CN215555057U - Quartz carrier with limiting function - Google Patents

Quartz carrier with limiting function Download PDF

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Publication number
CN215555057U
CN215555057U CN202121159546.3U CN202121159546U CN215555057U CN 215555057 U CN215555057 U CN 215555057U CN 202121159546 U CN202121159546 U CN 202121159546U CN 215555057 U CN215555057 U CN 215555057U
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nuts
fixing
grooves
connecting plates
plates
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李光华
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Shenyang Smbayer Semiconductor Technology Co ltd
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Shenyang Xinbei Yier Semiconductor Technology Co ltd
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Abstract

The utility model provides a quartz carrier with a limiting function, and relates to the technical field of quartz; the quartz carrier is used for carrying wafers, and the quartz carrier with the limiting function comprises: the device comprises a support column, a first connecting plate, a first sliding chute, a first fixing shaft, a first limiting groove, a first nut, a second connecting plate, a second sliding chute, a second fixing shaft, a second limiting groove and a second nut; the four support columns are vertically arranged, and distances are reserved among the four support columns; two ends of the two first connecting plates are respectively connected with the two adjacent supporting columns, and the two first connecting plates are opposite in position; the two first sliding chutes are respectively arranged on the two first connecting plates; the outer walls of the two ends of the first fixing shafts are provided with first external threads, the two ends of the two first fixing shafts are embedded into the two first sliding grooves respectively, and a distance is reserved between the two first fixing shafts.

Description

Quartz carrier with limiting function
Technical Field
The utility model relates to the technical field of quartz, in particular to a quartz carrier with a limiting function.
Background
At present, in the related art, the quartz carrier is a device used for storing wafers, and in the prior art, only a certain type of wafer can be stored, and the stability is low. Therefore, it is necessary to design a device that can store different types of wafers and improve the applicability of the device.
SUMMERY OF THE UTILITY MODEL
The present invention is directed to solving at least one of the problems of the prior art or the related art.
Therefore, the utility model provides a quartz carrier with a limiting function.
In view of the above, the present invention provides a quartz carrier with a position limiting function, the quartz carrier is used for carrying wafers, and the quartz carrier with the position limiting function comprises: the device comprises a support column, a first connecting plate, a first sliding chute, a first fixing shaft, a first limiting groove, a first nut, a second connecting plate, a second sliding chute, a second fixing shaft, a second limiting groove and a second nut; the four support columns are vertically arranged, and distances are reserved among the four support columns; two ends of the two first connecting plates are respectively connected with the two adjacent supporting columns, and the two first connecting plates are opposite in position; the two first sliding chutes are respectively arranged on the two first connecting plates; the outer walls of two ends of the first fixed shafts are provided with first external threads, two ends of the two first fixed shafts are respectively embedded into the two first sliding grooves, and a distance is reserved between the two first fixed shafts; at least two first limiting grooves are respectively arranged on the two first fixing shafts, a distance is reserved between every two adjacent first limiting grooves, and one end of the wafer is embedded into the first limiting grooves; first internal threads are arranged in the first nuts, the four first nuts are respectively sleeved at two ends of the two first fixed shafts, and the first nuts are attached to one side of the first connecting plate; two ends of the two second connecting plates are respectively connected with the two adjacent supporting columns, the two second connecting plates are opposite in position, and the second connecting plates are positioned below the first connecting plates; the two second sliding grooves are respectively arranged on the two second connecting plates; the outer walls of the two ends of the second fixing shafts are provided with second external threads, the two ends of the two second fixing shafts are respectively embedded into the two second sliding grooves, and a distance is reserved between the two second fixing shafts; at least two second limiting grooves are respectively arranged on the two second fixing shafts, a distance is reserved between every two adjacent second limiting grooves, and the other end of the wafer is embedded into the second limiting grooves; second internal threads are arranged in the second nuts, the four second nuts are respectively sleeved at two ends of the two second fixed shafts, and the second nuts are attached to one side of the second connecting plate; the first internal thread is matched with the first external thread, and the second internal thread is matched with the second external thread.
In the technical scheme, firstly, four support columns are vertically arranged, a distance is reserved between the four support columns, two ends of two first connecting plates are respectively connected with two adjacent support columns, and the two first connecting plates are opposite in position, so that the connecting effect of the first connecting plates and the support columns is realized; secondly, the two first sliding grooves are respectively arranged on the two first connecting plates, so that the effect that the first sliding grooves are arranged on the first connecting plates is realized; thirdly, the outer walls of the two ends of the first fixing shafts are provided with first external threads, the two ends of the two first fixing shafts are respectively embedded into the two first sliding grooves, and the two first fixing shafts are spaced from each other, so that the first fixing shafts can slide in the first sliding grooves; thirdly, at least two first limiting grooves are respectively arranged on the two first fixing shafts, a distance is reserved between every two adjacent first limiting grooves, and one end of the wafer is embedded into the first limiting grooves, so that the wafer is embedded into the first limiting grooves; thirdly, through arranging first internal threads in the first nuts, respectively sleeving two ends of the two first fixed shafts with the four first nuts, and attaching the first nuts to one side of the first connecting plate, the first nuts are rotated forwards or reversely, so that the first nuts are attached to the first connecting plate, and the position of the first fixed shafts is fixed; thirdly, two ends of the two second connecting plates are respectively connected with the two adjacent support columns, the two second connecting plates are opposite in position, and the second connecting plates are located below the first connecting plates, so that the second connecting plates are connected with the support columns; thirdly, the two second sliding chutes are respectively arranged on the two second connecting plates, so that the second sliding chutes are arranged on the second connecting plates; thirdly, the outer walls of the two ends of the second fixing shafts are provided with second external threads, the two ends of the two second fixing shafts are respectively embedded into the two second sliding grooves, and the two second fixing shafts are spaced from each other, so that the second fixing shafts slide in the second sliding grooves; thirdly, at least two second limiting grooves are respectively arranged on the two second fixing shafts, a distance is reserved between every two adjacent second limiting grooves, and the other end of the wafer is embedded into the second limiting grooves, so that the effect that the second limiting grooves fix the other end of the wafer is achieved; and thirdly, a second internal thread is arranged in the second nut, the four second nuts are respectively sleeved at two ends of the two second fixed shafts, and the second nuts are attached to one side of the second connecting plate, so that the second nuts can rotate forwards or reversely, the second nuts are attached to the second connecting plate, and the positions of the second fixed shafts are fixed. Adopt above-mentioned structure, through the first spacing groove of embedding two first fixed axles and the second spacing inslot of two second fixed axles respectively with four ends of wafer, realize the effect of 4 fixed wafer positions, two first fixed axles remove in first spout, two second fixed axles remove in the second spout, adjust suitable distance, be convenient for bear the weight of the wafer of different models, corotation or reversal first nut and second nut, make first nut and second nut laminate with one side of first connecting plate and second connecting plate respectively mutually, thereby fix the position of first fixed axle and second fixed axle, the stability of device has been improved.
In addition, the quartz carrier with the limiting function in the above technical solution provided by the present invention may further have the following additional technical features:
in the above technical solution, preferably, the quartz carrier with a position limiting function further includes: a slide bar and a moving slot; two ends of the sliding rod are respectively sleeved at one end of the first fixed shaft and one end of the second fixed shaft, the sliding rod is rotatably connected with the first fixed shaft and the second fixed shaft, and the sliding rod is positioned at the inner sides of the first connecting plate and the second connecting plate; the four moving grooves are respectively arranged on the four supporting columns, and two ends of the two second connecting plates are respectively embedded into the two moving grooves.
In the technical scheme, two ends of a sliding rod are respectively sleeved at one end of a first fixed shaft and one end of a second fixed shaft, the sliding rod is rotatably connected with the first fixed shaft and the second fixed shaft, and the sliding rod is positioned at the inner sides of a first connecting plate and a second connecting plate, so that the first fixed shaft is moved, and the sliding rod drives the second fixed shaft to move; thirdly, through setting up four shifting chutes respectively on four support columns, the both ends of two second connecting plates are embedded into two shifting chutes respectively, have realized the effect that the second connecting plate reciprocated at the shifting chute, and when the second connecting plate removed, the slide bar drove first fixed axle and removed to be convenient for adjust suitable distance, support the wafer, improved the suitability of device.
In the above technical solution, preferably, the quartz carrier with a position limiting function further includes: the long hole, the threaded rod and the third nut; the two strip holes are respectively arranged at two sides of the support column and are opposite in position; a third external thread is arranged on the outer wall of the threaded rod, and one end of the threaded rod sequentially penetrates through the support column and the second connecting plate; third internal threads are arranged in the third nuts, the two third nuts are respectively sleeved at two ends of the threaded rod, and the two third nuts are respectively attached to two sides of the supporting column; wherein the third internal thread is matched with the third external thread.
In the technical scheme, the two strip holes are respectively arranged on the two sides of the support column, and the two strip holes are opposite in position, so that the strip holes are arranged on the support column; thirdly, a third external thread is arranged on the outer wall of the threaded rod, and one end of the threaded rod sequentially penetrates through the support column and the second connecting plate, so that the threaded rod sequentially penetrates through the support column and the second connecting plate; thirdly, through being equipped with the third internal thread in the third nut, two third nuts are established respectively at the both ends of threaded rod, and two third nuts laminate mutually with the both sides of support column respectively, have realized corotation or reversal third nut, make two third nuts laminate respectively in the both sides of support column, the effect in fixed threaded rod position to fixed second connecting plate position has improved the stability of device.
In the above technical solution, preferably, the quartz carrier with a position limiting function further includes: a first fixing plate and a second fixing plate; two ends of the four first fixing plates are respectively connected with the four supporting columns end to end; the two ends of the four second fixing plates are connected with the four supporting columns end to end respectively, and the second fixing plates are located below the first fixing plates.
In the technical scheme, the two ends of the four first fixing plates are respectively connected with the four support columns end to end, so that the first fixing plates are connected with the support columns end to end, and the stability of the device is improved; and thirdly, the two ends of the four second fixing plates are respectively connected with the four support columns end to end, and the second fixing plates are located below the first fixing plates, so that the second fixing plates are connected with the support columns end to end, and the stability of the device is further improved.
In the above technical solution, preferably, the quartz carrier with a position limiting function further includes: a handle; the two handles are respectively connected with the two first fixing plates and are opposite in position.
In this technical scheme, through being connected two handles with two first fixed plates respectively, and two handle positions are relative, realized that the handle is connected with first fixed plate, through using the handle as the fulcrum, the effect of mobile device position has improved the suitability of device.
In the above technical solution, preferably, the quartz carrier device with a position limiting function further includes: a fixed leg; the fixed support legs are provided with three supporting blocks, and the four fixed support legs are respectively connected with the bottom surfaces of the four supporting columns.
In the technical scheme, the three supporting blocks are arranged on the fixed supporting feet, the four fixed supporting feet are respectively connected with the bottom surfaces of the four supporting columns, the supporting effect of the fixed supporting feet on the supporting columns is realized, and the device is more stable due to the characteristic that the three points have stability.
In the above technical solution, preferably, the first limiting groove and the second limiting groove are trapezoidal grooves.
In the technical scheme, the first limiting groove and the second limiting groove are trapezoidal grooves, so that the effect of embedding the wafer into the first limiting groove and the second limiting groove is realized, and the applicability of the device is improved.
In the above technical solution, preferably, the quartz carrier with the position limiting function is a quartz body.
In the technical scheme, the quartz carrier with the limiting function is a quartz body, so that the device is set as an insulator, the wafer is in an insulating environment, the wafer is prevented from being damaged by current, and the quality of the wafer is improved.
Additional aspects and advantages of the utility model will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the utility model.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
FIG. 1 shows a schematic structural view of a quartz carrier with a position limiting function according to one embodiment of the present invention;
FIG. 2 shows a schematic structural view of a quartz carrier with a position limiting function according to another embodiment of the present invention;
FIG. 3 is a schematic structural view showing a quartz carrier with a position limiting function according to still another embodiment of the present invention;
FIG. 4 is a schematic structural view showing a quartz carrier with a position limiting function according to still another embodiment of the present invention;
FIG. 5 is a schematic structural view showing a quartz carrier with a position limiting function according to still another embodiment of the present invention;
wherein, the correspondence between the reference numbers and the part names in fig. 1 to 5 is:
10 supporting columns, 12 first connecting plates, 14 first sliding grooves, 16 first fixing shafts, 18 first limiting grooves, 20 first nuts, 22 second connecting plates, 24 second sliding grooves, 26 second fixing shafts, 28 second limiting grooves, 30 second nuts, 32 sliding rods, 34 moving grooves, 36 long holes, 38 threaded rods, 40 third nuts, 42 first fixing plates, 44 second fixing plates, 46 handles and 48 fixing legs.
Detailed Description
In order that the above objects, features and advantages of the present invention can be more clearly understood, a more particular description of the utility model will be rendered by reference to the appended drawings. It should be noted that the embodiments and features of the embodiments of the present application may be combined with each other without conflict.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, however, the present invention may be practiced in other ways than those specifically described herein, and therefore the scope of the present invention is not limited by the specific embodiments disclosed below.
A quartz carrier with a position limiting function according to some embodiments of the present invention will be described with reference to fig. 1 to 5.
In an embodiment of the present invention, preferably, as shown in fig. 1 to 5, the present invention provides a quartz carrier with a spacing function, the quartz carrier being used for carrying wafers, the quartz carrier with the spacing function comprising: the device comprises a support column 10, a first connecting plate 12, a first sliding chute 14, a first fixing shaft 16, a first limiting groove 18, a first nut 20, a second connecting plate 22, a second sliding chute 24, a second fixing shaft 26, a second limiting groove 28 and a second nut 30; the four support columns 10 are vertically arranged, and distances are reserved among the four support columns 10; two ends of the two first connecting plates 12 are respectively connected with the two adjacent supporting columns 10, and the two first connecting plates 12 are opposite; the two first sliding chutes 14 are respectively arranged on the two first connecting plates 12; the outer walls of the two ends of the first fixing shafts 16 are provided with first external threads, the two ends of the two first fixing shafts 16 are respectively embedded into the two first sliding chutes 14, and a distance is reserved between the two first fixing shafts 16; at least two first limiting grooves 18 are respectively arranged on the two first fixing shafts 16, a distance is reserved between every two adjacent first limiting grooves 18, and one end of the wafer is embedded into the first limiting groove 18; first internal threads are arranged in the first nuts 20, the four first nuts 20 are respectively sleeved at two ends of the two first fixed shafts 16, and the first nuts 20 are attached to one side of the first connecting plate 12; two ends of the two second connecting plates 22 are respectively connected with the two adjacent supporting columns 10, the two second connecting plates 22 are opposite, and the second connecting plates 22 are positioned below the first connecting plates 12; the two second sliding grooves 24 are respectively arranged on the two second connecting plates 22; the outer walls of the two ends of the second fixing shafts 26 are provided with second external threads, the two ends of the two second fixing shafts 26 are respectively embedded into the two second sliding grooves 24, and a distance is reserved between the two second fixing shafts 26; at least two second limit grooves 28 are respectively arranged on the two second fixing shafts 26, a distance is reserved between every two adjacent second limit grooves 28, and the other end of the wafer is embedded into the second limit groove 28; second internal threads are arranged in the second nuts 30, the four second nuts 30 are respectively sleeved at two ends of the two second fixed shafts 26, and the second nuts 30 are attached to one side of the second connecting plate 22; the first internal thread is matched with the first external thread, and the second internal thread is matched with the second external thread.
In this embodiment, firstly, four support columns 10 are vertically arranged, and there is a distance between the four support columns 10, and two ends of two first connection plates 12 are respectively connected with two adjacent support columns 10, and the two first connection plates 12 are opposite in position, so that the connection between the first connection plates 12 and the support columns 10 is realized; secondly, the two first sliding chutes 14 are respectively arranged on the two first connecting plates 12, so that the first sliding chutes 14 are arranged on the first connecting plates 12; thirdly, the outer walls of the two ends of the first fixing shaft 16 are provided with first external threads, the two ends of the two first fixing shafts 16 are respectively embedded into the two first sliding grooves 14, and the two first fixing shafts 16 are spaced from each other, so that the first fixing shafts 16 can slide in the first sliding grooves 14; thirdly, at least two first limiting grooves 18 are respectively arranged on the two first fixing shafts 16, a distance is reserved between every two adjacent first limiting grooves 18, and one end of the wafer is embedded into the first limiting groove 18, so that the wafer is embedded into the first limiting groove 18; thirdly, the first nuts 20 are internally provided with first internal threads, the four first nuts 20 are respectively sleeved at two ends of the two first fixing shafts 16, and the first nuts 20 are attached to one side of the first connecting plate 12, so that the first nuts 20 are rotated forwards or reversely, the first nuts 20 are attached to the first connecting plate 12, and the positions of the first fixing shafts 16 are fixed; thirdly, two ends of two second connecting plates 22 are respectively connected with two adjacent supporting columns 10, the two second connecting plates 22 are opposite in position, and the second connecting plates 22 are positioned below the first connecting plates 12, so that the second connecting plates 22 are connected with the supporting columns 10; thirdly, the arrangement of the second chute 24 on the second connecting plate 22 is realized by arranging the two second chutes 24 on the two second connecting plates 22, respectively; thirdly, the outer walls of the two ends of the second fixing shafts 26 are provided with second external threads, the two ends of the two second fixing shafts 26 are respectively embedded into the two second sliding grooves 24, and the two second fixing shafts 26 are spaced from each other, so that the second fixing shafts 26 slide in the second sliding grooves 24; thirdly, at least two second limiting grooves 28 are respectively arranged on the two second fixing shafts 26, a distance is reserved between every two adjacent second limiting grooves 28, and the other end of the wafer is embedded into the second limiting groove 28, so that the effect that the second limiting groove 28 fixes the other end of the wafer is achieved; thirdly, through arranging the second internal threads in the second nuts 30, the four second nuts 30 are respectively sleeved at two ends of the two second fixing shafts 26, and the second nuts 30 are attached to one side of the second connecting plate 22, so that the second nuts 30 can rotate forwards or backwards, the second nuts 30 are attached to the second connecting plate 22, and the positions of the second fixing shafts 26 are fixed. By adopting the structure, the four ends of the wafer are respectively embedded into the first limiting grooves 18 of the two first fixing shafts 16 and the second limiting grooves 28 of the two second fixing shafts 26, so that the function of fixing the position of the wafer at 4 points is realized, the two first fixing shafts 16 move in the first sliding groove 14, the two second fixing shafts 26 move in the second sliding groove 24, the proper distance is adjusted, the wafer with different types can be conveniently borne, the first nut 20 and the second nut 30 can rotate forwards or reversely, the first nut 20 and the second nut 30 are respectively attached to one sides of the first connecting plate 12 and the second connecting plate 22, the positions of the first fixing shafts 16 and the second fixing shafts 26 are fixed, and the stability of the device is improved.
In an embodiment of the present invention, preferably, as shown in fig. 2, the quartz carrier with a position limiting function further includes: a slide bar 32 and a moving slot 34; two ends of the sliding rod 32 are respectively sleeved at one end of the first fixing shaft 16 and one end of the second fixing shaft 26, the sliding rod 32 is rotatably connected with the first fixing shaft 16 and the second fixing shaft 26, and the sliding rod 32 is positioned at the inner sides of the first connecting plate 12 and the second connecting plate 22; the four moving grooves 34 are respectively arranged on the four supporting columns 10, and both ends of the two second connecting plates 22 are respectively embedded in the two moving grooves 34.
In this embodiment, the two ends of the sliding rod 32 are respectively sleeved on one end of the first fixing shaft 16 and one end of the second fixing shaft 26, the sliding rod 32 is rotatably connected with the first fixing shaft 16 and the second fixing shaft 26, and the sliding rod 32 is located at the inner sides of the first connecting plate 12 and the second connecting plate 22, so that the first fixing shaft 16 moves and the sliding rod 32 drives the second fixing shaft 26 to move; thirdly, the four moving grooves 34 are respectively arranged on the four support columns 10, and two ends of the two second connecting plates 22 are respectively embedded into the two moving grooves 34, so that the second connecting plates 22 move up and down in the moving grooves 34, and the sliding rods 32 drive the first fixing shafts 16 to move while the second connecting plates 22 move, so that the proper distance can be conveniently adjusted, the wafer is supported, and the applicability of the device is improved.
In the embodiment of the present invention, preferably, as shown in fig. 3 and 4, the quartz carrier with a position limiting function further includes: elongated hole 36, threaded rod 38 and third nut 40; the two strip holes 36 are respectively arranged at two sides of the support column 10, and the two strip holes 36 are opposite in position; a third external thread is arranged on the outer wall of the threaded rod 38, and one end of the threaded rod 38 sequentially penetrates through the support column 10 and the second connecting plate 22; third internal threads are arranged in the third nuts 40, the two third nuts 40 are respectively sleeved at two ends of the threaded rod 38, and the two third nuts 40 are respectively attached to two sides of the support column 10; wherein the third internal thread is matched with the third external thread.
In this embodiment, the two elongated holes 36 are respectively disposed on two sides of the support pillar 10, and the two elongated holes 36 are opposite to each other, so that the elongated holes 36 are disposed on the support pillar 10; thirdly, a third external thread is arranged on the outer wall of the threaded rod 38, and one end of the threaded rod 38 sequentially penetrates through the supporting column 10 and the second connecting plate 22, so that the threaded rod 38 sequentially penetrates through the supporting column 10 and the second connecting plate 22; thirdly, through being equipped with the third internal thread in the third nut 40, two third nuts 40 overlap respectively and are established at the both ends of threaded rod 38, and two third nuts 40 laminate mutually with the both sides of support column 10 respectively, have realized corotation or reversal third nut 40, make two third nuts 40 laminate respectively in the both sides of support column 10, the effect in fixed threaded rod 38 position to fixed second connecting plate 22 position has improved the stability of device.
In an embodiment of the present invention, preferably, as shown in fig. 1, the quartz carrier with a position limiting function further includes: a first fixing plate 42 and a second fixing plate 44; two ends of the four first fixing plates 42 are respectively connected with the four supporting columns 10 end to end; two ends of the four second fixing plates 44 are respectively connected with the four supporting columns 10 end to end, and the second fixing plates 44 are located below the first fixing plates 42.
In this embodiment, the two ends of the four first fixing plates 42 are respectively connected with the four supporting columns 10 end to end, so that the first fixing plates 42 are connected with the supporting columns 10 end to end, and the stability of the device is improved; thirdly, the two ends of the four second fixing plates 44 are respectively connected with the four supporting columns 10 end to end, and the second fixing plates 44 are located below the first fixing plates 42, so that the second fixing plates 44 are connected with the supporting columns 10 end to end, and the stability of the device is further improved.
In an embodiment of the present invention, preferably, as shown in fig. 1, the quartz carrier with a position limiting function further includes: a handle 46; the two handles 46 are respectively connected to the two first fixing plates 42, and the two handles 46 are opposite to each other.
In this embodiment, the two handles 46 are connected to the two first fixing plates 42 respectively, and the two handles 46 are opposite to each other, so that the handles 46 are connected to the first fixing plates 42, and the device is moved about the handles 46 as a fulcrum, thereby improving the applicability of the device.
In an embodiment of the present invention, preferably, as shown in fig. 1, the quartz carrier with a position limiting function further includes: a fixed leg 48; the fixed legs 48 are provided with three support blocks, and the four fixed legs 48 are respectively connected to the bottom surfaces of the four support columns 10.
In this embodiment, the fixing legs 48 are provided with three supporting blocks, and the four fixing legs 48 are respectively connected to the bottom surfaces of the four supporting columns 10, so that the fixing legs 48 support the supporting columns 10, and the device is more stable due to the stability of the three points.
In the embodiment of the present invention, preferably, as shown in fig. 1, the first and second retaining grooves 18 and 28 are trapezoidal grooves.
In this embodiment, the first limiting groove 18 and the second limiting groove 28 are trapezoidal grooves, so that the wafer can be easily inserted into the first limiting groove 18 and the second limiting groove 28, and the applicability of the device is improved.
In the embodiment of the present invention, preferably, as shown in fig. 1, the quartz carrier with the position limiting function is a quartz body.
In the embodiment, the quartz carrier with the limiting function is a quartz body, so that the device is set as an insulator, the wafer is in an insulating environment, the wafer is prevented from being damaged by current, and the quality of the wafer is improved.
In the description of the present invention, the terms "plurality" or "a plurality" refer to two or more, and unless otherwise specifically limited, the terms "upper", "lower", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are merely for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present invention; the terms "connected," "mounted," "secured," and the like are to be construed broadly and include, for example, fixed connections, removable connections, or integral connections; may be directly connected or indirectly connected through an intermediate. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the description of the present invention, the description of the terms "one embodiment," "some embodiments," "specific embodiments," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In the present invention, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (8)

1. A quartz carrier with a limiting function, which is used for carrying wafers, is characterized in that the quartz carrier with the limiting function comprises:
the four support columns are vertically arranged, and distances are reserved among the four support columns;
two ends of each of the two first connecting plates are respectively connected with two adjacent support columns, and the two first connecting plates are opposite in position;
the two first sliding grooves are respectively arranged on the two first connecting plates;
the outer walls of two ends of the first fixing shafts are provided with first external threads, two ends of the two first fixing shafts are respectively embedded into the two first sliding grooves, and a distance is reserved between the two first fixing shafts;
at least two first limiting grooves are respectively arranged on the two first fixing shafts, a distance is reserved between every two adjacent first limiting grooves, and one end of the wafer is embedded into the first limiting grooves;
first internal threads are arranged in the first nuts, the four first nuts are respectively sleeved at two ends of the two first fixed shafts, and the first nuts are attached to one side of the first connecting plate;
two ends of each of the two second connecting plates are respectively connected with two adjacent supporting columns, the two second connecting plates are opposite in position, and the second connecting plates are positioned below the first connecting plates;
the two second sliding grooves are respectively arranged on the two second connecting plates;
the outer walls of two ends of the second fixing shafts are provided with second external threads, two ends of the two second fixing shafts are respectively embedded into the two second sliding grooves, and a distance is reserved between the two second fixing shafts;
at least two second limiting grooves are respectively arranged on the two second fixing shafts, a distance is reserved between every two adjacent second limiting grooves, and the other end of the wafer is embedded into the second limiting grooves;
the second nuts are internally provided with second internal threads, the four second nuts are respectively sleeved at two ends of the two second fixed shafts, and the second nuts are attached to one side of the second connecting plate;
wherein the first internal thread is adapted to the first external thread and the second internal thread is adapted to the second external thread.
2. The quartz carrier with spacing function of claim 1, further comprising:
the two ends of the sliding rod are respectively sleeved at one end of the first fixed shaft and one end of the second fixed shaft, the sliding rod is rotatably connected with the first fixed shaft and the second fixed shaft, and the sliding rod is positioned on the inner sides of the first connecting plate and the second connecting plate;
the four moving grooves are respectively arranged on the four supporting columns, and two ends of the two second connecting plates are respectively embedded into the two moving grooves;
3. the quartz carrier with spacing function of claim 2, further comprising:
the two strip holes are respectively arranged on two sides of the supporting column and are opposite in position;
the outer wall of the threaded rod is provided with a third external thread, and one end of the threaded rod sequentially penetrates through the support column and the second connecting plate;
third nuts, wherein third internal threads are arranged in the third nuts, the two third nuts are respectively sleeved at two ends of the threaded rod, and the two third nuts are respectively attached to two sides of the supporting column;
wherein the third internal thread is adapted to the third external thread.
4. The quartz carrier with spacing function of claim 3, further comprising:
two ends of the four first fixing plates are respectively connected with the four supporting columns end to end;
and the two ends of the four second fixing plates are respectively connected with the four support columns end to end, and the second fixing plates are positioned below the first fixing plates.
5. The quartz carrier with spacing function of claim 4, further comprising:
the handles are respectively connected with the first fixing plates and are opposite in position.
6. The quartz carrier with spacing function of claim 5, further comprising:
the supporting device comprises fixed supporting legs, wherein three supporting blocks are arranged on the fixed supporting legs, and the four fixed supporting legs are respectively connected with the bottom surfaces of the four supporting columns.
7. The quartz carrier with spacing function of claim 6, wherein:
the first limiting groove and the second limiting groove are trapezoidal grooves.
8. The quartz carrier with spacing function according to any of claims 1 to 7, characterized in that:
the quartz carrier with the limiting function is a quartz body.
CN202121159546.3U 2021-05-27 2021-05-27 Quartz carrier with limiting function Active CN215555057U (en)

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