering coating end according to claim 1, characterized in that: be equipped with guide block (131) on the lateral wall of fixed block (13), be equipped with on the lateral wall of fixed slot (21) and supply the gliding guide way (22) of guide block (131).

10. The off-line detection device for the vacuum magnetron sputtering coating end according to claim 1, characterized in that: the edge at the notch of the fixing groove (21) is arranged in a chamfer way.