CN215560789U - Automatic cleaning device for auxiliary chamber of single crystal furnace - Google Patents
Automatic cleaning device for auxiliary chamber of single crystal furnace Download PDFInfo
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- CN215560789U CN215560789U CN202121307462.XU CN202121307462U CN215560789U CN 215560789 U CN215560789 U CN 215560789U CN 202121307462 U CN202121307462 U CN 202121307462U CN 215560789 U CN215560789 U CN 215560789U
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Abstract
The utility model discloses an automatic cleaning device for a single crystal furnace auxiliary chamber, which comprises a moving mechanism, a lifting mechanism, an auxiliary lifting mechanism, a cleaning mechanism and a control system for controlling the lifting mechanism and the cleaning mechanism to operate; the lifting mechanism is vertically and fixedly connected to the moving mechanism, and the top of the lifting mechanism is connected with the cleaning mechanism; the lifting mechanism comprises a plurality of lifting joints and a transmission device, wherein the lifting joints are sequentially sleeved from bottom to top according to pipe diameters and are arranged in a step shape; the lifting mechanism has the advantages of simple structure, reasonable design, uniform lifting section by section, good lifting stability and reliability, good self-locking property, small volume, flexible operation, safety, reliability, high working efficiency, wide application prospect and contribution to popularization and application.
Description
Technical Field
The utility model belongs to the technical field of single crystal furnaces, and particularly relates to an automatic cleaning device for an auxiliary chamber of a single crystal furnace.
Background
The monocrystalline silicon is an important material of a solar cell and a semiconductor chip, the preparation method of the monocrystalline silicon is mainly a Czochralski method and is realized by adopting a monocrystalline furnace, and the process flow comprises the processes of vacuumizing, leak detection, pressure treatment, material melting, stabilization, fusion welding, seeding, shouldering, shoulder rotating, diameter equalization, ending, furnace stopping and the like. The cleanliness of the auxiliary chamber of the single crystal furnace has great influence on the quality of the single crystal silicon, at present, the cleaning of the auxiliary chamber of the traditional single crystal furnace is usually realized by manually holding a specially-made long rod, cleaning cloth is wound on the top end of the long rod, and the cleaning cloth is realized by the up-and-down movement of the long rod. However, as the sub-chamber height is high, up to nearly 10 meters of sub-chamber of the single crystal furnace has gradually emerged from the original 3 meters. The cleaning work of the auxiliary chamber of the single crystal furnace is individual force, the long rod which is as long as nearly 7 and 8 meters is usually needed during cleaning, the cleaning work is limited by the weight and the length of the long rod, the manual work is difficult to operate, the long rod is too long, the operation in a limited space is inconvenient, the cleaning is not easy, the cleaning effect is restricted by personal emotional factors, a plurality of dead corners which cannot be cleaned are possibly left after the cleaning, and the cleaning effect is unstable. This is a relatively headache problem for quality control of the pulled single crystal silicon rod. In addition, the number of the single crystal furnaces of each factory is increased sharply at present, the demand of cleaning work on workers is increased, and the labor cost is greatly increased. Therefore, it is urgently needed to develop an automatic cleaning device for the auxiliary chamber of the single crystal furnace to solve the technical problems.
In view of the above, the present invention is particularly proposed.
SUMMERY OF THE UTILITY MODEL
Aiming at the problems in the prior art, the utility model aims to provide the automatic cleaning device for the auxiliary chamber of the single crystal furnace, which has the advantages of simple structure, reasonable design, uniform lifting of the lifting mechanism section by section, good lifting stability and reliability, good self-locking property, small volume, flexible operation, safety, reliability, high working efficiency, wide application prospect and contribution to popularization and application.
In order to achieve the aim, the utility model provides an automatic cleaning device for an auxiliary chamber of a single crystal furnace, which comprises a moving mechanism, a lifting mechanism, an auxiliary lifting mechanism, a cleaning mechanism and a control system for controlling the lifting mechanism and the cleaning mechanism to operate; the lifting mechanism is vertically and fixedly connected to the moving mechanism, and the top of the lifting mechanism is connected with the cleaning mechanism; the lifting mechanism comprises a plurality of lifting joints and a transmission device, the lifting joints are sequentially sleeved from bottom to top according to pipe diameters and are arranged in a ladder shape, the transmission device drives the lifting joint at the bottom to ascend or descend, and the lifting joint at the bottom drives the rest lifting joints to ascend or descend section by section through an auxiliary lifting mechanism.
Preferably, the auxiliary lifting mechanism comprises a plurality of movable pulleys and matched steel wire ropes, the lifting joints are provided with the movable pulleys, two ends of the steel wire rope of the movable pulley bypassing the lowermost lifting joint are respectively fixed on the base of the lifting mechanism and the outer wall of the lifting joint of the penultimate section, and two ends of the steel wire rope of the movable pulley bypassing the other lifting joints are respectively fixed on the outer walls of the lifting joints adjacent to the movable pulley above and below the movable pulley;
preferably, the outer/inner wall of each lifting joint is provided with a longitudinal guide strip, and the inner/outer wall of each adjacent lifting joint is provided with a guide groove matched with the longitudinal guide strip;
preferably, the transmission device comprises a trapezoidal screw and a trapezoidal screw nut matched with the trapezoidal screw, the lowermost lifting joint is connected with the trapezoidal screw through the trapezoidal screw nut, and the trapezoidal screw is driven by a lifting motor;
preferably, the upper end of the uppermost lifting joint is provided with a storage plate for fixing a cleaning mechanism;
preferably, the moving mechanism is a moving cart, and four corners of the bottom of the moving cart are provided with casters with locking structures.
The automatic cleaning device for the auxiliary chamber of the single crystal furnace has the following beneficial effects:
1. the utility model effectively avoids the technical problem that the cleaning effect is poor because the difficulty of manually operating a seven-eight long rod in the prior art is larger, the operation of the lifting mechanism of the utility model only needs a transmission device to drive the lowermost lifting joint, the lifting of the other lifting joints is realized by an auxiliary lifting mechanism which does not need electric energy driving, namely, a trapezoidal screw is self-locked and connected with the lowermost lifting joint through a trapezoidal screw nut, because steel wire ropes which bypass a movable pulley of the lowermost lifting joint are respectively fixed on a base of the lifting mechanism and the outer wall of the penultimate lifting joint, the length of the steel wire ropes is unchanged, when the lowermost lifting joint moves upwards/downwards, a movable pulley of the lowermost lifting joint downwards/upwards pulls the steel wire ropes, the steel wire ropes drive the lifting joint of the penultimate lifting joint to move upwards/downwards, and so on, the lifting mechanism has the advantages that the rest lifting sections uniformly and synchronously ascend/descend section by section, the energy consumption is low, the cost is greatly saved, the running stability and reliability of the lifting mechanism are guaranteed, the structure is simple, the design is reasonable, the self-locking performance is good, the size is small, the operation and the control are flexible, the safety and the reliability are realized, the working efficiency is high, the wide application prospect is realized, and the popularization and the application are facilitated.
2. Because there is certain clearance that supplies wire rope to pass between the adjacent lift festival, in the operation process, can produce some and rock, and then the outer/inner wall through the lift festival is equipped with at least one vertical guide strip, the interior/outer wall of adjacent lift festival be equipped with vertical guide strip matched with direction recess, the lift festival can not produce at the lift in-process and rock, the stability and the good reliability of going up and down.
Drawings
FIG. 1 is a sectional view of an elevating mechanism of an automatic cleaning device for a sub-chamber of a single crystal furnace according to the present invention.
FIG. 2 is a schematic structural diagram of an automatic cleaning device for an auxiliary chamber of a single crystal furnace provided by the utility model
In the figure:
1. the moving mechanism 11, the caster 2, the lifting mechanism 21, the lowermost lifting joint 22, the lifting joint 23 of the penultimate section, the lifting joint 24 of the penultimate section, the uppermost lifting joint 25, the storage plate 26, the base 3, the auxiliary lifting mechanism 31, the movable pulley 32, the steel wire rope 4, the cleaning mechanism 5, the trapezoidal screw rod 6, the trapezoidal screw nut 7 and the lifting motor are arranged on the base, and the lifting motor is arranged on the base.
Detailed Description
The present invention will be further described with reference to the following specific embodiments and accompanying drawings to assist in understanding the contents of the utility model.
As shown in fig. 1-2, the automatic cleaning device for the auxiliary chamber of the single crystal furnace provided by the utility model comprises a moving mechanism 1, a lifting mechanism 2, an auxiliary lifting mechanism 3, a cleaning mechanism 4 and a control system for controlling the operation of the lifting mechanism 2 and the cleaning mechanism 4; the lifting mechanism 2 is vertically and fixedly connected to the moving mechanism 1, and the top of the lifting mechanism is connected with a cleaning mechanism 4. The operation of the lifting mechanism 2 and the cleaning mechanism 4 is controlled through the control system, and program control is adopted, so that each set area can not be omitted, the cleaning effect is better, and the cleaning efficiency is higher. The moving mechanism 1 is a moving cart, and four corners of the bottom of the moving cart are provided with trundles 11 with locking structures.
As shown in fig. 2, the lifting mechanism 2 includes a plurality of lifting joints and a transmission device which are sequentially sleeved from bottom to top according to pipe diameters and are arranged in a ladder shape, and an object placing plate 25 for fixing the cleaning mechanism 4 is arranged at the upper end of the uppermost lifting joint 24. The transmission device drives the lowest lifting joint 21 to ascend or descend, and the lowest lifting joint 21 drives the other lifting joints to ascend or descend section by section through the auxiliary lifting mechanism 3.
The auxiliary lifting mechanism 3 comprises a movable pulley 31 and a matched steel wire rope 32, the lifting joints are provided with the movable pulleys 31, two ends of the steel wire rope 32 which bypasses the movable pulley 31 of the lifting joint 21 at the lowest part are respectively fixed on the base 26 of the lifting mechanism 2 and the outer wall of the lifting joint 22 at the penultimate part, and two ends of the steel wire rope 32 which bypasses the movable pulleys 31 of the other lifting joints are respectively fixed on the outer walls of the lifting joints which are adjacent up and down.
The transmission device comprises a trapezoidal lead screw 5 and a trapezoidal lead screw nut 6 matched with the trapezoidal lead screw 5, the lifting joint 21 at the lowest part is connected with the trapezoidal lead screw 5 through the trapezoidal lead screw nut 6, and the trapezoidal lead screw 5 is driven by a lifting motor 7.
Because there is certain clearance that supplies wire rope 32 to pass between the adjacent lift festival, can produce and rock at the operation in-process, and then be equipped with at least one vertical guide strip through the outer/inner wall of lift festival, the interior/outer wall of adjacent lift festival is equipped with and vertical guide strip matched with direction recess, and the guarantee lift festival can not produce at the lift in-process and rock.
The working principle of the lifting mechanism 2 is as follows: the lifting motor 7 drives the trapezoidal screw 5 to rotate forwards or backwards, the trapezoidal screw nut 6 drives the lowermost lifting joint 21 to move upwards along the trapezoidal screw 5, the length of the steel wire rope 32 is unchanged because the steel wire rope 32 bypassing the movable pulley 31 of the lowermost lifting joint 21 is respectively fixed on the base 26 of the lifting mechanism 2 and on the outer wall of the penultimate lifting joint 22, when the lowermost lifting joint 21 moves upwards, the movable pulley 31 of the lowermost lifting joint 21 pulls the steel wire rope 32 downwards, the steel wire rope 32 drives the penultimate lifting joint 22 to move upwards, then, because one end of the steel wire rope 32 bypassing the movable pulley 31 of the penultimate lifting joint 22 is fixed on the lowermost lifting joint 21, the other end of the steel wire rope is fixed on the penultimate lifting joint 23, when the penultimate lifting joint 22 moves upwards, the movable pulley 31 of the penultimate lifting joint 22 pulls the steel wire rope 32 downwards, the steel wire rope 32 drives the lifting joint 23 of the penultimate section to move upwards, and by analogy, the lifting joints uniformly and synchronously ascend section by section until the lifting joint 21 at the lowest part ascends to the stop position, the lifting joint 24 at the uppermost part completes the upward movement, and at this time, the lifting mechanism 2 completes the ascending operation.
Similarly, when the lifting mechanism 2 descends, the lifting motor 7 drives the trapezoidal screw 5 to rotate reversely or positively, the trapezoidal screw nut 6 drives the lowermost lifting joint 21 to move downwards along the trapezoidal screw 5, the movable pulley 31 of the lowermost lifting joint 21 pulls the steel wire rope 32 upwards to drive the other lifting joints to move downwards uniformly and synchronously section by section until the lowermost lifting joint 21 descends to the initial position, and then the lifting mechanism 2 finishes the descending operation.
The present invention has been described in detail with reference to specific embodiments, which are provided to assist in understanding the core concepts of the present invention. It should be understood that any obvious modifications, equivalents and other improvements made by those skilled in the art without departing from the spirit of the present invention are intended to be included within the scope of the present invention.
Claims (6)
1. An automatic cleaning device for an auxiliary chamber of a single crystal furnace comprises a moving mechanism, a lifting mechanism, an auxiliary lifting mechanism, a cleaning mechanism and a control system for controlling the lifting mechanism and the cleaning mechanism to operate; the lifting mechanism is vertically and fixedly connected to the moving mechanism, and the top of the lifting mechanism is connected with the cleaning mechanism; the lifting mechanism is characterized by comprising a plurality of lifting joints and a transmission device, wherein the lifting joints are sequentially sleeved from bottom to top according to pipe diameters and are arranged in a ladder shape, the transmission device drives the lifting joint at the bottom to ascend or descend, and the lifting joint at the bottom drives the other lifting joints to ascend or descend section by section through an auxiliary lifting mechanism.
2. The automatic cleaning device for the auxiliary chamber of the single crystal furnace as claimed in claim 1, wherein the auxiliary lifting mechanism comprises a plurality of movable pulleys and a plurality of steel wire ropes matched with the movable pulleys, the movable pulleys are arranged on the lifting joints, two ends of the steel wire rope which bypasses the movable pulley of the lowermost lifting joint are respectively fixed on a base of the lifting mechanism and the outer wall of the lifting joint of the penultimate section, and two ends of the steel wire rope which bypasses the movable pulleys of the other lifting joints are respectively fixed on the outer walls of the lifting joints which are adjacent up and down.
3. The automatic cleaning device for the auxiliary chamber of the single crystal furnace as claimed in claim 2, wherein the outer/inner walls of the lifting joints are provided with longitudinal guide strips, and the inner/outer walls of the adjacent lifting joints are provided with guide grooves matched with the longitudinal guide strips.
4. The automatic cleaning device for the auxiliary chamber of the single crystal furnace as claimed in claim 1, wherein the transmission device comprises a trapezoidal lead screw and a trapezoidal lead screw nut matched with the trapezoidal lead screw, the lowermost lifting joint is connected with the trapezoidal lead screw through the trapezoidal lead screw nut, and the trapezoidal lead screw is driven by a lifting motor.
5. The automatic cleaning device for the auxiliary chamber of the single crystal furnace according to claim 1, wherein an upper end of the uppermost lifting joint is provided with a storage plate for fixing a cleaning mechanism.
6. The automatic cleaning device for the auxiliary chamber of the single crystal furnace as claimed in claim 1, wherein the moving mechanism is a moving cart, and four corners of the bottom of the moving cart are provided with casters with locking structures.
Priority Applications (1)
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CN202121307462.XU CN215560789U (en) | 2021-06-11 | 2021-06-11 | Automatic cleaning device for auxiliary chamber of single crystal furnace |
Applications Claiming Priority (1)
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CN202121307462.XU CN215560789U (en) | 2021-06-11 | 2021-06-11 | Automatic cleaning device for auxiliary chamber of single crystal furnace |
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CN215560789U true CN215560789U (en) | 2022-01-18 |
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CN202121307462.XU Active CN215560789U (en) | 2021-06-11 | 2021-06-11 | Automatic cleaning device for auxiliary chamber of single crystal furnace |
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2021
- 2021-06-11 CN CN202121307462.XU patent/CN215560789U/en active Active
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